Aerotech PRO165LM Series User manual

Revision: 1.08.00
PRO165LM Hardware Manual

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PRO165LM Hardware Manual Table of Contents
Table of Contents
PRO165LM Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EC Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 13
1.2. Accuracy and Temperature Effects 13
1.3. Basic Specifications 14
1.4. Vacuum Operation 16
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 20
2.3. Securing the Stage to the Mounting Surface 23
2.4. Attaching the Payload to the Stage 24
2.4.1. Speed Capability 26
Chapter 3: Electrical Specifications and Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 36
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 47
Appendix A: Warranty and Field Service 49
Appendix B: Technical Changes 51
Index 53
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Table of Contents PRO165LM Hardware Manual
List of Figures
Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems 18
Figure 2-2: PRO165LM Series Stage with Lifting Features 19
Figure 2-3: PRO165LM Dimensions 20
Figure 2-4: PRO165LM Accessory Tabletop Dimensions (-TT3, -TT6 Options) 21
Figure 2-5: Dimensions for Stages without a Cable Management System (-CMS0 Option) 22
Figure 2-6: Cantilevered Load Capability of PRO165LM Series Stages 25
Figure 2-7: Stage Orientations 25
Figure 3-1: Ground Connection Points for the -CMS0 Option 28
Figure 3-2: Motor and Feedback Wiring 34
Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35
Figure 3-4: Machine Direction 38
Figure 3-5: Hall Phasing 39
Figure 3-6: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder) 40
Figure 3-7: Encoder Phasing Reference Diagram (-E2 Incremental Encoder) 40
Figure 4-1: Endplate Cover Removal (Step 2) 44
Figure 4-2: Hardcover Screw Removal (Step 3) 45
Figure 4-3: Hardcover Removal (Step 3) 46
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PRO165LM Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 13
Table 1-3: PRO165LM Series Specifications (-0100 to -0300) 14
Table 1-4: PRO165LM Series Specifications (-0400 to -1000) 15
Table 2-1: Stage Mounting Surface Flatness Requirement 23
Table 2-2: Stage to Mounting Surface Hardware 23
Table 3-1: Linear Motor Connector Wiring 29
Table 3-2: Linear Motor Limit and Encoder Connector Wiring (-E1 and -E2 Incremental Encoder
Options) 30
Table 3-3: Linear Motor Limit and Encoder Connector Wiring (-E3 Absolute Encoder Option) 31
Table 3-4: General Motor Connector Wiring (for Z or T Axes) 32
Table 3-5: General Feedback Connector Wiring (for Z or T axes) 33
Table 3-6: Feedback Specifications 36
Table 3-7: PRO165LMLinear Motor Specifications (BLMC-142-A) 37
Table 3-8: Encoder Specifications 37
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