VAT 642 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
605403ED Edition 2017-11-24
Control gate valve
with Logic interface
Series 642
DN 63-400 mm (I.D. 2.5“ - 16")
This manual is valid for the valve ordering number(s):
642 . . - . .GC- . . . . (1 sensor input)
642 . . - . .GE- . . . . (2 sensor inputs)
642 . . - . .AC- . . . . (1 sensor input / ±15V SPS)
642 . . - . .AE- . . . . (2 sensor inputs / ±15V SPS)
642 . . - . .HC- . . . . (1 sensor input / PFO)
642 . . - . .HE- . . . . (2 sensor inputs / PFO)
642 . . - . .CC- . . . . (1 sensor input / ±15V SPS / PFO)
642 . . - . .CE- . . . . (2 sensor inputs / ±15V SPS / PFO)
SPS = Sensor Power Supply PFO = Power Failure Option
configured with firmware 600P.1G.00.06…08
Sample picture

Series
642
2/94 Edition 2017-11-24 605403ED
Imprint
Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH
-
9469 Haag,
Switzerland
Copyright
©
VAT Vakuumventile AG
2017
No part of these instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

Series 642
605403ED Edition 2017-11-24 3/
94
Contents
1 Description of product........................................................................5
1.1 Identification of product ...................................................................................................5
1.2 Use of product.................................................................................................................5
1.3 Used abbreviations..........................................................................................................5
1.4 Related documents..........................................................................................................5
1.5 Important information.......................................................................................................5
1.6 Technical data.................................................................................................................6
1.6.1 Control and actuating unit.................................................................................6
1.6.2 Valve unit..........................................................................................................8
2 Safety ...................................................................................................9
2.1 Compulsory reading material...........................................................................................9
2.2 Danger levels ..................................................................................................................9
2.3 Personnel qualifications.................................................................................................10
2.4 Safety labels..................................................................................................................10
3 Design and Function.........................................................................11
3.1 Design...........................................................................................................................11
3.2 Function.........................................................................................................................11
3.2.1 Pressure control system overview and function..............................................12
3.2.2 Principle of a pressure control system ............................................................13
4 Installation.........................................................................................14
4.1 Unpacking .....................................................................................................................14
4.2 Installation into the system............................................................................................15
4.2.1 Installation space condition.............................................................................16
4.2.2 Connection overview.......................................................................................17
4.2.3 Installation procedure......................................................................................18
4.3 Tightening torque ..........................................................................................................19
4.3.1 Mounting with centering rings .........................................................................19
4.3.2 Mounting with O-ring in grooves .....................................................................20
4.4 Admissible forces..........................................................................................................21
4.4.1 Requirements to sensor connection................................................................22
4.5 Electrical connection......................................................................................................22
4.5.1 Ground connection..........................................................................................23
4.5.2 Sensor supply concepts..................................................................................24
4.5.3 Power and sensor connection (+24 VDC sensors) .........................................25
4.5.4 Power (+24 VDC) and sensor connection (±15 VDC sensors) with opt. SPS
module 27
4.5.5 Service port connection...................................................................................29
4.5.6 Functions and Wiring ......................................................................................30
4.5.7 Digital inputs ...................................................................................................32
4.5.8 Digital outputs.................................................................................................34
4.5.9 Analog inputs and outputs...............................................................................35
4.6 Initial operation..............................................................................................................36
4.6.1 Setup procedure .............................................................................................36
4.6.2 Logic Interface configuration...........................................................................36
4.6.3 Valve configuration .........................................................................................37
4.6.4 Sensor configuration.......................................................................................38
4.6.5 ZERO..............................................................................................................38
4.6.1 LEARN (adaptive)...........................................................................................39
4.6.2 Pressure control algorithem............................................................................41
4.7 Tuning of control performance.......................................................................................48
4.7.1 Tuning of pressure control (adaptive) .............................................................49
4.7.2 Tuning of pressure control performance with fixed PI control .........................54

Series
642
4/94 Edition 2017-11-24 605403ED
4.7.3 Tuning of pressure control with soft pump.......................................................57
5 Operation........................................................................................... 60
5.1 Normal operation...........................................................................................................60
5.1.1 Local operation................................................................................................61
5.1.2 Remote operation............................................................................................62
5.2 Close valve....................................................................................................................63
5.3 Open valve.....................................................................................................................63
5.4 Position control..............................................................................................................63
5.5 Pressure control.............................................................................................................63
5.5.1 Operation with 2 sensors.................................................................................64
5.6 Display information........................................................................................................65
5.6.1 Power up.........................................................................................................65
5.6.2 Operation ........................................................................................................66
5.6.3 Fatal error........................................................................................................66
5.6.4 Safety mode....................................................................................................66
5.6.5 Service indication............................................................................................66
5.7 Operation during power up ............................................................................................67
5.8 Behavior in case of power failure...................................................................................67
5.9 Operation under increased temperature........................................................................67
6 Trouble shooting .............................................................................. 68
7 Maintenance...................................................................................... 70
7.1 Maintenance intervals....................................................................................................70
7.2 Maintenance procedures...............................................................................................71
7.2.1 Replacement of gate seals and valve cleaning...............................................72
7.2.2 Replacement of Option board .........................................................................77
7.2.3 Retrofit / replacement procedure.....................................................................79
8 Repairs .............................................................................................. 82
9 Dismounting and Storage................................................................ 83
9.1 Dismounting...................................................................................................................83
9.2 Storage..........................................................................................................................84
10 Packaging and Transport................................................................. 85
10.1 Packaging......................................................................................................................85
10.2 Transport .......................................................................................................................86
11 Disposal............................................................................................. 87
12 Spare parts........................................................................................ 88
12.1 Drawing .........................................................................................................................89
12.1.1 Valve unit with seals and grease.....................................................................90
12.1.2 Controller.........................................................................................................91
12.1.3 Accessories.....................................................................................................91
13 Appendix........................................................................................... 93

Series 642 DESCRIPTION OF PRODUCT
605403ED Edition 2017-11-24 5/
94
1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.


Fabrication number
Order number
1.2 Use of product
This product is a control gate valve with isolation functionality. It is intended to use for downstream
pressure control applications.
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation Description
CPA Control Performance Analyzer
PFO Power Failure Option
SFS Sensor Full Scale
SPS Sensor Power Supply
ADC Analog-to-digital converter
1.4 Related documents
• Product Data Sheet
• Dimensional Drawing
• IOMI Heating device (if valve with heater)
1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example
:
Refer to chapter: «Technical data» for detailed information.
made in Switzerland
Fabrication No.:
000 . .- . . . .- . . . ./ . . . .
A - . . . . . .

DESCRIPTION OF PRODUCT Series
642
6/94 Edition 2017-11-24 605403ED
1.6 Technical data
1.6.1 Control and actuating unit
Description
Power input
1)
(α)+24 VDC (±10%) @ 0.5 V pk-
pk max. [connector: POWER]
[
642
. .
-
. .
A
.
-
. . . . /
642
. .
-
. .
G
.
-
. . . . ]
[642 . . - . . C. - . . . . / 642 . . - . . H. - . . . . ]
50 W max. (operation of valve with max. load) without PFO
4)
50 W plus 10 W for PFO
4)
Sensor power supply
2)
(β)
[642 . . - . . A. - . . . . / 642 . . - . . C. - . . . . ]
Input
Output
+24 VDC / 1500 mA max.
±15 VDC (±5%) / 1000 mA
max.
[connector: POWER]
[connector: SENSOR]
Sensor power supply
2)
(β)
[642 . . - . . G. - . . . . / 642 . . - . . H. - . . . . ]
Input
Output
+24 VDC resp. ± 15 VDC
same as input but:
2.0 A max. at ± 15 VDC
1.5 A max. at + 24 VDC
[connector: POWER]
[connector: SENSOR]
1)
Internal overcurrent protection by a PTC device.
2)
Refer to chapter «Sensor supply concepts» for details.
Calculation of complete power consumption:
P
tot
= α+ β
whereas
βdepends on sensor supply concept and sensor power consumption.

Series 642 DESCRIPTION OF PRODUCT
605403ED Edition 2017-11-24 7/
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Control and actuating unit (continuation)
Sensor input
Signal input voltage
ADC resolution
Sampling time
0-10 VDC / Ri>100 kΩ
0.23 mV
10 ms
[connector: SENSOR]
Digital inputs
3)
±24 VDC max. [connector: INTERFACE]
Digital outputs
3)
Input voltage
Input current
Breaking capacity
70 VDC or 70 V peak max.
0.5 ADC or 0.5 A peak max.
10 W max.
[connector: INTERFACE]
Analog outputs
3)
0-10 VDC / 1 mA max. [connector: INTERFACE]
PFO
4)
battery pack
[642 . . - . . C. - . . . . / 642 . . - . . H. - . . . . ]
Charging time
Durability
2 minutes max.
up to 10 years @ 25°C ambient;
refer to «Durability of power fail battery» for details
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
5 mV or 0.1% of setpoint, whichever is greater
3)
Refer to chapter «Schematics» for details.
4)
PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details.

DESCRIPTION OF PRODUCT Series
642
8/94 Edition 2017-11-24 605403ED
1.6.2 Valve unit
Description
Pressure range at 20°C (unheated on delivery)
•DN63…200
•DN250…400
1 × 10E-8 mbar to 2.0 bar (abs)
1 × 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside / seat at 20°C (unheated on delivery) 1 × 10E-9 mbar ls
-1
Differential pressure on the gate
•Valve closed
- DN63…200
- DN250…400
•During closing / opening
≤2.0 bar
≤1.2 bar
≤30 mbar
Cycles until first service (unheated and under clean conditions)
•Pressure control
•Isolation cycles
1’000’000
200’000
Admissible operating temperature
•Valve body
•Ambient
≤150°C
≤150°C
Mounting position (valve seat to face chamber is recommended)
•DN63…350
•DN400
Any
Horizontal only (optional in vertical position with
extended closing time, fewer cycles)
Process side materials body / plate Stainless steel: 304 (1.4301)
other parts Stainless steel: 301 (1.4310), 304 (1.4301),
420 (1.4034), 420D (1.4037), 430 (1.4016)
Seals plate FKM (e.g. Viton
®
)
rotary feed through FKM (e.g. Viton
®
)
bonnet FKM (e.g. Viton
®
) (DN63…200 vulcanized)
Operating time (s) for: DN 63
2½" DN 80 3" DN 100 4" DN 160 6" DN 200 8" DN 250 10" DN 320 12" DN 350 14" DN 400 16"
Open / close 4 4 6 6 6 10 10 10 10
Pressure control (throttling) 3 3 3 5 5 9 9 9 9
Min. controllable
conductance (ls
-1
)
[N
2
molecular flow] 0.65 0.8 1 1.6 2 2.5 3.2 3.5 4
Max. Conductance (ls
-1
)
[N
2
molecular flow] 440 800 1700 5000 12000 22000 30000 40000 50000
Weight (approx.) kg 14 14 17 28 34 62 112 120 155
lbs 31 31 37 62 75 136 246 264 340
Valve position indication Visual (mechanical and on controller)
Dimensions Refer to dimensional drawing of specific valve
ordering number (available on request)

Series 642 SAFETY
605403ED Edition 2017-11-24 9/
94
2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

SAFETY Series
642
10/94 Edition 2017-11-24 605403ED
2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label Part No. Location on valve
T-9001-156 On protective foil covering of
valve opening

Series 642 DESIGN AND FUNCTION
605403ED Edition 2017-11-24 11/
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3 Design and Function
3.1 Design
1 Valve gate 7 Gate seal
2 Ball guidance 8 Actuator shaft
3 Leaf spring 9 Counter plate
4 Ball pairs 10 Bonnet seal
5 Detents 11 Rotary feed through seals
6 Crank bolt
3.2 Function
The valve gate (1) acts as a throttling element and varies the conductance of the valve opening.
Actuation is performed with a stepper motor and controller. The stepper motor/controller version
ensures accurate pressure control due to exact gate positioning. For leak tight closing the VATLOCK
principle is applied. For details refer to VAT catalog.
14 3 9 2 5 7 6 8 11 10

DESIGN AND FUNCTION Series
642
12/94 Edition 2017-11-24 605403ED
3.2.1 Pressure control system overview and function
Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.
Example: Downstream control
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 HV Pump
S
eff
Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (mbar)
p Pressure (mbar)
or units used in USA
S
eff
= 12.7 • Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (sccm)
p Pressure (mTorr)
M
3
4
5
7
8
2
1
9
Q
pV
Seff
6

Series 642 DESIGN AND FUNCTION
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3.2.1.1 Way of operation
The controller compares the actual pressure in the process chamber given by the pressure sensor
with the preset pressure. The controller uses the difference between actual and set pressure to
calculate the correct position of the control valve. The controller drives the control valve into the
correct position and the actual pressure again equals the set pressure.
This control operation is performed continuously. Pressure changes in the process chamber due to
leaks, desorption, and gas flow, reaction products, variations in pumping speed etc. are always
corrected at once.
3.2.1.2 Pressure control
In a vacuum system which is pumped and into which gas is admitted at the same time, the pressure
can be controlled in two ways:
1. Downstream control (standard):
The pressure is controlled by changing the conductance of a control valve between pump and
process chamber. This changes the effective pumping speed at the process chamber. Pressure
and gas flow can be independently controlled over a wide range.
2. Upstream control:
The pressure is controlled by changing the gas flow into the process chamber, while the pumping
speed remains constant.
3.2.1.3 Adaptive controller (standard)
A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual
adjustments. This allows for a completely automatic operation of the system.
3.2.2 Principle of a pressure control system
1. Host computer sends
pressure set point
2. Controller reads actual
pressure from sensor
3. Optimizing module sends
new PID parameters
4. Actuator sets new valve
position
Host computer
(Example)
1.
4.
3.
2.

INSTALLATION Series
642
14/94 Edition 2017-11-24 605403ED
4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
NOTICE
Physical overstraining at controller
Inappropriate handling with the valve may cause in damage of controller.
Do not place the valve on the controller.
CAUTION
Valve is a heavy component
Physical overstraining.
Use a crane to lift valves DN 200 (8”) and larger.
•
Make sure that the supplied products are in accordance with your order.
• Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
• Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Attach lifting device for valves DN 200 (8”) and larger. For attachment refer to dimensional drawing of
valve.
3. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

Series 642 INSTALLATION
605403ED Edition 2017-11-24 15/
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4.2 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening
and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

INSTALLATION Series
642
16/94 Edition 2017-11-24 605403ED
4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air circulation
as shown in figure below. (sample picture)
Overview table: DN to required distance (d) for maintenance.
DN 63 80 / 100 160 200 250 320 / 350 400
d
180 220 300 350 450 550 600
100
d

Series 642 INSTALLATION
605403ED Edition 2017-11-24 17/
94
4.2.2 Connection overview
System:
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Cable to Logic remote control unit
7 Cable to power supply
8 Controller
9 Connection cable controller / actuator
10 Actuator
11 Pump
Actuator Controller
M
3
4
5
6
7
2
198
10
11

INSTALLATION Series
642
18/94 Edition 2017-11-24 605403ED
4.2.3 Installation procedure
1. Install valve [1] into the vacuum system, with valve seat side to process chamber. The valve seat side
is indicated by the symbol "∆" on the valve flange.
•Do not tighten the flange screws stronger than indicated under «Tightening
torque».
•Do not admit higher forces to the valve than indicated under «Admissible forces».
•Make sure that enough space is kept free to do preventive maintenance work.
The required space is indicated on the dimensional drawing.
2. Install the ground connection cable at controller. Refer to «Electrical connection»
3. Install connection cable between actuator (connector) and controller (connector: VALVE)
4. Install sensor(s) [4] according to the recommendations of the sensor manufacturer and directives
given under «Requirements to sensor connection».
5. Connect pressure sensor cable [5] to sensor(s) and then to valve (connector: SENSOR). Refer to
chapter «Electrical connection» for correct wiring.
Input for second sensor is available on
642
. .
-
. . .
H
-
. . . . version only.
6. Connect valve to Logic Interface [6] (Logic connector). Refer to «Function and Wiring» for correct
wiring.
7. Connect power supply [7] to valve (connector: POWER). Refer to chapter «Electrical connection» for
correct wiring.
To provide power to the valve motor pins 2 and 3 must be bridged, otherwise motor
interlock is active and thevalve enters the safety mode and is not operative. Refer
also to «Safety mode».
8. This valve may optionally be equipped with a heating device. Connect VAT heating device according
to manual of respective heating device.
9. Perform «Setup procedure» to prepare valve for operation.
Without performing the setup procedure the valve will not be able to do pressure
control.

Series 642 INSTALLATION
605403ED Edition 2017-11-24 19/
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4.3 Tightening torque
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels
in the following tables.
4.3.1 Mounting with centering rings
DN max. torque
(Nm) max. torque (lbs . ft) Max. hole depth [d] (mm)
mm inch ISO-F JIS ASA-LP ISO-F JIS ASA-LP ISO-F JIS ASA-LP
63 2 1/2 8 – 10 8 – 10 8 – 10 6 – 8 6 – 8 6 – 8 13 13 15
80 3 8 – 10 8 – 10 8 – 10 6 – 8 6 – 8 6 – 8 13 13 15
100 4 8 – 10 8 – 10 8 – 10 6 – 8 6 – 8 6 – 8 13 13 15
160 6 13 – 15 13 – 15 20 - 30 9 - 11 9 - 11 15 – 22 14 14 15
200 8 13 – 15 13 – 15 20 - 30 9 - 11 9 - 11 15 – 22 16 16 20
250 10 17 – 20 17 – 20 40 – 60 13 – 15 13–15 30 – 44 16 16 20
320 12 17 - 20 17 – 20 40 - 60 13 – 15 13–15 30 - 44 16 16 20
350 12 17 - 20 17 – 20 40 - 60 13 – 15 13–15 30 - 44 16 16 20
400 16 17 – 20 30 – 35 55 – 80 13 – 15 22 – 26 41 – 59 25 25 NA
The torque values below are dependent on many factors, such as materials involved,
surface quality, surface treatment, and lubrication.
The torques below are valid if immersion depth of the mounting screws is at least
once the thread diameter (min. 1d), and the friction coefficient of the screw-flange
connection (µ
total
= (µ
screw thread-helicoil
+ µ
under screw head
)/2) is bigger than 0.12. Lower
friction coefficients may damage the valve, as the resulting preload force gets too
high. Therefore for other friction coefficients the torque needs to be adapted. Please
review design guidelines for Helicoil-Screw connections and make sure that screws in
use are capable to withstand applied torques, are appropriate for the application and
are not too long. Too long screws may damage the valve, the immersion depth should
not exceed (hole depth
–
1 mm).
Refer to «Spare parts / Accessories» for centering rings ordering numbers.
d

INSTALLATION Series
642
20/94 Edition 2017-11-24 605403ED
4.3.2 Mounting with O-ring in grooves
DN max. torque t
(Nm) max. torque (lbs . ft) Max. hole depth [d] (mm)
mm inch ISO-F JIS ASA-LP ISO-F JIS ASA-LP ISO-F JIS ASA-LP
63 4 N/A N/A N/A N/A N/A N/A 13 13 15
80 4 N/A N/A N/A N/A N/A N/A 13 13 15
100 4 N/A N/A N/A N/A N/A N/A 13 13 15
160 6 N/A N/A N/A N/A N/A N/A 14 14 15
200 8 N/A N/A N/A N/A N/A N/A 16 16 20
250 10 N/A N/A N/A N/A N/A N/A 16 16 20
320 12 N/A N/A N/A N/A N/A N/A 16 16 20
350 12 NA N/A N/A N/A N/A N/A 16 16 20
400 16 NA N/A N/A N/A N/A N/A 25 25 N/A
d