
Contents Spectron Gas Control Systems GmbH
ii GES_LT71_1122
Contents
1 Introduction ................................................................................................................................................. 3
2 Description................................................................................................................................................... 4
2.1 Intended use ......................................................................................................................................... 4
2.2 Misuse................................................................................................................................................... 4
2.3 Identification / label ............................................................................................................................... 4
2.4 Environment .......................................................................................................................................... 5
2.4.1 Temperatures............................................................................................................................. 5
2.4.2 Degree of cleanliness ................................................................................................................ 5
2.4.3 Emissions................................................................................................................................... 5
2.5 Standards and laws............................................................................................................................... 5
3 Safety............................................................................................................................................................ 7
3.1 Basic information on the safety instructions.......................................................................................... 7
3.2 Safety instructions................................................................................................................................. 8
3.3 Emergencies and safety devices .......................................................................................................... 10
3.4 Qualification of the operating and maintenance personnel ................................................................... 10
4 Design and function.................................................................................................................................... 11
4.1 Design ................................................................................................................................................... 11
4.2 Functional description ........................................................................................................................... 12
4.3 Technical data....................................................................................................................................... 12
4.4 Boundaries and interfaces .................................................................................................................... 12
5 Installation ................................................................................................................................................... 14
5.1 General information............................................................................................................................... 14
5.2 Installation work .................................................................................................................................... 14
5.2.1 Connecting the incoming and outgoing lines ............................................................................. 14
5.3 Checking the armature.......................................................................................................................... 14
6 Commissioning ........................................................................................................................................... 15
6.1 Preparations for commissioning............................................................................................................ 15
6.2 Procedure for commissioning................................................................................................................ 15
7 Operation ..................................................................................................................................................... 16
7.1 Exchanging the process gas source ..................................................................................................... 16
8 Maintenance, cleaning and repairs............................................................................................................ 18
8.1 General information on maintenance .................................................................................................... 18
8.2 Regular maintenance work and cleaning .............................................................................................. 19
9 Repair ........................................................................................................................................................... 20
9.1 General information on repair work....................................................................................................... 20
9.2 Troubleshooting and fault rectification .................................................................................................. 21
10 Dismantling and disposal........................................................................................................................... 22
10.1 General information on dismantling ...................................................................................................... 22
10.2 Returns.................................................................................................................................................. 22
10.3 Disposal ................................................................................................................................................ 23