Aerotech PRO190SL Series User manual

Revision: 1.04.00
PRO190SL/SLE Hardware
Manual

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PRO190SL/SLE Hardware Manual Table of Contents
Table of Contents
PRO190SL/SLE Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 11
1.2. Accuracy and Temperature Effects 11
1.3. Basic Specifications 12
1.4. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 17
2.3. Securing the Stage to the Mounting Surface 21
2.4. Attaching the Payload to the Stage 23
Chapter 3: Electrical Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 33
3.3. Motor and Feedback Specifications 35
3.4. Limits, Marker, and Machine Direction 39
3.5. Motor and Feedback Phasing 40
Chapter 4: Maintenance 43
4.1. Service and Inspection Schedule 43
4.2. Cleaning and Lubrication 44
4.3. Belt Adjustment 48
4.4. Troubleshooting 51
Appendix A: Warranty and Field Service 53
Appendix B: Revision History 55
Index 57
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Table of Contents PRO190SL/SLE Hardware Manual
List of Figures
Figure 2-1: Lifting Features 16
Figure 2-2: SL Dimensions 17
Figure 2-3: SLE Dimensions 18
Figure 2-4: PRO190SL/SLE Accessory Tabletop Dimensions (-TT3/-TT6 Option) 19
Figure 2-5: PRO190SL/SLE Z-Axis Bracket Dimensions 20
Figure 2-6: Mounting Hole Locations 22
Figure 2-7: Cantilevered Load Capability 24
Figure 2-8: Stage Orientations 24
Figure 2-9: Load Torque Equation 25
Figure 2-10: Torque Required to Turn Ball Screw in Vertical Orientation 25
Figure 3-1: Motor and Feedback Wiring (-SL Option) 33
Figure 3-2: Motor and Feedback Wiring (-SLE Option) 34
Figure 3-3: Machine Direction 39
Figure 3-4: Hall Phasing 40
Figure 3-5: Analog Encoder Phasing Reference Diagram 41
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 41
Figure 4-1: Hardcover Removal Procedure (Step 2) 46
Figure 4-2: Hardcover Removal Procedure (Step 3) 46
Figure 4-3: Hardcover Removal Procedure (Step 4) 47
Figure 4-4: Foldback Motor Cover Removal 49
Figure 4-5: Foldback Motor Part Callouts 50
Figure 4-6: Lubricate the Pulley Flanges 50
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PRO190SL/SLE Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 9
Table 1-2: Environmental Specifications 11
Table 1-3: PRO190SL/SLE Series Specifications (-050 to -250) 12
Table 1-4: PRO190SL/SLE Series Specifications (-300 to -800) 13
Table 2-1: Stage Mounting Surface Flatness Requirement 21
Table 2-2: Stage to Mounting Surface Hardware 22
Table 3-1: Motor Connector Pinout 29
Table 3-2: Part Numbers for the Motor Connector 29
Table 3-3: Feedback Connector Pinout 30
Table 3-4: Part Numbers for the Feedback Connector 30
Table 3-5: Linear Encoder Connector Pinout (-SLE only) 31
Table 3-6: Part Numbers for the Encoder Connector 31
Table 3-7: Limit Connector Pinout 32
Table 3-8: Part Numbers for the Limit Connector 32
Table 3-9: Feedback Specifications 35
Table 3-10: PRO190SL/SLE Motor Specifications (BMS100) 36
Table 3-11: PRO190SL/SLEMotor Specifications (BM130) 37
Table 3-12: Rotary Encoder Specifications for PRO190SLStages 38
Table 3-13: Linear Encoder Specifications for PRO190SLEStages 38
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