VAT 590 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
298292EB
Edition 2013-05-13
Variable leak valve DN 16 (5/8") (preliminary)
with integrated controller
with RS232 interface
Series 590
DN 16 mm (I.D. 5/8")
This manual is valid for the following product ordering number:
59024-GEGG-AAD1
configured with firmware 612P.1E.D3
Sample picture

Series 590
2/56
Edition 2013-05-13
298292EB
Imprint
Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright
© VAT Vakuumventile AG 2013
No part of these Instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

Series 590
298292EB
Edition 2013-05-13
3/56
Contents
1Description of product........................................................................5
1.1 Identification of product ...................................................................................................5
1.2 Use of product.................................................................................................................5
1.3 Used abbreviations..........................................................................................................5
1.4 Related documents..........................................................................................................5
1.5 Important information.......................................................................................................5
1.6 Technical data.................................................................................................................6
1.6.1 Control and actuating unit..................................................................................6
1.6.2 Valve unit...........................................................................................................7
2Safety ...................................................................................................8
2.1 Compulsory reading material...........................................................................................8
2.2 Danger levels ..................................................................................................................8
2.3 Personnel qualifications...................................................................................................9
3Design and Function.........................................................................10
3.1 Design...........................................................................................................................10
3.2 Function.........................................................................................................................10
4Installation.........................................................................................11
4.1 Unpacking .....................................................................................................................11
4.2 Installation into the system............................................................................................12
4.2.1 Installation space condition..............................................................................13
4.2.2 Connection overview........................................................................................14
4.2.3 Installation procedure.......................................................................................15
4.2.4 Admissible forces.............................................................................................15
4.2.4.1 Admissible forces at controller........................................................15
4.3 Electrical connection......................................................................................................16
4.3.1 Sensor supply concepts...................................................................................17
4.3.2 Power and sensor connection (+24 VDC sensors)..........................................17
4.3.2.1 Sensor power wiring via controller..................................................17
4.3.2.2 Sensor power wiring external.........................................................18
4.3.3 Service port connection ...................................................................................19
4.4 RS232 interface.............................................................................................................19
4.4.1 Settings............................................................................................................19
4.4.2 Schematics......................................................................................................19
4.4.2.1 Configuration with switches for digital inputs..................................20
4.4.2.2 Configuration with voltage source for digital inputs ........................21
4.4.2.3 Digital inputs...................................................................................22
4.5 Initial operation..............................................................................................................23
4.5.1 Setup procedure ..............................................................................................23
4.5.2 RS232 Interface configuration .........................................................................24
4.5.3 Fixed PI upstream configuration......................................................................25
4.5.3.1 Optimize P-Gain, I-Gain .................................................................27
4.5.3.2 Valve speed adjustment.................................................................28
4.5.4 RS232 Command syntax.................................................................................28
4.5.5 Control commands...........................................................................................29
4.5.6 Inquiry commands ...........................................................................................30
4.5.7 Setup commands.............................................................................................34
4.5.8 Error messages ...............................................................................................37
5Operation...........................................................................................38
5.1 Normal operation...........................................................................................................38
5.1.1 Local operation................................................................................................38
5.1.2 Remote operation ............................................................................................39

Series 590
4/56
Edition 2013-05-13
298292EB
5.2 Close valve....................................................................................................................39
5.3 Open valve.....................................................................................................................39
5.4 Position control..............................................................................................................40
5.5 Pressure control.............................................................................................................40
5.6 Display information........................................................................................................41
5.6.1 Power up..........................................................................................................41
5.6.2 Operation .........................................................................................................42
5.6.3 Errors...............................................................................................................43
5.6.4 Safety mode.....................................................................................................43
5.7 Operation under increased temperature........................................................................43
5.7.1 Bake-out...........................................................................................................43
5.8 Behavior during power up..............................................................................................44
5.9 Behavior during power failure........................................................................................44
5.10 Trouble shooting............................................................................................................45
6Maintenance...................................................................................... 47
7Repairs .............................................................................................. 48
8Dismounting and Storage................................................................ 49
8.1 Dismounting...................................................................................................................49
8.2 Storage..........................................................................................................................50
9Packaging and Transport................................................................. 51
9.1 Packaging......................................................................................................................51
9.2 Transport .......................................................................................................................52
10 Disposal............................................................................................. 53
11 Spare parts........................................................................................ 54
12 Appendix ........................................................................................... 55

Series 590
DESCRIPTION OF PRODUCT
298292EB
Edition 2013-05-13
5/56
1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.
590..-....-..../....
made in Switzerland

Fabrication number
1.2 Use of product
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation
Description
1.4 Related documents
Product data sheet
Dimensional drawing
1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example:
VAT disclaims any liability for damages resulting from inappropriate packaging.

DESCRIPTION OF PRODUCT
Series 590
6/56
Edition 2013-05-13
298292EB
1.6 Technical data
1.6.1 Control and actuating unit
Description
Input voltage 1)
+24 VDC (±10%) @ 0.5 V pk-pk max.
[connector: POWER]
Power consumption
38 W
[connector: POWER]
Sensor power supply output 2)
+24 VDC / 1500 mA max.
[connector: SENSOR]
Sensor input
Signal input voltage / Input resistance
ADC resolution
Sampling time
0-10 VDC / Ri>100 kΩ
0.23 mV
10 ms
[connector: SENSOR]
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
5 mV or 0.1% of setpoint, whichever is greater
Position resolution / position control capability
100’000 (full stroke)
Typical closing / opening time
3.5 s
Table 1-1
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.

Series 590
DESCRIPTION OF PRODUCT
298292EB
Edition 2013-05-13
7/56
1.6.2 Valve unit
Description
Leak rate to outside
≤ 1 × 10E-10 mbar l/s-1
Leak rate valve seat at (close position)
≤ 1 × 10E-10 mbar l/s-1
Cycles until first service
20’000
Bake-out temperature
- Open / closed
- actuator
≤ 300°C
≤ 50°C
Heating and cooling rate
≤ 60°Ch-1
Mounting position
Any
Process side materials
body
1.4943, AISI 660 / 1.4404, AISI 316 L
diaphragm
1.4310, AISI 301, gold plated
Test pressure
1 bar
Pressure range at 20 C
UHV to 10 bar (abs)
Differential pressure
≤ 10 bar
Max. differential pressure on plate during opening
≤ 10 bar
Adjustable gas flow [air, 1 bar, RT]
1 × 10-10 mbar ls-1 –100 mbar ls-1
Dead volume
- seat port
- side port
2.7 cm3
1.1 cm3
Dimensions
Refer to dimensional drawing of specific valve ordering
number
(available on request)
Table 1-2

SAFETY
Series 590
8/56
Edition 2013-05-13
298292EB
2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

Series 590
SAFETY
298292EB
Edition 2013-05-13
9/56
2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.

DESIGN AND FUNCTION
Series 590
10/56
Edition 2013-05-13
298292EB
3 Design and Function
3.1 Design
open
closed
mechanical position indicator
Figure 3-1
3.2 Function
The valve plate acts as a throttling element and varies the conductance of the valve opening.
Actuation is performed with a stepper motor and controller. The stepper motor/controller version
ensures accurate pressure control due to exact gate positioning.

Series 590
INSTALLATION
298292EB
Edition 2013-05-13
11/56
4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
NOTICE
Physical overstraining at controller
Inappropriate handling with the valve may cause in damage of controller.
Do not place the valve on the controller panel.
NOTICE
Damage of valve and flanges
Inappropriate handling with the valve may cause in damage of controller.
Pay attention that valve and flanges don’t get damaged when the valve is lifting out of
the box and handled afterwards.
NOTICE
Contamination
Plate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Make sure that the supplied products are in accordance with your order.
Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

INSTALLATION
Series 590
12/56
Edition 2013-05-13
298292EB
4.2 Installation into the system
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Plate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

Series 590
INSTALLATION
298292EB
Edition 2013-05-13
13/56
4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air circulation
as shown in figure below.
75
Figure 4-1

INSTALLATION
Series 590
14/56
Edition 2013-05-13
298292EB
4.2.2 Connection overview
System:
M
3
4
5
7 8
2
1
96
1 Valve
2 Process chamber
3 Gas inlet
4 Controller
5 Pressure sensor
6 Sensor cable
7 Cable to remote control unit (RS232)
8 Cable to power supply
9 Pump
Controller:
Figure 4-2

Series 590
INSTALLATION
298292EB
Edition 2013-05-13
15/56
4.2.3 Installation procedure
1. Remove protection flanges only prior assembly into the vacuum system.
2. Install valve [1] into the vacuum system.
The valve seat side is indicated by the symbol «∆» on dimensional drawing, see
also Figure 4-1.
Do not admit higher forces to the valve than indicated under «Admissible forces».
Make sure that enough space is kept free to do preventive maintenance work.
The required space is indicated on the dimensional drawing.
3. Install the sensor [5] according to the recommendations of the sensor manufacturer and directives
given under «Requirements to sensor connection».
4. Connect pressure sensor cable [6] to sensor and then to valve (connector: SENSOR). Refer to
chapter «Electrical connection» for correct wiring. 59024-GEGG-0001 supports 1 sensor.
5. Connect valve to RS232 [7] (connector: INTERFACE). Refer to «RS232 schematics» for correct
wiring.
6. Connect power supply [8] to valve (connector: POWER). Refer to chapter «Electrical connection»
for correct wiring.
To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor
interlock is active and thevalve enters the safety mode and is not operative. Refer
also to «Safety mode».
7. Perform «Setup procedure» to prepare valve for operation.
Without performing the setup procedure the valve will not be able to do pressure
control.
4.2.4 Admissible forces
NOTICE
Force at valve body and flange
Forces from the weight of other components can lead to deformation of the valve body
and flanges.
Do not apply any force at valve body or flanges.
4.2.4.1 Admissible forces at controller
NOTICE
Force at controller
Forces from the weight of other components can lead to deformation the controller.
Do not apply any force at controller.

INSTALLATION
Series 590
16/56
Edition 2013-05-13
298292EB
4.3 Electrical connection
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.

Series 590
INSTALLATION
298292EB
Edition 2013-05-13
17/56
4.3.1 Sensor supply concepts
Concepts:
External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply
24 VDC sensors. Refer to chapter «Power and sensor connection (+24 VDC sensors)» for
schematic and correct wiring.
4.3.2 Power and sensor connection (+24 VDC sensors)
4.3.2.1 Sensor power wiring via controller
Figure 4-3
Pins 4 and 8 must be
bridged for operation.
An optional switch
would allow for motor
interlock to prevent
valve from moving.

INSTALLATION
Series 590
18/56
Edition 2013-05-13
298292EB
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away
from noise sources.
Connect Power supply (+24 / GND) at DB–9 male power connector and
Sensors (+24V / 0V / + / -) at DB–15 female sensor connector exactly as shown in
the drawing above!
Connector: Use only screws with 4–40 UNC thread for fastening the connectors!
4.3.2.2 Sensor power wiring external
Figure 4-4
Pins 4 and 8 must be
bridged for operation.
An optional switch
would allow for motor
interlock to prevent
valve from moving.

Series 590
INSTALLATION
298292EB
Edition 2013-05-13
19/56
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away
from noise sources.
Connect Power supply (+24 / GND) at DB–9 male power connector and
Sensors (+24V / 0V / + / -) at DB–15 female sensor connector exactly as shown in
the drawing above!
Connector: Use only screws with 4–40 UNC thread for fastening the connectors!
4.3.3 Service port connection
The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer.
This requires a service cable and software from VAT. You can either use our freeware 'Control View',
which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.
Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation.
The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing
and maintenance and not for permanent control.
Refer also to chapter: «Local Operation» for details and to chapter «Spare parts / Accessories» for
ordering numbers of service cable, software and Service Box 2.
Use only screws with 4–40 UNC thread for fastening the service port connector.
4.4 RS232 interface
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following schematic.
4.4.1 Settings
The factory default setting of the RS232 interface might be changed to fit the application by using the
Control View software, the Control Performance Analyzer software or the Service Box 2. Refer to
chapter: «RS232 Interface configuration».
4.4.2 Schematics
This interface allows for remote operation by means of a command set based on the RS232 protocol.
In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by
switches or by voltage sources.
Active digital inputs have higher priority than RS232 commands.

INSTALLATION
Series 590
20/56
Edition 2013-05-13
298292EB
4.4.2.1 Configuration with switches for digital inputs
Figure 4-5
Connect the RS232 interface connector exactly as shown in the drawing above!
Use only screws with 4–40 UNC thread for fastening the DB-25 connector!