CKD FCM Series User manual

7CC-793A
COMPACT FLOW RATE
CONTROLLER FCM SERIES

High accuracy
and multi-function are achieved
by mounting microcomputer
Micro processed sensor
chip for quick response is
equipped
Stainless steel body
Applicable fluid and flow rate
0.015 to 50 ℓ/min
0.015 to 50 ℓ/min
0.015 to 10 ℓ/min
0.06 to 20 ℓ/min
Weight: approx. 480 g
Rectification structure with
improved low pressure loss and
reproducibility
Compact flow rate controller FCM Series
Resin body
Applicable fluid and flow rate
Weight: approx. 200 g
0.015 to 100 ℓ/min
Specifications Dimensions
Explanation
of functions
Operation
method
1 7 12 25
Compact flow rate sensor FSM, gathered technologies of compact solenoid
valve.
High performance and economic efficiency for all of sensor function,
proportional control function, valve function, to satisfy various purposes
Compact flow rate controller FCM Series.
Compatible with different fluids
Applicable fluid: various gas including air, nitrogen, argon, oxygen,
methane, propane. Now hydrogen and helium are added to the applicable
fluid. This controller can be used with a diverse range of applications.
Low differential pressure models are added
Flow rate control for combustion gas whose supplying pressure
is low (for example,fire control of burner) is now possible.
Compact and light weight
Dimensions: 70 × 70 × 30 (depth × lateral × width).
It can be installed in narrow space or moving section, and helps
to make equipments more compact and light.
Volume
30%
compared to conventional model
Approx.
Weight
20%
compared to conventional model
Approx.
0.5 s high-speed control
High-speed control of 0.5sec is possible with adopting platinum
sensor chip on which silicon micro machining is applied.
Various purposes will be fulfilled.
Input signal
Time (sec)
Analog output (%FS)
100
80
60
40
20
0
-0.5 00 0.5 1.0 2.0 3.01.5 2.5 3.5
Dedicated electric power is not required
Power supply voltage is 24 VDC. It operates with
general single electric power.
Highly trusted flow rate control
Reproducibility, which impacts
on flow rate control is improved
by our unique rectification
structure.
Repeatability
Accuracy ±3% F.S.
±1% F.S.
RoHS compliant
Harmful substances such as lead and hexavalent chrome that adversely
affect the global environment are never used in the materials.
Mounted digital display, which allows
us to see control status at a glance
• Flow rate value is digital displayed in 3 digits
• As well as error display, output status (switch output
ON-OFF) is displayed.
Output display 3-digit number LED display
Flip vertical display is
selectable according to
installed direction
(optional)
Parallel input type is available
as standard
Controllable with parallel input (ON/OFF signal of PLC
etc., 10bit resolution 1024). Analog input/output device
including D/A converter etc.
is not necessary.
Microcomputer realizes
multi-function
Error display function
Notifies error events with display and electric signal.
Zero/span adjustment function
Zero span of input signal can be adjusted as you like.
Preset input function
When four random flow rate points are set, the flow rate is controlled by
inputting a 2-bit signal from an external source (signals from PLC, etc.).
Direct memory function
Even if input signals from an external source are not used,
control flow rate is freely adjusted with controller operation keys.
Switch output function
Switch output function with setting upper/lower limitations
of flow rate is equipped. (over current protect is built-in)
Flow rate integration function
Flow rate integration display (up to 6 digits) and pulse
output for integration are available.
Auto shutdown function
Valves are shutdown automatically at the time of error or
emergency.

High accuracy
and multi-function are achieved
by mounting microcomputer
Micro processed sensor
chip for quick response is
equipped
Stainless steel body
Applicable fluid and flow rate
0.015 to 50 ℓ/min
0.015 to 50 ℓ/min
0.015 to 10 ℓ/min
0.06 to 20 ℓ/min
Weight: approx. 480 g
Rectification structure with
improved low pressure loss and
reproducibility
Compact flow rate controller FCM Series
Resin body
Applicable fluid and flow rate
Weight: approx. 200 g
0.015 to 100 ℓ/min
Specifications Dimensions
Explanation
of functions
Operation
method
1 7 12 25
Compact flow rate sensor FSM, gathered technologies of compact solenoid
valve.
High performance and economic efficiency for all of sensor function,
proportional control function, valve function, to satisfy various purposes
Compact flow rate controller FCM Series.
Compatible with different fluids
Applicable fluid: various gas including air, nitrogen, argon, oxygen,
methane, propane. Now hydrogen and helium are added to the applicable
fluid. This controller can be used with a diverse range of applications.
Low differential pressure models are added
Flow rate control for combustion gas whose supplying pressure
is low (for example,fire control of burner) is now possible.
Compact and light weight
Dimensions: 70 × 70 × 30 (depth × lateral × width).
It can be installed in narrow space or moving section, and helps
to make equipments more compact and light.
Volume
30%
compared to conventional model
Approx.
Weight
20%
compared to conventional model
Approx.
0.5 s high-speed control
High-speed control of 0.5sec is possible with adopting platinum
sensor chip on which silicon micro machining is applied.
Various purposes will be fulfilled.
Input signal
Time (sec)
Analog output (%FS)
100
80
60
40
20
0
-0.5 00 0.5 1.0 2.0 3.01.5 2.5 3.5
Dedicated electric power is not required
Power supply voltage is 24 VDC. It operates with
general single electric power.
Highly trusted flow rate control
Reproducibility, which impacts
on flow rate control is improved
by our unique rectification
structure.
Repeatability
Accuracy ±3% F.S.
±1% F.S.
RoHS compliant
Harmful substances such as lead and hexavalent chrome that adversely
affect the global environment are never used in the materials.
Mounted digital display, which allows
us to see control status at a glance
• Flow rate value is digital displayed in 3 digits
• As well as error display, output status (switch output
ON-OFF) is displayed.
Output display 3-digit number LED display
Flip vertical display is
selectable according to
installed direction
(optional)
Parallel input type is available
as standard
Controllable with parallel input (ON/OFF signal of PLC
etc., 10bit resolution 1024). Analog input/output device
including D/A converter etc.
is not necessary.
Microcomputer realizes
multi-function
Error display function
Notifies error events with display and electric signal.
Zero/span adjustment function
Zero span of input signal can be adjusted as you like.
Preset input function
When four random flow rate points are set, the flow rate is controlled by
inputting a 2-bit signal from an external source (signals from PLC, etc.).
Direct memory function
Even if input signals from an external source are not used,
control flow rate is freely adjusted with controller operation keys.
Switch output function
Switch output function with setting upper/lower limitations
of flow rate is equipped. (over current protect is built-in)
Flow rate integration function
Flow rate integration display (up to 6 digits) and pulse
output for integration are available.
Auto shutdown function
Valves are shutdown automatically at the time of error or
emergency.

Examples of applications
Useful in different fields
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
1.5 to 50
3 to 100
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
1.5 to 50
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
Rc1/4
9/16-18 UNF
1/4"
double barbed joint
1/4"
JXR male joint
Air typeGas typeGas typeGas type
0.1 1 10 100
N2
O2
H2
Ar
13A
Hydrogen
Helium
O2
AIR
SUS
N 2
Ar
CH4
C3H8
Model No.
SUS
SUS
SUS
Output
Error outputSpecificationsOutput type
Analog 1 to 5 V
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
Switch
bit
bit
bit
bit
NPN
PNP
Analog
Switch
NPN
PNP
Analog
Switch
NPN
PNP
Analog
Switch
NPN
PNP
SUS
FCM-9500 AI
FCM-0001 AI
FCM-0002 AI
FCM-0005 AI
FCM-0010 AI
FCM-0020 AI
FCM-0050 AI
FCM-0100 AI (only resin type)
FCM-9500 AR
FCM-0001 AR
FCM-0002 AR
FCM-0005 AR
FCM-0010 AR
FCM-0020 AR
FCM-0050 AR
FCM-9500 O2/LN/C1/C3
FCM-0001 O2/LN/C1/C3
FCM-0002 O2/LN/C1/C3
FCM-0005 O2/LN/C1/C3
FCM-0010 O2/LN/C1/C3
FCM-0002 H2/HE
FCM-0005 H2/HE
FCM-0010 H2/HE
FCM-0020 H2/HE
This compact flow rate controller is used for different applications including machinery, automobile, and precision
device fields, advanced fields such as semiconductors and biotechnology, medicine and food.
Applicable fluid
Dry
air
Combustion gas
Note: Preset 8-point (3-bit) input is used customized. The external integration reset signal input cannot be used. Contact your CKD Sales Office for details.
Semiconductor Wire bonding
Appropriate for wire bonding tension
control requiring high accuracy.
Liquid crystal
Glass floating transport
Appropriate for floating (non-contact)
transport of large FPD glass, etc.
Liquid crystal
Ionizer purge gas flow rate control
Compatibility with different flow rate ranges enables
air flow rates to be controlled.
Food Adding and packaging
Ideal for adding inert gas for food packages, etc.
Glass processing
Burner flame control
The low-pressure gas supply enables burner
flame, etc., to be controlled.
Automobile, etc.
Control of argon gas flow rate for welding
This controller can handle a variety of flow ranges
enabling the flow rate of argon gas for welding to be
controlled.
Semiconductor
Purge gas flow rate control
Compatibility with different flow rate ranges.
The flow rate of purge gas, etc., is controlled.
N2gas control for laser oscillator and
semiconductor manufacturing equipment.
Applicable fluid and flow rate control ranges
Model No. Applicable
fluid
0.10.01 1 10 100
Flow rate control range ( /min) Body material Port size
Air
Nitrogen
Argon
Oxygen
City gas
Methane
Propane
ø6 push in
ø8 push in
Rc1/4
9/16-18 UNF
Resin Resin
Rc1/4
9/16-18 UNF
Rc1/4
9/16-18 UNF
Input/output specifications
Input
Input signal: Specifications
Analog: 0 to 10 V
Analog: 0 to 5 V
Pre-set: 4 points (2bit) (Note)
Analog: 4 to 20 mA
Pre-set: 4 points (2bit) (Note)
Parallel: 10bit
Pre-set: 4 points (2bit) (Note)
FCM-*-*0AN
FCM-*-*0AP
FCM-*-*0SN
FCM-*-*0SP
FCM-*-*1AN
FCM-*-*1AP
FCM-*-*1SN
FCM-*-*1SP
FCM-*-*2AN
FCM-*-*2AP
FCM-*-*2SN
FCM-*-*2SP
FCM-*-*PAN
FCM-*-*PAP
FCM-*-*PSN
FCM-*-*PSP
Flow rate (ℓ/min)

FCM Series
Useful in different fields
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
1.5 to 50
3 to 100
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
1.5 to 50
0.015 to 0.5
0.03 to 1
0.06 to 2
0.15 to 5
0.3 to 10
0.06 to 2
0.15 to 5
0.3 to 10
0.6 to 20
Rc1/4
9/16-18 UNF
1/4"
double barbed joint
1/4"
JXR male joint
Air typeGas typeGas typeGas type
0.1 1 10 100
N2
O2
H2
Ar
13A
Hydrogen
Helium
O2
AIR
SUS
N 2
Ar
CH4
C3H8
Model No.
SUS
SUS
SUS
Output
Error outputSpecificationsOutput type
Analog 1 to 5 V
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
NPN
PNP
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
1 to 5 V
NPN
PNP
Switch
bit
bit
bit
bit
NPN
PNP
Analog
Switch
NPN
PNP
Analog
Switch
NPN
PNP
Analog
Switch
NPN
PNP
SUS
FCM-9500 AI
FCM-0001 AI
FCM-0002 AI
FCM-0005 AI
FCM-0010 AI
FCM-0020 AI
FCM-0050 AI
FCM-0100 AI (only resin type)
FCM-9500 AR
FCM-0001 AR
FCM-0002 AR
FCM-0005 AR
FCM-0010 AR
FCM-0020 AR
FCM-0050 AR
FCM-9500 O2/LN/C1/C3
FCM-0001 O2/LN/C1/C3
FCM-0002 O2/LN/C1/C3
FCM-0005 O2/LN/C1/C3
FCM-0010 O2/LN/C1/C3
FCM-0002 H2/HE
FCM-0005 H2/HE
FCM-0010 H2/HE
FCM-0020 H2/HE
This compact flow rate controller is used for different applications including machinery, automobile, and precision
device fields, advanced fields such as semiconductors and biotechnology, medicine and food.
Applicable fluid
Dry
air
Combustion gas
Note: Preset 8-point (3-bit) input is used customized. The external integration reset signal input cannot be used. Contact your CKD Sales Office for details.
Semiconductor Wire bonding
Appropriate for wire bonding tension
control requiring high accuracy.
Liquid crystal
Glass floating transport
Appropriate for floating (non-contact)
transport of large FPD glass, etc.
Liquid crystal
Ionizer purge gas flow rate control
Compatibility with different flow rate ranges enables
air flow rates to be controlled.
Food Adding and packaging
Ideal for adding inert gas for food packages, etc.
Glass processing
Burner flame control
The low-pressure gas supply enables burner
flame, etc., to be controlled.
Automobile, etc.
Control of argon gas flow rate for welding
This controller can handle a variety of flow ranges
enabling the flow rate of argon gas for welding to be
controlled.
Semiconductor
Purge gas flow rate control
Compatibility with different flow rate ranges.
The flow rate of purge gas, etc., is controlled.
N2gas control for laser oscillator and
semiconductor manufacturing equipment.
Applicable fluid and flow rate control ranges
Model No. Applicable
fluid
0.10.01 1 10 100
Flow rate control range ( /min) Body material Port size
Air
Nitrogen
Argon
Oxygen
City gas
Methane
Propane
ø6 push in
ø8 push in
Rc1/4
9/16-18 UNF
Resin Resin
Rc1/4
9/16-18 UNF
Rc1/4
9/16-18 UNF
Input/output specifications
Input
Input signal: Specifications
Analog: 0 to 10 V
Analog: 0 to 5 V
Pre-set: 4 points (2bit) (Note)
Analog: 4 to 20 mA
Pre-set: 4 points (2bit) (Note)
Parallel: 10bit
Pre-set: 4 points (2bit) (Note)
FCM-*-*0AN
FCM-*-*0AP
FCM-*-*0SN
FCM-*-*0SP
FCM-*-*1AN
FCM-*-*1AP
FCM-*-*1SN
FCM-*-*1SP
FCM-*-*2AN
FCM-*-*2AP
FCM-*-*2SN
FCM-*-*2SP
FCM-*-*PAN
FCM-*-*PAP
FCM-*-*PSN
FCM-*-*PSP
Flow rate (ℓ/min)

Compact ow rate controller
FCMSeries
For air, nitrogen, argon, oxygen, city gas, methane, propane (ow rate range: 0.5 to 100ℓ/min)
For hydrogen, helium (ow rate range: 0 to 20ℓ/min)
Descriptions FCM-[*1] [*2]-[*3] [*4] [*5]
Valve drive type Proportional solenoid valve When not energized: Closed
Flow rate range
AI (air, nitrogen) AR (argon) O2 (oxygen) LN (city gas) C1 (methane) C
3
(propane)
Full scale ow rate
Note 1
*1
Standard model
9500 0 to 500mℓ/min
0001 0 to 1ℓ/min
0002 0 to 2ℓ/min
0005 0 to 5ℓ/min
0010 0 to 10ℓ/min
0020 0 to 20ℓ/min
0050 0 to 50ℓ/min
0100 0 to 100 ℓ /min (only resin type)
Low differential press.
(only stainless steel)
L9500 0 to 500mℓ/min
L0001 0 to 1ℓ/min
L0002 0 to 2ℓ/min
L0005 0 to 5ℓ/min
L0010 0 to 10ℓ/min
Applicable uid
Note 2
*2
AI Compressed air, nitrogen
AR Argon
O2 Oxygen (oil-prohibit specications)
LN City gas (13A) Note 3
C1 Methane (CH4 100%)
C3 Propane (C3H8 100%)
Port size,
Body material *3
H6
ø6 push in, resin (excluding 50, 100ℓ/min)
H8 ø8 push in, resin
8A Rc1/4, stainless steel
UF 9/16-18UNF, stainless steel
Control
Precision scope of guarantee 3 to 100% F.S.
Response time *1
9500 to 0020, L9500 to L0010 Within 0.5 sec at setting ±5%F.S. (TYP)
0050 to 0100 Within 1 sec at setting ±5%F.S. (TYP)
Accuracy ±3% F.S. or less
Repeatability ±1% F.S. or less
Temperature characteristics ±0.1% F.S./˚C or less (25˚C standard)
Pressure characteristics ±1%F.S. or less per 98kPa (standard differential pressure reference)
Pressure
Standard differential pressure Note 4 Refer to separate table.
Operation differential rated pressure Note 5 Refer to separate table.
Proof pressure *3 H6/H8 (resin body) 490 kPa
8A/UF (SUS body) 980 kPa
Ambient temperature and humidity 0 to 50 ˚C, 90% RH or less (with no dew condensation)
Input/output
Input signal/
Pre-set input
*4
0 0 to 10 VDC (6.7kΩ)/4 points (2bit)
1 0 to 5 VDC (10kΩ)/4 points (2bit)
2 4 to 20 mA DC (250 Ω)/4 points (2bit)
PParallel 10bit/none
Output signal *5
AN
Analog output: 1-5V (connected load impedance 500kΩ and over)
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
AP
Analog output: 1-5V (connected load impedance 500kΩ and over)
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
SN
Switch output: NPN open collector output, 50mA or less voltage drop 2.4V or less
Error output: NPN open collector output, 50mA or less, voltage drop 2.4V or less
SP
Switch output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Error output: PNP open collector output, 50mA or less, voltage drop 2.4V or less
Flow rate display
Display method 3-digit 7-segment LED, display accuracy: control accuracy ± 1 digit
Display range and resolution Refer to separate table.
Integrating function Refer to separate table.
Power supply
voltage
Power supply voltage 24VDC±10% (stabilized power with ripple rate 2% or less)
Current consumption Note 11 250 mA or less
Mounting orientation Free
Wetted area material *3 H6/H8 (resin body) Polyamide resin, uoro rubber, stainless steel, alumina, silicon, solder
8A/UF (SUS body) Stainless steel, uoro rubber, alumina, silicon, solder
Weight *3 H6/H8 (resin body) Approx. 200g
8A/UF (SUS body) Approx. 480g
Degree of protection IEC standards IP40
Protective circuit Note 6
Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
For air, nitrogen, argon, oxygen, city gas, methane, propane FCM series
Specifications
1

FCMSeries
Specications
Note 1: Converted to volumetric ow rate at 20°C 1 barometric pressure (101 kPa). Also, full scale means the maximum ow rate within ow rate range.
Note 2: When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does
not contain dust or oil mist.
When using compressed air, use clean air that complies to JIS B8392-1: 2012 (ISO 8573-1: 2010) [1.1.1 to 1.6.2]. Compressed air from the compressor
contains drainage (water, oxidized oil, foreign matter, etc.). Install a lter, air dryer (minimum pressure dew point: 10°C or less), and oil mist lter (maximum
oil concentration: 0.1 mg/m3) on the primary side of this product to maintain product functions.
<Recommended circuit>
<Recommended components>
Air lter: F series
Oil mist lter: M series
Note 3: City gas 13A is a value for methane (CH4) 88% gas.
Note 4: Standard differential pressure is one at the product's calibration. (secondary side atmospheric release)
Note 5: Operation
differential pressure is necessary differential pressure for the product's normal actuation. It differs depending on ow rate range or applicable uid.
Also, the minimum value of
operation differential pressure is necessary differential pressure, to ow full scale ow rate at secondary side atmospheric
release.
Note 6: This product’s protective circuit is effective only against specic incorrect connections and load short circuits. It does not necessarily provide protection
against all incorrect connections.
Note 7: It is out of operation differential rated pressure, at low pressure line (1 to 2.5 kPa) of city gas.
Note 8: Valve inside of this product cannot be used as a stop valve that has no leakage. Specications allow leakage to a certain degree.
Note 9: Output impedance for the analog output voltage is approximately 1KΩ. If the impedance of the connecting load is low, the margin of error and the output
value will increase.
Make sure to check the errors on connecting load impedance before use.
Note 10 : Integrated ow rate is a reference value. Also, it will be reset if power is turned off.
Note 11 : Current at 24 VDC, load not-connected, full scale ow rate. Current consumption varies with the load status.
Display and integrating function
(Low differential pressure model)
(Standard model)
Standard differential pressure and operation differential pressure Note 4, 5
Pressure
Flow rate range *1
9500 0001 0002 0005 0010 0020 0050 0100
Applicable uid *2
AI Standard differential
pressure (kPa) 50 100 100 100 100 150 200 300
Operation differential
pressure (kPa) 20 to 150 50 to 200 50 to 250 50 to 250 50 to 250
100 to 300 150 to 300 250 to 350
AR Standard differential
pressure (kPa) 50 100 100 100 100 150 200
Operation differential
pressure (kPa) 20 to 150 50 to 200 50 to 250 50 to 250 50 to 250
100 to 300 150 to 300
O2
Standard differential
pressure (kPa) 50 100 100 100 100
Operation differential
pressure (kPa) 20 to 150 50 to 200 50 to 250 50 to 250 50 to 250
LN/C1
Standard differential
pressure (kPa) 50 50 50 50 50
Operation differential
pressure (kPa) 20 to 150 20 to 150 20 to 150 20 to 150 30 to 150
C3 Standard differential
pressure (kPa) 50 50 50 50 50
Operation differential
pressure (kPa) 20 to 150 20 to 150 20 to 150 20 to 150 30 to 150
Flow rate range *1
L9500 L0001 L0002 L0005 L0010
Applicable uid *2
AI/O2
LN/C1
C3 Note 7
Standard differential
pressure (kPa)
20 20 20 20 20
Operation differential
pressure (kPa)
5 to 50 5 to 50 5 to 50 5 to 50 10 to 50
Flow rate range *1
9500
L9500 0001 L0001 0002 L0002 0005 L0005 0010 L0010 0020 0050 0100
Flow rate
display
Display range
0 to 500mℓ/min 0.00 to 1.00ℓ/min 0.00 to 2.00ℓ/min 0.00 to 5.00ℓ/min 0.0 to 10.0ℓ/min 0.0 to 20.0ℓ/min 0.0 to 50.0ℓ/min 0 to 100ℓ/min
Display resolution 1mℓ/min 0.01ℓ/min 0.01ℓ/min 0.01ℓ/min 0.1ℓ/min 0.1ℓ/min 0.1ℓ/min 1ℓ/min
Integrating
function
Note 10
Display range 999999mℓ
9999.99ℓ 9999.99ℓ 9999.99ℓ 99999.9ℓ 99999.9ℓ 99999.9ℓ 999999ℓ
Display resolution 1mℓ 0.01ℓ 0.01ℓ 0.01ℓ 0.1ℓ 0.1ℓ 0.1ℓ 1ℓ
Pulse output rate 5mℓ 0.01ℓ 0.02ℓ 0.05ℓ 0.1ℓ 0.2ℓ 0.5ℓ 1ℓ
FCMSeries
Specications
Oil mist lter
(micro alescer)
RegulatorAir dryer
Filter
FCM Series
Pneumatics
pressure source
2

FCMSeries
Descriptions FCM-[*1][*2]-[*3][*4][*5]
Valve drive type Proportional solenoid valve When not energized: Closed
Flow rate range H2 (Hydrogen) HE (helium)
Full scale ow
rate
Note 1
*1
0002 0 to 2 ℓ/min
0005 0 to 5 ℓ/min
0010 0 to 10 ℓ/min
0020 0 to 20 ℓ/min
Applicable uid
Note 2
*2 H2 Hydrogen
HE Helium
Port size *3
8A Rc1/4
UF 9/16-18UNF
4S 1/4" double barbed joint
4RM 1/4" JXR male joint
Control
Precision scope of guarantee 3 to 100%F.S.
Response time *1 Within 0.5 sec at setting ±5%F.S. (TYP)
Accuracy ±3% F.S. or less
Reproducibility ±1% F.S. or less
Temperature characteristics ±0.2% F.S./°C or less (25°C standard)
Pressure characteristics ±1%F.S. or less per 98kPa (standard differential pressure reference)
Pressure
Standard differential pressure Note 3 Refer to separate table.
Operation differential rated pressure Note 4 Refer to separate table.
Proof pressure 980kPa
Ambient temperature and humidity 0 to 50 °C, 90% RH or less (with no dew condensation)
External leakage 1×10-6 less than Pa
・
m3/s (helium leak rate)
Input/
output
Input signal/
pre-set input *4
0 0 to 10 VDC (6.7kΩ)/4 point (2bit)
1 0 to 5 VDC (10kΩ)/4 point (2bit)
2 4 to 20 mADC (250Ω)/4 point (2bit)
PParallel 10 bit/none
Output signal *5
AN
Analog output: 1 to 5 V (connected load impedance 500 kΩ and over)
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
AP
Analog output: 1 to 5 V (connected load impedance 500 kΩ and over)
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
SN
Switch output: NPN open collector output, 50 mA or less voltage drop 2.4 V or less
Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less
SP
Switch output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less
Flow rate
display
Display method 3-digit 7-segment LED, display accuracy: control accuracy ±1 digit
Display range and resolution Refer to separate table.
Integrating function Refer to separate table.
Power supply
voltage
Power supply voltage 24 VDC±10% (stabilized power with ripple rate 1% or less)
Current consumption Note 9 270mA or less
Mounting orientation Free
Wetted area material Stainless steel, uoro rubber, alumina, silicon, solder
Weight *3 8A/UF Approx. 480g
4S/4RM Approx. 560g
Protection structure IEC standards IP40
Protection circuit Note 5
Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection
EMC Directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8
Hydrogen and helium FCM Series
Specifications
3

FCMSeries
Specications
Flow rate range *1
0002 0005 0010 0020
Applicable uid *2
H2
Standard differential
pressure (kPa)
20 50 50 50
Operation differential
pressure (kPa)
10 to 50 30 to 80 30 to 80 30 to 80
HE
Standard differential
pressure (kPa)
50 100 100 100
Operation differential
pressure (kPa)
20 to 100 50 to 150 50 to 150 50 to 150
Flow rate range *1
0002 0005 0010 0020
Flow rate
display
Display range 0.00 to 2.00ℓ/min 0.00 to 5.00ℓ/min 0.0 to 10.0ℓ/min 0.0 to 20.0ℓ/min
Display resolution 0.01ℓ/min 0.01ℓ/min 0.1ℓ/min 0.1ℓ/min
Integrating
function
Note 8
Display range 9999.99ℓ 9999.99ℓ 99999.9ℓ 99999.9ℓ
Display resolution 0.01ℓ 0.01ℓ 0.1ℓ 0.1ℓ
Pulse output rate 0.02ℓ 0.05ℓ 0.1ℓ 0.2ℓ
Note 1: Converted to volumetric ow rate at 20°C 1 barometric pressure (101 kPa). Also, full scale indicates the maximum ow rate within ow rate range.
Note 2: When using for other than compressed air, use dry gas that does not contain corrosive elements such as chlorine, sulfur, or acids, and clean gas that does
not contain dust or oil mist.
Note 3: Standard differential pressure is one at the product's calibration. (secondary side atmospheric release)
Note 4: Operation differential pressure is necessary differential pressure for the product's normal actuation. It differs depending on ow rate range or applicable
uid.
Also, the minimum value of operation differential pressure is necessary differential pressure, to ow full scale ow rate at secondary side atmospheric
release.
Note 5: This product’s protective circuit is effective only against specic incorrect connections and load short circuits. It does not necessarily provide protection
against all incorrect connections.
Note 6: Valve inside of this product cannot be used as a stop valve that has no leakage. Specications allow leakage to a certain degree.
Note 7: Output impedance for the analog output voltage is approximately 1KΩ. If the impedance of the connecting load is low, the margin of error and the output
value will increase.
Make sure to check the errors on connecting load impedance before use.
Note 8: Integrated ow rate is a reference value. Also, it will be reset if power is turned off.
Note 9: Current at 24 VDC, load not-connected, full scale ow rate. Current consumption varies with the load status.
Display and integrating function
Standard differential pressure and operation differential pressure
Pressure
4

For air, nitrogen, argon, oxygen, city gas, methane, propane
FCMSeries
A
How to order
BApplicable fluid
CPort/body material
DInput specifications
E
Output specifications
Model No.
FCM 9500 R 1 B T0
FCM AC1
F
Display direction
GCable
HBracket
ITraceability
<Example of model No.>
Discrete option model
FCM-0001AI-H81ANR1BK
Model: Small size flow rate controller FCM series
Flow rate range : 0 to 1 ℓ/min
Applicable fluid : Compressed air, nitrogen
Port/body material : Push in (ø8), resin body
Input specifications : Analog 0 to 5 VDC
Output specifications : 1 to 5 V analog, error (NPN)
Display direction : Reverse direction
Cable : 1 m
Bracket : With bracket
Traceability : Inspection results included
A
B
C
D
E
F
G
H
I
AI H6 AN
Flow rate range
Note on model No. selection
Note 1: Refer to the dimensions on page 7 for the
9/16-18UNF screw shape.
Symbol
Standard model
Low differential press.
(Only stainless steel)
Descriptions
9500
0001
0002
0005
0010
0020
0050
0100
L9500
L0001
L0002
L0005
L0010
0 to 0.5 ℓ/min
0 to 1 ℓ/min
0 to 2 ℓ/min
0 to 5 ℓ/min
0 to 10 ℓ/min
0 to 20 ℓ/min
0 to 50 ℓ/min
0 to 100 ℓ/min
(only resin body)
0 to 0.5 ℓ/min
0 to 1 ℓ/min
0 to 2 ℓ/min
0 to 5 ℓ/min
0 to 10 ℓ/min
C3C1LNO2ARAI
AI
AR
O2
LN
C1
C3
Compressed air, nitrogen gas
Argon
Oxygen (oil-prohibit specifications)
City gas (13A)
Methane (CH4)
Propane (C3H8)
Flow rate range
A
Applicable fluid
B
0
1
2
P
Analog 0 to 10 VDC
Analog 0 to 5 VDC
Analog 4 to 20 mADC
Parallel 10bit
Input specifications
D
AN
AP
SN
SP
1 to 5 V analog error (NPN)
1 to 5 V analog error (PNP)
Switch (NPN), error (NPN)
Switch (PNP), error (PNP)
Output specifications
E
Blank
1
3
None
1 m
3 m
Cable
G
Blank
T
K
None
Traceability certificate, system diagram, inspection results included
Inspection results included
Traceability
I
AC1
AC3
PC1
PC3
LB1
9-conductor analog cable 1m
9-conductor analog cable 3m
15-conductor parallel cable 1m
15-conductor parallel cable 3m
Bracket
Symbol Descriptions
Blank
RPositive direction Reverse direction
Display direction
F
Blank
BNone With bracket
Bracket
H
C3C1LNO2ARAI
H6
H8
8A
UF Note 1
Push in (ø6), resin body
(Excluding flow rate ranges 0050 and 0100)
Push in (ø8), resin body
Rc1/4, stainless steel body
9/16-18 UNF, stainless steel body
Port/body material
C
Applicable fluid
Applicable fluid
5