CKD FCM Series User manual

1365
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
CONTENTS
Product introduction 1366
Applications 1368
Series variation 1369
Safety precautions 1370

FCM 1376
Technical data 1385
Functional explanation, operation 1387
Custom 1403
Sensors / flow controller
Small size flow controller
FCM

1366
Microcomputer attains high
accuracies and multi-functions
Rectifier mechanism
improves low pressure
loss and repeatability
High-speed response
micro machined sensor
chip incorporated
Small size flow controller
Resin body
 Applicable fluids/Flow rates
Weight/approx. 200g
0.015 to 100R/min.
Stainless steel body
 Applicable fluids/Flow rates
 Weight/approx. 480g
0.015 to 50R/min.
0.015 to 50R/min.
0.015 to 10R/min.
0.06 to 20R/min.
FCM Series
Compact, high-speed, multifunction solution
Ultimate ideal multi-functions
flow controller
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
FCM Series

1367
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
This series supports various gases including air,
nitrogen, argon, oxygen, methane and propane. The new
series is compatible with hydrogen and helium, allowing
use with a variety of applications.
The flow of combustion gas with low supply pressure, such
as burner thermal power control, can now be controlled.
Merging the small size flow sensor FSM and small solenoid valve technologies.
The small size flow controller FCM Series is equipped with sensor functions,
proportional control functions and valve functions, all which have a high
performance and cost feasibility. This series supports various applications.
Compatible with various fluid types
New low differential pressure model
Digital display shows the
control state at a glance
Compact and light weight
0.5 second high-speed control
The size is just 70H70D 30W.
Install in a confined place or on a moving space to
downsize and lighten a system.
Volume Compared to
conventional approx.
Weight Compared to
conventional approx.
The platinum sensor chip using silicone micro machining
achieves 0.5 second high-speed control, enabling use in
various applications.
Input signal
Analog output (%FS)
A 24VDC power voltage allows operation with general-
purpose single supplies.
Dedicated power supply not required
All substances, such as lead and hexavalent chrome,
which could adversely affect the global environment,
have been completely eliminated from the materials
used in this controller.
RoHS Directive compliant
CKD’s original rectifier control
enhances the repeatability
affecting flow controllability.
Highly reliable flow control
Repeatability
Precision
• The flow value is displayed digitally with three digits.
• The output state (switch output ON-OFF) is displayed in
addition to the error display.
Output display 3-digit LED display
A top/bottom reversed
display can be selected
according to the
installation direction
(option)
Parallel input type
available as a standard
Control with parallel input (PLC, etc., ON/OFF signal, 10-
bit resolution 1024) is possible. An analog input/output
device, such as a D/A converter, is no longer needed.
Realize multi functions
with microcomputer
Error display function
Errors are displayed and notified with electrical signals.
Zero/span adjustment function
Zero and span can be adjusted according to the usage
methods.
Preset input function
Set up to four random flow rate points, and control the
flow with 2-bit signal inputs from an external source
(signals from PLC, etc.).
Direct memory function
Freely adjust the control flow with the production’s
operation keys even without input signals from an
external source.
Switch output function
A switch output function using the flow rate’s upper/lower
limit settings is incorporated. (Built-in overcurrent
protection)
Flow rate integrating function
Integral display of the flow rate (max. 6 digits) and pulse
outputs for integration are possible.
Automatic shutoff function
The valves are automatically shutoff in an emergency,
such as when an error occurs.
Time (sec)
FCM Series

1368
FCM Series
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Useful in different fields
This small size flow controller is used for different applications including machinery, automobile, precision device fields,
and advanced fields such as semiconductors and biotechnology, medicine and food.
Compatibility with different flow rate ranges enables
flow rates of purge gas, etc., to be controlled.
Dry
air
1 10 100
N2
Liquid crystal Glass floating transfer
Semiconductor
Liquid crystal Ionizer purge gas flow control
Compatibility with different flow rate ranges
enables air flow rates to be controlled.
Wire bonding
Ideal for wire bonding tension
control requiring high accuracy.
Ideal for floating (non-contact)
transfer of large FPD glass, etc.
O2
Ar
Automobile, etc. Control of argon gas flow for welding
Compatibility with different flow rate ranges enables
to control argon gas flow for welding.
Glass processing Burner flame control
The low-pressure gas supply enables
burner flame, etc., to be controlled.
Semiconductor Purge gas flow control
N2 gas control for laser oscillator and semiconductor manufacturing equipment
Foods Filling package
Ideal for adding inert gas for food packages, etc.
H2
0.1
Flow (R/min.)
Applicable fluids
Combustion
gas

1369
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
FCM Series
Series variation
Applicable fluids / flow control ranges
FCM-9500 AI
FCM-0001 AI
FCM-0002 AI
FCM-0005 AI
FCM-0010 AI
FCM-0020 AI
FCM-0050 AI
FCM-0100 AI (only resin)
FCM-9500 AR
FCM-0001 AR
FCM-0002 AR
FCM-0005 AR
FCM-0010 AR
FCM-0020 AR
FCM-0050 AR
FCM-9500 O2/LN/C1/C3
FCM-0001 O2/LN/C1/C3
FCM-0002 O2/LN/C1/C3
FCM-0005 O2/LN/C1/C3
FCM-0010 O2/LN/C1/C3
FCM-0002 H2/HE
FCM-0005 H2/HE
FCM-0010 H2/HE
FCM-0020 H2/HE
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
1.5 to 50
3 to 100
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
1.5 to 50
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
Air
Nitrogen
Air typeGas type
Resin
0.10.01 1 10 100
Model no. Applicable
fluids
Flow control range (R/min.) Body material
ø6 push-in
ø8 push-in
Rc1/4
9/16-18 UNF
Rc1/4
9/16-18 UNF
Resin
SUS
SUS
Port size
SUS
Rc1/4
9/16-18 UNF
Rc1/4
9/16-18 UNF
1/4 inch
Double barbed joint
1/4 inch
JXR male joint
Argon
Oxygen
City gas
Methane
Propane
Hydrogen
Helium
SUS
SUS
I/O specifications
FCM-*-*0AN
FCM-*-*0AP
FCM-*-*0SN
FCM-*-*0SP
FCM-*-*1AN
FCM-*-*1AP
FCM-*-*1SN
FCM-*-*1SP
FCM-*-*2AN
FCM-*-*2AP
FCM-*-*2SN
FCM-*-*2SP
FCM-*-*PAN
FCM-*-*PAP
FCM-*-*PSN
FCM-*-*PSP
Gas typeGas type
Input
Input signal: specifications
Analog: 0-10V
Preset: 4 points (2 bit) (Note)
1-5V
NPN
PNP
1-5V
NPN
PNP
1-5V
NPN
PNP
Analog: 0-5V
Preset: 4 points (2 bit) (Note)
Analog: 4-20mA
Preset: 4 points (2 bit) (Note)
Parallel: 10bit
Analog
Switch
Analog
Switch
Analog
Switch
(Note) Preset 8-point (3-bit) input is used customized. (The external integration reset signal input cannot be used.) Contact our CKD Sales Office for details.
Model no. Output
Error outputSpecificationsOutput method
Analog 1-5V
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
Switch
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
bit
bit
bit
bit
AIR
N
2
C3H8
13A
O
2
Ar
CH
4

1370
Flow controller
Safety precautions
Always read this section before starting use.
Refer to Intro 67 for general precautions.
Small size flow controller FCM Series
Design & Selection
1. Working fluid
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
DANGER
WARNING
 Do not feed gas at the explosion limit. There is a
risk of explosion.
 Before using hydrogen, be sure to purge piping with
inert gas such as nitrogen or argon. Otherwise ex-
plosions could occur.
 Do not feed oxygen gas to wetted sections that are
not oil-treated. There is a risk of fire. Even if the
product has oil treatment, if gas other than oxygen
gas has passed even once, do not use the product
for oxygen gas.
 This product cannot be used as a business meter.
This product does not comply with Measurement
Laws, and cannot be used for commercial business.
 This product is for use with gases indicated on the
model. Use of noncompatible fluids lowers product
accuracy and controllability. If hydrogen or helium
gas is passed to a series not designated for these,
the sensor safety circuit may prevent operation. (If
the safety circuit operates, the flow cannot be mea-
sured or controlled until power is turned off.)
 When mixing hydrogen or helium with another gas,
be sure to note reverse gas flow. If hydrogen or
helium is passed to a series not designated for
these, the sensor safety circuit may prevent opera-
tion. (If the safety circuit operates, the flow cannot
be measured or controlled until power is turned off.)
When shutting off gas, provide shutoff valves and
shut off each gas separately as shown below to pre-
vent gas from flowing in reverse.
 Prevent entry of foreign matter into this product.
If foreign matter gets into this product (dirt, water,
or oil mist into pipes), accuracy and controllability
could drop or the product could fail.
If foreign matter could enter the product, install a
filter, dryer, or oil mist filter upstream from the prod-
uct.
The mesh provided in this product is used to rectify the
flow in pipes. It is not a filter for removing foreign matter.
Compressed air from the compressor contains drainage
(water, oxidized oil, foreign matter, etc.), so install a filter,
air dryer, and oil mist filter (microalescer) upstream from
the product.
When using compressed air, use clean air that complies
to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2.
<Recommended circuit>
When using a valve on the primary side of this product,
only use an oil-prohibit specification valve. This controller
could malfunction or fail if subject to splattering grease or
oil, etc.
Use dry gas which does not contain corrosive elements
such as chlorine, sulfur or acids, and which is clean and
does not contain dust or oil mist.
Depending on the fluid, retaining the fluid for a long time
could adversely affect the performance. Do not seal the
fluid in the pipe for long periods of time.
 When using this controller for liquefied gas such as
propane gas, evaporate the gas. This controller
could fail if liquefied gas is fed.
 When using this product to control burner air-fuel
ratio, take measures in the design stages to pre-
vent backfire, and to prevent adverse effect to this
product even if a backfire should occur. A rise in the
pipe's internal pressure and flame caused by a
burner's backfire could damage this product.
 Confirm that the fluid supply line's pressure is within
the working differential pressure range before start-
ing use.
If the main pressure is low, or the secondary pres-
sure is high, the differential pressure will be lost and
the fluid will not flow.
Gas supply
source Shut off valve
FCM Series
(Hydrogen/helium)
Gas supply
source Shut off valve
FCM Series
(Other than hydrogen/helium)
Pneumatics
pressure source FCM Series
Filter
Air
dryer Regulator
Oil mist filter

1371
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
FCM Series
Individual Precautions
Design & Selection
2. Working environment
WARNING
CAUTION
3. Flow unit
 Corrosive environment
Do not use this product in an environment contain-
ing corrosive gases such as sulfurous acid.
 Ambient temperature, fluid temperature
Keep the ambient temperature and fluid tempera-
ture within 0 to 50˚C. Even if the temperature is
within the specified range, do not use this product if
the ambient temperature and fluid temperature could
suddenly change and cause dew to condense.
 Guaranteed withstanding pressure and operating
pressure difference range
Using this product at a level exceeding the guaran-
teed withstanding pressure and operating pressure
difference could cause damage. Follow the speci-
fied range.
The differential pressure will be lost and the fluid
will not flow if the main pressure is low or if the sec-
ondary pressure is high.
 Drip-proof environment
This product's protective structure is IP40 or equiva-
lent. Do not install it where it could be subject to
water, salt, dust, or cutting chips, or a compressed
or decompressed environment. This product can-
not be used where the temperature changes sharply
or in a highly humid environment as dew conden-
sation in the product could cause damage.
 This product's solenoid proportional valve does not
have a complete close-stop.
If a complete close-stop is required, provide a sepa-
rate external shutoff valve.
When the external shutoff valve is closed, wait with
this product's valve fully closed (set flow rate: zero).
If this product is left in normal control while this ex-
ternal shutoff valve is closed, an instant overflow
could occur when the external shutoff valve is
opened. When using for applications that turn ON/
OFF at a high frequency, the life of the proportional
valve may be shortened depending on use. Con-
tact CKD when using for applications that turn ON/
OFF at a high frequency.
 Do not install this product at a place that moves or
vibrates. Vibration or impact could cause this con-
troller to malfunction.
 Check the leakage current to prevent malfunction
caused by current leaking from other controllers.
When using a PLC, etc., this product could malfunc-
tion because of leakage currents.
 Due to wiring, the current input power ground and
signal common are the same.
When driving several of these products with one
PLC and D/A unit, depending on the D/A unit's cir-
cuit, the correct signal may not be input because of
wiring problems. Consult with the PLC maker be-
fore using.
 Current input is used with input signal 1-5 V, but
unlike other voltage input, the input impedance is
small at 250Ω, so a signal generator that matches
this impedance must be used.
 Monitor the pipe's pressure loss
When piping this product, check that the differential
pressure between the upstream side and down-
stream side is within the operating pressure differ-
ence range (refer to pages 1377, 1379). Controller
may not operate properly if used outside of the op-
erating pressure difference range. Operation may
not be as expected if there is an orifice or restric-
tion on the secondary side (downstream) of the prod-
uct. Care must be taken.
If the primary or secondary pressure of this product
repeatedly fluctuates, the ability to track the
product's control may be lost, and the flow control
may become unstable.
 This controller's flow rate is measured with mass
flow not affected by pressure. The unit isR/min.,
that is the mass flow converted to volumetric flow
at 20˚C 1 barometric pressure (101 kPa).
CAUTION

1372
FCM Series
Installation & Adjustment
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
1. Wiring
DANGER
 Use power voltage and output within the specified
voltage. If voltage exceeding the specified voltage
is applied, the sensor could malfunction or be dam-
aged, or electrical shock or fire could occur. Do not
use a load exceeding the output rating. Failure to
observe this could result in output damage or fire.
 Check the connector pin and cable conductor wire
color when wiring. Incorrect connections could re-
sult in sensor damage, problems, and malfunctions,
so check the wire color against the instruction
manual before wiring.
 Check wiring insulation.
Check that wires do not contact other circuits, that
there is no ground fault, and that the insulator be-
tween terminals is not defective. An overload could
flow to the product, and result in damage.
 Use a DC stabilized power supply, within the speci-
fied rating, insulated from the AC power supply.
Failure to insulate the power supply could result in
electric shock. If power is not stabilized, the peak
could be exceeded during the summer. This could
damage this product or cause accuracy to drop.
 Stop controller and devices, and turn power OFF
before wiring. Starting operation suddenly could
result in unpredictable operation and hazards. Con-
duct an energized test with controllers and devices
stopped, and set target switch data. Discharge any
static electricity accumulated by personnel or tools
before and during work. Connect and wire bending
resistant material, such as robot wire material, for
movable sections.
 Do not use this controller at levels exceeding the
power voltage range. If voltage exceeding the speci-
fied range is applied, or if an AC power (100 VAC)
is applied, the controller could break or burn.
 Separate this product and its wiring as far away from
sources of noise such as power distribution wires.
Provide separate measures for surge applied to the
power cable.
 Do not short-circuit the load.This product could break
or burn.
 Use stabilized DC power completely separated from
the AC primary side for stainless steel construction.
Connect either the plus or minus side of the power
supply to the FG. A varistor (limit voltage. 40 V) is
connected between the stainless steel internal
power circuit and stainless steel device to prevent
dielectric breakdown of the sensor. Do not conduct
a withstand voltage test or insulation resistance test
between the internal power circuit and stainless steel
device. Disconnect wiring if this testing is required.
An excessive potential difference between the power
and stainless steel device will cause the internal
parts to burn.
After installing, connecting, and wiring the stainless
steel device, electrical welding of the device or frame
or short-circuit accidents, etc., could cause the weld-
ing current, the excessive high voltage caused by
welding, or a surge voltage, etc., to run through wir-
ing or ground wire connected between the above
devices. This could result in damage to wires or
devices. Conduct any work such as electrical weld-
ing after removing this device and disconnecting all
electric wires connected to the FG.
 The option shield cable connector is a shielded wire.
Insulate wires that are not being used so that they
do not contact other wires, including shielded wires.
If inadvertently connected to the ground, etc., the
controller could malfunction or break.
 Check the direction and fit the D-sub connector into
the back.
 Lock the D-sub connector so that it does not dislo-
cate. Before loosening the lock, fix the fixing block
with a tool, etc.
 Extending the cable
When extending the cable longer than 3m, the wir-
ing resistance could cause the analog output and
analog input signal error to increase and the con-
trol to become unstable. Using with a length within
3m is recommended.
DIGITALMASSFLOWCONTROLLER
MADEINJAPAN
WARNING
CAUTION

1373
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
FCM Series
2. Piping
CAUTION
 Pipe based on the fluid direction and the direction
indicated on the device.
 Tightening the 4S or 4RM port size (hydrogen, he-
lium model) joint
(1) Tightening the joint
4RM (1/4 inch JXR male joint) — When gasket material
is nickel or SUS316
Tighten the nut by hand until the gasket contacts the
bead, then tighten 1/8 of a turn using a tool.
4S (double-barbed joint) — Confirm that the front fer-
rule, back ferrule, and nut are correctly attached, and
insert tubing until it contacts the back of the main body.
Tighten the nut by hand as far as possible, then tighten
1 1/4 of a turn using a tool.
 Before piping, clean pipes with compressed air to
remove any foreign matter of cutting chips, etc. The
rectifying unit or platinum sensor could be damaged
if foreign matter or cutting chips get in.
 When attaching piping to this product, use the fol-
lowing torques as reference so that excessive
screwing torque or load torque is not applied to the
connection port.
 When piping, put a wrench, etc., on the stainless
steel device so that force is not applied to the resin
section.
Nut
Gasket
Bead
Holder
Front ferrule Back ferrule
Tube
Nut
Rc1/4
9/16-18UNF
6 to 8
6 to 8
Tightening torque N·mPort thread
 Check that sealing tape or adhesive does not get
inside when piping.
 When connecting pipes, wrap sealing tape in the
opposite direction from threads starting 2 mm in-
side from the end of piping threads.
If sealing tape protrudes from pipe threads, it could be cut
when screwed in. This could cause the tape to enter the
solenoid valve and lead to faults.
When using a liquid sealing agent, check that it does not
get on resin parts. Otherwise resin could be damaged.
Otherwise resin could be damaged.
 Sealant may stick to threads when piping is removed.
Be sure to remove sealant before repiping.
 Connect a joint even when using the stainless steel
device with the OUT side opened. The port filter
could come off.
 When using resin construction, do not bend the tube
near the push-in joint. If strain could be applied to
the tube near the push-in joint, attach an insert ring
onto the tube and insert into the push-in joint.
 When using resin construction, accurately insert the
tube and confirm that it does not dislocate even
when pulled. Cut the tube at a right angle with a
dedicated cutter before using.
 After piping, confirm that no gas is leaking.
 When using this product for oxygen gas, monitor
the following points.
Piping work must be completed by personnel with exper-
tise on handling oxygen gas.
Use oil-treated pipes.
Remove any dirt or burrs from piping before attaching to
this product.
Attach a filter to the primary side of this product.
Installation & Adjustment

1374
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
FCM Series
WARNING
During Use & Maintenance
 This product uses a micro-sensor chip, and must be
installed where it will not be subject to dropping,
impact or vibration. Handle this product as a preci-
sion device during installation and transportation.
 If a failure occurs during operation, turn power OFF
immediately and stop use. Contact your dealer.
 This product does not control the flow for two seconds
after power is turned ON so it completes self-diagno-
sis. Provide a control circuit and program that ignore
signals for two seconds after power is turned ON.
 Keep this product's flow within the rated flow range.
 Use this product within the operating differential pres-
sure range.
 When the setting is changed, control devices could
operate unintentionally. Stop devices before chang-
ing settings.
 Do not disassemble or modify this product. Doing
so could result in faults.
 This case is made of resin. Do not use solvent, alco-
hol or any other cleaning agent to remove contami-
nation, etc., or the resin case could be corroded or
damaged. Wipe off any dirt with a rag soaked in a
diluted neutral detergent solution and wrung out well.
 Monitor leading of the surge current
When controller power is shared with an inductive
load that generates a surge, such as a solenoid
valve or relay, if the circuit is cut off while the induc-
tive load is functioning, the surge current could en-
ter the output circuit and cause damage depending
on where the surge absorption element is installed.
 Take countermeasures as followings to prevent dam-
ages caused by reverse current.
(1) Avoid centralizing current at the power cable, es-
pecially the minus side power cable, and use as
thick cable as possible.
Input
components
Input
components
Input
components
(2) Limit the number of devices connected to the
same power as this product.
(3) Insert a diode in serial with the flow sensor's out-
put cable to prevent reversal of current.
(4) Insert a diode in serially with this product's power
cable to prevent reverse flow of the current.
 Monitor leading of the surge current
When controller power is shared with an inductive
load that generates a surge, such as a solenoid
valve or relay, if the circuit is cut off while the induc-
tive load is functioning, the surge current could en-
ter the output circuit and cause damage depending
on where the surge absorption element is installed.
Take countermeasures as followings to prevent
damage caused by surge current leading.
(1) Separate the power supply for output compris-
ing the inductive load, such as the solenoid valve
and relay, and input, such as the flow controller.
(2) If separate power supplies cannot be used, di-
rectly install a surge absorption element for all
inductive loads. Remember that the surge ab-
sorption element connected to the PLC, etc., pro-
tects only that device.
(3) Connect a surge absorption element to the fol-
lowing places on the power wiring as shown be-
low as a measure against disconnections in un-
specific areas:
When components are connected with connectors,
if a connector is dislocated during energizing, the
output device could be damaged because of the
reason above. Turn off the power before dislocat-
ing a connector.
 Inspect the sensor at least once a year and confirm
that it operates correctly.
 The sensor chip will degrade when used for a long
time and cause the detected flow to vary. Periodi-
cally inspect the sensor chip.
CAUTION
 Output accuracy is affected by the temperature char-
acteristics and heat self-generated when energized.
Provide a standby time (10 minutes or more after
turning power ON) when using.
Other
device Test SW or
short circuit
Disconnection
This product
Diode to prevent
reverse flow Control panel
Current from
other device
Main
circuit
PLC input
Surge
absorbing
element
(Integrated)
Circuit cutoff with
disconnection
or emergency stopSurge absorbing element
(To be installed later)
Flow controller
Surge current PLC output
PLC
ON
Main
circuit
Relay
Solenoid
valve

MEMO
1375
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter

1376
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Small size flow controller
FCM Series
 Air, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100R/min.)
Hydrogen, helium (flow rate range: 0 to 20R/min.)
Full scale
flow
Note 1
Applicable
fluids
Note 2
*3
Port size/
Body material
0 to 500mR/min.
0 to 1R/min.
0 to 2R/min.
0 to 5R/min.
0 to 10R/min.
0 to 20R/min.
0 to 50R/min.
0 to 100R/min. (only resin)
0 to 500mR/min.
0 to 1R/min.
0 to 2R/min.
0 to 5R/min.
0 to 10R/min.
Compressed air, nitrogen
Argon
Oxygen (oil-prohibited specifications)
City gas (13A) Note 3
Methane (CH4 100%)
Propane (C3H8 100%)
ø6 push-in, resin (excluding 50, 100 R/min.)
ø8 push-in, resin
Rc1/4, stainless steel
9/16-18UNF, stainless steel
Control range
Responsiveness
9500 to 0020, L9500 to L0010
0050 to 0100
Precision
Repeatability
Temperature characteristics
Pressure characteristics
Standard differential pressure Note 4
Operating differential pressure range Note 5
Withstanding H6/H8 (resin body)
pressure
8A/UF (SUS body)
Input 0
signal/ 1
pre-set 2
input P
AN
AP
Output
signal SN
SP
Display method
Display range, display resolution
Power voltage
Current consumption
H6/H8 (resin body)
8A/UF (SUS body)
H6/H8 (resin body)
8A/UF (SUS body)
Control
Pressure
Ambient temperature/humidity
I/O
Flow
display
Integrating functions
Power
supply
Installation attitude
Wet area material
Weight
Protective structure
Protective circuit Note 6
EMC directive
9500
0001
0002
0005
0010
0020
0050
0100
L9500
L0001
L0002
L0005
L0010
AI
AR
O2
LN
C1
C3
H6
H8
8A
UF
3 to 100%F.S.
Within 0.5sec. at setting ±5%F.S. (TYP)
Within 1sec. at setting ±5%F.S. (TYP)
±3%F.S. or less
±1%F.S. or less
±0.1%F.S./˚C or less (25˚C reference)
±1%F.S. or less per 98kPa (standard differential pressure reference)
Refer to the separate table
Refer to the separate table
490kPa
980kPa
0 to 50˚C, 90%RH or less (no dew)
0 to 10 VDC (6.7kΩ) / 4 points (2 bit)
0 to 5 VDC (10kΩ) / 4 points (2 bit)
4 to 20 mADC (250Ω) / 4 points (2 bit)
Parallel 10bit / None
Analog output: 1-5V (connected load impedance 500kΩand over)
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Analog output: 1-5V (connected load impedance 500kΩand over)
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Switch output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
3-digit 7-segment LED, Display precision: control precision 1 digit
Refer to the separate table
Refer to the separate table
24 VDC ±10% (safety power supply with ripple ratio 2% or less)
250mA or less
Free
Polyamide resin, fluoro rubber, stainless steel, alumina, semiconductor silicone, solder
Stainless steel, fluoro rubber, alumin.a, semiconductor silicone, solder
Approx. 200g
Approx. 480g
IEC standards IP40
Power supply reverse connection prevention, switch output reverse connection prevention, switch output load short-circuit protection
EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Valve drive method
*1
Standard model
Low pressure
differential model
(Only stainless steel)
Specifications
FCM Series for air, nitrogen, argon, oxygen, city gas, methane, propane
Descriptions FCM- (*1) (*2) - (*3) (*4) (*5)
Proportional solenoid valve When not energized: Closed
C3 (propane)













C1 (methane)













LN (city gas)













O2 (oxygen)













AR (argon)










AI (air, nitrogen)


















*2
*3
*1
*4
*5
*3
*3
Flow range

1377
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
Pressure
Standard differential pressure / operating differential pressure Note 4, 5
(Standard model)
AI
Standard differential pressure (kPa)
Operating differential pressure (kPa)
AR
Standard differential pressure (kPa)
Operating differential pressure (kPa)
O2
Standard differential pressure (kPa)
Operating differential pressure (kPa)
LN/C1
Standard differential pressure (kPa)
Operating differential pressure (kPa)
C3
Standard differential pressure (kPa)
Operating differential pressure (kPa)
50
20 to 150
50
20 to 150
50
20 to 150
50
20 to 150
50
20 to 150
100
50 to 200
100
50 to 200
100
50 to 200
50
20 to 150
50
20 to 150
100
50 to 250
100
50 to 250
100
50 to 250
50
20 to 150
50
20 to 150
100
50 to 250
100
50 to 250
100
50 to 250
50
20 to 150
50
20 to 150
100
50 to 250
100
50 to 250
100
50 to 250
50
30 to 150
50
30 to 150
150
100 to 300
150
100 to 300
200
150 to 300
200
150 to 300
300
250 to 350
Flow rate range *1
9500 0001 0002 0005 0010 0020 0050 0100
(Low pressure differential model)
AI/O2
LN/C1
C3
Standard differential
pressure (kPa)
Operating differential
pressure (kPa)
20
5 to 50
20
5 to 50
20
5 to 50
20
5 to 50
20
10 to 50
Flow rate range *1
L9500 L0001 L0002 L0005 L0010
Display / integration
Flow display
Integrating
functions
Display range
Display resolution
Display range
Display resolution
Pulse output rate
Flow rate range *1
9500
L9500
0001
L0001
0002
L0002
0005
L0005
0010
L0010 0020 0050 0100
Note 1: Converted to volumetric flow at 20˚C 1 barometric pressure (101kPa)
Note 2: Use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist.
When using compressed air, use clean air that complies to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressor
contains drainage (water, oxidized oil, foreign matter, etc.). Install a filter, air dryer (minimum pressure dew point: 10˚C or
less), and oil mist filter (maximum oil concentration: 0.1 mg/m
3
) on the primary side of this product to maintain product functions.
<Recommended circuit>
<Recommended component>
Air filter: F Series
Oil mist filter: M Series
Note 3: City gas 13 A is for methane (CH 4 ) 88% gas generated from LNG.
Note 4: The standard differential pressure is the differential pressure when this product is calibrated.
Note 5: The operating differential pressure is the differential pressure required to operate this product normally. Note that this will differ according
to the flow range and applicable fluid.
Note 6: This product's protective circuit is effective only for specific incorrect connections and load short-circuits. It does not necessarily provide
protection for all incorrect connections.
Note 7: For the city gas low pressure line (1 to 2.5kPa), this is outside of the working differential pressure range.
Note 8: This product cannot be used as a stop value which requires the internal valve leakage to be zero. Slight leakage is permitted for the
specifications.
Note 9: The analog output voltage's output impedance is approx. 1KΩ. The error with the output value will increase when the connected load's
impedance is low.
Check the error with the connected load's impedance before starting use.
Pneumatics
pressure source FCM Series
Filter
Air
dryer Regulator
Oil mist filter
(Micro alescer)
Note 7
Applicable fluids *2
Applicable fluids *2
0 to 100R/min.
1R/min.
999999R
1R
1R
0.00 to 1.00R/min.
0.01R/min.
9999.99R
0.01R
0.01R
0.00 to 2.00R/min.
0.01R/min.
9999.99R
0.01R
0.02R
0.00 to 5.00R/min.
0.01R/min.
9999.99R
0.01R
0.05R
0.0 to 10.0R/min.
0.1R/min.
99999.9R
0.1R
0.1R
0.0 to 20.0R/min.
0.1R/min.
99999.9R
0.1R
0.2R
0.0 to 50.0R/min.
0.1R/min.
99999.9R
0.1R
0.5R
0 to 500mR/min.
1mR/min.
999999mR
1mR
5mR
FCM Series
Specifications

1378
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
FCM Series
*3Port size
Control range
Responsiveness
Precision
Repeatability
Temperature characteristics
Pressure characteristics
Standard differential pressure Note 3
Operating differential pressure range Note 4
Withstanding pressure
0
Input signal/ 1
pre-set input 2
P
AN
AP
Output signal SN
SP
Display method
Display range, display resolution
Power voltage
Current consumption
Control
Pressure
Ambient temperature / humidity
External leakage
I/O
Flow
display
Integrating functions
Power
supply
Installation attitude
Wet area material
Weight
Protective structure
Protective circuit Note 5
EMC directive
0002
0005
0010
0020
H2
HE
8A
UF
4S
4RM
3 to 100%F.S.
Within 0.5sec. at setting ±5%F.S. (TYP)
±3%F.S. or less
±1%F.S. or less
±0.2%F.S./˚C or less (25˚C reference)
±1%F.S. or less per 98kPa (standard differential pressure reference)
Refer to the separate table
Refer to the separate table
980kPa
0 to 50˚C, 90%RH or less (no dew)
1 x 10
-6
Pa/m
3
/s or less (helium leak rate)
0 to 10 VDC (6.7kΩ) / 4 points (2 bit)
0 to 5 VDC (10kΩ) / 4 points (2 bit)
4 to 20 VDC (250Ω) / 4 points (2 bit)
Parallel 10bit / None
Analog output: 1-5V (connected load impedance 500kΩand over)
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Analog output: 1-5V (connected load impedance 500kΩand over)
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Switch output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
Error output: PNP open collector output, 50mA or less voltage drop 2.4V or less
Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
3-digit 7-segment LED, display system: control precision ±1 digit
Refer to the separate table
Refer to the separate table
24 VDC ±10% (safety power supply with ripple ratio 1% or less)
270mA or less
Free
Stainless steel, fluoro rubber, alumin.a, silicone, solder
Approx. 480g
Approx. 560g
IEC standards IP40
Power supply reverse connection prevention, switch output reverse connection prevention, switch output load short-circuit protection
EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
HE (helium)









H2 (hydrogen)









*1
Valve drive method
Full scale
flow Note 1
Applicable
fluids Note 2
*1
*2
Specifications
FCM Series for hydrogen, helium
Descriptions
Proportional solenoid valve When not energized: Closed
Flow range
0 to 2R/min.
0 to 5R/min.
0 to 10R/min.
0 to 20R/min.
Hydrogen
Helium
Rc1/4
9/16-18UNF
1/4 inch double barbed joint
1/4 inch JXR male joint
*3 4S/4RM
*4
*5
FCM- (*1) (*2) - (*3) (*4) (*5)
8A/UF

1379
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
FCM Series
Specifications
Pressure
Standard differential pressure / operating differential pressure
H2
Standard differential pressure (kPa)
Operating differential pressure (kPa)
HE
Standard differential pressure (kPa)
Operating differential pressure (kPa)
20
10 to 50
50
20 to 100
50
30 to 80
100
50 to 150
50
30 to 80
100
50 to 150
50
30 to 80
100
50 to 150
Flow rate range *1
0002 0005 0010 0020
Display / integration
Flow display Display range
Display resolution
Integrating Display range
functions Display resolution
Pulse output rate
Flow rate range *1
0002 0005 0010 0020
Note 1: Converted to volumetric flow at 20˚C 1 barometric pressure (101kPa)
Note 2:
Use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does not contain dust or oil mist.
Note 3: The standard differential pressure is the differential pressure when this product is calibrated.
Note 4: The operating differential pressure is the differential pressure required to operate this product normally. Note that this will differ according
to the flow range and applicable fluid.
Note 5: This product's protection circuit is effective only for specific misconnections and load short-circuits. It does not provide protection for all
misconnections.
Note 6: This product cannot be used as a stop value which requires the internal valve leakage to be zero. Slight leakage is permitted for the
specifications.
Note 7: The analog output voltage's output impedance is approx. 1KΩ. The error with the output value will increase when the connected load's
impedance is low.
Check the error with the connected load's impedance before starting use.
0.00 to 2.00R/min.
0.01R/min.
9999.99R
0.01R
0.02R
0.00 to 5.00R/min.
0.01R/min.
9999.99R
0.01R
0.05R
0.0 to 10.0R/min.
0.1R/min.
99999.9R
0.1R
0.1R
Applicable fluids *2
0.0 to 20.0R/min.
0.1R/min.
99999.9R
0.1R
0.2R/

1380
FCM Series
A
How to order
BWorking fluid
CPort, body material
D
E
Model no.
FCM 9500 R 1 B T0
FCM AC1
F
Display
direction
G
Cable
H
Bracket
I
Traceability
<Example of model number>
Discrete option model no.
FCM-0001AI-H81ANR1BK
Model: Small size flow controller FCM
AFlow rate range : 0 to 1R/min.
BWorking fluid : Compressed air, nitrogen
CPort/body material : Push-in (ø8), resin body
DInput specifications : Analog 0-5 VDC
EOutput specifications : 1-5V analog, error (NPN)
FDisplay direction : Reverse direction
GCable : 1m
HBracket : With bracket
ITraceability : With inspection results
AI H6 AN
Flow rate range
Note 1: Refer to the dimensions on page 1382 for the
9/16-18UNF screw shape.
Note on model no. selection
FCM Series for air, nitrogen, argon, oxygen, city gas, methane, propane
Input specifications
Output
specifications
Symbol
Standard model
Low pressure
differential model
(Only stainless steel)
Descriptions
9500
0001
0002
0005
0010
0020
0050
0100
L9500
L0001
L0002
L0005
L0010
0 to 0.5R/min.
0 to 1R/min.
0 to 2R/min.
0 to 5R/min.
0 to 10R/min.
0 to 20R/min.
0 to 50R/min.
0 to 100R/min.
(only resin body)
0 to 0.5R/min.
0 to 1R/min.
0 to 2R/min.
0 to 5R/min.
0 to 10R/min.
AI
AR
O2
LN
C1
C3
Flow rate range
A
Working fluid
B
0
1
2
P
Input specifications
D
AN
AP
SN
SP
Output specifications
E
Blank
1
3
Cable
G
Blank
T
K
Traceability
I
AC1
AC3
PC1
PC3
LB1
Analog 9-conductor, cable 1m
Analog 9-conductor, cable 3m
Parallel 15-conductor, cable 1m
Parallel 15-conductor, cable 3m
Bracket
Symbol Descriptions
Blank
R
Display direction
F
Blank
B
Bracket
H
H6
H8
8A
UF Note 1
Port, body material
C
Working fluid
Working fluid
C3










C1










LN










O2










AR







AI













C3


C1


LN


O2


AR


AI




Compressed air, nitrogen gas
Argon
Oxygen (oil-prohibited specifications)
City gas (13A)
Methane (CH
4 )
Propane (C
3 H 8 )
Analog 0-10 VDC
Analog 0-5 VDC
Analog 4-20mA DC
Parallel 10bit
1-5V analog error (NPN)
1-5V analog error (PNP)
Switch (NPN), error (NPN)
Switch (PNP), error (PNP)
None
1m
3m
None
Traceability Certificate, system diagram, inspection results included
Inspection results included
Positive direction
Reverse direction
None
With bracket
Push-in (ø6), resin body
(Excluding flow rate range; 0050, 0100)
Push-in (ø8), resin body
Rc1/4, stainless steel body
9/16-18 UNF, stainless steel body
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor

1381
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
FCM Series
How to order
A
How to order
BWorking fluid
CPort
DInput specifications
EOutput
specifications
Model no.
FCM 0002 R 1 B T0
FCM AC1
F
Display
direction
G
Cable
H
Bracket
I
Traceability
<Example of model number>
Discrete option model no.
FCM-0002H2-8A1ANR1BK
AFlow rate range : 0 to 2R/min.
BWorking fluid : Hydrogen
CPort : Rc1/4
DInput specifications : Analog 0-5 VDC
EOutput specifications : 1-5V analog, error (NPN)
FDisplay direction : Reverse direction
GCable : 1m
HBracket : With bracket
ITraceability : With inspection results
H2 8A AN
Flow rate range
For hydrogen, helium
Symbol Descriptions
0002
0005
0010
0020
0 to 2R/min.
0 to 5R/min.
0 to 10R/min.
0 to 20R/min.
HE




H2




H2
HE
Flow rate range
A
Working fluid
B
0
1
2
P
Input specifications
D
AN
AP
SN
SP
Output specifications
E
Blank
1
3
Cable
G
Blank
T
K
Traceability
I
AC1
AC3
PC1
PC3
LB1
Analog 9-conductor, cable 1m
Analog 9-conductor, cable 3m
Parallel 15-conductor, cable 1m
Parallel 15-conductor, cable 3m
Bracket
Symbol Descriptions
Blank
R
Display direction
F
Blank
B
Bracket
H
HE




H2




8A
UF
4S
4RM
Port
C
Working fluid
Working fluid
Hydrogen
Helium
Analog 0-10 VDC
Analog 0-5 VDC
Analog 4-20mA DC
Parallel 10bit
1-5V analog error (NPN)
1-5V analog error (PNP)
Switch (NPN), error (NPN)
Switch (PNP), error (PNP)
None
1m
3m
None
Traceability Certificate, system diagram, inspection results included
Inspection results included
Positive direction
Reverse direction
None
With bracket
Rc1/4
9/16-18UNF
1/4 inch double barbed joint
1/4 inch JXR male joint

1382
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
FCM Series
Body material: Resin, port size: ø6, ø8
FCM-*-H8/H6*
Body material: Stainless steel, port size: Rc1/4, 9/16-18UNF
FCM-*-8A/UF
Dimensions
30
70
70
15
30
16
33.5
46
12
58.5
58.5
46
33.5
70
30
15
30
70
12
16
2-#4-40UNC
The display direction is reverse for the FCM-*-*R*.
2-M3 depth 5
Port size
ø6 push-in joint or
ø8 push-in joint
D sub-connector 15 pin/plug
2-#4-40UNC
2-M3 depth 5
Port size
Rc1/4 or
9/16-18UNF
D sub-connector 15 pin/plug
The display direction is reverse for the FCM-*-*R*.
2.5
ø15.6
15.25
11.5
9/16-18UNF
Mesh filter
9/16-18UNF
Effective length of threaded part 11.5
12˚
45˚
Sealant plane

1383
Small size flow controller
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor
Contact / close
contact conf.
SW
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Ending
Vacuum
filter
FCM Series
Dimensions
Port size: 1/4 inch double barbed joint
FCM-*-4S
Port size: 1/4 inch JXR male joint
FCM-*-4RM
Dimensions
15
30
70 Port size
1/4 inch
Double barbed joint
70
12
(121.4)
30
D sub-connector 15 pin/plug
2-#4-40UNC The display direction is reverse for the FCM-*-*R*.
16
33.5
46
58.5
2-M3 depth 5
15
33.5
70
12
Port size
1/4 inch
JXR male joint
46
58.5
30
(117.8)
70
30
16
2-#4-40UNC
D sub-connector 15 pin/plug
The display direction is reverse for the FCM-*-*R*.
2-M3 depth 5

1384
FCM Series
Cable optional dimensions
9-conductor cable for analog input type
Discrete option model no.: FCM-AC1, AC3
15-conductor cable for parallel input type
Discrete option model no.: FCM-PC1, PC3
Bracket (floor installation type)
Discrete model no.: FCM-LB1
12
Isolator color -
13
Green Blue
4-20
mA DC
0-5
VDC
11
White
10
Gray
9876
-
5
Red
4
-
3
Yellow
2
Orange
1
D-sub
socket pin
No.
Brown
14
Black
15
Pre-set
input signal Input signal
Bit 1 Bit 2
Integration
reset
signal
Vacant
+24 VDC
Power
supply +
Vacant
--
Vacant Vacant Vacant
-
Common
0-10
VDC Vacant
Vacant
Analog
output
1-5 VDC
Switch
output
NPN
or
PNP
output
Error
output
NPN
or
PNP
output
Power
supply -
(0V)
Type of input
Isolator color
13
Green Blue
11
White
10
Gray
98765
Red Light
blue Pink
White
(with
black
line)
4
Purple
3
Yellow
2
Orange
1
D-sub
socket pin
No.
Brown
12 14
Black
15
Red
(with
black
line)
Green
(with
black
line)
Common
1-5 VDC
Parallel input signal Parallel input signal
Power
supply +
NPN
or
PNP
output
NPN
or
PNP
output
Power
supply -
(0V)
Type of input
Name
Name
15 40
50
30
65
4-6
8-R1.75
4-3.5
4-ø3.5
4-R3
5
1
30
Note: The No. 1 pin common is common for the preset input and integration reset signal (No. 1 to 3 pins).
Note: The No. 10 pin common is common for the parallel input signals (No. 1 to 4, 6 to 9, 11, 12 pins).
1000
3000 100
18.9
11
28.5
33.4
(ø10)
(ø6)
9-AWG26
* Connect the shield cable to the
"- power supply" (0V).
Shield wire
1000
3000 100
18.9
11
28.5
33.4
(ø10)
(ø6.5)
15-AWG26
* Connect the shield cable to the
"- power supply" (0V).
Shield wire
13
Bit 10Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Bit 8
+24 VDC
Bit 9
Parallel input
signal
Analog
output Switch output Error output
Ending
Speed
control valve
Check valve
/ others
Magnetic
spring buffer
Refrigerating
type dryer
Desiccant
type dryer
High polymer
membrane
type dryer
Auto. drain
/ others
F.R.L.
(Module unit)
F.R.L.
(Separate)
F.R.L.
(Related
products)
Clean
F.R.
Air
booster
Joint
/ tube
Suction
plate
Total air
system
Total air
system
(Gamma)
Air filter
Compact
F.R.
Precise
regulator
Electro
pneumatic
regulator
Silencer
Vacuum
regulator
Vacuum
filter
Contact / close
contact conf.
SW
Mechanical
pressure SW
Electronic
pressure SW
Pressure SW
for coolant
Small
flow sensor
Small
flow controller
Flow sensor
for air
Flow sensor
for water
Air sensor