VAT 95248-PAGI-0002 Assembly instructions

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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Butterfly Pressure Control Valve
with EtherCAT interface and
isolation valve control
sample picture
This manual is valid for the valve ordering number(s):
95248-PAGI-0002
configured with firmware 612C.1E.11
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
952 .. –....–. .../... .
A–.. ....
Fabrication number
Explanation of symbols:
Read declaration carefully before you start any other
action!
Keep body parts and objects away from the valve
opening!
Attention!
Hot surfaces; do not touch!
Loaded springs and/or air cushions are potential
hazards!
Wear gloves!
Disconnect electrical power and compressed air lines.
Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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Imprint
Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website
www.vatvalve.com
Phone
[phone]
Fax
[phone]
Email
[email protected]
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Copyright
© VAT Vakuumventile AG 2009
No part of these Instructions may be reproduced in any way (photocopies, microfilms or any
other reproduction processes) nor may it be manipulated with electronic systems, duplicated or
distributed without written permission from VAT. Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT firmware are
intended for use with VAT products. The VAT firmware contains a limited, time unlimited user
license. The VAT firmware may not be used for purposes other than those intended nor is it
permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies
of the VAT firmware to other people.
The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle
third parties to consider these names to be unprotected and to use them freely. This is in
accordance with the meaning of the laws and acts covering brand names and trademarks.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
3/81
Contents:
1Use of product........................................................................................................................................................... 5
1.1 Technical data.................................................................................................................................................. 6
1.1.1 Valve unit............................................................................................................................................. 7
2Installation................................................................................................................................................................. 8
2.1 Unpacking........................................................................................................................................................ 8
2.2 Installation into the system............................................................................................................................... 8
2.3 Tightening torque........................................................................................................................................... 10
2.3.1 Mounting with centering rings............................................................................................................ 10
2.3.2 Mounting with O-ring in grooves........................................................................................................ 10
2.4 Admissible forces........................................................................................................................................... 11
2.4.1 Admissible forces for valve body ....................................................................................................... 11
2.4.2 Admissible forces at controller........................................................................................................... 12
2.5 Requirements to sensor connection............................................................................................................... 13
2.6 Electrical connection...................................................................................................................................... 14
2.6.1 Ground connection ............................................................................................................................ 14
2.6.2 Sensor supply concepts..................................................................................................................... 15
2.6.3 Power and sensor connection (+24 VDC sensors)............................................................................ 16
2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module.............................. 18
2.6.5 EtherCAT interface connection.......................................................................................................... 20
2.6.6 Logic I/O connection.......................................................................................................................... 21
2.6.7 Digital input........................................................................................................................................ 22
2.6.8 Digital output...................................................................................................................................... 22
2.6.9 Service port connection..................................................................................................................... 22
2.6.10 Isolation valve control (IVC) connection............................................................................................. 23
3Operation................................................................................................................................................................ 24
3.1 Introduction.................................................................................................................................................... 24
3.1.1 Local operation.................................................................................................................................. 24
3.1.2 Remote operation.............................................................................................................................. 25
3.1.3 Safety mode....................................................................................................................................... 25
3.1.4 Service indication............................................................................................................................... 25
3.2 Operation under increased temperature ........................................................................................................ 25
3.3 Behaviour during power up ............................................................................................................................ 25
3.4 Behavior in case of power failure................................................................................................................... 26
3.5 Display information......................................................................................................................................... 26
3.5.1 EtherCat LEDs................................................................................................................................... 28
3.6 Setup procedure............................................................................................................................................. 29
3.6.1 EtherCAT configuration ..................................................................................................................... 30
3.6.2 LOGIC I/O configuration.................................................................................................................... 39
3.6.3 Valve and sensor configuration.......................................................................................................... 40
3.6.4 ZERO................................................................................................................................................. 41
3.6.5 LEARN............................................................................................................................................... 42
3.7 Behaviour of isolation valve............................................................................................................................ 44
3.8 Close valve .................................................................................................................................................... 44
3.9 Open valve..................................................................................................................................................... 44
3.10 Position control............................................................................................................................................... 44
3.11 Pressure control............................................................................................................................................. 45
3.11.1 Tuning of control performance........................................................................................................... 46
3.12 EtherCAT interface (General) ........................................................................................................................ 50
3.13 EtherCAT interface (Process data –cyclic communication)........................................................................... 50
3.13.1 OUTPUT Buffer (Master PLC)........................................................................................................... 50
3.13.2 INPUT Buffer (Master PLC)............................................................................................................... 53
3.14 EtherCAT interface (Parameter data –acyclic communication)..................................................................... 58
3.14.1 EtherCAT Object dictionary............................................................................................................... 58
3.15 Communication and timing control between Master (PLC) and Slave (VAT-Valve)....................................... 62
3.16 PRESSURE and SENSOR READING allocation........................................................................................... 63

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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4Trouble shooting ..................................................................................................................................................... 64
4.1 Additional EtherCAT warning......................................................................................................................... 66
5Maintenance & repairs............................................................................................................................................ 67
5.1 Maintenance procedures................................................................................................................................ 68
5.2 Option board .................................................................................................................................................. 73
5.2.1 Durability of power fail battery............................................................................................................ 73
5.2.2 Retrofit / replacement procedure ....................................................................................................... 74
6Drawing................................................................................................................................................................... 78
7Spare parts ............................................................................................................................................................. 79
7.1 Control and actuating unit.............................................................................................................................. 79
7.2 Valve unit....................................................................................................................................................... 79
7.3 Seals and grease........................................................................................................................................... 79
7.4 Accessories.................................................................................................................................................... 80
7.4.1 Centering ring with Viton o-ring.......................................................................................................... 80
8Warranty ................................................................................................................................................................. 81

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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1 Use of product
This product is a Butterfly control valve for downstream pressure control in vacuum systems.
Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only!
Other applications are only allowed with the written permission of VAT.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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1.1 Technical data
Control and actuating unit
Input voltage 1)
+24 VDC (±10%) @ 0.5 V pk-pk max.
[connector: POWER]
Power consumption
38 W
[connector: POWER]
Sensor power supply output 2)
+24 VDC / 1500 mA max.
[connector: SENSOR]
Sensor input
Signal input voltage / Input resistance
ADC resolution
Sampling time
0-10 VDC / Ri>100 kΩ (linear to pressure)
0.23 mV
10 ms
[connector: SENSOR]
Digital inputs 3)
±24 VDC max.
[connector: INTERFACE]
Digital outputs 3)
Input voltage
Input current
Breaking capacity
70 VDC or 70 V peak max.
0.5 ADC or 0.5 A peak max.
10 W max.
[connector: INTERFACE]
Analog outputs 3) (optional)
0-10 VDC / 1 mA max.
[connector: INTERFACE]
PFO4) battery pack
Charging time
Durability
2 minutes max.
up to 10 years @ 25°C ambient
refer to «Durability of power fail battery» for details
Ambient temperature
0 °C to +50 °C max. (<35 °C recommended)
Pressure control accuracy
0.1% of sensor full scale
Position resolution / position control capability
20000 (full stroke)
Actuating time
closing
0.3 s typ.
opening
0.3 s typ.
Utilizable valve torque
2.5 Nm
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) Refer to chapter «Schematics» for details.
4) PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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1.1.1 Valve unit
Valve unit
Pressure range at 20 C
1 x 10E-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20 C
1 x 10E-9 mbar l/s
Cycles until first service
2’000’000 (unheated and under clean conditions)
Admissible operating temperature
10°C to +150°C
Mounting position
Any.
Control unit for ISO-KF version needs support when mounted on horizontal
piping and control unit does not hang.
Wetted materials
- Body
Aluminium AA6082 (3.2315)
- Plate
Aluminium AA6082 (3.2315)
- Shaft
Stainless steel 316L (1.4404 or 1.4435 )
- Plate screws
- Rotary feedthrough seals atmosphere side
Stainless steel 316L (A4)
Viton
- Rotary feedthrough seals vacuum side
Viton
- Slide bearing for shaft
iglidur®X
Max. differential pressure on plate
100mbar
Min. controllable conductance (Cmin)
[N2molecular flow]
5 l/s
Conductance in open position [N2molecular flow]
15000 l/s
Dimensions
Refer to dimensional drawing of specific valve ordering number
(available on request)

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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2 Installation
2.1 Unpacking
Valves DN63 / 2½" and larger must not be lifted solely by the actuator.
2.2 Installation into the system
Fingers and objects must be kept out of the valve opening and away from moving parts.
The valve plate starts to move just after power is supplied.
Do not connect or disconnect sensor cable when device is under power.
Connection overview: Connectors at controller panel:
EtherCAT connection Ground connection

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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1. Install valve [1] into the vacuum system.
Caution: Do not tighten the flange screws stronger than indicated under «Tightening torque».
Caution: Do not admit higher forces to the valve than indicated under «Admissible forces».
Note: Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated
on the dimensional drawing.
Note: Control unit of valves with ISO-KF flanges (612 . . –K. . . ) needs support when mounted on horizontal piping
and control unit does not hang.
2. Install the ground connection cable at controller. Refer to «Electrical connection»
3. Install sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under
«Requirements to sensor connection».
4. Connect pressure sensor cable [3] to sensor(s) and then to valve (connector: SENSOR). Refer to chapter «Electrical
connection» for correct wiring.
Note: 95248-PAGI-0002 supports 1 sensor(s).
5. Connect valve to remote control unit [4] (connector: EtherCat and LOGIC I/O). Refer to «EtherCAT connection» for
correct wiring.
6. Connect power supply [5] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring.
Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the
valve enters the safety mode and is not operative. Refer also to «Safety mode».
7. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of
respective heating device.
8. Perform «Setup procedure» to prepare valve for operation.
Note: Without performing the setup procedure the valve will not be able to do pressure control.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.3 Tightening torque
Note:
The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment,
and lubrication.
The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and
the friction coefficient of the screw-flange connection ( total = (screw thread-helicoil + under screw head)/2) is bigger than 0.12. Lower
friction coefficients may damage the valve, as the resulting preload force gets too high. Therefore for other friction
coefficients the torque needs to be adapted. Please review design guidelines for Helicoil-Screw connections and make sure
that screws in use are capable to withstand applied torques, are appropriate for the application and are not too long. Too
long screws may damage the valve, the immersion depth should not exceed (hole depth –1 mm).
Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following
tables.
2.3.1 Mounting with centering rings
ISO-F
ISO-F
max. tightening torque
(Nm)
max. tightening torque
(lbs . ft)
17 –20
13 –15
hole depth (mm)
hole depth (inch)
See dimensional drawing
See dimensional drawing
Refer to «Spare parts / Accessories» for centering rings ordering numbers.
2.3.2 Mounting with O-ring in grooves
ISO-F
JIS
ASA-LP
ISO-F
JIS
ASA-LP
max. tightening torque
(Nm)
max. tightening torque
(lbs . ft)
35-40
65-70
80-90
26-30
48-52
59-67
hole depth (mm)
hole depth (inch)
See dimensional drawing
See dimensional drawing

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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2.4 Admissible forces
2.4.1 Admissible forces for valve body
Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve. The
stress has to be relieved by suitable means. The following forces are admissible:
Axial tensile or
compressive force «FA»
Bending moment «M»
N
lb.
Nm
lbf.
1200
264
60
45
FA
M

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.4.2 Admissible forces at controller
Attention!
Do not pushing, shocking load, or stressing the valve controller!
Do not deposit anything at valve controller!
The admissible force at valve controller in regards to the pedestal is shown in table below. In case higher force is
applied, the pedestal could be permanently damaged!
Admissible force «F»
Overview
F= Force
a = middle of aluminium part of controller (b / 2)
400 N
b
pedestal
a
a
F
b
a
a
F
pedestal

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
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2.5 Requirements to sensor connection
To achieve fast and accurate pressure control a fast
sensor response is required.
Sensor response time: < 50ms
The sensor is normally connected to the chamber by a
pipe. To maintain that the response time is not degraded
by this connection it needs to meet the following
requirements:
Inner diameter of connection pipe: > = 10 mm
Length of connection pipe: < = 300 mm
These conductance guidelines must include all valves and
limiting orifices that may also be present.
Make also sure that there is no obstruction in front of
sensor connection port inside the chamber.
The sensor should also be mounted free of mechanical
shock and vibration.
Dynamic stray magnetic fields may introduce noise to
sensor output and should be avoided or shielded.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.6 Electrical connection
2.6.1 Ground connection
Recommendation for ground strap between controller and system (chassis)
Material
L (Length max.)
B1 (min.)
B2 (min.)
d1 ( )
d2 ( )
copper tinned
200 mm
25 mm
25 mm
4.5 mm
customized
Note: Connection plates of ground strap must be total plane for a good electrical contact!
Note: The connection point at chassis (FE) must be blank metal (not coated).
It is also possible to connect the ground strap at system chamber if it is well connected to PE.
Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap)
Valve controller
System
Ground connection
Chassis (FE)
(Functional Earth)
B1
B2
d2
L
Ground strap
PE
Recommended torque: 1,3…1,7Nm
d1

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
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2012-04-23
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2.6.2 Sensor supply concepts
This valve offers 2 alternative concepts to supply the sensor(s) with power. This depends on the sensor type that is used.
Optional is this valve available with an sensor power supply module (SPS) that converts 15 VDC from the 24 VDC.
Concepts:
External + 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC
sensors. Refer to chapter «Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring.
External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supply 15 VDC
sensors. Refer to chapter «Power and sensor connection ( 15 VDC sensors) without optional SPS module» for
schematic and correct wiring.
Valve versions:
612 . . - . . G. - . . . . and 612 . . - . . H. - . . . . SPS module not included
Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.6.3 Power and sensor connection (+24 VDC sensors)
[612 . . - . . G. - . . . . / 612 . . - . . H. - . . . . versions recommended]
2.6.3.1 Sensor power wiring via controller
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor
interlock to prevent valve from moving.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.6.3.2 Sensor power wiring external
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor
interlock to prevent valve from moving.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.6.4 Power and sensor connection ( 15 VDC sensors) without optional SPS module
[612 . . - . . G. - . . . . / 612 . . - . . H. - . . . . versions only]
2.6.4.1 Sensor power wiring via controller
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor
interlock to prevent valve from moving.
Fuse 1A
Fuse 1A

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
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2012-04-23
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2.6.4.2 Sensor power wiring external
Note:
Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not
connect other pins, that may damage power supply or controller!
Connector: Use only screws with 4-40UNC thread for fastening the connectors!
Pins 4 and 8 must be bridged for operation!
An optional switch would allow for motor
interlock to prevent valve from moving.

Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10”), EtherCAT
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel [phone] Fax [phone] [email protected] www.vatvalve.com
282408EB
2012-04-23
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2.6.5 EtherCAT interface connection
The EtherCAT interface is galvanic isolated from control unit.
2.6.5.1 EtherCAT installation (example)
2.6.5.2 EtherCAT network and cable
Connector type: RJ45 standard connector
Cable: CAT5, 6 or 7 STP (shielded twisted pair), not crossover
Note: Cable length between Master and Slaves max. 100 m.
Note: For all detail information about EtherCAT refer to EtherCAT homepage: http://www.ethercat.org/
RJ45
OUT
Connector
housing
Cable
C = 1nF/2kV
R = 1MΩ
PE = Protective Earth
Master (Slave X)
VAT Valve
Slave X
optional
RJ45
RJ45
RJ45
OUT
IN
IN
Cable