Agilent Technologies EXSLRSH110 User manual

D R A F T
Vacuum Products Division
SH-110 EXHAUST
SILENCER KIT
Part No. 699904395
Rev. A
April 2008
INSTRUCTION MANUAL

D R A F T
Copyright 2008
Agilent, Inc.
SH-110 Exhaust Silencer Kit

SH-110 Exhaust Silencer Kit
D R A F T
iii
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
When products are used with toxic chemicals, or in an atmosphere that is dangerous to the health of
humans, or is environmentally unsafe, it will be the responsibility of the Customer to have the product
cleaned by an independent agency skilled and approved in handling and cleaning contaminated
materials before the product will be accepted by Agilent, Inc. for repair and/or replacement.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements
made by any person, including representatives of Seller, which are inconsistent or in conflict with the
terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an
officer of Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or
adjustment, written authorization from Seller or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained. Any Product
returned to Seller for examination shall be prepaid via the means of transportation indicated as
acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and
any warranty claim on any item that has been altered or has been returned by non-acceptable means of
transportation. When any Product is returned for examination and inspection, or for any other reason,
Customer shall be responsible for all damage resulting from improper packing or handling, and for loss
in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole
responsibility for determining the cause and nature of failure, and Seller’s determination with regard
thereto shall be final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned. 3/1/00

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D R A F T

SH-110 Exhaust Silencer Kit
D R A F T
v
Preface
Documentation Conventions
This manual uses the following documentation conventions:
WARNING Warnings indicate a particular procedure or practice, which
if not followed correctly, could lead to serious injury.
CAUTION Cautions indicate a particular procedure or practice, which if
not followed, could cause damage to the equipment.
NOTE Notes contain important information.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Agilent. Be aware of the hazards associated with this
equipment, know how to recognize potentially hazardous conditions, and how to avoid
them. Read carefully and strictly observe all cautions and warnings. The consequences of
unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Agilent office.

SH-110 Exhaust Silencer Kit
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D R A F T

SH-110 Exhaust Silencer Kit
D R A F T
1-1
SH-110 Exhaust Silencer Kit
Agilent’s exhaust silencer kit for the SH-110 scroll pumps reduces the total sound pressure
level due to exhaust pulsation, mitigates audible noise in the most sensitive frequencies,
and collects tip seal dust with a 5-micron filter element.
Figure 1-3 shows the kit mounted at the exhaust of an SH-110 in the side position.
Table 1-1 breaks down the kit parts and quantities.
Replacement polyester filter element rated 99% efficient at the 5-micron particle size, P/N:
REPLSLR FILTER1.
Table 1-1 Exhaust Silencer Kit for SH-110, P/N: EXSLRSH110
Part Name Qty
Filter/ Silencer Can NW 16 1
Clamp NW16 black 1
90° elbow barb fitting 1/4" NPT x 1/2" hose 1
Centering ring 1
Tygon hose black .75" OD x .125" W x 5" long 2
Silencer/ Resonator Assembly 1
NW 16 connector .50 tubing 1
Tie Wrap 1
Mount, Adhesive Backed 1
Hose Clamp 4

SH-110 Exhaust Silencer Kit
1-2
D R A F T
Installation
NOTE To ensure proper operation, and to prevent damage, the kit
must be installed and operated only as specified.
To install:
1. Unscrew the ¼" NPT coupler for the pump's exhaust (unless using the small footprint
version).
2. Screw in the ¼" NPT hose barb fitting into the ¼" NPT female exhaust fitting.
Refer to Figure 1-1 for this procedure.
Figure 1-1 : SH-110 Exhaust Silencer Kit: Components
3. Connect the longer piece of Tygon tubing into the ½" hose end of the 1/4" NPT barb and
secure with a hose clamp.
4. Connect the other end of the Tygon tubing to the ½" hose, 3/8" NPT barb belonging to
the Resonator assembly and secure with a hose clamp.
5. Connect the second Tygon tubing to the ½" hose end of the 1/4" NPT barb and secure
with a hose clamp.
6. Attach the smooth end of the NW16 connector to the other end of the Tygon tubing.
7. Connect the NW16 flange to the NW16 connector by the means of a centering ring and
secure connection with a clamp.
Optional: if a smaller footprint is desired (Figure 1-4 on page 1-3), connect the
Silencer-Filter Can NW16 connector directly to the pump's exhaust, which has an NW
16 flange, and secure it with a clamp via a centering ring.

SH-110 Exhaust Silencer Kit
D R A F T
1-3
WARNING Do not use this kit If the application requires capture or
containment of gases being pumped. Instead, route the pump
exhaust to an appropriate collection system.
Figure 1-2 shows the kit dimensions.
Figure 1-2 : SH-110 Silencer/ Filter Can, Kit Dimensions
Figure 1-3 SH-110 with Exhaust Silencer Kit Installed
Figure 1-4 SH-110 with Exhaust Silencer Kit-small Footprint Version- No Resonator

SH-110 Exhaust Silencer Kit
1-4
D R A F T
Performance
Typical reductions are: 4 dB(A) measured at 1 m from the front of the pump, on a horizontal
direction and an average of 3.8 db(A) from all three directions, under a 2-3 Torr load, and
with the gas ballast open. The exhaust silencer kit does not significantly influence the sound
pressure when pumping at base pressure.
The kit’s silencer/resonator assembly mitigates exhaust pulsation noise in the most sensitive
frequencies.
If the smaller footprint version is adopted, the silencing performance is slightly diminished,
and the low frequencies are not as successfully mitigated as with the full version.
Maintenance
Replace the 5-micron filter element after every tip-seal or module change.

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Pg 1/3
NORTH AMERICA:
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[email protected]
PACIFIC RIM:
please visit our website for individual
office information
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Vacuum Products Division
Instructions for returning products
Dear Customer:
Please follow these instructions whenever one of our products needs to be returned.
1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify
all products that have pumped or been exposed to any toxic or hazardous materials.
2) After evaluating the information, Agilent Technologies will provide you with a Return Authorization (RA) number via email or fax,
as requested.
Note: Depending on the type of return, a Purchase Order may be required at the time the Request for Return is submitted. We
will quote any necessary services (evaluation, repair, special cleaning, eg).
3) Important steps for the shipment ofreturning product:
xRemove all accessories from the core product (e.g. inlet screens, vent valves).
xPrior to shipment, drain any oils or other liquids, purge or flush all gasses, and wipe off any excess residue.
xIf ordering an Advance Exchange product, please use the packaging from the Advance Exchange toreturn the defective
product.
xSeal the product in a plastic bag, and package product carefully to avoid damage in transit. You are responsible for loss or
damage in transit.
xAgilent Technologies is not responsible for returning customer provided packaging or containers.
xClearly label package with RAnumber. Using the shipping label provided will ensure the proper address and RA number
are on the package. Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will
be returned.
4) Return only products for which the RA was issued.
5) Product being returned under a RAmust bereceived within 15business days.
6) Ship tothe location specified onthe printable label, which will besent, along with the RAnumber, assoon aswehave received
all ofthe required information. Customer is responsible for freight charges on returning product.
7) Return shipments must comply with all applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION:
Req
uest for Return Health and
Safety Certification

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Vacuum Products Division
Request for Return Form
(Health and Safety Certification)
Please read important policy information on Page 3 that applies to all returns.
1) CUSTOMER INFORMATION
Company Name:
Contact Name:
Tel:
Email:
Fax:
Customer Ship To:
Customer Bill To:
Europe only: VAT reg. Number:
USA/Canada only: Taxable Non-taxable
2) PRODUCT IDENTIFICATION
Product Description
Agilent P/N
Agilent S/N
Original Purchasing Reference
3) TYPE OF RETURN (Choose one from each row and supply Purchase Order if requesting a billable service)
3A. Non-Billable Billable New PO # (hard copy must be submitted with this form):
3B.Exchange Repair Upgrade Consignment/Demo Calibration Evaluation Return for Credit
4) HEALTH and SAFETY CERTIFICATION
AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS,
RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY.
Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT pumped or been exposed to any toxic or hazardous materials. OR
HAS pumped or been exposed to the following toxic or hazardous materials. If this box is checked, the following
information must also be filled out. Check boxes for all materials to which product(s) pumped or was exposed:
Toxic Corrosive Reactive Flammable Explosive Biological Radioactive
List all toxic/hazardous materials. Include product name, chemical name, and chemical symbol or formula:
________________________________________________________________________________________________________
NOTE: If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all
costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of
exposure to toxic or hazardous materials present in the product.
Print Name: Authorized Signature: ………………………. Date:
5) FAILURE INFORMATION:
Failure Mode (REQUIRED FIELD. See next page for suggestions of failure terms):
Detailed Description of Malfunction: (Please provide the error message)
Application (system and model):
I understand and agree to the terms of Section 6, Page 3/3.
Print Name: Authorized Signature: ………………………. Date:

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Vacuum Products Division
Request for Return Form
(Health and Safety Certification)
Please use these Failure Mode to describe the concern about the product on Page 2.
TURBO PUMPS and TURBO CONTROLLERS
APPARENT DEFECT/MALFUNCTION
POSITION
PARAMETERS
- Does not start
- Noise
- Vertical
Power: Rotational Speed:
- Does not spin freely
- Vibrations
-Horizontal
Current:
Inlet Pressure:
- Does not reach full speed
-Leak
-Upside-down
Temp 1: Foreline Pressure:
- Mechanical Contact
-Overtemperature
-Other:
Temp 2:
Purge flow:
- Cooling defective
-Clogging
………………….
OPERATING TIME:
ION PUMPS/CONTROLLERS VALVES/COMPONENTS
- Bad feedthrough - Poor vacuum - Main seal leak - Bellows leak
- Vacuum leak - High voltage problem - Solenoid failure - Damaged flange
- Error code on display - Other - Damaged sealing area -Other
LEAK DETECTORS INSTRUMENTS
- Cannot calibrate -No zero/high backround - Gauge tube not working - Display problem
- Vacuum system unstable
- Cannot reach test mode
- Communication failure
- Degas not working
- Failed to start - Other - Error code on display - Other
SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS
- Pump doesn’t start - Noisy pump (describe) - Heater failure - Electrical problem
- Doesn’t reach vacuum - Over temperature - Doesn’t reach vacuum - Cooling coil damage
- Pump seized - Other - Vacuum leak - Other
Section 6) ADDITIONAL TERMS
Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent
Technologies Vacuum Product Division – Products and Services Terms of Sale.
xCustomer is responsible for the freight charges for the returning product. Return shipments must comply with all
applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
xCustomers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies
within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the
non-returned/non-rebuildable part.
xReturns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur
a restocking fee. Please reference the original purchase order number.
xUnits returned for evaluation will be evaluated, and a quote for repair will be issued. If you choose to have the unit
repaired, the cost of the evaluation will be deducted from the final repair pricing. A Purchase Order for the final repair price
should be issued within 3 weeks of quotation date. Units without a Purchase Order for repair will be returned to the
customer, and the evaluation fee will be invoiced.
xA Special Cleaning fee will apply to all exposed products per Section 4 of this document.
xIf requesting a calibration service, units must be functionally capable of being calibrated.

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