Tektronix 372 User manual

User Manual
372
Semiconductor Workbench
070-8467-00
Please check for change information at the
rear of this manual.
First Printing JULY 1992

Instrument Serial Numbers
Each instrument manufactured by Tektronix has a serial number on a panel insert or tag, or stamped on the
chassis. The first letter in the serial number designates the country of manufacture. The last five digits of the
serial number are assigned sequentially and are unique to each instrument. Those manufactured in the
United States have six unique digits. The country of manufacture is identified as follows
B010000 Tektronix, Inc., Beaverton, Oregon, USA
E200000 Tektronix United Kingdom, Ltd., London
J300000 Sony/Tektronix, Japan
H700000 Tektronix Holland, NV, Heerenveen, The Netherlands
Instruments manufactured for Tektronix by external vendors outside the United States are assigned a two digit
alpha code to identify the country of manufacture (e.g., JP for Japan, HK for Hong Kong, IL for Israel, etc.).
Tektronix, Inc., P.O. Box 500, Beaverton, OR 97077
Printed in U.S.A.
Copyright ETektronix, Inc., 1992. All rights reserved. Tektronix products are covered by U.S. and foreign
patents, issued and pending. The following are registered trademarks TEKTRONIX, TEK, TEKPROBE, and
SCOPEĆMOBILE.
Microsoft is a registered trademark of Microsoft Corporation.
IBM is a registered trademark of International Business Machines.
GPIBĆPCII, GPIBĆPCIIA, ATĆGPIB, and MCĆGPIB are registered trademarks of National Instruments
Corporation.

WARRANTY
Tektronix warrants that this product will be free from defects in materials and workmanship for a period of one (1) year from the
date of shipment. If any such product proves defective during this warranty period, Tektronix, at its option, either will repair the
defective product without charge for parts and labor, or will provide a replacement in exchange for the defective product.
In order to obtain service under this warranty, Customer must notify Tektronix of the defect before the expiration of the warranty
period and make suitable arrangements for the performance of service. Customer shall be responsible for packaging and
shipping the defective product to the service center designated by Tektronix, with shipping charges prepaid. Tektronix shall
pay for the return of the product to Customer if the shipment is to a location within the country in which the Tektronix service
center is located. Customer shall be responsible for paying all shipping charges, duties, taxes, and any other charges for
products returned to any other locations.
This warranty shall not apply to any defect, failure or damage caused by improper use or improper or inadequate maintenance
and care. Tektronix shall not be obligated to furnish service under this warranty a) to repair damage resulting from attempts by
personnel other than Tektronix representatives to install, repair or service the product; b) to repair damage resulting from
improper use or connection to incompatible equipment; or c) to service a product that has been modified or integrated with
other products when the effect of such modification or integration increases the time or difficulty of servicing the product.
THIS WARRANTY IS GIVEN BY TEKTRONIX WITH RESPECT TO THIS PROD CT IN LIE OF ANY OTHER
WARRANTIES, EXPRESSED OR IMPLIED. TEKTRONIX AND ITS VENDORS DISCLAIM ANY IMPLIED WARRANTIES OF
MERCHANTABILITY OR FITNESS FOR A PARTIC LAR P RPOSE. TEKTRONIX' RESPONSIBILITY TO REPAIR OR
REPLACE DEFECTIVE PROD CTS IS THE SOLE AND EXCL SIVE REMEDY PROVIDED TO THE C STOMER FOR
BREACH OF THIS WARRANTY. TEKTRONIX AND ITS VENDORS WILL NOT BE LIABLE FOR ANY INDIRECT, SPECIAL,
INCIDENTAL, OR CONSEQ ENTIAL DAMAGES IRRESPECTIVE OF WHETHER TEKTRONIX OR THE VENDOR HAS
ADVANCE NOTICE OF THE POSSIBILITY OF S CH DAMAGES.

372 ser Manual i
About this Manual
This is the User Manual for the 372 Semiconductor Workbench.
The Getting Started section describes the 372 in broad terms, tells you how
to install and power up the instrument, and contains a tutorial on how to
make measurements using different methods. The demo devices and the
floppy disk supplied with this manual may be used with this tutorial.
In the Operating Basics you will find the pictorial At A Glance chapter showĆ
ing controls, indicators and connectors, as well as a menu map. It is folĆ
lowed by Basic Menu Operation, and how to mount a device.
The Reference section explains several topics in more detail, including how
to program the 372 with the help of examples on the floppy disk supplied
with the manual.
The Appendices list the 372 accessories, its specifications, calibration and
diagnostic procedures, and other useful information.
The following documents are related to the use or service of the SemiconĆ
ductor Workbench.
HThe 372 Programmer Manual (Tektronix part number 070Ć8619Ć00)
describes using a computer to control the 372 through the GPIB interĆ
face.
HThe 372 Service Manual (Tektronix part number 070Ć8466Ć00) provide
information for maintaining and servicing your 372 to the module level.
Related Manuals

About this Manual
ii

372 ser Manual iii
Contents
About the Manual i............................................
Safety xix......................................................
Consignes de Sécurité xxi.......................................
Getting Started
Overview 1Ć1...................................................
Product Description 1Ć1......................................
Measurement Units 1Ć1....................................
Measurement Configuration 1Ć1............................
Auxiliary Voltage Supply Unit 1Ć1...........................
Test Fixture 1Ć2...........................................
Acquisition, Display and Analysis 1Ć2........................
User Interface 1Ć2.........................................
Floppy Disk Drive 1Ć3.....................................
372ĆBased Programming 1Ć3...............................
Remote Control (GPIB) 1Ć3................................
Video Printer, Centronics, Plotter and TTL I/O 1Ć3.............
Start p 1Ć5.....................................................
Safety 1Ć5...................................................
Operation 1Ć5...............................................
Power On 1Ć9............................................
Self Test 1Ć10..............................................
Power Down 1Ć10..........................................
Tutorial 1Ć11.....................................................
Introduction 1Ć11.............................................
Example 1 - The Measurement Process 1Ć12...................
Powering Up and Initialization 1Ć12...........................
Mounting a DUT 1Ć13......................................
Setups 1Ć15...............................................
Configuration with CATALOG Setups 1Ć15....................
Averaging and Acquisition Parameters 1Ć16...................
Source Setup 1Ć18.........................................
Measurement and AutoĆscaling 1Ć21.........................
Measurement Using the Cursors 1Ć22........................
Example 2 - Other ways to Setup 1Ć28.........................
Manual Setup 1Ć28.........................................
Connection and Source Mode 1Ć29..........................
Measurement Mode 1Ć30...................................
Sweep Mode 1Ć31.........................................

Contents
iv
Averaging and Acquisition Parameters 1Ć32...................
Graph Display 1Ć32........................................
Source Setup 1Ć33.........................................
Axis Label 1Ć33............................................
Recalling Settings 1Ć34.....................................
Example 3 - Measurements sing the Cursor 1Ć37.............
BJT 1Ć39..................................................
FET 1Ć44.................................................
DIODE 1Ć46...............................................
Example 4 - Time Domain Measurement 1Ć49..................
Setting Up 1Ć49............................................
Measurement 1Ć54.........................................
About the Sample Disk 1Ć56...................................
FET 1Ć56.................................................
BJT 1Ć56..................................................
DIO 1Ć57..................................................
Operating Basics
Basic Menu Operation 2Ć1.......................................
Touch Area 2Ć1...........................................
Box and Selection Box 2Ć1.................................
Selectors 2Ć2.............................................
Soft Buttons 2Ć2..........................................
Soft Keys 2Ć2.............................................
Graphs 2Ć2..............................................
Other Areas 2Ć3..........................................
PopĆup Menu 2Ć3.........................................
Selector Operation 2Ć5....................................
Entry of Text 2Ć6..........................................
Entry of Numerals 2Ć6.....................................
Moving Objects 2Ć7.......................................
Scrolling 2Ć9.............................................
Button/Soft Button Operation 2Ć10...........................
Mounting the Device nder Test 2Ć11..............................
Attaching the Test Adapter 2Ć11..............................
Mounting the DUT and Wiring 2Ć12...........................
Protective Cover 2Ć12......................................
Basic Patch Wiring Examples 2Ć13...........................
Before and After Floating Measurement 2Ć17.......................
Reference
At a Glance 3Ć1.................................................
Front Panel 3Ć2..............................................

372 ser Manual v
Front Panel Controls 3Ć3.....................................
Rear Panel 3Ć4..............................................
Test Fixture with Test Adapters 3Ć6............................
Rear Panel of the Test Fixture 3Ć7.............................
Patch Panel 3Ć8.............................................
Test Adapters 3Ć9............................................
Main Menu 3Ć10..............................................
CONFIG Menu (Sweep Measurement Mode) 3Ć11...............
CONFIG Menu
(Time Domain Measurement Mode) 3Ć12....................
Catalog Setup Menu 3Ć13.....................................
Measure Menu 3Ć14...........................................
tility Menu 3Ć15.............................................
PROG Menu (Program Trace Menu) 3Ć16.......................
PROG Menu (Program Editing Menu) 3Ć17......................
Disk Menu 3Ć18...............................................
Measurement System 3Ć19........................................
Measurement Circuit 3Ć19.....................................
HPU/LPU 3Ć20.............................................
GNDU 3Ć21...............................................
Matrix Switch 3Ć21.........................................
Floating Chassis 3Ć21......................................
Test Fixture 3Ć22..............................................
Protective Cover and Interlock System 3Ć22...................
DUT Connection and Kelvin Sense 3Ć22......................
Measurement Modes and Acquisition 3Ć24.....................
Sweep Measurement Mode 3Ć24............................
Time Domain Measurement Mode 3Ć27.......................
Averaging 3Ć27............................................
Pulse Mode 3Ć28..........................................
Measurement Data and Graph Display 3Ć30...................
Curve Analysis 3Ć30........................................
Range and Resolution 3Ć32.................................
Setups 3Ć37......................................................
Introduction 3Ć37.............................................
Configuration 3Ć38............................................
Catalog Setup 3Ć38........................................
Operation 3Ć41...............................................
Setup Using the CATALOG 3Ć41.............................
Manual Setup 3Ć41.........................................
Sweep Mode 3Ć44.........................................
Measurement Data and Graph Display 3Ć47...................
Averaging and Acquisition Parameters 3Ć49....................
Source Setup 3Ć51............................................
Measure Range, Compliance and RĆmode
(Protective Resistance) 3Ć51............................

Contents
vi
Source Output 3Ć54........................................
Axis Label 3Ć58............................................
Pulse Mode 3Ć59.................................................
Introduction 3Ć59.............................................
Switching Pulse Mode 3Ć60.................................
Supplied Channel 3Ć60.....................................
Pulse Parameters 3Ć60.....................................
Auxiliary Voltage Supply 3Ć63.....................................
Setup 3Ć63...................................................
Measurement 3Ć65...............................................
Single Measurement 3Ć65...................................
Repeated Measurement 3Ć66................................
Dynamic Changes of Settings 3Ć66...........................
Adjusting the Graph Display 3Ć69..................................
Introduction 3Ć69.............................................
Automatic Scaling Adjustment 3Ć70............................
Manual Scaling Adjustment 3Ć70...............................
Y Axis (Vertical Axis) 3Ć70...................................
Y Axis Range 3Ć71.........................................
X Axis (Horizontal Axis) 3Ć72................................
X Axis Range 3Ć73.........................................
Mathematical Operation 3Ć75......................................
Introduction 3Ć75.............................................
Operation 3Ć75...............................................
Algorithm 3Ć76...............................................
Switching Graph Display 3Ć79.....................................
Parameter Analysis sing the Cursor 3Ć81.........................
Introduction 3Ć81.............................................
Operation 3Ć81...............................................
Selecting Cursor and Cursor Type 3Ć82.......................
Moving Cursor 3Ć82........................................
Cursor Types 3Ć84.........................................
Zoom 3Ć95.......................................................
Setup 3Ć95...................................................
Zoom Area 3Ć96..............................................
Zoom In 3Ć96.................................................
Reset Zoom 3Ć96.............................................
Text Editing on the Graph 3Ć99....................................
Introduction 3Ć99.............................................
Creating a Label 3Ć100.........................................
Moving the Label 3Ć102........................................
Removing the Label 3Ć103......................................