Aerotech PRO280SLE Series User manual

Revision: 1.10.00
PRO280SL/SLE Hardware
Manual

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PRO280SL/SLE Hardware Manual Table of Contents
Table of Contents
PRO280SL/SLE Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 11
1.2. Accuracy and Temperature Effects 11
1.3. Basic Specifications 12
1.4. Vacuum Operation 14
Chapter 2: Installation 15
2.1. Unpacking and Handling the Stage 15
2.2. Dimensions 17
2.3. Securing the Stage to the Mounting Surface 21
2.4. Attaching the Payload to the Stage 23
Chapter 3: Electrical Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 32
3.3. Motor and Feedback Specifications 34
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Belt Adjustment 46
4.4. Troubleshooting 49
Appendix A: Warranty and Field Service 51
Appendix B: Revision History 53
Index 55
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Table of Contents PRO280SL/SLE Hardware Manual
List of Figures
Figure 2-1: Lifting Features 16
Figure 2-2: PRO280SL Dimensions 17
Figure 2-3: PRO280SLE Dimensions 18
Figure 2-4: PRO280SL/SLE Accessory Tabletop Dimensions (-TT3/-TT6 Option) 19
Figure 2-5: PRO280SL/SLE Z-Axis Bracket Dimensions 20
Figure 2-6: Mounting Hole Locations 22
Figure 2-7: Cantilevered Load Capability 24
Figure 2-8: Stage Orientations 24
Figure 2-9: Load Torque Equation 25
Figure 2-10: Torque Required to Turn Ball Screw in Vertical Orientation 25
Figure 3-1: Motor and Feedback Wiring (-SL Option) 32
Figure 3-2: Motor and Feedback Wiring (-SLE Option) 33
Figure 3-3: Machine Direction 38
Figure 3-4: Hall Phasing 39
Figure 3-5: Analog Encoder Phasing Reference Diagram 40
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 40
Figure 4-1: Hardcover Removal Procedure (Step 2) 44
Figure 4-2: Hardcover Removal Procedure (Step 3) 44
Figure 4-3: Hardcover Removal Procedure (Step 4) 45
Figure 4-4: Foldback Motor Cover Removal 47
Figure 4-5: Foldback Motor Part Callouts 48
Figure 4-6: Lubricate the Pulley Flanges 48
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PRO280SL/SLE Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 9
Table 1-2: Environmental Specifications 11
Table 1-3: PRO280SL/SLE Series Specifications (-0300 to -0500) 12
Table 1-4: PRO280SL/SLE Series Specifications (-0600 to -1000) 13
Table 2-1: Stage Mounting Surface Flatness Requirement 21
Table 2-2: Stage to Mounting Surface Hardware 22
Table 3-1: Motor Connector Pinout 29
Table 3-2: Feedback Connector Pinout 29
Table 3-3: Linear Encoder Connector Pinout (-SLE only) 30
Table 3-4: Part Numbers for the Encoder Connector 30
Table 3-5: Limit Connector Pinout 31
Table 3-6: Part Numbers for the Limit Connector 31
Table 3-7: Feedback Specifications 34
Table 3-8: PRO280SL/SLE Motor Specifications (BMS465) 35
Table 3-9: PRO280SL/SLE Motor Specifications (BM500) 36
Table 3-10: Rotary Encoder Specifications for PRO280SLStages 37
Table 3-11: Linear Encoder Specifications for PRO280SLEStages 37
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