Aerotech ANT95XY Series User manual

Revision: 1.04.00
ANT95XY Hardware Manual

Global Technical Support
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website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
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Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2010-2019, Aerotech, Inc., All rights reserved.

ANT95XY Hardware Manual Table of Contents
Table of Contents
ANT95XY Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
Chapter 2: Mechanical Specifications and Installation 13
2.1. Unpacking and Handling the Stage 13
2.2. Dimensions 14
2.3. Securing the Stage to the Mounting Surface 17
2.4. Attaching the Payload to the Stage 19
Chapter 3: Electrical Specifications and Installation 21
3.1. Motor and Feedback Connectors 22
3.2. Motor and Feedback Wiring 24
3.3. Motor and Feedback Specifications 25
3.4. Limits, Marker, and Machine Direction 27
3.5. Motor and Feedback Phasing 28
Chapter 4: Maintenance 31
4.1. Service and Inspection Schedule 31
4.2. Cleaning and Lubrication 32
4.3. Troubleshooting 33
Appendix A: Warranty and Field Service 35
Appendix B: Revision History 37
Index 39
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Table of Contents ANT95XY Hardware Manual
List of Figures
Figure 2-1: Shipping Clamps 13
Figure 2-2: ANT95XY-025 Dimensions 14
Figure 2-3: ANT95XY-050 Dimensions 15
Figure 2-4: ANT95XY-025 Mounting Plate (-MP) Dimensions 16
Figure 2-5: ANT95XY-050 Mounting Plate (-MP) Dimensions 16
Figure 2-6: Mounting Hole Pattern 18
Figure 2-7: Cantilevered Load Capabilities 20
Figure 3-1: Motor and Feedback Wiring 24
Figure 3-2: Machine Direction 27
Figure 3-3: Hall Phasing 28
Figure 3-4: Analog Encoder Phasing Reference Diagram 29
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 29
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ANT95XY Hardware Manual Table of Contents
List of Tables
Table 1-1: ANT95XY Model Numbering System 9
Table 1-2: Environmental Specifications 10
Table 1-3: ANT95XY Series Specifications (-025 and -050) 11
Table 2-1: Stage to Mounting Surface Hardware 17
Table 3-1: Motor and Feedback Pinouts 23
Table 3-2: Feedback Specifications 25
Table 3-3: Motor Specifications 26
Table 3-4: Encoder Specifications 26
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Table of Contents ANT95XY Hardware Manual
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the ANT95XY. Read all parts of this
manual before you install or operate the ANT95XY or before you do maintenance to your system. To prevent
injury to you and damage to the equipment, obey the precautions in this manual. The precautions that follow
apply when you see a Danger or Warning symbol in this manual. If you do not obey these precautions, injury
to you or damage to the equipment can occur. If you do not understand the information in this manual,
contact Aerotech Global Technical Support
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ANT95XY and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ANT95XY stage must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
5. Use care when moving the ANT95XY stage. Lifting or transporting the ANT95XY stage
improperly can result in injury or damage to the ANT95XY.
6. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
7. Operators must be trained before operating this equipment.
8. All service and maintenance must be performed by qualified personnel.
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ANT95XY Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT95XY Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, i.e., as a whole, including the equipment referred to in this
Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 3/26/2019
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ANT95XY Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ANT95XY Model Numbering System
ANT95XY Two-Axis XYDirect-Drive Nanopositioning Stage
Travel (Required)
-025 25 mm travel
-050 50 mm travel
Mounting Plate (Optional)
-MP Mounting plate
Performance Grade (Required)
-PL1 Base performance
-PL3 High-accuracy performance, PLUS
-PL4 Ultra high-accuracy performance, ULTRA
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Overview ANT95XY Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The ANT95XY stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the ANT95XY. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ANT95XY
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the ANT95XY is
mounted. Contact the factory for more details.
The thermal expansion coefficient of the encoder scale is 3.25 ppm/°C. Travel will increase or decrease at
this rate as the temperature of the encoder scale temperature deviates from 20°C (68°F).
The accuracy specification of ANT95XY series stages is measured 25 mm above the table with the stage in
an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
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ANT95XY Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT95XY Series Specifications (-025 and -050)
ANT95XY-025 ANT95XY-050
-PL1(2) -PL3(1,2) -PL4(1,2) -PL1(2) -PL3(1,2) -PL4(1,2)
Travel 25 mm 50 mm
Accuracy(2,3) ±2.5
µm ±250 nm ±250 nm ±2.5 µm ±250 nm ±250 nm
Resolution (Minimum Incremental
Motion) 1 nm 1 nm
Bidirectional Repeatability(3) ±100
nm ±75 nm ±75 nm ±100 nm ±75 nm ±75 nm
Unidirectional Repeatability(3) ±25 nm ±25 nm
Straightness(3) ±1.0
µm ±1.0 µm ±250 nm ±1.0 µm ±1.0 µm ±250 nm
Flatness(3) ±1.0 µm ±1.0 µm
Pitch 49 µrad (10 arc sec) 49 µrad (10 arc sec)
Roll 49 µrad (10 arc sec) 49 µrad (10 arc sec)
Yaw 24 µrad (5 arc sec) 24 µrad (5 arc sec)
Orthogonality
49 µrad
(10 arc
sec)
15 µrad
(3 arc
sec)
4.8 µrad
(1 arc
sec)
49 µrad
(10 arc
sec)
15 µrad
(3 arc
sec)
4.8 µrad
(1 arc
sec)
Maximum Speed(4) (upper axis) 500 mm/s 500 mm/s
Maximum Acceleration (No Load,
upper axis)(4) 4.5 g - 45 m/s22.75 g - 27 m/s2
In-Position Stability(5) <1 nm <1 nm
Maximum Force (continuous) 7.75 N 9.5 N
Load Capacity
(horizontal)(6) 4.0 kg 6.0 kg
Moving Mass Upper Axis 0.45 kg 0.8 kg
Lower Axis 1.13 kg 2.1 kg
Stage Mass 1.8 kg 3.2 kg
Material Aluminum Body/Black Hardcoat Finish
Mean Time BetweenFailure 20,000 Hours
1. Requires the use of an Aerotech controller.
2. Specifications for -PL1 and -PL3options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY
measured 25 mm above the tabletop.
3. Certified with each stage.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. In-position jitter listing is 3 sigma value.
6. Axis orientation for on-axis loading is listed.
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Overview ANT95XY Hardware Manual
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ANT95XY Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : ANT95XY installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the ANT95XY. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the ANT95XY. Use care when
moving the ANT95XY.
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the ANT95XYfrom its protective shipping container. Gently set the ANT95XY on a
smooth, flat, and clean surface.
Before operating the ANT95XY, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each ANT95XY has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Clamps
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion and potential
damage from occurring during shipment. The brackets must be removed before the ANT95XY can be
operated. Retain the brackets and hardware for future use.
Figure 2-1: Shipping Clamps
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Mechanical Specifications and Installation ANT95XY Hardware Manual
2.2. Dimensions
Figure 2-2: ANT95XY-025 Dimensions
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ANT95XY Hardware Manual Mechanical Specifications and Installation
Figure 2-3: ANT95XY-050 Dimensions
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Mechanical Specifications and Installation ANT95XY Hardware Manual
Figure 2-4: ANT95XY-025 Mounting Plate (-MP) Dimensions
Figure 2-5: ANT95XY-050 Mounting Plate (-MP) Dimensions
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ANT95XY Hardware Manual Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The ANT95XY must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ANT95XY stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 1 µm per 50 mm.
N O T E : The ANT95XY is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ANT95XY. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
Access the mounting holes in the base of the ANT95XY stage by sliding the carriage all the way to either end
of travel (as shown in Figure 2-6).
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for your
mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw Torque
M4 by 8 mm [#8 by 3/8 in] SHCS 2.3 N·m
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Mechanical Specifications and Installation ANT95XY Hardware Manual
Figure 2-6: Mounting Hole Pattern
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ANT95XY Hardware Manual Mechanical Specifications and Installation
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Chapter 3 and the documentation delivered with the stage.
N O T E : If your ANT95XY was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ANT95XY is started
up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : Use 3-point mounting, if possible, when attaching the payload to the stage.
N O T E : For valid system performance, the mounting interface should be flat within 5 µm.
W A R N I N G : Refer to the dimensions in Section 2.2. for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage.
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Mechanical Specifications and Installation ANT95XY Hardware Manual
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
If cantilevered loads are applied, refer to Figure 2-7 to find the maximum allowable load.
Figure 2-7: Cantilevered Load Capabilities
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