VAT 612 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
605262EE Edition 2018-08-20
Butterfly Pressure Control Valve
with EtherCAT interface
Series 612
DN 63-250 mm (I.D. 2.5“- 10")
This manual is valid for the following product ordering numbers:
Configured with firmware: 600P.1G.00.03…07…08,
600P.1G.27.00,
600P.1H.00.01
Sample picture

Series
612
2/116 Edition 2018-08-20 605262EE
Imprint
Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH
-
9469 Haag,
Switzerland
Copyright
©
VAT Vakuumventile AG
2018
No part of these instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

Series 612
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Contents
1 Description of product........................................................................6
1.1 Identification of product ...................................................................................................6
1.2 Use of product.................................................................................................................6
1.3 Used abbreviations..........................................................................................................6
1.4 Related documents..........................................................................................................6
1.5 Important information.......................................................................................................6
1.6 Technical data.................................................................................................................7
1.6.1 Control and actuating unit.................................................................................7
1.6.2 Valve unit..........................................................................................................9
2 Safety .................................................................................................10
2.1 Compulsory reading material.........................................................................................10
2.2 Danger levels ................................................................................................................10
2.3 Personnel qualifications.................................................................................................11
2.4 Safety labels..................................................................................................................11
3 Design and Function.........................................................................12
3.1 Design...........................................................................................................................12
3.2 Function.........................................................................................................................12
3.2.1 Pressure control system overview and function..............................................13
3.2.2 Principle of a pressure control system ............................................................14
4 Installation.........................................................................................15
4.1 Unpacking .....................................................................................................................15
4.2 Installation into the system............................................................................................16
4.2.1 Installation space condition.............................................................................17
4.2.2 Connection overview.......................................................................................17
4.2.3 Installation procedure......................................................................................18
4.3 Tightening torque ..........................................................................................................19
4.3.1 Mounting with centering rings .........................................................................19
4.3.2 Mounting with O-ring in grooves .....................................................................20
4.4 Admissible forces..........................................................................................................20
4.4.1 Admissible forces at controller........................................................................22
4.4.2 Requirements to sensor connection................................................................23
4.5 Electrical connection......................................................................................................23
4.5.1 Ground connection..........................................................................................24
4.5.2 Sensor supply concepts..................................................................................25
4.5.3 Power and sensor connection (+24 VDC sensors) .........................................26
4.5.4 Power and sensor connection (±15 VDC sensors) without opt. SPS module .28
4.5.5 Power and sensor connection (±15 VDC sensors) with optional SPS module 30
4.5.6 EtherCAT interface connection.......................................................................31
4.5.7 LOGIC I/O.......................................................................................................32
4.5.8 Service port connection...................................................................................33
4.6 Initial operation..............................................................................................................34
4.6.1 Device identification value...............................................................................35
4.6.2 EtherCAT configuration...................................................................................35
4.6.3 LOGIC I/O configuration..................................................................................44
4.6.4 Valve configuration .........................................................................................45
4.6.5 Sensor configuration.......................................................................................46
4.6.6 ZERO..............................................................................................................47
4.6.7 LEARN (adaptive)...........................................................................................48
4.6.8 Pressure control configuration ........................................................................50
4.7 Tuning of control performance.......................................................................................51
4.7.1 Tuning of control performance with adaptive pressure controller....................52
4.7.2 Tuning of control performance with fixed PI pressure controller .....................57

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4.7.3 Tuning of control performance with soft pump pressure controller..................60
4.8 EtherCAT interface (General)........................................................................................63
4.9 EtherCAT interface (Process data – cyclic communication) ..........................................63
4.9.1 OUTPUT Buffer (Master PLC).........................................................................63
4.9.2 INPUT Buffer (Master PLC).............................................................................66
4.10 EtherCAT interface (Parameter data – acyclic communication) ....................................71
4.10.1 EtherCAT Object dictionary.............................................................................71
4.10.2 Communication and timing between Master (PLC) and Slave (VAT-Valve)....77
5 Operation........................................................................................... 78
5.1 Normal operation...........................................................................................................78
5.1.1 Local operation................................................................................................78
5.1.2 Remote operation............................................................................................79
5.2 Close valve....................................................................................................................80
5.3 Open valve.....................................................................................................................80
5.4 Position control..............................................................................................................80
5.5 Pressure control.............................................................................................................81
5.5.1 Pressure control operation with 2 sensors ......................................................82
5.6 Display information........................................................................................................83
5.6.1 Power up.........................................................................................................83
5.6.2 Operation ........................................................................................................84
5.6.3 Fatal error........................................................................................................84
5.6.4 EtherCAT LEDs...............................................................................................84
5.6.5 Safety mode....................................................................................................86
5.6.6 Service indication............................................................................................86
5.7 Operation during power up ............................................................................................86
5.8 Behavior in case of power failure...................................................................................86
5.9 Operation under increased temperature........................................................................87
6 Trouble shooting .............................................................................. 88
6.1 Additional EtherCAT warning.........................................................................................91
7 Maintenance...................................................................................... 92
7.1 Maintenance intervals....................................................................................................92
7.2 Maintenance procedures...............................................................................................93
7.2.1 Replacement of shaft feedthrough seals and valve cleaning ..........................94
7.2.2 Replacement of Option board .........................................................................98
7.2.3 Retrofit / replacement procedure...................................................................100
8 Repairs ............................................................................................ 104
9 Dismounting and Storage.............................................................. 105
9.1 Dismounting.................................................................................................................105
9.2 Storage........................................................................................................................106
10 Packaging and Transport............................................................... 107
10.1 Packaging....................................................................................................................107
10.2 Transport .....................................................................................................................108
11 Disposal........................................................................................... 109
12 Spare parts...................................................................................... 110
12.1 Drawing .......................................................................................................................111
Sample picture........................................................................................................................111
12.1.1 ISO-KF valve unit - aluminum blank, without heating....................................112
12.1.2 ISO-KF valve unit – stainless steel, without heating......................................112
12.1.3 Seals and grease ..........................................................................................113

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12.1.4 Control and actuating unit.............................................................................113
12.1.5 Accessories...................................................................................................114
13 Appendix..........................................................................................115

DESCRIPTION OF PRODUCT Series
612
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1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.


Fabrication number
Order number
1.2 Use of product
This product is a Butterfly control valve for downstream pressure control in vacuum systems.
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation Description
CPA Control Performance Analyzer
PFO Power Failure Option
SFS Sensor Full Scale
SPS Sensor Power Supply
ADC Analog-to-digital converter
1.4 Related documents
• Product Data Sheet
• Dimensional Drawing
• IOMI Heating device (if valve with heater)
1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example
:
Refer to chapter: «Technical data» for detailed information.
made in Switzerland
Fabrication No.:
000 . .- . . . .- . . . ./ . . . .
A - . . . . . .

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1.6 Technical data
1.6.1 Control and actuating unit
Description
Power input
1)
(α)+24 VDC (±10%) @ 0.5 V pk-pk
max. [connector: POWER]
[
612
. .
-
. .
A
.
-
. . . . /
612
. .
-
. .
G
.
-
. . . . ]
[612 . . - . . C. - . . . . / 612 . . - . . H. - . . . . ]
38 W max. (operation of valve with max. load) without PFO
4)
38 W plus 10 W for PFO
4)
Sensor power supply
2)
(β)
[612 . . - . . A. - . . . . / 612 . . - . . C. - . . . . ]
Input
Output
+24 VDC / 1500 mA max.
±15 VDC (±5%) / 1000 mA max.
[connector: POWER]
[connector: SENSOR]
Sensor power supply
2)
(β)
[612 . . - . . G. - . . . . / 612 . . - . . H. - . . . . ]
Input
Output
+24 VDC resp. ± 15 VDC
same as input but:
2.0 A max. at ± 15 VDC
1.5 A max. at + 24 VDC
[connector: POWER]
[connector: SENSOR]
1)
Internal overcurrent protection by a PTC device.
2)
Refer to chapter «Sensor supply concepts» for details.
4)
PFO = Power Failure Option. Refer to chapter «Behavior in case of power failure» for details
Calculation of complete power consumption:
P
tot
= α+ β
whereas
βdepends on sensor supply concept and sensor power consumption.

DESCRIPTION OF PRODUCT Series
612
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Control and actuating unit (continuation)
Sensor input
Signal input
ADC resolution
Sampling time
0-10 VDC / Ri>100 kΩ
0.23 mV
10 ms
[connector: SENSOR]
Digital outputs
3)
Input voltage
Input current
70 VDC or 70 V peak max.
0.1 ADC or 0.1 A peak max.
PFO
4)
battery pack
[612 . . - . . C. - . . . . / 612 . . - . . H. - . . . . ]
Charging time
Durability
2 minutes max.
up to 10 years @ 25°C ambient;
refer to «Durability of power fail battery» for details
Ambient temperature 0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy 5 mV or 0.1% of setpoint, whichever is greater
Position resolution / position control
capability 20000
Actuating time closing 0.3 s typ.
opening 0.3 s typ.
Utilizable valve torque 2.5 Nm
3)
Refer to chapter «Schematics» for details.
4)
PFO = Power Failure Option. Refer to chapter «Behavior in case of power failure» for details

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1.6.2 Valve unit
Description
Pressure range at 20°C
- Aluminum (612 . . - . A. . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)
- Aluminum hard anodized (612 . . - . H. . - . . . . ) 1 × 10E-6 mbar to 1.2 bar (abs)
- Aluminum nickel coated (612 . . - . I. . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)
- Stainless steel (612 . . - . E. . - . . . . ) 1 × 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20°C
- Aluminum (612 . . - . A. . - . . . . ) 1 × 10E-9 mbar l/s
- Aluminum hard anodized (612 . . - . H. . - . . . . ) 1 × 10E-5 mbar l/s
- Aluminum nickel coated (612 . . - . I. . - . . . . ) 1 × 10E-9 mbar l/s
- Stainless steel (612 . . - . E. . - . . . . ) 1 × 10E-9 mbar l/s
Cycles until first service 2’000’000 (unheated and under clean conditions)
Admissible operating temperature +10°C to +150°C
Mounting position Any
Control unit for ISO-KF version needs support when mounted
on horizontal piping and control unit does not hang.
Wetted materials
- Body, plate (612 . . - . A. . - . . . . ) Aluminum 3.2315 (AA6082)
- Body, plate (612 . . - . H. . - . . . . ) Aluminum 3.2315 (AA6082) hard anodized
- Body, plate (612 . . - . I. . - . . . . ) Aluminum 3.2315 (AA6082) nickel coated
- Body, plate (612 . . - . E. . - . . . . ) Stainless steel 316L (1.4404 or 1.4435 )
- Shaft Stainless steel 316L (1.4404 or 1.4435 )
- Plate screws Stainless steel 316L (A4)
- Shaft seal Viton
®
(standard). Other materials available on request.
Seal materials are declared on dimensional drawing of
specific valve ordering number.
- Slide bearing for shaft iglidur
®
X
DN 63
2½" DN 80 3" DN 100 4" DN 160 6" DN 200 8" DN 250 10"
Max. differential pressure on plate
1000
mbar 1000 mbar 800 mbar 300 mbar 150 mbar 100mbar
Min. controllable conductance (C
min
)
[N
2
molecular flow] 0.45 l/s 0.65 l/s 0.85 l/s 1.7 l/s 2.8 l/s 5 l/s
Conductance in open position [N
2
molecular flow] 360 l/s 850 l/s 1400 l/s 3800 l/s 7800 l/s 15000 l/s
Dimensions Refer to dimensional drawing of specific valve ordering number
(available on request)

SAFETY Series
612
10/116 Edition 2018-08-20 605262EE
2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

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2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label Part No. Location on valve
T-9001-156 On protective foil covering of
valve opening

DESIGN AND FUNCTION Series
612
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3 Design and Function
3.1 Design
1 Integrated controller 4 Double seal
2 Coupling 5 Plate
3 Bearing 6 Valve body
3.2 Function
The valve plate (5) acts as a throttling element and varies the conductance of the valve opening.
The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.
See also principle drawing on chapter: «Connection Overview».
Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures
very fast and accurate process pressure control even in demanding contaminating processes.
Double seal of
rotary feedthrough
1
2
4
5
6
3

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3.2.1 Pressure control system overview and function
Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.
Example: Downstream control
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 HV Pump
S
eff
Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (mbar)
p Pressure (mbar)
or units used in USA
S
eff
= 12.7 • Q / p
S
eff
effective pump speed (ls
-1
)
Q Gas flow (sccm)
p Pressure (mTorr)
3.2.1.1 Way of operation
The controller compares the actual pressure in the process chamber given by the pressure sensor
with the preset pressure. The controller uses the difference between actual and set pressure to
calculate the correct position of the control valve. The controller drives the control valve into the
correct position and the actual pressure again equals the set pressure.
This control operation is performed continuously. Pressure changes in the process chamber due to
leaks, desorption, and gas flow, reaction products, variations in pumping speed etc. are always
corrected at once.
3.2.1.2 Pressure control
In a vacuum system which is pumped and into which gas is admitted at the same time, the pressure
can be controlled in two ways:
1. Downstream control (standard):
The pressure is controlled by changing the conductance of a control valve between pump and
process chamber. This changes the effective pumping speed at the process chamber. Pressure
and gas flow can be independently controlled over a wide range.
2. Upstream control:
The pressure is controlled by changing the gas flow into the process chamber, while the pumping
speed remains constant.
M
3
4
5
7
8
2
1
9
Q
pV
Seff
6

DESIGN AND FUNCTION Series
612
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3.2.1.3 Adaptive controller (standard)
A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual
adjustments. This allows for a completely automatic operation of the system.
3.2.2 Principle of a pressure control system
1. Host computer sends
pressure set point
2. Controller reads actual
pressure from sensor
3. Optimizing module sends
new PID parameters
4. Actuator sets new valve
position
Host computer
(Example)
1.
4.
3.
2.

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4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
NOTICE
Physical overstraining at controller
Inappropriate handling with the valve may cause in damage of controller.
Do not place the valve on the controller.
NOTICE
Physical overstraining at pedestal
Inappropriate handling with the valve may cause in damage of pedestal.
Lift valve at valve body out of transport case.
• Make sure that the supplied products are in accordance with your order.
• Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
• Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

INSTALLATION Series
612
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4.2 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

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4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air
circulation as shown in figure below.
Sample picture
4.2.2 Connection overview
System:
1 Valve with controller and actuator
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Cable to remote control unit
7 Cable to power supply
8 HV Pump
70 mm
M
3
4
5
6
7
2
1
8

INSTALLATION Series
612
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Controller:
4.2.3 Installation procedure
All numbers in brackets refer to chapter: «Connection overview».
1. Remove protective covers from body flanges.
2. Install [1] valve into the vacuum system.
• Do not tighten the flange screws stronger than indicated under chapter «Tightening
torque».
• Do not admit higher forces to the valve than indicated under chapter «Admissible
forces».
• Make sure that enough space is kept free to do preventive maintenance work. The
required space is indicated on the dimensional drawing.
• Control unit of valves with ISO-KF (612 . . – K. . .) needs support when mounted
on horizontal piping and control unit does not hang.
3. Install the ground connection cable at controller. Refer to chapter «Electrical connection».
4. Install sensor(s) [4] according to the recommendations of the sensor manufacturer and directives
given under chapter «Requirements to sensor connection».
5. Connect sensor cable [5] to sensor(s) and then to valve (connector: SENSOR). Refer to chapter
«Electrical connection» for correct wiring.
6. Connect valve with cable [7] to remote control unit (connector: INTERFACE). Refer to chapter
«EtherCAT connection» for correct wiring.
7. Connect power supply cable [8] to valve (connector: POWER). Refer to chapter «Electrical
connection» for correct wiring.
To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor
interlock is active and the valve enters the safety mode and is not operative. Refer
also to chapter «Safety mode».

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8. This valve may optionally be equipped with a heating device. Connect VAT heating device according
to manual of respective heating device.
9. Perform chapter «Setup procedure» to prepare valve for operation.
Without performing the setup procedure the valve will not be able to do pressure
Control.
4.3 Tightening torque
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels
in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of
the valve.
4.3.1 Mounting with centering rings
Valve size
max. tightening
torque
(Nm)
max. tightening
torque
(lbs . ft)
mm inch ISO-F ISO-F
63 2½ 8-10 6-8
80 3 8-10 6-8
100 4 8-10 6-8
160 6 13-15 9-11
200 8 13-15 9-11
250 10 13-15 9-11
Refer to «Spare parts / Accessories» for centering rings ordering numbers.

INSTALLATION Series
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4.3.2 Mounting with O-ring in grooves
Valve size max. tightening torque
(Nm) max. tightening torque (lbs . ft)
mm inch ISO-F JIS ISO-F JIS
63 2½ 20-23 35-40 15-17 26-30
80 3 20-23 35-40 15-17 26-30
100 4 20-23 35-40 15-17 26-30
160 6 40-45 35-40 30-35 26-30
200 8 40-45 65-70 30-35 48-52
250 10 40-45 65-70 30-35 48-52
4.4 Admissible forces
NOTICE
Force at valve body
Forces from the weight of other components can lead to deformation of the valve body
and to malfunction of the valve.
Do not higher force the valve body as specified.
The following forces are admissible.
Make sure that screws in use are capable to withstand applied torques.