VAT 620 Series Assembly instructions

Installation, Operating &
Maintenance Instructions
1003735EB.DOCX Edition 2020-01-08
Control Angle Valve
Series 620
DN 100 (I.D. 4")
This manual is valid for the following product ordering numbers
62040-QE52-….
62040-XE52-….
Sample picture

Series
620
2/26 Edition 2020-01-08 1003735EB.DOCX
Imprint
Manufacturer
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Website:
Phone:
Fax:
Email:
www.vatvalve.com
[phone]
[phone]
[email protected]
Publisher
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Editor
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Print
VAT Vakuumventile AG, CH
-
9469 Haag, Switzerland
Copyright
©
VAT Vakuumventile AG
2020
No part of these Instructions may be reproduced in any way (photocopies,
microfilms or any other reproduction processes) nor may it be manipulated with
electronic systems, duplicated or distributed without written permission from VAT.
Offenders are liable to pay damages.
The original VAT firmware and updated state of the art versions of the VAT
firmware are intended for use with VAT products. The VAT firmware contains a
limited, time unlimited user license. The VAT firmware may not be used for
purposes other than those intended nor is it permitted to make copies of the VAT
firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to
other people.
The use of trade names, brand names, trademarks, etc. in these Instructions
does not entitle third parties to consider these names to be unprotected and to
use them freely. This is in accordance with the meaning of the laws and acts
covering brand names and trademarks.

Series 620
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Contents
1 Description of product........................................................................4
1.1 Identification of product ...................................................................................................4
1.2 Use of product.................................................................................................................4
1.3 Used abbreviations..........................................................................................................4
1.4 Related documents..........................................................................................................4
1.5 Important information.......................................................................................................4
1.6 Technical data of valve unit.............................................................................................5
2 Safety ...................................................................................................6
2.1 Compulsory reading material...........................................................................................6
2.2 Danger levels ..................................................................................................................6
2.3 Personnel qualifications...................................................................................................7
2.4 Safety labels....................................................................................................................7
3 Design and Function...........................................................................8
3.1 Design.............................................................................................................................8
3.2 Function of valve.............................................................................................................8
4 Installation...........................................................................................9
4.1 Unpacking .......................................................................................................................9
4.2 Installation of valve into the system...............................................................................10
4.2.1 Installation example – chamber / pump (preferred layout)..............................11
4.2.2 Installation procedure......................................................................................12
4.3 Admissible forces..........................................................................................................13
5 Operation...........................................................................................14
6 Maintenance ......................................................................................15
6.1 Maintenance intervals....................................................................................................15
6.2 Maintenance procedures...............................................................................................16
6.2.1 Replacement of plate and bonnet seals and valve cleaning ...........................17
7 Repairs...............................................................................................19
8 Dismounting and Storage.................................................................20
8.1 Dismounting ..................................................................................................................20
8.2 Storage..........................................................................................................................21
9 Packaging and Transport.................................................................22
9.1 Packaging......................................................................................................................22
9.2 Transport.......................................................................................................................22
10 Disposal.............................................................................................23
11 Spare parts ........................................................................................24
11.1 Overview .......................................................................................................................24
11.2 Accessories...................................................................................................................24
12 Appendix............................................................................................25

DESCRIPTION OF PRODUCT Series
620
4/26 Edition 2020-01-08 1003735EB.DOCX
1 Description of product
1.1 Identification of product
The fabrication number and order number are fixed on the product directly or by means of an
identification plate.
Fabrication No.:
000 . .- . . . .- . . . ./ . . . .
A - . . . . . .


Fabrication number
Order number
1.2 Use of product
Use product for clean and dry vacuum applications only. Other applications are only allowed with the
written permission of VAT.
1.3 Used abbreviations
Abbreviation Description
CPA Control Performance Analyzer
EC External Controller
PFO Power Fail Option
1.4 Related documents
• Product data sheet
• Dimensional drawing
• Manual of heating device
1.5 Important information
This symbol points to a very important statement that requires particular attention.
Example:
Refer to chapter: «Technical data» for detailed information.

Series 620 DESCRIPTION OF PRODUCT
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1.6 Technical data of valve unit
Data
Pressure range at 20 °C 1 × 10-8 mbar to 1.2 bar (abs)
Leak rate to outside at 20 °C < 1 x 10-9 mbar l/s
Leak rate valve seat (local) at 20 °C < 1 x 10-9 mbar l/s
Max. differential pressure on plate during isolation 1.0 bar (in opening direction)
1.1 bar (in closing direction)
Max. differential pressure on plate during opening 1 bar (in either direction)
Cycles until first service (unheated and under clean
conditions)
- Pressure control (open - max. throttle - open)
- Closing / opening
1’000’000
200’000
Admissible operating temperature 10°C to +80°C
Mounting position Any
Process side
materials body Stainless steel 316L (1.4404)
plate Stainless steel 316L (1.4404)
bellows Stainless steel 316Ti (1.4571)
Seals bonnet seal
FKM (e.g. Viton
®
)
plate
FKM (e.g. Viton
®
)
Max. controllable conductance (N
2
molecular flow) 400 l/s
Min. controllable conductance (N
2
molecular flow) 0.2 l/s
Full stroke 30 mm
Actuating time Throttling
(pressure / position control)
0% -> 100% or 100% -> 0% 2 s typ.
Close
0% -> isolated
0% -> close signal
100% -> isolated
100% -> close signal
0.6 s typ.
1.1 s typ.
1.4 s typ.
1.9 s typ.
Open
0% -> 100% 0.8 s typ.
Controller External control unit (EC2)
Weight approx. 11 kg
Dimensions Refer to dimensional drawing (available on request)

SAFETY Series
620
6/26 Edition 2020-01-08 1003735EB.DOCX
2 Safety
2.1 Compulsory reading material
Read this chapter prior to performing any work with or on the product. It contains important information
that is significant for your own personal safety. This chapter must have been read and understood by
all persons who perform any kind of work with or on the product during any stage of its serviceable
life.
NOTICE
Lack of knowledge
Failing to read this manual may result in property damage.
Firstly, read manual.
These Installation, Operating & Maintenance Instructions are an integral part of a
comprehensive documentation belonging to a complete technical system. They must
be stored together with the other documentation and accessible for anybody who is
authorized to work with the system at any time.
2.2 Danger levels
DANGER
High risk
Indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
WARNING
Medium risk
Indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
CAUTION
Low risk
Indicates a hazardous situation which, if not avoided, may result in minor or moderate
injury.
NOTICE
Command
Indicates a hazardous situation which, if not avoided, may result in property damage.

Series 620 SAFETY
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2.3 Personnel qualifications
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
2.4 Safety labels
Label Part No. Location on valve
T-9001-155 (crushing hazard) On flange protection covering
the valve opening

DESIGN AND FUNCTION Series
620
8/26 Edition 2020-01-08 1003735EB.DOCX
3 Design and Function
3.1 Design
Sample picture
1 Valve body 3 Bellows 5 Bonnet
2 Plate seal 4 Bonnet seal 6 Cover
Valve seat side
3.2 Function of valve
The valve plate acts as a throttling element and varies the conductance of the valve opening. The
controller calculates the required plate position to achieve the set point pressure. Actuation is
performed by one synchronous stepper motor. Encoder monitors the position. This principle ensures
fast and accurate process pressure control.
1
6
2
3
4
5

Series 620 INSTALLATION
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4 Installation
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
4.1 Unpacking
• Make sure that the supplied products are in accordance with your order.
• Inspect the quality of the supplied products visually. If it does not meet your
requirements, please contact VAT immediately.
• Store the original packaging material. It may be useful if products must be returned
to VAT.
1. Open the transport case and remove inside packing material as far as necessary.
2. Lift the valve carefully and place it on a clean place.
Do not remove protective covering from valve opening

INSTALLATION Series
620
10/26 Edition 2020-01-08 1003735EB.DOCX
4.2 Installation of valve into the system
CAUTION
Valve opening
Risk of injury.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Wrong connection
Wrong connection may result in damage of valve, controller or power supply.
Connect all cables exactly as shown in the following schematic.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected against contamination.
Always wear clean room gloves when handling the valve.
•
Make sure that the sealing surfaces of the valve and the chamber are undamaged.
• Mount valve to a clean system only.

Series 620 INSTALLATION
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4.2.1 Installation example – chamber / pump (preferred layout)
Sample picture
Chamber
Pump
Control
angle valve [1]
Valve cable [3]
Controller
[2]

INSTALLATION Series
620
12/26 Edition 2020-01-08 1003735EB.DOCX
4.2.2 Installation procedure
All numbers in brackets refer to chapter «Installation example – chamber / pump».
1. Remove protective covering from body flanges.
2. Install the valve [0] into the vacuum system.
Valve flange type: EVAC ISO Tapered
TM
62040-QE52-…. Valve flange type: ISO-K 62040-XE52-….
Use chain clamp for flange «EVAC ISO
Tapered
TM
»
Tightening torque depends on exact type of chain
clamp. Follow recommendation of chain clamp
manufacturer.
Use 8 pieces of clamp for ISO-K flange DN100
Tightening torque depends on type and material
of clamp and screw. Follow recommendation of
chain clamp manufacturer.
• The valve seat side is indicated by the symbol «∆». Refer to chapter «Design» or
dimensional drawing.
• Do not admit higher forces to the valve than indicated under «Admissible forces».
• Make sure that enough space is kept free to do preventive maintenance work. The
required space is indicated on the dimensional drawing
3. Cover flanges with appropriate insulation material (not part of the valve) to prevent injuries and
heat loss.
4. Install all electrical connections at External Controller [2] according to «External Controller
manual».
5. Connect cables (Power and Sensor) of bellows heater according to chapter «Installation of
bellows heater into the system »
6. Connect cables (Power and Sensor) of jacket heater according to «Manual of heating device»
(not content of this manual).

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4.3 Admissible forces
NOTICE
Force at valve body
Forces from the weight of other components can lead to deformation of the valve body
and to malfunction of the valve.
Do not higher force the valve body as specified.
The following forces are admissible.
Axial tensile or compressive
force «F
A
» Bending moment «M»
F
A
F
A
M
N lb. Nm Lbf
500 112 54 40

OPERATION Series
620
14/26 Edition 2020-01-08 1003735EB.DOCX
5 Operation
NOTICE
Damage during heat up ramp and cool down
If valve is closed and fan not running then valve may get damaged.
Make sure that valve is in open position and fan running.
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
WARNING
Electric shock
Electrical shock may get result in death or serious injury.
Operation is allowed only if all protective covers of heating device are closed and no
parts under voltage could be reached.
CAUTION
Valve opening
Risk of injury.
Do not operating before the valve is installed complete into system.
CAUTION
Hot valve
Heated valve may result in minor or moderate injury.
Do not touch valve and heating device during operation. Once heating is switched off
(valve and system) await until the valve is cooled down complete (<25°C) before doing
any work.
NOTICE
Overheating
Do not cover the ventilation grid.
If ventilation grid is covered the valve motor may be damaged.
For «Operation of valve» refer to «External Controller manual»
If you need any further information, please contact one of our service centers. You will find the
addresses on our website www.vatvalve.com.

Series 620 MAINTENANCE
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6 Maintenance
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of the valve opening and away from moving parts.
Disconnect power on controller before doing any work.
CAUTION
Hot valve
Heated valve may result in minor or moderate injury.
Do not touch valve and heating device during operation. Once heating is switched off
(valve and system) await until the valve is cooled down complete (<25°C) before doing
any work
NOTICE
Damage during heat up ramp and cool down
If valve is closed and fan not running then valve may get damaged.
Make sure that valve is in open position and fan running.
NOTICE
Contamination
Gate and other parts of the valve might have been contaminated during usage.
Always wear protective gloves when handling the valve.
NOTICE
Cleanliness
Gate and other parts of the valve must be protected from contamination during service.
Always wear clean room gloves when handling the valve.
6.1 Maintenance intervals
Under clean operating conditions, the valve does not require any maintenance during the specified
cycle life. Contamination from the process may influence the function and requires more frequent
maintenance.

MAINTENANCE Series
620
16/26 Edition 2020-01-08 1003735EB.DOCX
6.2 Maintenance procedures
NOTICE
Damage during service
If valve is closed during service procedure valve may get damaged.
Make sure that PFO is deactivated and valve is in open position before starting service
procedure.
One maintenance procedure is defined for this valve:
• Replacement of plate seal, bonnet seal and valve cleaning
Required frequency of cleaning and replacement of seals is depending on process
conditions.
For spare parts of plate and bonnet seal refer to chapter: «Spare parts».
To deactivate PFO refer to «External Controller manual».

Series 620 MAINTENANCE
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6.2.1 Replacement of plate and bonnet seals and valve cleaning
6.2.1.1 Required tools
• Allen Wrench No. 6 (Allen torque wrench No. 6)
• Clean room wiper
• Isopropyl alcohol
• O-ring removal tool (see chapter Accessories)
Description Required tool
1. Obey the safety advice!
2. Open the valve
3. Switch OFF PFO
4. Switch OFF power to the valve
5. Disconnect valve cable
6. Loosen 4 screws
Allen wrench
No. 6
7. Remove actuator unit with bellows
from valve body
8. Remove plate O-ring (1) and bonnet
O-ring (2)
O-ring removal
tool

MAINTENANCE Series
620
18/26 Edition 2020-01-08 1003735EB.DOCX
Description Required tool
9. Clean the O-ring grooves
Clean room
wiper soaked
with isopropyl
alcohol
10. Install the new bonnet and plate
O-rings
For new O-rings refer to
chapter: «Spare parts».
11. Assemble actuator unit with bellows
into valve body in reverse order.
12. Fasten the bonnet screws with
14.5 Nm (crosswise)
Allen torque
wrench No. 6
13. Connect valve cable
14. Switch ON power to the valve
15. Switch ON PFO

Series 620 REPAIRS
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7 Repairs
Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is
allowed to carry out the repairs, but only with the prior consent of VAT.
Please contact one of our service centers. You will find the addresses on our website
www.vatvalve.com.

DISMOUNTING AND STORAGE Series
620
20/26 Edition 2020-01-08 1003735EB.DOCX
8 Dismounting and Storage
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
WARNING
Harmful substances
Risk of injury in case of contact with harmful substances.
Remove harmful substances (e. g. toxic, caustic or microbiological ones) from valve
before you return the valve to VAT.
8.1 Dismounting
NOTICE
Damage during cool down
If valve is closed and fan not running then valve may get damaged.
Make sure that valve is in open position and fan running.
NOTICE
Contamination
Gate and other parts of the valve might have been contaminated during usage.
Always wear protective gloves when handling the valve.
NOTICE
Valve in open position
Valve seat may become damaged if valve gate is in open position.
Move valve gate to the closed position before dismounting the valve.
CAUTION
Hot valve
Heated valve may result in minor or moderate injury.
Do not touch valve and heating device during operation. Once heating is switched off
(valve and system) await until the valve is cooled down complete (<25°C) before doing
any work
1. Close the valve.
2. For dismounting the valve please follow the instructions of chapter «Installation», however in
reverse order.