VAT 616 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
1143687EA Edition 10.08.2022
Butterfly control & isolation valve
with extended control range
with Ethernet interface
Series 616
DN 40-100 mm (I.D. 1.5“ - 4")
This manual is valid for the valve ordering number(s):
616 . . - . .GZ - . . . . (2 sensor inputs / analog outputs)
616 . . - . .AZ - . . . . (2 sensor inputs / analog outputs / ±15V SPS)
616 . . - . .HZ - . . . . (2 sensor inputs / analog outputs / PFO)
616 . . - . .CZ - . . . . (2 sensor inputs / analog outputs / ±15V SPS / PFO)
SPS = Sensor Power Supply PFO = Power Failure Option
Sample Picture

Series
616
2/144 Edition 10.08.2022 1143687EA
Imprint
Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[e-mail]
Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH
-
9469 Haag,
Switzerland
Copyright
©
VAT Vakuumventile AG
2022
No part of these instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VATfirmware and updated state of the artversions of the VAT firmware
are intended for use with VAT products. The VAT firmware contains a limited, time
unlimited user license. The VAT firmware may not be used for purposes other than
those intended nor is it permitted to make copies of the VAT firmware. In particular,
it is strictly forbidden to give copies of the VAT firmware to other people.
The use of trade names, brand names, trademarks, etc. in these Instructions does
not entitle third parties to consider these names to be unprotected and to use them
freely. This is in accordance with the meaning of the laws and acts covering brand
names and trademarks
.

Series 616
1143687EA Edition 10.08.2022 3/
144
Contents
1 Description of product........................................................................6
1.1 Identification of product ...................................................................................................6
1.2 Firmware .........................................................................................................................6
1.3 Use of product.................................................................................................................6
1.4 Used abbreviations..........................................................................................................6
1.5 Related documents..........................................................................................................6
1.6 Important information.......................................................................................................6
1.7 Technical data.................................................................................................................7
1.7.1 Control and actuating unit.................................................................................7
1.7.2 Valve unit..........................................................................................................7
2 Safety ...................................................................................................8
2.1 Compulsory reading material...........................................................................................8
2.2 Danger levels ..................................................................................................................8
2.3 Personnel qualifications...................................................................................................9
2.4 Safety labels....................................................................................................................9
3 Design and Function.........................................................................10
3.1 Design...........................................................................................................................10
3.2 Function.........................................................................................................................11
3.2.1 Pressure control system overview and function..............................................11
3.2.2 Principle of a pressure control system ............................................................12
4 Installation.........................................................................................13
4.1 Initial procedure.............................................................................................................13
4.2 Unpacking .....................................................................................................................14
4.3 Installation into the system............................................................................................15
4.3.1 Installation Hints..............................................................................................16
4.3.2 Installation space condition.............................................................................16
4.3.3 Admissible forces............................................................................................17
4.3.4 Admissible forces at controller........................................................................18
4.3.5 Tightening torque DNs 40 – 50mm.................................................................19
4.3.6 Tightening torque DNs 63 – 100mm ...............................................................20
4.4 Connection overview.....................................................................................................21
4.5 Power-, Ground- and Sensor Connection......................................................................22
4.5.1 Connection cable recommendations...............................................................22
4.5.2 Ground connection..........................................................................................23
4.5.3 Power and Sensor supply concepts................................................................24
4.5.4 Drive Power Enabled Switch, Safety Mode.....................................................28
4.6 Power Up.......................................................................................................................29
4.7 Power Down, Power Failure Option ..............................................................................29
4.7.1 Power down behavior in case of power failure................................................29
4.7.2 Power Fail Option ...........................................................................................29
4.8 Service Port, CPA software...........................................................................................30
4.8.1 How to start.....................................................................................................30
4.8.2 Update ............................................................................................................31
4.9 Display Information........................................................................................................32
4.9.1 Power up.........................................................................................................32
4.9.2 Operation........................................................................................................33
4.9.3 Error................................................................................................................33
4.10 System Settings and States ..........................................................................................34
4.10.1 Identification....................................................................................................34
4.10.2 Statistics..........................................................................................................35
4.10.3 Warning/Error..................................................................................................36
4.10.4 Service............................................................................................................36

Series
616
4/144 Edition 10.08.2022 1143687EA
4.11 Valve Settings and States..............................................................................................37
4.11.1 States..............................................................................................................37
4.11.2 Homing............................................................................................................37
4.11.3 Cycle Counter..................................................................................................38
4.11.4 Position Restriction..........................................................................................38
4.11.5 Position Adaption ............................................................................................39
4.12 Interface Ethernet..........................................................................................................40
4.12.1 Ethernet Frame ...............................................................................................40
4.12.2 Connector, LEDs.............................................................................................40
4.12.3 TCP/IP settings ...............................................................................................41
4.12.4 Configuration Port 500 ....................................................................................41
4.12.5 Command Set .................................................................................................42
4.12.6 Position and Pressure Units............................................................................46
4.12.7 Compound Commands ...................................................................................47
4.12.8 Compatible Command Sets ............................................................................50
4.13 Pressure Sensor............................................................................................................65
4.13.1 Mechanical connection requirements..............................................................65
4.13.2 Configuration...................................................................................................66
4.13.3 Crossover (2 sensor operation mode).............................................................68
4.13.4 Zero Adjust......................................................................................................69
4.13.5 Logarithmic Pressure ......................................................................................70
4.14 Power Connector Digital IO ...........................................................................................71
4.14.1 Digital Input .....................................................................................................71
4.14.2 Digital Output...................................................................................................72
5 Operation........................................................................................... 73
5.1 Access Mode.................................................................................................................74
5.1.1 Overview.........................................................................................................74
5.1.2 Remote and Locked operation ........................................................................74
5.1.3 Local operation................................................................................................74
5.2 Control Mode.................................................................................................................75
5.2.1 View ................................................................................................................76
5.3 Pressure Control............................................................................................................77
5.3.1 Controller units................................................................................................77
5.3.2 Control algorithm.............................................................................................78
5.3.3 Adaptive algorithm...........................................................................................80
5.3.4 PI algorithm.....................................................................................................91
5.3.5 Pressure Ramp ...............................................................................................97
5.3.6 Profile Ramp .................................................................................................100
5.3.7 Automated Controller Selector......................................................................103
5.3.8 Control Position Restriction...........................................................................104
5.3.9 Store Control Parameter Volatile...................................................................104
5.4 Position Control ...........................................................................................................105
5.4.1 Parameter .....................................................................................................105
5.4.2 Position Ramp...............................................................................................105
5.5 Operation under increased temperature......................................................................106
6 Trouble shooting ............................................................................ 107
6.1 Warnings .....................................................................................................................107
6.2 Errors...........................................................................................................................109
6.2.1 Error Recovery..............................................................................................109
6.2.2 Error Bitmap..................................................................................................109
6.2.3 Error Number.................................................................................................110
6.2.4 Error Code.....................................................................................................110
6.3 Troubleshooting List ....................................................................................................112
7 Maintenance.................................................................................... 113
7.1 Maintenance intervals..................................................................................................113
7.2 Maintenance procedures.............................................................................................114

Series 616
1143687EA Edition 10.08.2022 5/
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7.2.1 Replacement of vulcanized plate or plate with O-ring...................................115
7.2.2 Replacement of shaft feed through seals and valve cleaning.......................119
7.2.3 Replacement of Option board.......................................................................125
8 Repairs.............................................................................................130
8.1 FPR Service................................................................................................................130
9 Dismounting and Storage...............................................................131
9.1 Dismounting ................................................................................................................131
9.2 Storage........................................................................................................................132
10 Packaging and Transport...............................................................133
10.1 Packaging....................................................................................................................134
10.2 Transport.....................................................................................................................134
11 Disposal...........................................................................................135
12 Spare parts ......................................................................................136
12.1 ISO-KF for DNs 40 - 63mm.........................................................................................137
12.1.1 Drawing.........................................................................................................137
12.1.2 ISO-KF valve unit – aluminum hard anodized, without heating.....................138
12.1.3 ISO-KF valve unit – stainless steel, without heating .....................................138
12.1.4 Seals and grease..........................................................................................139
12.1.5 Clamping connections for ISO-KF.................................................................139
12.2 ISO-F for DNs 80 - 100mm..........................................................................................140
12.2.1 Drawing.........................................................................................................140
12.2.2 ISO-F valve unit – aluminum hard anodized, without heating.......................141
12.2.3 ISO-F valve unit – stainless steel, without heating........................................141
12.2.4 Seals and grease..........................................................................................142
12.3 Control unit and Accessories.......................................................................................143
12.3.1 Control and actuating unit.............................................................................143
12.3.2 Accessories...................................................................................................143
12.3.3 Centering ring with VITON ® O-ring..............................................................143

DESCRIPTION OF PRODUCT Series
616
6/144 Edition 10.08.2022 1143687EA
1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.
Fabrication No.:
000 . .- . . . .- . . . ./ . . . .
A - . . . . . .


Fabrication number
Order number
1.2 Firmware
Please look up the firmware version in the CPA or read it from the display at start up.
Location: CPA/Parameters: System.Identification.Firmware
1.3 Use of product
This product is a Butterfly control valve for downstream pressure control in vacuum systems.
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.4 Used abbreviations
Abbreviation Description
CPA Control Performance Analyzer
PFO Power Failure Option
SFS Sensor Full Scale
SPS Sensor Power Supply
ADC Analog-to-digital converter
1.5 Related documents
• Product Data Sheet
• Dimensional Drawing
• IOMI Heating device (if valve with heater)
1.6 Important information
This symbol points to a very important statement that requires particular attention.
Example
:
Refer to chapter: «Technical data» for detailed information.

Series 616 DESCRIPTION OF PRODUCT
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1.7 Technical data
1.7.1 Control and actuating unit
See product data sheet.
1.7.2 Valve unit
See product data sheet.

SAFETY Series 6
16
8/144 Edition 10.08.2022 1143687EA
2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

Series 616 SAFETY
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2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label Part No. Location on valve
T-9001-156 On protective foil covering of
valve opening

DESIGN AND FUNCTION Series
616
10/144 Edition 10.08.2022 1143687EA
3 Design and Function
3.1 Design
1 Controller 4 Double seal
2 Coupling 5 Plate
3 Bearing 6 Body
XY: Double excentric bearing: prevents wearing of the O-ring and particle generation

Series 616 DESIGN AND FUNCTION
1143687EA Edition 10.08.2022 11/
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3.2 Function
The valve plate acts as a throttling element and varies the conductance of the valve opening. The
integrated controller calculates the required plate position to achieve the setpoint pressure. Actuation
is handled by a stepper motor with an encoder for position monitoring. This principle ensures fast and
accurate process pressure control even in demanding contaminating processes. The seal being
attached to the plate reduces the minimum controllable conductance and allows leak tight closing of
the valve. In closed position, the seal is pressed against the body.
3.2.1 Pressure control system overview and function
Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.
Example: Downstream control
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 HV Pump
S
eff
Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (mbar)
p Pressure (mbar)
or units used in USA
S
eff
= 12.7 • Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (sccm)
p Pressure (mTorr)
M
3
4
5
7
8
2
1
9
Q
pV
Seff
6
Open
Closed
Pressure control

DESIGN AND FUNCTION Series
616
12/144 Edition 10.08.2022 1143687EA
3.2.1.1 Way of operation
The controller compares the actual pressure in the process chamber given by the pressure sensor
with the preset pressure. The controller uses the difference between actual and set pressure to
calculate the correct position of the control valve. The controller drives the control valve into the
correct position and the actual pressure again equals the set pressure.
This control operation is performed continuously. Pressure changes in the process chamber due to
leaks, desorption, and gas flow, reaction products, variations in pumping speed etc. are always
corrected at once.
3.2.1.2 Pressure control
In a vacuum system which is pumped and into which gas is admitted at the same time, the pressure
can be controlled in two ways:
1. Downstream control (standard):
The pressure is controlled by changing the conductance of a control valve between pump and
process chamber. This changes the effective pumping speed at the process chamber. Pressure
and gas flow can be independently controlled over a wide range.
2. Upstream control:
The pressure is controlled by changing the gas flow into the process chamber, while the pumping
speed remains constant.
3.2.1.3 Adaptive controller (standard)
A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual
adjustments. This allows for a completely automatic operation of the system.
3.2.2 Principle of a pressure control system
1. Host computer sends
pressure set point
2. Controller reads actual
pressure from sensor
3. Optimizing module sends
new PID parameters
4. Actuator sets new valve
position
Host computer
(Example)
1.
4.
3.
2.

Series 616 INSTALLATION
1143687EA Edition 10.08.2022 13/
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4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Initial procedure

INSTALLATION Series 616
14/144 Edition 10.08.2022 1143687EA
4.2 Unpacking
NOTICE
Physical overstraining at controller
Inappropriate handling with the valve may cause in damage of controller.
Do not place the valve on the controller.
NOTICE
Physical overstraining at pedestal
Inappropriate handling with the valve may cause in damage of pedestal.
Lift valve at valve body out of transport case.
• Make sure that the supplied products are in accordance with your order.
• Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
• Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

Series 616 INSTALLATION
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4.3 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

INSTALLATION Series 616
16/144 Edition 10.08.2022 1143687EA
4.3.1 Installation Hints
Install valve into the vacuum system. Valve seat side shall face process chamber.
• Do not tighten the flange screws stronger than indicated under chapter «Tightening
torque».
• Do not admit higher forces to the valve than indicated under chapter «Admissible
forces».
• Make sure that enough space is kept free to do preventive maintenance work. The
required space is indicated on the dimensional drawing.
• Control unit of valves with ISO-KF (616 . . – K. . .) needs support when mounted
on horizontal piping and control unit does not hang.
4.3.2 Installation space condition
Install the valve with integrated controller with space for dismantling and air
circulation as shown in figure below.
Sample picture
70

Series 616 INSTALLATION
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4.3.3 Admissible forces
NOTICE
Force at valve body
Forces from the weight of other components can lead to deformation of the valve body
and to malfunction of the valve.
Do not higher force the valve body as specified.
The following forces are admissible.
Valve size Axial tensile or
compressive force «F
A
» Bending moment «M»
mm inch N lb. Nm lbf.
Sample picture
40 1½ 100 22 6 4.5
50 2 150 34 11 8
63 2½ 800 176 32 24
sample picture
80 3 850 187 35 26.5
100 4 1000 220 40 30
M F A
M F A

INSTALLATION Series 616
18/144 Edition 10.08.2022 1143687EA
4.3.4 Admissible forces at controller
NOTICE
Force at pedestal
In case higher force is applied, the pedestal could be permanently damaged.
– Do not pushing, shocking load, or stressing the valve controller
– Do not deposit anything at valve controller
The admissible force at valve controller in regards to the pedestal is shown in table
below
Admissible force
«F»
Overview
F= Force
a = middle of aluminum part of controller (b / 2)
400 N
sample pictures
pedestal
b
a
a
F
F
b
pedestal
a
a

Series 616 INSTALLATION
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4.3.5 Tightening torque DNs 40 – 50mm
Tightening torques for ISO-KF flange connections depend on the type of seal which is used. Follow
recommendations of seal manufacturer.
4.3.5.1 ISO-KF Clamping connections
Clamping chain (example)
Valve size
ISO-KF ISO-KF
e.g.:
31032-KASA-0001
31034-KASA-0001
recommended
tightening torque
(Nm)
recommended
tightening torque
(lbs . ft)
DN40 / 1½ “ 5 3.7
DN50 / 2“ 6 4.5
Clamping device (example)
Valve size
ISO-KF ISO-KF
e.g.:
31032-KASE-0001
31034-KASE-0001
recommended
tightening torque
(Nm)
recommended
tightening torque
(lbs . ft)
DN40 / 1½ “ 12 9
DN50 / 2“ 12 9

INSTALLATION Series 616
20/144 Edition 10.08.2022 1143687EA
4.3.6 Tightening torque DNs 63 – 100mm
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels
in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of
the valve.
4.3.6.1 Mounting of CF-F flanges
Tightening torques for CF-F flange connections depend on the type of seal which is used. Follow
recommendations of seal manufacturer.
4.3.6.2 Mounting with centering rings
Valve size
ISO-F ISO-F
max. tightening
torque
(Nm)
max. tightening
torque
(lbs . ft)
DN63 / 2½ “ 8-10 6-8
DN80 / 3“ 8-10 6-8
DN100 / 4“ 8-10 6-8
hole depth (mm) hole depth (inch)
DN63 / 2½ “ 12 0.47
DN80 / 3“ 12 0.47
DN100 / 4“ 12 0.47
4.3.6.3 Mounting with O-ring in grooves
Valve size ISO-F JIS ASA-LP ISO-F JIS ASA-LP
max. tightening torque
(Nm)
max. tightening torque
(lbs . ft)
DN63 / 2½ “ 20-23 35-40 35-40 15-17 26-30 26-30
DN80 / 3“ 20-23 35-40 35-40 15-17 26-30 26-30
DN100 / 4“ 20-23 35-40 35-40 15-17 26-30 26-30
hole depth (mm) hole depth (inch)
DN63 / 2½ “ 12 n/a n/a 0.47 n/a n/a
DN80 / 3“ 12 n/a n/a 0.47 n/a n/a
DN100 / 4“ 12 n/a n/a 0.47 n/a n/a
Refer to «Spare parts / Accessories» for centering rings ordering numbers.
Make sure that screws in use are capable to withstand applied torques.