Agilent Technologies 5517B User manual

Agilent Technologies
Agilent
5517B/BL/C/D/DL/FL
Laser Head
User’s Guide

Notices
© Agilent Technologies, Inc. 2009
No part of this manual may be reproduced
in any form or by any means (including
electronic storage and retrieval or transla-
tion into a foreign language) without prior
agreement and written consent from Agi-
lent Technologies, Inc. as governed by
United States and international copyright
laws.
Manual Part Number
05517-90077
Edition
First edition, June 2009
Printed in USA
Agilent Technologies, Inc.
5301 Stevens Creek Boulevard
Santa Clara, California 95052-8059
Warranty
The material contained in this docu-
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to being changed, without notice, in
future editions. Further, to the maxi-
mum extent permitted by applicable
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either express or implied, with regard
to this manual and any information
contained herein, including but not lim-
ited to the implied warranties of mer-
chantability and fitness for a particular
purpose. Agilent shall not be liable for
errors or for incidental or consequen-
tial damages in connection with the
furnishing, use, or performance of this
document or of any information con-
tained herein. Should Agilent and the
user have a separate written agree-
ment with warranty terms covering the
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with these terms, the warranty terms
in the separate agreement shall con-
trol.
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Limited Rights as defined in FAR 52.227-14
(June 1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any
technical data.
Safety Notices
CAUTION
A CAUTION notice denotes a haz-
ard. It calls attention to an operat-
ing procedure, practice, or the like
that, if not correctly performed or
adhered to, could result in damage
to the product or loss of important
data. Do not proceed beyond a
CAUTION notice until the indi-
cated conditions are fully under-
stood and met.
WARNING
A WARNING notice denotes a haz-
ard. It calls attention to an operat-
ing procedure, practice, or the like
that, if not correctly performed or
adhered to, could result in personal
injury or death. Do not proceed
beyond a WARNING notice until
the indicated conditions are fully
understood and met.

Agilent 5517B/BL/C/D/DL/FL
Laser Head
User’s Guide
This guide describes how to use the Agilent 5517B/BL/C/D/DL/FL
Laser Head. The information in this guide applies to laser heads
having the serial prefix number listed below.
SERIAL PREFIX NUMBER US4627 for 5517B
US4605 for 5517BL
US4627 for 5517C
US4614 for 5517D
US4631 for 5517DL
US4636 for 5517FL

Agilent Technologies, Inc. 8.CD.L.03.11.97.R1.J.CW1FL
Santa Clara Site
5301 Stevens Creek Boulevard
Santa Clara, California 95052-8059
Certification
and Warranty
Certification
Agilent Technologies certifies that
this product met its published
specification at the time of
shipment from the factory. Agilent
further certifies that its calibration
measurements are traceable to
the United States National
Institute of Standards and
Technology (formerly National
Bureau of Standards), to the
extent allowed by the Institute’s
calibration facility, and to the
calibration facilities of other
International Standards
Organization members.
Warranty
Agilent warrants
Agilent hardware, accessories and
supplies against defects in
materials and workmanship for a
period specified by each product
from date of shipment. If Agilent
receives notice of such defects
during the warranty period, Agilent
will, at its option, either repair or
replace products which prove to
be defective. Replacement
products may be either new or
like-new.
Agilent warrants that
Agilent software will not fail to
execute its programming
instructions, for the period
specified above, due to defects in
material and workmanship when
properly installed and used. If
Agilent receives notice of such
defects during the warranty
period, Agilent will replace
software media which does not
execute its programming
instructions due to such defects.
For detailed warranty
information, see back matter.
Safety Considerations
General
This product and related
documentation must be reviewed
for familiarization with this safety
markings and instructions before
operation.
This product is a safety Class I
instrument (provided with a
protective earth terminal).
Before Applying Power
Verify that the product is set to
match the available line voltage
and the correct fuse is installed.
Before Cleaning
Disconnect the product from
operating power before cleaning.
Safety Earth Ground
An uninterruptible safety earth
ground must be provided from the
mains power source to the product
input wiring terminals or supplied
power cable.
Warning Symbols That May Be
Used In This Book
Instruction manual symbol; the
product will be marked with this
symbol when it is necessary for
the user to refer to the instruction
manual.
Indicates hazardous voltages.
Indicates earth (ground) terminal.
or
Indicates terminal is connected to
chassis when such connection is
not apparent.
Safety Considerations (contd)
Indicates Alternating
current.
Indicates Direct current.
BODILY INJURY OR DEATH
MAY RESULT FROM FAILURE
TO HEED A WARNING. DO
NOT PROCEED BEYOND A
WARNING UNTIL THE
INDICATED CONDITIONS ARE
FULLY UNDERSTOOD AND
MET.
Damage to equipment, or
incorrect measurement data,
may result from failure to heed
a caution. Do not proceed
beyond a CAUTION until the
indicated conditions are fully
understood and met.
These CAUTION labels are
required by the United States
Center for Devices and
Radiological Health. Failure to
follow their instructions may result
in personal injury.
This symbol indicates laser
radiation.
For additional safety and
acoustic noise information,
see back matter.
WARNING
CAUTION
CONTINOUS WAVE 1mW 670nm
CLASS II LASER PRODUCT
LASER RADIATION-DO NOT
STARE INTO BEAM
CAUTION

LASER RADIATION
(ALSO WHEN OPEN AND INTERLOCK
FAILED OR DEFEATED)
DO NOT STARE INTO BEAM
MAXIMUM OUTPUT: 1 mw
PULSE SPEC: continuous wave
LASER MEDIUM: helium neon
CLASS II LASER PRODUCT
CAUTION
AVOID EXPOSURE
LASER LIGHT EMISSION FROM THIS APERTURE
CAUTION
EXIT
PORT
THREE POSITION
SHUTTER CONTROL:
OPEN, REDUCED
APERTURE, CLOSED
DO NOT STARE
INTO BEAM.
ALIGNMENT
APERTURE
FOR REDUCED
BEAM
+ 15V POWER ON
- 15V POWER ON
READY
LASER ON
COMPLIES WITH
21 CFR 1040.10
AND 1040.11
5517D
HeNe Laser
Opt.
SN: US44444444
Power: 200 uW
Split Freq: 3.74 MHz
ISM 1 - A
ICES/NMB-001
Agilent Technologies Inc.
5301 Stevens Creek Blvd.
Santa Clara, CA 95051
July, 2005
Made in U.S.A. of domestic and
foreign content
N10149
LASER RADIATION
CAUTION
(ALSO WHEN OEPN AND INTERLOCK,
IF ANY, FAILED OR DEFEATED)
DO NOT STARE INTO BEAM
MAXIMUM OUTPUT: 1 mw
PULSE SPEC: continuous wave
LASER MEDIUM: helium neon
CLASS II LASER PRODUCT
LASER HEAD SAFETY LABELS

END PRODUCT LASER SAFETY CONSIDERATIONS
The Agilent 5517B/BL/C/D/DL/FL Laser Head complies with U.S.
National Center for Devices and Radiological Health regulations 21
CFR 1040.10 and 1040.11.
These regulations may also apply to the end product into which the
Agilent 5517B/BL/C/D/DL/FL Laser Head will be designed. Care
must be taken to insure that the end product complies with all
applicable national and local laser safety regulations.
FDA/CDRH Accession Number is 9020360.

Agilent 5517B/BL/C/D/DL/FL User’s Guide vii
Contents
Contents
1 General Information
Introduction 2
Description of the Agilent 5517B/BL/C/D/DL/FL
Laser Head 2
Manual Organization 5
Options 6
Accessories 7
Cables 7
Power Supply 9
Related Documents 9
2 Laser Head at a Glance
Laser Head Front Panel at a Glance 12
Laser Head Rear Panel at a Glance 13
3Installation
Introduction 16
Preparing the Laser Head for Use 16
Unpacking and Inspection 16
Warranty Claims 17
Installing the Laser Head 17
Connecting the Laser Head Cables 18
Electrical Considerations 25
Grounding considerations 25
Power supply requirements 25
Power dissipation 25
Fusing 25
Mounting Considerations 27
Orientation 27
Thermal isolation 27
Heat flow considerations 28

viii Agilent 5517B/BL/C/D/DL/FL User’s Guide
Contents
Vibration isolation 28
Magnetic shielding 28
Mounting plane tolerance 29
Mounting and clearance 29
Powering Up the Laser Head 30
4PerformanceTests
Introduction 32
Recommended Test Equipment 32
Performance Tests 33
Laser power output test 33
Split frequency test 35
Wavelength test 36
Performance Test Record 37
5 Adjustments
Introduction 40
Safety Considerations 40
Recommended Test Equipment 41
Laser Head Adjustments 41
Equipment needed 41
Preheat setting 42
Adjustment Test Record 49
6 Using the Laser Head in a System
Introduction 52
A one-axis example is used for simplicity 52
Basic steps apply to all laser systems 52
Agilent laser interferometer positioning systems at a glance 52
All Agilent laser systems share a similar configuration 53
A controller is required for all laser positioning systems 54
Setting Up the System Electronics 54
Install the laser electronics board in the PC 54
Connect the electronics cables 54
Power up the laser head 55

Agilent 5517B/BL/C/D/DL/FL User’s Guide ix
Contents
Aligning the Optics 56
Making Measurements — An Example 57
Solving Problems 60
7Service
Introduction 62
Unpacking and Inspection 62
Warranty Claims 62
Contacting Agilent Technologies 62
Laser Head Shipment 63
Tagging for Service 63
Packaging for Reshipment 63
Laser Head Troubleshooting 64
Exchange Laser Tube Assemblies 64
Troubleshooting 64
Disassembly Procedures 68
Tools Required 68
To remove the Front Panel and the Cover 69
To remove the A3 Controller/Reference Board 70
To remove the A1 Connector Board 70
To remove the A4 Sampler Board 71
To remove the A5 Laser Tube Assembly and A2 Power Supply 71
8 Specifications
Introduction 74
Calibration cycle 74
Specifications and characteristics 74
Specifications and Characteristics 74
Index

x Agilent 5517B/BL/C/D/DL/FL User’s Guide
Contents

Agilent 5577B/BL/C/D/DL/FL User’s Guide xi
Figures
Figures
Figure 1. Agilent 5517B/C/D and 5517BL/DL/FL Laser Heads 3
Figure 2. Agilent 10881A/B/C Laser Head Cable. 19
Figure 3. Agilent N1251B High Performance Laser Head Cable 20
Figure 4. Agilent 10881D/E/F Laser Head Cable 21
Figure 5. Agilent 10791A/B/C Laser Head Cable 22
Figure 6. Installation of laser system cables 23
Figure 7. A1 Connector board, component side, showing fuse locations and high voltage
connectors 26
Figure 8. A3 Controller/Reference Board 27
Figure 9. Laser position transducer mounting 29
Figure 10. Front Panel Turret and Aperture 33
Figure 11. Measuring the laser beam power with power meter detector 34
Figure 12. Split frequency test setup 35
Figure 13. Jumper Locations on A3 Controller/Reference Board (05517-60031) 47
Figure 14. Jumper Locations on A3 Controller/Reference Board (05517-60003) 47
Figure 15. High voltage area and anode lead 48
Figure 16. Three-pin high voltage power supply connector 48
Figure 17. Typical single-axis Agilent Laser Interferometer Positioning System 53
Figure 18. Start/Programs pop-up menu 57
Figure 19. Monitor screen after opening the application 58
Figure 20. Measurement screen 59
Figure 21. Laser Head—primary troubleshooting flowchart 65
Figure 22. Board trouble isolation flowchart 66
Figure 23. DS1 through DS4 locations on A3 Controller/Reference Board 67
Figure 24. DS4, DS6, Q3, TP1 and TP8 locations on A3 Controller/Reference Board 67
Figure 25. Laser head cover removal 69
Figure 26. Agilent 5517B/C/D Laser Head dimensions and mounting location 78
Figure 27. Agilent 5517BL/DL/FL Laser Head dimensions and mounting location 79

xii Agilent 5577B/BL/C/D/DL/FL User’s Guide
Figures

Agilent 5577B/BL/C/D/DL/FL User’s Guide xiii
Ta b le s
Ta b le s
Table 1. Summary of the laser head major operating characteristics 4
Table 2. Laser head mechanical and electronic assembly summary 4
Table 3. Available options 6
Table 4. Laser Head Cables 8
Table 5. Te rmin al co nn ection s (t hree sp ad e l ug s ) 21
Table 6. 18-Pin Laser Head Cable and Rear Panel Connector pin assignments 24
Table 7. Laser Head Power Supply requirements 25
Table 8. Laser head internal fuses 26
Ta bl e 9 . R eco m m en d ed Te s t E q ui p me n t 32
Table 10. Setpoint voltages at TP11 and TP15 – standard tube with 05517-60031 A3
Board 44
Table 11. Setpoint voltages at A3TP11 and A3TP15 – short body tube* 45
Table 12. Setpoint voltages at TP11 and TP15 – standard tube with 05517-60003 A3
Board 46
Table 13. Exchange Laser Tube Assemblies 64
Table 14. Disassemble procedures 68
Table 15. Agilent Laser Head Specifications and Characteristics 75

xiv Agilent 5577B/BL/C/D/DL/FL User’s Guide
Ta b l e s

1
Agilent 5517B/BL/C/D/DL/FL Laser Head
User’s Guide
Agilent Technologies
1
General Information
Introduction, 2
Description of the Agilent 5517B/BL/C/D/DL/FL Laser Head, 2
Manual Organization, 5
Options, 6
Accessories, 7
Related Documents, 9

2 Agilent 5517B/BL/C/D/DL/FL User’s Guide
1General Information
Introduction
This manual contains information required to install, operate, test, adjust,
and service the Agilent 5517B/BL/C/D/DL/FL Laser Head. The information
in this manual is specific to the Agilent 5517B/BL/C/D/DL/FL Laser Head,
unless otherwise stated. This manual does not contain information on how
to set up a laser interferometer position measurement system. The Agilent
Laser and Optics User’s Manual, part number 05517- 90086 and CD part
number 05517- 13602, will assist you in setting up, aligning and using the
laser system to make interferometer measurements.
Additional manuals are available for the other components that make up a
complete system. To find out more, visit the Agilent web site pertaining to
laser interferometer position measurement systems at
www.agilent.com/find/lasers.
The Agilent part number of this manual is listed on the “Notice” page
(inside front cover) and back cover.
Description of the Agilent 5517B/BL/C/D/DL/FL
Laser Head
The Agilent 5517B/BL/C/D/DL/FL Laser Head consists of a thermally-
tuned laser tube, control circuits, a reference receiver, and a high- voltage
power supply. The laser head requires external ±15 Volt supplies. Status
lights, mounted on the rear panel of the laser head, provide information
on power supply inputs and fuses and also on laser and reference
frequency outputs. The laser head produces a frequency stabilized laser
beam and a balanced reference output as the source of interferometer
position measurements.
The wavelength of light from the laser head is used as the length standard
for Agilent laser measurement systems. The laser head generates a
coherent (all light waves in phase), collimated (all waves traveling parallel
to one another), light beam consisting of two orthogonally polarized
frequency components. To differentiate between the frequencies, the lower
frequency is identified as f1and the higher as f2. Frequency f1is oriented
parallel to the laser base, while f2is perpendicular to the base.
The difference between these two frequencies is the reference frequency
listed in Table 1. An optical receiver inside the laser head detects the
frequency difference and makes it available on the rear panel connector as
a balanced electrical output called the REFerence Frequency. The reference
output is one signal used by the external electronics to measure the
distance traveled.

General Information 1
Agilent 5517B/BL/C/D/DL/FL User’s Guide 3
The physical differences between the 5517B/C/D and 5517BL/DL/FL are:
•5517B/C/D has a non- vented cover as shown in Figure 1.
•5517BL/DL/FL has a vented cover for heat isolation as shown in
Figure 1.
•5517B/C/D beam height is 79.5 mm (see Figure 26 on page 78).
•5517BL/DL/FL beam height is 80.8 mm (see Figure 27 on page 79).
Figure 1 Agilent 5517B/C/D and 5517BL/DL/FL Laser Heads
Table 1 lists the physical and operating differences. The primary difference
between the laser heads is the difference between their laser beam
reference frequencies. A larger frequency difference allows measurements
involving motion to be made at higher velocities (slew rates). See Chapter
4, Specifications for complete specifications on each model.
AVOID EXPOSURE
LASER LIGHT EMISSION FROM THIS APERTURE
Agilent 5517BL/DL/FL
Laser Head
Agilent 5517B/C/D
Laser Head
AVOID EXPOSURE
LASER LIGHT EMISSION FROM THIS APERTURE

4 Agilent 5517B/BL/C/D/DL/FL User’s Guide
1General Information
1 The maximum velocities apply to measurements made using linear or single pass interferometers, and the
Agilent E1708A or E1709A receivers.
2These specifications are for standard laser heads.
Tab l e 1 Summary of the laser head major operating characteristics
Agilent Model Maximum
Velocity
1
Reference Frequency Beam Output Power
2
Beam
Height Vented for Forced-Air Head
Dissipation
5517B 500 mm/s 1.9 MHz to 2.4 MHz Min: >120 µW
Max: 1 mW 79.5 mm No
5517BL 500 mm/s 1.9 MHz to 2.4 MHz Min: >120 µW
Max: 1 mW 80.8 mm Yes
5517C 711 mm/s 2.4 MHz to 3.0 MHz Min: >180 µW
Max: 1 mW 79.5 mm No
5517D 1000 mm/s 3.4 MHz to 4.0 MHz Min: >180 µW
Max: 1 mW 79.5 mm No
5517DL 1200 mm/s
≥ 4.4 MHz Min: 180 µW
Max: 1 mW
After 3 yrs: >120 µW
80.8 mm Yes
5517FL 2000 mm/s 7.0 MHz Min: >65 µW
Max: 1 mW
After 3 yrs: >50 µW
80.8 mm Yes
Tab l e 2 Laser head mechanical and electronic assembly summary
Agilent Model Serial Number Cover A3 Controller/Reference Assembly
5517FL All One-piece 05517-60032
5517DL All One-piece 05517-60031
All others US4410 and above One-piece 05517-60031
Below US4410 Two-piece 05517-60003

General Information 1
Agilent 5517B/BL/C/D/DL/FL User’s Guide 5
Manual Organization
Front matter includes the warranty information, safety information, table
of contents, and list of figures and tables.
Chapter 1, “General Information” (this chapter) —
Covers product description, manual organization, options, and available
accessories.
Chapter 2, “Laser Head at a Glance” —
Provides a visual introduction to the Agilent 5517B/BL/C/D/DL/FL Laser
Head and an overview of its aperture, indicators, and connector.
Chapter 3, “Installation” —
Provides installation and power- up instructions for the
Agilent 5517B/BL/C/D/DL/FL Laser Head. This chapter contains details
about connecting the laser heads to the power supplies, axis boards, and
chassis/systems using the laser head cables. It also contains electrical and
mounting considerations information.
Chapter 4, “Performance Tests” —
Provides procedures that verify the laser head operates properly and
meets the Agilent 5517B/BL/C/D/DL/FL Laser specifications given in
Chapter 8, “Specifications.”
Chapter 5, “Adjustments” —
Provides instructions on how to adjust voltage levels at key points on the
hardware.
Chapter 6, “Using the Laser Head in a System” —
Provides an overview of how the laser interferometer system works, and
describes how to align the optics, make a measurement, and solve
problems.
Chapter 7, “Service” —
This chapter is divided into three parts. Part 1 contains instructions on
unpacking and inspection, warranty claims, and returning the laser head
to Agilent for service. Part 2 contains troubleshooting information that
guide you in troubleshooting the laser head to the defective assembly. Part
3 contains the disassembly and reassembly procedures.
Chapter 8, “Specifications” —
Lists all specifications and operating characteristics for the laser head.
Index

6 Agilent 5517B/BL/C/D/DL/FL User’s Guide
1General Information
Options
Table 3 lists most available options.
* Support Option W50 is available only at the time of purchase. Service contracts are available from Agilent for
instruments which did not include support options at the time of purchase. For information, contact your
nearest Agilent Technologies Sales and Support office (offices are listed at the back of this manual).
Tab l e 3 Available options*
* Contact your Agilent representative for information about additional options.
Model Option* Description
5517B Option A6J ANSI-NCSL 2540-1-1994 Compliant Calibration
Option 141 Japanese User’s Manual
5517BL Option AV4 Laser and Optics User’s Manual
Option A6J ANSI-NCSL 2540-1-1994 Compliant Calibration
5517C Option A6J ANSI-NCSL 2540-1-1994 Compliant Calibration
Option H07 Optical Power > 400 µW
Option OBV Additional User’s Manual
Option 003 3mm beam
Option 006 6mm beam (default)
Option 009 9mm beam
Option 030 Replaces standard feet with three electrically insulated feet.
Option 038 Delete feet
Option 039 Standard Mounting (default)
5517D Option A6J ANSI-NCSL 2540-1-1994 Compliant Calibration
Option 030 Replaces standard feet with three electrically insulated feet.
Option 039 Standard Mounting (default)
5517DL Option 006 6mm beam (default)
Option 009 9mm beam
Option 038 Delete feet
Option 039 Standard Mounting (default)
5517FL Option 006 6mm beam (default)
Option 009 9mm beam
Option 030 Replaces standard feet with three electrically insulated feet.
Option 039 Standard feet (default)