Aerotech PRO190LM User manual

Revision: 1.01.00
PRO190LM Hardware Manual

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PC-to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs
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customer order number available before you call or include it in your email.
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Phone: [phone]
Fax: [phone]
Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2015-2017, Aerotech, Inc., All rights reserved.

PRO190LM Hardware Manual Table of Contents
Table of Contents
PRO190LM Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EC Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 13
1.2. Accuracy and Temperature Effects 13
1.3. Basic Specifications 14
1.4. Vacuum Operation 16
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 20
2.3. Securing the Stage to the Mounting Surface 23
2.4. Attaching the Payload to the Stage 24
2.4.1. Speed Capability 26
Chapter 3: Electrical Specifications and Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 36
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 47
Appendix A: Warranty and Field Service 49
Appendix B: Technical Changes 51
Index 53
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Table of Contents PRO190LM Hardware Manual
List of Figures
Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems 18
Figure 2-2: PRO190LM Series Stage with Lifting Features 19
Figure 2-3: PRO190LM Dimensions 20
Figure 2-4: PRO190LM Accessory Tabletop Dimensions (-TT3, -TT6 Options) 21
Figure 2-5: Dimensions for Stages without a Cable Management System (-CMS0 Option) 22
Figure 2-6: Cantilevered Load Capability of PRO190LM Series Stages 25
Figure 2-7: Stage Orientations 25
Figure 3-1: Ground Connection Points for the -CMS0 Option 28
Figure 3-2: Motor and Feedback Wiring 34
Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35
Figure 3-4: Machine Direction 38
Figure 3-5: Hall Phasing 39
Figure 3-6: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder) 40
Figure 3-7: Encoder Phasing Reference Diagram (-E2 Incremental Encoder) 40
Figure 4-1: Endplate Cover Removal (Step 2) 44
Figure 4-2: Hardcover Screw Removal (Step 3) 45
Figure 4-3: Hardcover Removal (Step 3) 46
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PRO190LM Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 13
Table 1-3: PRO190LM Series Specifications (-0100 to -0300) 14
Table 1-4: PRO190LM Series Specifications (-0400 to -1000) 15
Table 2-1: Stage Mounting Surface Flatness Requirement 23
Table 2-2: Stage to Mounting Surface Hardware 23
Table 3-1: Linear Motor Connector Wiring 29
Table 3-2: Linear Motor Limit and Encoder Connector Wiring (-E1 and -E2 Incremental Encoder
Options) 30
Table 3-3: Linear Motor Limit and Encoder Connector Wiring (-E3 Absolute Encoder Option) 31
Table 3-4: General Motor Connector Wiring (for Z or T Axes) 32
Table 3-5: General Feedback Connector Wiring (for Z or T axes) 33
Table 3-6: Feedback Specifications 36
Table 3-7: PRO190LMLinear Motor Specifications (BLMC-192-A) 37
Table 3-8: Encoder Specifications 37
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Table of Contents PRO190LM Hardware Manual
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PRO190LM Hardware Manual Safety
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the PRO190LM and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to
avoid potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The PRO190LM stage must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
5. Use care when moving the PRO190LM stage. Lifting or transporting the PRO190LM stage
improperly can result in injury or damage to the PRO190LM.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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Safety PRO190LM Hardware Manual
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PRO190LM Hardware Manual Declaration of Conformity
EC Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO190LM Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which
it is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e., as a whole, including the equipment
referred to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln
Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
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Declaration of Conformity PRO190LM Hardware Manual
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PRO190LM Hardware Manual Overview
Chapter 1: Overview
The specifications in this manual pertain to the second generation of PRO LM stages. Second generation
stages can be distinguished from their first generation counterparts by the second generation's curved
hardcover. Contact Aerotech if you need a first generation manual.
Table 1-1: Model Numbers and Ordering Options
PRO190LM Linear Motor Stage
Travel (Required)
-0100 100 mm travel stage
-0150 150 mm travel stage
-0200 200 mm travel stage
-0250 250 mm travel stage
-0300 300 mm travel stage
-0400 400 mm travel stage
-0500 500 mm travel stage
-0600 600 mm travel stage
-0800 800 mm travel stage
-1000 1000 mm travel stage
Mounting Orientation (Required)
Normal mounting orientation
-MT1 Side-mounted or vertical orientation
-MT2 Inverted mounting orientation
Tabletop (Required)
-TT1 Tabletop with metric dimension mounting
-TT2 Tabletop with English dimension mounting
-TT3 Accessory tabletop with mounting for select rotary stages
-TT4 Tabletop with metric dimension mounting and wiper brushes
-TT5 Tabletop with English dimension mounting and wiper brushes
-TT6 Accessory tabletop with mounting for select rotary stages and wipers
NOTE:-TT1 option required for lower axis of XY
Feedback (Required)
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.1 μm digital TTL output
-E3 Absolute linear encoder; EnDat 2.2
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Overview PRO190LM Hardware Manual
PRO190LM Linear Motor Stage (continued)
Cable Management (Required)
-CMS0 No external CMS, motor/feedback connector bracket on carriage
-CMS1 External CMSfor single axis
-CMS2 External CMS for lower-axis of two-axis PRO XY assembly
-CMS3 External CMSfor lower-axis of two-axis (XZ or XT) assembly
-CMS4 External CMS for upper-axis of two-axis PRO XY assembly
-CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly
-CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7 External CMS for lower-axis of three-axis (XZT) assembly
-CMS10 External CMS for upper-axis of two-axis PRO225LM XY assembly
-CMS11 External CMS for upper-axis of three-axis PRO 225LM XYZ/T assembly
-CMS12 External CMS for upper-axis of four-axis PRO 225LM/ XYZT assembly
Lifting Hardware (Optional)
-LF Lifting hardware
NOTE:Lifting option only available on travels 400 mm and greater. Lifting should never by ordered on the upper-axis of an XY set
(only order on lower-axis)
ThermoComp™ (Optional)
-TCMP ThermoComp™ integrated temperature compensation unit
NOTE: An A3200 controller must be used with the -TCMP option
Metrology (Required)
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR)with performance plots
Accessories (to be ordered as a separate line item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 µm orthogonality for
short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc sec orthogonality. Alignment to within 10 µm
orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for short
travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc sec orthogonality. Alignment to within 5 µm
orthogonality for short travel stages.
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PRO190LM Hardware Manual Overview
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The PRO190LM stages have limited protection against dust, but not water. This
equates to an ingress protection rating of IP50.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of PRO190LM series stages is measured 25 mm above the table with the stage
in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
The accuracy specifications listed in Section 1.3. assume a 20°C operating environment. If the temperature
of the stage differs from 20°C, the encoder scale in the stage will expand or contract at the rate of 3.25 ppm
per °C.
The ThermoComp™ option is a hardware and software solution that uses the functionality of the A3200
controller to mitigate the effects of changing temperature by detecting and compensating for thermal
changes. ThermoComp™ is effective at compensating for both self-heating and environmental temperature
changes.
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Overview PRO190LM Hardware Manual
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: PRO190LM Series Specifications (-0100 to -0300)
PRO190LM -0100 -0150 -0200 -0250 -0300
Travel 100 mm 150 mm 200 mm 250 mm 300 mm
Accuracy (1) Standard ±4 μm ±6 μm ±8 μm ±9 μm ±10 μm
Calibrated ±1 μm ±1 μm ±1 μm ±1 μm ±1 μm
Resolution (Minimum
Incremental Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability (1) ±0.3 μm ±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm
Horizontal Straightness (1) ±1.5 μm ±2 μm ±2.5 μm ±3 μm ±3.5 μm
Vertical Straightness (1) ±1.5 μm ±2 μm ±2.5 μm ±3 μm ±3.5 μm
Pitch 27 μrad
(5.6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
45 μrad
(9.3 arc sec)
50 μrad
(10.3 arc
sec)
Roll 27 μrad
(5.6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
45 μrad
(9.3 arc sec)
50 μrad
(10.3 arc
sec)
Yaw 27 μrad
(5.6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
45 μrad
(9.3 arc sec)
50 μrad
(10.3 arc
sec)
Maximum Speed (2) 2 m/s
Maximum Acceleration (2) 3 g
Maximum Force, Continuous 106.7 N – Standard
154.7 – With Air Cooling (20 psig)
Load Capacity (3) Horizontal 60 kg
Side 60 kg
Moving Mass 4.5 kg
Stage Mass 14.4 kg 15.6 kg 16.8 kg 18.1 kg 19.3 kg
Material Anodized Aluminum
Mean Time Between Failure 20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent (consult the Aerotech factory for multi-axis or non-standard applications).
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PRO190LM Hardware Manual Overview
Table 1-4: PRO190LM Series Specifications (-0400 to -1000)
PRO190LM -0400 -0500 -0600 -0800 -1000
Travel 400 mm 500 mm 600 mm 800 mm 1000 mm
Accuracy (1) Standard ±12 μm ±14 μm ±15.5 μm ±17 μm ±18 μm
Calibrated ±1 μm ±1 μm ±1 μm ±1.5 μm ±1.5 μm
Resolution (Minimum
Incremental Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability (1) ±0.4 μm ±0.4 μm ±0.4 μm ±0.5 μm ±0.5 μm
Horizontal Straightness (1) ±4.5 μm ±5.5 μm ±6.5 μm ±8 μm ±9.5 μm
Vertical Straightness (1) ±4.5 μm ±5.5 μm ±6.5 μm ±8 μm ±9.5 μm
Pitch
60 μrad
(12.4 arc
sec)
70 μrad
(14.4 arc
sec)
80 μrad
(16.5 arc
sec)
90 μrad
(18.6 arc
sec)
110 μrad
(22.7 arc
sec)
Roll
60 μrad
(12.4 arc
sec)
70 μrad
(14.4 arc
sec)
80 μrad
(16.5 arc
sec)
90 μrad
(18.6 arc
sec)
110 μrad
(22.7 arc
sec)
Yaw
60 μrad
(12.4 arc
sec)
70 μrad
(14.4 arc
sec)
80 μrad
(16.5 arc
sec)
90 μrad
(18.6 arc
sec)
110 μrad
(22.7 arc
sec)
Maximum Speed (2) 2 m/s
Maximum Acceleration (2) 3 g
Maximum Force, Continuous 106.7 N – Standard
154.7 – With Air Cooling (20 psig)
Load Capacity (3) Horizontal 60 kg
Side 60 kg
Moving Mass 4.5 kg
Stage Mass 21.7 kg 24.2 kg 26.6 kg 31.5 kg 36.4 kg
Material Anodized Aluminum
Mean Time Between Failure 20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent (consult the Aerotech factory for multi-axis or non-standard applications).
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Overview PRO190LM Hardware Manual
1.4. Vacuum Operation
Aerotech can specially prepare the PRO190LM for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
Special Guidelines
To ensure that the PRO190LM will continue to perform well in the vacuum environment, follow the guidelines
listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
1. Do not remove the PRO190LM from the sealed bag until it is ready for use.
2. Always handle the PRO190LM in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the PRO190LM.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the PRO190LM.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease
or a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum surfaces and Teflon cables. Aerotech recommends that customers
bake out vacuum systems when first installing them in the vacuum chamber.
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PRO190LM Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : PRO190LM installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Refer to Section 1.3. for stage mass specifications.
lDo not attempt to lift heavy loads single handed.
lLift only by the base. Use lifting hardware if it has been provided (refer to Figure 2-2).
lDo not use the tabletop or cables as lifting points.
lFor multi-axis assemblies, always lift the system by the lower axis.
W A R N I N G : It is the customer's responsibility to safely and carefully lift and move the
PRO190LM.
lSecure all moving parts before lifting or moving the PRO190LM to a new location.
Unsecured moving parts could shift and cause bodily injury.
lImproper handling could adversely affect the PRO190LM’s performance. Use care when
lifting or moving the PRO190LM.
Carefully remove the PRO190LMfrom its protective shipping container. Gently set the PRO190LM on a
smooth, flat, and clean surface.
Before operating the PRO190LM, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each PRO190LM has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Brackets
All PRO190LM series stages are packaged with shipping brackets installed to prevent unwanted stage
motion and potential damage from occurring during shipment. The brackets are red anodized aluminum (the
only red anodized pieces Aerotech uses) that attach to the stage base on either side of the stage carriage.
The rubber pads on the shipping brackets compress slightly to gently hold the carriage in place. Two
shipping brackets are used on single axis and upper axis stages in a multi-axis stack, while four shipping
brackets are used on lower axis stages in multi-axis stacks. They must be removed from the stage for the
stage to operate. Retain the brackets for future use.
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Mechanical Specifications and Installation PRO190LM Hardware Manual
Shipping Bracket
NOTE:
[QTY. 2] Red anodized brackets on a single axis
(shown) and on the upper axis of a multi-axis stack.
[QTY. 4] Red anodized brackets on the lower axis
of a multi-axis stack.
Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems
N O T E : After removing the lifting features or shipping brackets, retain them for future use. Do not
transport or ship the PRO190LM without the lifting features or shipping brackets attached.
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PRO190LM Hardware Manual Mechanical Specifications and Installation
Lifting Instructions
This section applies only to stages equipped with lifting features. The lifting features should come attached
to the system and contain (QTY 4) eye bolts and (QTY 4) standoffs (see Figure 2-2). The eyebolts are
threaded into the standoffs and the standoffs are threaded into the stage base. These must be removed for
the stage to operate. Retain the lifting hardware for future use.
If the stage must be lifted in the future, reattach the shipping brackets and the lifting hardware. If the stage is
part of a multi-axis system, attach the lifting features to the lower axis.
Eyebolt [QTY. 4]
Standoff [QTY. 4]
Figure 2-2: PRO190LM Series Stage with Lifting Features
N O T E : After removing the lifting features or shipping brackets, retain them for future use. Do not
transport or ship the PRO190LM without the lifting features or shipping brackets attached.
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Mechanical Specifications and Installation PRO190LM Hardware Manual
2.2. Dimensions
NOTES
Figure 2-3: PRO190LM Dimensions
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