
Contents Spectron Gas Control Systems GmbH
ii GES_ZT300_1221
Contents
1 Introduction.................................................................................................................................................. 3
2 Description................................................................................................................................................... 4
2.1 Intended use ......................................................................................................................................... 4
2.2 Misuse .................................................................................................................................................. 4
2.3 Identification / label ............................................................................................................................... 4
2.4 Environment.......................................................................................................................................... 5
2.4.1 Temperatures............................................................................................................................. 5
2.4.2 Degree of cleanliness ................................................................................................................ 5
2.4.3 Emissions................................................................................................................................... 5
3 Safety............................................................................................................................................................ 6
3.1 Basic information on the safety instructions ......................................................................................... 6
3.2 Safety instructions ................................................................................................................................ 7
3.3 Emergencies and safety devices .......................................................................................................... 9
3.4 Qualification of the operating and maintenance personnel................................................................... 9
4 Design and function .................................................................................................................................... 10
4.1 Design................................................................................................................................................... 10
4.2 Functional description........................................................................................................................... 11
4.3 Technical data ...................................................................................................................................... 12
4.4 Boundaries and interfaces .................................................................................................................... 12
5 Installation.................................................................................................................................................... 13
5.1 General information .............................................................................................................................. 13
5.2 Installation work .................................................................................................................................... 13
5.2.1 Connecting the incoming and outgoing lines ............................................................................. 13
5.3 Checking the armature ......................................................................................................................... 13
6 Commissioning............................................................................................................................................ 14
6.1 Preparations for commissioning ........................................................................................................... 14
6.2 Procedure for commissioning ............................................................................................................... 14
7 Operation...................................................................................................................................................... 15
7.1 Exchanging the process gas source..................................................................................................... 15
8 Maintenance, cleaning and repairs............................................................................................................ 17
8.1 General information on maintenance.................................................................................................... 17
8.2 Regular maintenance work and cleaning.............................................................................................. 18
9 Repair ........................................................................................................................................................... 19
9.1 General information on repair work ...................................................................................................... 19
9.2 Troubleshooting and fault rectification .................................................................................................. 20
10 Dismantling and disposal ........................................................................................................................... 21
10.1 General information on dismantling ...................................................................................................... 21
10.2 Returns ................................................................................................................................................. 21
10.3 Disposal ................................................................................................................................................ 22