VAT 650 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
294290EA
Edition 2012-05-02
Pendulum control & isolation valve
with DeviceNet® interface
Series 650
DN 400 mm (I.D. 16")
This manual is valid for the valve ordering number(s):
65052-PAAP-0001
configured with firmware 650P.1E.00 and 264420 (DeviceNet®)
Sample picture

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Imprint
Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright
© VAT Vakuumventile AG 2012
No part of these Instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

Series 650
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Contents
1Description of product........................................................................5
1.1 Identification of product ...................................................................................................5
1.2 Use of product.................................................................................................................5
1.3 Used abbreviations..........................................................................................................5
1.4 Related documents .........................................................................................................5
1.5 Important information.......................................................................................................6
1.6 Technical data.................................................................................................................7
1.6.1 Control and actuating unit.................................................................................7
1.6.2 Valve unit..........................................................................................................8
2Safety ...................................................................................................9
2.1 Compulsory reading material...........................................................................................9
2.2 Danger levels ..................................................................................................................9
2.3 Personnel qualifications.................................................................................................10
2.4 Safety labels..................................................................................................................10
3Design and Function.........................................................................11
3.1 Design...........................................................................................................................11
3.2 Function.........................................................................................................................12
3.2.1 Pressure control system overview and function..............................................13
3.2.2 Principle of a pressure control system ............................................................14
4Installation.........................................................................................15
4.1 Unpacking .....................................................................................................................15
4.2 Installation into the system............................................................................................16
4.2.1 Installation space condition.............................................................................17
4.2.2 Connection overview.......................................................................................18
4.2.3 Installation procedure......................................................................................19
4.3 Tightening torque ..........................................................................................................20
4.3.1 Mounting with centering rings .........................................................................20
4.3.2 Mounting with O-ring in grooves .....................................................................20
4.4 Admissible forces ..........................................................................................................21
4.5 Requirements to sensor connection..............................................................................22
4.6 Electrical connection......................................................................................................22
4.6.1 Ground connection..........................................................................................23
4.6.2 Sensor supply concepts..................................................................................24
4.6.3 Power and sensor connection ( 15 VDC sensors) with opt. SPS module ......25
4.6.4 DeviceNet interface connection.....................................................................26
4.7 Initial operation..............................................................................................................27
4.7.1 Setup procedure .............................................................................................27
4.7.2 DeviceNet®configuration................................................................................27
4.7.1 Valve configuration..........................................................................................29
4.7.2 Sensor configuration.......................................................................................29
4.7.3 ZERO..............................................................................................................30
4.7.4 LEARN............................................................................................................30
4.7.5 Tuning of control performance ........................................................................33
4.8 DeviceNet interface commands.....................................................................................38
4.8.1 Assembly objects............................................................................................38
4.8.2 Assembly object bit map.................................................................................39
4.8.3 Explicit messaging control commands............................................................41
4.8.4 Explicit messaging inquiry commands ............................................................43
4.8.5 Explicit messaging setup commands..............................................................49
5Operation...........................................................................................54
5.1 Introduction....................................................................................................................54

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5.1.1 Local operation................................................................................................55
5.1.2 Remote operation............................................................................................55
5.2 Close valve....................................................................................................................56
5.3 Open valve ....................................................................................................................56
5.4 Position control..............................................................................................................56
5.5 Pressure control.............................................................................................................57
5.5.1 Safety mode....................................................................................................57
5.5.2 Operation under increased temperature..........................................................57
5.6 Behaviour during power up............................................................................................58
5.7 Behavior in case of power failure...................................................................................58
5.8 Behavior In case of compressed air pressure drop........................................................58
5.9 Display information........................................................................................................59
6Trouble shooting .............................................................................. 61
7Maintenance...................................................................................... 64
7.1 Maintenance intervals....................................................................................................64
7.2 Maintenance procedures...............................................................................................65
7.2.1 Replacement of isolation seals and valve cleaning.........................................66
7.2.2 Replacement of actuator shaft seals...............................................................69
7.2.3 Replacement of Option board .........................................................................74
8Repairs .............................................................................................. 81
9Dismounting and Storage................................................................ 82
9.1Dismounting...................................................................................................................82
9.2 Storage..........................................................................................................................83
10 Packaging and Transport................................................................. 84
10.1 Packaging......................................................................................................................84
10.2 Transport.......................................................................................................................85
11 Disposal............................................................................................. 86
12 Spare parts........................................................................................ 87
12.1 Drawing .........................................................................................................................87
12.1.1 Valve unit with seals and grease.....................................................................88
12.1.2 Control and actuating unit ...............................................................................88
12.1.3 Accessories.....................................................................................................89
13 Appendix........................................................................................... 90

Series 650
DESCRIPTION OF PRODUCT
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1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.
made in Switzerland
Fabrication No.:
000..-....-..../....
A-......


Fabrication number
Order number
1.2 Use of product
This product is a throttling pendulum valve with isolation functionality. It is intended to use for
downstream pressure control applications.
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation
Description
CPA
Control Performance Analyzer
CV
Control view
PFO
Power Failure Option
SFS
Sensor Full Scale
SPS
Sensor Power Supply
ADC
Analog-to-digital converter
1.4 Related documents
Product Data Sheet
Dimensional Drawing
IOMI Heating device (if valve with heater)

DESCRIPTION OF PRODUCT
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1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example:
Refer to chapter: «Technical data» for detailed information.

Series 650
DESCRIPTION OF PRODUCT
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1.6 Technical data
1.6.1 Control and actuating unit
Control and actuating unit
Input voltage 1)
+24 VDC (±10%) @ 0.5 V pk-pk max.
[connector: POWER]
Power consumption
86 W
[connector: POWER]
Power input (DeviceNet®)
3 W max. (from DeviceNet®)
[DeviceNet® connector]
Sensor power supply output 2)
±15 VDC (±5%) / 1000 mA max.
[connector: SENSOR]
Sensor input
Signal input voltage / Input resistance
ADC resolution
Sampling time
0-10 VDC / Ri>100 kΩ (linear to
pressure)
0.23 mV
10 ms
[connector: SENSOR]
PFO3) battery pack
Charging time
Durability
2 minutes max.
up to 10 years @ 25°C ambient
refer to «Durability of power fail battery» for details
Compressed air supply
4 - 7 bar / 55 - 100 psi (above ATM)
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
5 mV or 0.1% of set point, whichever is greater
Position resolution / position control capability
13511 (full stroke)
Closing time throttling only
1.5 s typ.
Opening time throttling only
1.5 s typ.
Closing time throttling & isolation
5 s typ.
Opening time throttling & isolation
6 s typ.
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) PFO = Power Failure Option. Refer to «Behaviour in case of power failure» for details.

DESCRIPTION OF PRODUCT
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1.6.2 Valve unit
Valve unit
Pressure range at 20 C
1 x 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20 C
1 x 10E-9 mbar l/s
Leak rate valve seat at 20 C
1 x 10E-9 mbar l/s
Cycles until first service
- Isolation cycles (open - closed - open)
- Throttling cycles (open - max. throttle - open)
200’000 (unheated and under clean conditions)
1’000’000 (unheated and under clean conditions)
Admissible operating temperature
10°C to +150°C
Mounting position
horizontally only (valve seat to face chamber is
recommended)
Wetted materials
body
Aluminum AA6082 (3.2315)
pendulum plate
Aluminum AA6082 (3.2315)
sealing ring
Aluminum AA6082 (3.2315) 3.2315 (AA6082), 1.4306
(304L)
Other parts
Stainless steel 316L (1.4404 or 1.4435), 1.4122, 301
(1.4310), 304 (1.4303), 1.4571, A2 (304)
Seals
body
FKM (e.g. Viton®)
plate
FKM (e.g. Viton®)
rotary feed through atmosphere side
FKM (e.g. Viton®)
rotary feed through vacuum side
FKM (e.g. Viton®)
shaft feed through atmosphere side
FKM (e.g. Viton®)
shaft feed through vacuum side
FKM (e.g. Viton®)
bonnet
FKM (e.g. Viton®)
Max. differential pressure on plate during isolation
1200 mbar in either direction
Max. differential pressure on plate
during opening and throttling
5 mbar
Min. controllable conductance
(N2molecular flow)
30 l/s
Dimensions
Refer to dimensional drawing of specific valve ordering
number
(available on request)

Series 650
SAFETY
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2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

SAFETY
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2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label
Part No.
Location on valve
T-9001-156
On protective foil covering of
valve opening

Series 650
DESIGN AND FUNCTION
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3 Design and Function
3.1 Design
1
Plate seal
6
Integrated controller
2
Body seal
7
Rotary feed through seals
3
Shaft feed through seals
8
Pendulum plate
4
Bonnet seal
9
Sealing ring
5
Actuator
1 2 3 4
5
9 8 7
6

DESIGN AND FUNCTION
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3.2 Function
The valve plate acts, due to its pendulum motion, as a throttling element and varies the conductance
of the valve opening. The integrated controller calculates the required plate position to achieve the set
point pressure. Actuation is performed by a stepper motor. An encoder monitors the position. This
principle ensures fast and accurate process pressure control.
For opening or control the “sealing ring” is lifted pneumatically by “compressed air”, afterwards the
“pendulum plate” moves to open or do pressure control. For leak tight closing, the “sealing ring”
moves downwards and press the pendulum plate to valve body for “isolation”. Closing is performed by
“springs”.
“open /
pressure
control”
“isolation”
close
sealing ring
pendulum plate
“compressed air”
sealing ring
pendulum plate
springs

Series 650
DESIGN AND FUNCTION
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3.2.1 Pressure control system overview and function
Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences.
M
3
4
5
7
8
2
1
9
Q
pV
Seff
6
Example: Downstream control
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 HV Pump
Seff Q / p
Seff effective pump speed (ls-1)
Q Gas flow (mbar)
p Pressure (mbar)
or units used in USA
Seff = 12.7 •Q / p
Seff effective pump speed (ls-1)
Q Gas flow (sccm)
p Pressure (mTorr)

DESIGN AND FUNCTION
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3.2.1.1 Way of operation
The controller compares the actual pressure in the process chamber given by the pressure sensor
with the preset pressure. The controller uses the difference between actual and set pressure to
calculate the correct position of the control valve. The controller drives the control valve into the
correct position and the actual pressure again equals the set pressure.
This control operation is performed continuously. Pressure changes in the process chamber due to
leaks, desorption, gas flow, reaction products, variations in pumping speed etc. are always corrected
at once.
3.2.1.2 Pressure control
In a vacuum system which is pumped and into which gas is admitted at the same time, the pressure
can be controlled in two ways:
1. Downstream control (standard):
The pressure is controlled by changing the conductance of a control valve between pump and
process chamber. This changes the effective pumping speed at the process chamber. Pressure
and gas flow can be independently controlled over a wide range.
2. Upstream control:
The pressure is controlled by changing the gas flow into the process chamber, while the pumping
speed remains constant.
3.2.1.3 Adaptive controller (standard)
A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual
adjustments. This allows for a completely automatic operation of the system.
3.2.2 Principle of a pressure control system
1. Host computer sends
pressure set point
2. Controller reads actual
pressure from sensor
3. Optimizing module sends
new PID parameters
4. Actuator sets new valve
position
Host computer
(Example)
1.
4.
3.
2.

Series 650
INSTALLATION
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4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
NOTICE
Physical overstraining at controller
Inappropriate handling with the valve may cause in damage of controller.
Do not place the valve on the controller.
CAUTION
Valve is a heavy component
Physical overstraining.
Use a crane to lift valves DN 200 (8”) and larger.
Make sure that the supplied products are in accordance with your order.
Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Attach lifting device for valves DN 200 (8”) and larger. For attachment refer to dimensional drawing of
valve.
3. Lift the valve carefully and place it on a clean place.
Do not remove protective foils from valve opening

INSTALLATION
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4.2 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
WARNING
Valve in open position
Risk of injury when compressed air is connected to the valve.
Connect compressed air only when:
–valve is installed in the vacuum system
–moving parts cannot be touched
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.

Series 650
INSTALLATION
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4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air circulation
as shown in figure below.
100 mm

INSTALLATION
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4.2.2 Connection overview
System:
M
3
4
5
7
8
2
1
9
6
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 Pump
Controller:
Ground connection
DeviceNet® Interface connector

Series 650
INSTALLATION
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4.2.3 Installation procedure
1. Install valve [1] into the vacuum system. Valve seat side should face process chamber. The valve seat
side is indicated by the symbol " " on the valve flange.
2. Connect compressed air supply to connection labeled ‘IN’ located at actuator, see Figure 1 below.
Connect compressed air return line connection labeled ‘OUT’ located at actuator, see Figure 1 below.
3.Install the ground connection cable at controller. Refer to «Electrical connection»
4. Install pressure sensor(s) [4] according to the recommendations of the sensor manufacturer and
directives given under «Requirements to sensor connection».
5. Connect sensor cable [5] to sensor(s) and then to valve (connector: SENSOR).
Refer to chapter «Electrical connection» for correct wiring.
6. Connect valve to DeviceNet [7] (connector: INTERFACE). Refer to «DeviceNet schematics» for correct
wiring.
7. Connect power supply [8] to valve (connector: POWER). Refer to chapter «Electrical connection» for
correct wiring.
8. This valve has a double sealed rotary feed through and optionally an intermediate pumping port for the
actuator shaft. This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 2 below.
9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to
manual of respective heating device.
10. Perform «Setup procedure» to prepare valve for operation.
Fig. 1
Fig. 2
Do not tighten the flange screws stronger than indicated under «Tightening
torque».
Do not admit higher forces to the valve than indicated under «Admissible forces».
Make sure that enough space is kept free to do preventive maintenance work.
The required space is indicated on the dimensional drawing.
Compressed air pressure must be in the range of: 4 - 7 bar / 55 - 100 psi (above
ATM).
Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8“ ISO/NPT
internal threads.
65052-PAAP-0001 supports 1 sensor(s).
To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor
interlock is active and the valve enters the safety mode and is not operative. Refer
also to «Safety mode».
Without performing the setup procedure the valve will not be able to do pressure
control.
intermediate
pumping port
IN
OUT

INSTALLATION
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4.3 Tightening torque
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels
in the following tables.
4.3.1 Mounting with centering rings
ISO-F
ISO-F
Max. tightening torque
(Nm)
Max. tightening torque
(Lbs. ft.)
17-20
13-15
hole depth (mm)
hole depth (inch)
20
0.79
4.3.2 Mounting with O-ring in grooves
ISO-F
JIS
ASA-LP
ISO-F
JIS
ASA-LP
Max. tightening torque
(Nm)
Max. tightening torque
(Lbs. ft.)
65-70
115-
120
230-240
48-52
85-89
170-178
hole depth (mm)
hole depth (inch)
20
0.79
The torque values below are dependent on many factors, such as materials involved,
surface quality, surface treatment, and lubrication.
The torques below are valid if immersion depth of the mounting screws is at least
once the thread diameter (min. 1d), and the friction coefficient of the screw-flange
connection ( total = ( screw thread-helicoil + under screw head)/2) is bigger than 0.12. Lower
friction coefficients may damage the valve, as the resulting preload force gets too
high. Therefore for other friction coefficients the torque needs to be adapted. Please
review design guidelines for Helicoil-Screw connections and make sure that screws in
use are capable to withstand applied torques, are appropriate for the application and
are not too long. Too long screws may damage the valve, the immersion depth should
not exceed (hole depth –1 mm).
Refer to «Spare parts / Accessories» for centering rings ordering numbers.