Aerotech ADRS User manual

Revision 2.00
ADRSHigh-Precision Mechanical
Bearing Direct-Drive Rotary Stage
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2006-2023, Aerotech, Inc., All rights reserved.

Table of Contents
ADRSHigh-Precision Mechanical Bearing Direct-Drive Rotary Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 6
UKCADeclaration of Incorporation 7
Safety Procedures and Warnings 8
Installation and Operation 9
Electrical Warnings 10
Motor-Related Warnings 11
Pinch Points 12
Handling and Storage 13
Chapter 1: Overview 15
1.1. Environmental Specifications 16
1.2. Accuracy and Temperature Effects 16
1.3. Basic Specifications 17
1.4. Vacuum Operation 18
Chapter 2: Installation 19
2.1. Dimensions 19
2.2. Securing the Stage to the Mounting Surface 22
2.3. Attaching the Payload or Fixturing to the Stage 24
Chapter 3: Electrical Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 31
3.3. Motor and Feedback Specifications 32
3.4. Limits, Marker, and Machine Direction 36
3.5. Motor and Feedback Phasing 37
Chapter 4: Maintenance 39
4.1. Service and Inspection Schedule 39
4.2. Cleaning and Lubrication 40
4.3. Rear Seal Change Procedure 41
4.4. Troubleshooting 42
Appendix A: Warranty and Field Service 43
Appendix B: Revision History 45
Index 47
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List of Figures
Figure 2-1: ADRS100 Dimensions 19
Figure 2-2: ADRS150 Dimensions 20
Figure 2-3: ADRS200 Dimensions 21
Figure 2-4: Stage Mounting Holes 23
Figure 2-5: Load Orientations 24
Figure 2-6: Cantilevered Load Capabilities 25
Figure 3-1: ADRSMotor and Feedback Wiring 31
Figure 3-2: Machine Direction 36
Figure 3-3: Hall Phasing Diagram 37
Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave) 38
Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave) 38
Figure 4-1: Exploded View of Seal Assembly 41
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List of Tables
Table 1-1: Model Numbers and Ordering Options 15
Table 1-2: Environmental Specifications 16
Table 1-3: ADRS Series Specifications 17
Table 2-1: Stage Mounting Surface Flatness Requirement 22
Table 2-2: Stage to Mounting Surface Hardware 22
Table 2-3: Mounting Interface Flatness Requirement 24
Table 3-1: High Power D-Style Motor Connector Pinout 29
Table 3-2: Mating Connector Part Numbers for the Motor Connector 29
Table 3-3: Feedback Connector Pinout 30
Table 3-4: Mating Connector Part Numbers for the Feedback Connector 30
Table 3-5: Hall-Effect Sensor Specifications 32
Table 3-6: Thermistor Specifications 32
Table 3-7: Encoder Specifications 32
Table 3-8: Encoder Resolution 32
Table 3-9: Maximum Speed Per Encoder Option 32
Table 3-10: ADRS100 Motor Specifications 33
Table 3-11: ADRS150 Motor Specifications 34
Table 3-12: ADRS200 Motor Specifications 35
Table 4-1: Troubleshooting 42
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EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ADRS stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended; and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of Machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of Machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements
of the following directive(s):
EU 2015/863 Directive, Restricted Substances (RoHS 3)
Authorized
Representative: / Norbert Ludwig
Managing Director
Aerotech GmbH
Gustav-Weißkopf-Str.18
90768 Fürth
Germany
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 5/17/2023
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UKCADeclaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ADRS stage
To which this declaration relates, meets the essential health and safety requirements and is in
conformity with the relevant UK Legislation listed below:
Supply of Machinery (Safety) Regulations 2008
Hazardous Substances in Electrical and Electronic Equipment Regulations
2012
Using the relevant section of the following UK Designated Standards and other normative
documents when installed in accordance with the installation instructions supplied by the
manufacturer.
EN ISO 12100:2010
Safety of Machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of Machinery - Electrical equipment of machines - Part 1:General
requirements
and furthermore declares that it is not allowed to put the product into service until the machinery
into which it is to be incorporated or of which it is to be a component has been found and declared
to be in conformity with the provisions of the Supply of Machinery (Safety) Regulations 2008 UK
Legislation and with national implementing legislation, for example, as a whole, including the
equipment referred to in this Declaration.
Authorized
Representative: / Simon Smith
Managing Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 5/17/2023
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Pinch, Shear, or Crush Hazard
General/Conditional Awareness Rotational Machinery Hazard
Hot Surface Hazard Pinch/Entanglement Hazard
Magnetic Field Hazard Trip Hazard
Heavy, Bulky Lifting Hazard Appropriate Equipment Required
Pressure/Explosive Atmosphere
Hazard Electrostatic Discharge Hazard
A blue circle symbol is an action or tip that you should obey. Some examples include:
General tip Read the manual/section
Wear personal protective equipment
(PPE): Safety Glasses If applicable, do not lift unassisted
Wear personal protective equipment
(PPE): Gloves
Wear personal protective equipment
(PPE): Hearing Protection
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Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lMake sure that the product is securely mounted before you operate it.
lMake sure that all pneumatic lines are securely connected.
lUse care when you move the ADRS or you could negatively affect the performance of
it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
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Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
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Motor-Related Warnings
Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all
applicable codes and standards when you use or operate a stage or system that incorporates
Aerotech motors.
DANGER: Mechanical Hazard!
Personnel must be made aware of the mechanical hazards during set up or when you
do service to the stage.
lUnintentional manual movement into the stage "end-of-travel" stops, could damage
the stage or undo precision alignments.
lStage movement could create pinch points, entanglement hazards, or rotational
mechanical hazards.
DANGER: Hot Surface Hazard!
lThe stage/motor frame temperature could exceed 70°C in some applications.
lDo not touch the stage/motor frame while it is in operation.
lWait until the stage/motor has cooled before you touch it.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as airborne dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
DANGER: Magnetic Field Hazard!
Aerotech stage/motors contain magnets which can present a Magnetic Field Hazard.
lDo not disassemble a stage motor under any circumstances.
lStrong magnetic fields could interfere with external/internal medical devices.
lStrong magnetic fields could present mechanical hazards such as pinch points.
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Pinch Points
A pinch point is a mechanical hazard that can occur when there are exposed parts of the stage or
system that can move. For example, the travel of a stage tabletop could expose the user to a pinch
point between the tabletop and the stage housing. The images that follow will show you typical
external and internal pinch point locations.
DANGER: Mechanical Hazard!
lSystem travel can cause crush, shear, or pinch injuries.
lOnly trained operators should operate this equipment.
lDo not put yourself in the travel path of machinery.
lRestrict access to all motor and stage parts
owhen the system moves under power (during normal operation, for example).
owhen the system is moved manually (during the installation process or when you
do maintenance, for example).
lMotors are capable of very high speeds and acceleration rates.
Figure 1: Typical Pinch Point Locations
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Handling and Storage
IMPORTANT: It is the responsibility of the customer to safely and carefully lift and
move the stage.
lBe careful when you move or transport the stage.
lRetain the shipping materials for future use.
lTransport or store the stage in its protective packaging.
WARNING: Electrostatic Discharge (ESD) Sensitive Components!
Wear an ESDwrist strap when you handle, install, or do service to the system assembly.
You could damage the power supply or drives if you fail to observe the correct
ESDpractices.
Inspect the shipping container for any evidence of shipping damage. If any damage exists, notify the
shipping carrier immediately.
Remove the packing list from the shipping container. Make sure that all the items specified on the
packing list are contained within the package.
The documentation for the stage is on the included installation device. The documents include
manuals, interconnection drawings, and other documentation pertaining to the system. Save this
information for future reference.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Unpacking and Handling
It is the responsibility of the customer to safely and carefully lift and move the stage.
IMPORTANT: All electronic equipment and instrumentation is wrapped in antistatic
material and packaged with desiccant. Ensure that the antistatic material is not
damaged during unpacking.
DANGER:Lifting Hazard! Use care when you move the ADRS or you could negatively
affect the performance of it.
lUse the correct lifting techniques, mechanical assistance, or additional help to lift or
move this product.
lDo not use the cables or the connectors to lift or move this product.
lMake sure that all moving parts are secure before you move the stage. Unsecured
moving parts could shift and cause injury or damage to the equipment.
lIf the stage is heavy, a single person lift could cause injury. Use assistance when you
lift or move it.
oRefer to Section 2.1. Dimensions for dimensions
oRefer to Section 1.3. Basic Specifications for weight specifications.
Carefully remove the stagefrom its protective shipping container.
lLift this product only by the base.
lFor multi-axis assemblies, always lift the system by the lower axis.
lUse a cart, dolly, or similar device to move the stage to a new location.
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Gently set the stage on a smooth, flat, and clean surface. Use compressed nitrogen or clean, dry, oil-
free air to remove any dust or debris that has collected during shipping.
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will
ensure that all of the alignments, preloads, and tolerances are the same as they were when they
were tested at Aerotech.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Shipping Brackets
If the ADRS has shipped as part of a system, shipping brackets (typically red, anodized aluminum)
might have been installed to secure the system prior to shipment. The shipping clamps, if installed,
will need to be removed prior to machine start up.
Storage
Store the stage in the original shipping container. If the original packaging included ESDprotective
packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of
vibrations, and flat.
Refer to Section 1.1. Environmental Specifications
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Chapter 1: Overview
Table 1-1: Model Numbers and Ordering Options
ADRS Series
ADRS100 Mechanical-bearing direct-drive rotary stage
ADRS150 Mechanical-bearing direct-drive rotary stage
ADRS200 Mechanical-bearing direct-drive rotary stage
Feedback (Required)
-E6 Incremental encoder, 1 Vpp
-E7 Incremental encoder, digital RS422, electrical resolution 10.24 arc sec (ADRS100) or
6.48 arc sec (ADRS150, ADRS200)
-E8 Incremental encoder, digital RS422, electrical resolution 5.12 arc sec (ADRS100) or
3.24 arc sec (ADRS150, ADRS200)
-E9 Incremental encoder, digital RS422, electrical resolution 2.56 arc sec (ADRS100) or
1.62 arc sec (ADRS150, ADRS200)
-E10 Incremental encoder, digital RS422, electrical resolution 1.02 arc sec (ADRS100) or
0.65 arc sec (ADRS150, ADRS200)
Motor (Required)
-M1 Low current, -A winding
-M2 Low voltage, -B winding
Tabletop (Required)
-TT1 Metric tabletop
-TT2 English tabletop
Lower Seal (Optional)
- No lower seal
-SL Lower Seal
Note: The Lower Seal is not available for the ADRS100.
Metrology (Required)
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots
Integration (Required)
-TAS Test as system: Testing, integration, and documentation of a group of components
as a complete system that will be used together.
-TAC Test as components:Testing and integration of individual items as discrete
components that ship together.
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1.1. Environmental Specifications
WARNING:General Hazard Warning! Do not expose this product to environments or
conditions outside of the listed specifications. You could damage the equipment if you
exceed the environmental or operating specifications.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as airborne dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
The stage should be packaged with desiccant if it is to be stored for an extended
time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration Use the system in a low vibration environment. Floor or acoustical vibration can
affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
These stages have limited protection against dust, but not water. This equates to
an ingress protection rating of IP40.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes
could cause a decrease in performance or permanent damage to the stage. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage
specifications are repeatable over an extended period of time. The severity of temperature effects
on all specifications depends on many different environmental conditions, which include how the
stage is mounted. Contact the factory for more details.
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1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ADRS Series Specifications
ADRS100 ADRS150 ADRS200
Tabletop Diameter 95 mm 140 mm 190 mm
Aperture 6 mm 15 mm 26 mm
Bus Voltage 340 VDC max.
Maximum Torque
(Continuous) 0.48 N·m 2.36 N·m 5.99 N·m
Maximum Speed(1) 1500 rpm(6) 600 rpm 600 rpm
Accuracy(2) Uncalibrated 388 µrad (80 arc sec)
Calibrated (3) 29.1 µrad (6 arc sec)
Repeatability(2) 14.6 µrad (3 arc sec)
Max Load (4) Axial 7 kg 20 kg 40 kg
Radial 3 kg 10 kg 20 kg
Axial Error Motion (5) 2 µm 5 µm 5 µm
Radial Error Motion (5) 3 µm 5 µm 5 µm
Tilt Error Motion 48.5 µrad (10 arc sec)
Inertia (Unloaded) 0.00038 kg-m20.00264 kg-m20.01069 kg-m2
Total Mass 2.0 kg 4.5 kg 8.4 kg
Finish Tabletop Hardcoat
Stage Black Anodize
(1) Maximum speed listed is stage and motor dependent (and assumes a 340 V bus). The actual speed could be lower due
to motor back emf or encoder bandwidth. Consult an Aerotech Applications Engineer for more details.
(2) Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution
must be 0.36 arc sec or less.
(3) Calibrated accuracy requires the -PL2 option and Aerotech controls.
(4) Maximum loads are mutually exclusive.
(5) For the ADRS-100, error motion specifications are below 700 rpm. Above 700 rpm the max radial error is 5 microns.
Errors measured 25 mm above the tabletop.
(6) The maximum speed is limited to 1400 rpm with the -E10 feedback option.
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1.4. Vacuum Operation
Vacuum option preparations are available as special orders. Contact Aerotech for more information.
There are two vacuum preparation options:
lLow Vacuum (for use in atmospheric pressures to 10-3 Torr)
lHigh Vacuum (preparation for environments from 10-3 to 10-6 Torr).
Special preparations include:
lParts are lubricated with vacuum-compatible lubricants.
lMaterials, fasteners, and coatings are selected to be compatible with the specified level of
vacuum.
lHigh-vacuum systems are designed to eliminate trapped volumes.
lPrior to assembly, stage parts are thoroughly cleaned in a clean environment.
lThe stage is packaged in a special polyethylene bag.
Vacuum Guidelines
To ensure that the stage will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines
outlined in this manual).
1. Do not remove the stage from its sealed bag until it is ready to use.
2. Always handle the stage in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the stage.
3. During installation, use cleaned, vented, stainless steel fasteners to secure the stage.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the
viscous vacuum-compatible lubricants, could result in excessive motor operating temperatures.
Because of this, consider all continuous torque ratings to be 40 to 60% lower than the value
specified for operation in normal atmospheric environment. Reduce motor usage accordingly.
5. We recommend that you use a small quantity of Braycote® 602EF grease or a compatible
substitute of equal quality lubricant in vacuum applications.
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends
that you bake out vacuum systems when you first install them into the vacuum chamber. Bake
the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and
degas polymers (such as cable insulation).
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Chapter 2: Installation
The stage installation must be in accordance with the instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions
could result in injury or damage to the equipment.
2.1. Dimensions
Figure 2-1: ADRS100 Dimensions
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Figure 2-2: ADRS150 Dimensions
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