Edwards EXT70/70200 User manual

B756-50-880
Issue C Original
Instruction Manual
EXT70/70/200H

Document Template: 02B01010 Attachment 4 Iss. 1
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
EXT70/70/200 24V system B756-52-991
EXT70/70/200 24V cartridge spare B756-51-991
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum
Pumps
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-1:2006 Electrical equipment for measurement, control and laboratory
Industrial Location, Use. EMC requirements. General requirements
Class B Emissions
EN50581: 2012 Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
and fulfils all the relevant provisions of
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
2006/42/EC Machinery Directive
2011/65/EU†Restriction of Certain Hazardous Substances (RoHS) Directive
†i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). Whilst the RoHS Directive
does not legally apply to this vacuum equipment, we recognize that component compliance is relevant to many of our
customers.
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
13.01.2014, Burgess Hill
Peter Mea
r
es
GV Technical Support Manager Date and Place
P200-01-000 Issue D
This product has been manufactured under a quality system certified to ISO9001:2008

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Contents
B756-50-880 Issue C
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
2 TECHNICAL DATA .................................................................................3
2.1 General .................................................................................................................... 3
2.2 Pumping media ........................................................................................................... 3
2.3 Vent gas specification and vent control data ....................................................................... 4
2.4 Materials exposed to gases pumped .................................................................................. 5
3 INSTALLATION .....................................................................................7
3.1 Unpack and inspect ...................................................................................................... 7
3.2 Installation ................................................................................................................8
3.3 Connection to the LCT Premier system .............................................................................. 9
3.3.1 Connection of the EXDC160 module .................................................................................. 9
3.3.2 Backing connection .....................................................................................................10
3.4 Vent options, vent valve connection and control ..................................................................10
3.5 Electrical installation ..................................................................................................10
3.5.1 EXDC160 Controllers ....................................................................................................11
3.6 Cooling ...................................................................................................................11
3.6.1 Introduction .............................................................................................................11
3.6.2 Forced-air cooling ......................................................................................................11
4 OPERATION ...................................................................................... 13
4.1 Start-up procedure .....................................................................................................13
4.2 Shut-down procedure ..................................................................................................13
4.3 Safety interlocks and control system ................................................................................13
4.3.1 EXDC160 Controller .....................................................................................................14
5 MAINTENANCE ................................................................................... 15
5.1 Introduction .............................................................................................................15
5.2 Removing the cartridge pump from the system ....................................................................15
5.3 Refitting the cartridge pump to the system ........................................................................16
5.4 Pressing the pump in place with the fixing bolts ..................................................................17
5.5 Bearing maintenance ...................................................................................................17
5.6 Rotor life .................................................................................................................17
5.7 Fault finding .............................................................................................................17
6 STORAGE AND DISPOSAL ....................................................................... 19
6.1 Storage ...................................................................................................................19
6.2 Disposal ...................................................................................................................19
7 SERVICE, SPARES AND ACCESSORIES ......................................................... 21
7.1 Introduction .............................................................................................................21
7.2 Vent valves ..............................................................................................................22
7.3 Service ....................................................................................................................22
For return of equipment, complete the HS Forms at the end of this manual.
mv/11/13

B756-50-880 Issue C
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Contents
Illustrations
Figure Page
1 EXT70/70/200H dimensions ............................................................................................ 6
2 Opening procedures for packaging .................................................................................... 7
3 EXT70/70/200H system fitted to the Waters LCT flight tube ..................................................... 9
4 Cartridge pump fixing positions ......................................................................................16
5 Breakdown of spares items ............................................................................................21
Tables
Table Page
1 Technical data ........................................................................................................... 4
2 List of items supplied ................................................................................................... 8
3 Vent restructure orifice diameter (with atmospheric pressure at the inlet of the vent valve) ............10
4 Fault finding .............................................................................................................18
5 Spares Items .............................................................................................................22
6 Vent valves ..............................................................................................................22
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400-40-000

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Introduction
B756-50-880 Issue C
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance, and storage instructions for the Edwards 24V EXT70/70/
200H system and the integral cartridge pumps. The pumps must be used as specified in this manual. Read this manual
before installing and operating the pumps.
The EXT70/70/200H is designed for use with an Edwards EXDC160 Controller. Read the instruction manual supplied
with the controller before attempting to install or operate the equipment. The controller manual contains details of
electrical installation.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The following warning labels are on the pump:
The units used throughout this manual conform to the SI international system of units of measurement. Also,
throughout this manual the abbreviation ‘sccm’ is used to mean ‘standard cubic centimetre per minute’, this is a
flow of 1ccm at an ambient temperature of 0°C and a pressure of 1013mbar (1.013 x 105Pa).
The EXT70/70/200H system supplied to Waters is designed specifically for incorporation into the LCT Premier
application, backed by an E2M28 rotary pump. The pump is supplied in a purpose-designed chamber.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
Protective Conductor terminal.

B756-50-880 Issue C
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Introduction
It is the responsibility of the customer to ensure the stability of the system and the correct application of all electrical
and vacuum connections once the system is installed on the application. It is also the responsibility of the customer
to ensure that no service connections form slip or trip hazards on the installed system.
There is no inlet screen fitted to the end of the cartridge pump and the blades of the turbo pump are visible and
accessible through the pump envelope at this point. The blades present a rotational safety hazard when the pump is
operational and a sharp-edged hazard when the pump is stationary. Care must be taken to avoid foreign objects
entering the pump when installing equipment to the chambers. The EXT70/70/200H system should only be operated
when rigidly mounted within the specially designed chamber and connected to a vacuum system.
The weight of the EXT70/70/200H cartridge pump, complete with EXDC160 controller, is approximately 8kg.
Appropriate handling precautions should be taken when manoeuvring the pump into the system. Appropriate nitrile
or latex gloves should be worn at all times while handling the cartridge pump to prevent contamination of the vacuum
parts.
WARNING
Under no circumstances should the pump be run other than when installed in the Edwards
approved sealed chamber.

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TECHNICAL DATA
B756-50-880 Issue C
2 TECHNICAL DATA
2.1 General
2.2 Pumping media
CAUTION
Do not use the EXT70/70/200H to pump gases containing more than 20% oxygen. If gases containing more than
20% oxygen are pumped, the pump lubricant will polymerise and the pump may fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
The EXT70/70/200H is designed to pump the following residual gases normally used in high-vacuum systems:
The pump can be used to pump oxygen and water vapour, subject to the following conditions:
Oxygen - The oxygen concentration must be less than 20% by volume.
Water vapour - Ensure that vapour does not condense inside the pump.
If there is a requirement to pump a gas not in the list above, contact the supplier for advice. If the supplier is not
contacted, the warranty on the pump may be invalidated. The pumps are not suitable for pumping aggressive or
corrosive gases.
Performance See Table 1
Dimensions See Figure 1
Maximum inlet flange temperature 70 ºC
Maximum magnetic field 3.5 mT radial field
>7 mT axial field
Installation category EN61010 part 1, Category 1
Pollution degree EN61010 part 1, Category 2
Ambient operating temperature range 5 ºC to 40 ºC
Ambient operating humidity range 10 to 90% RH (non-condensing)
Maximum operating altitude 2000 m
Ambient storage temperature range -30 ºC to 70 ºC
WARNING
Do not use the EXT70/70/200H to pump explosive gas mixtures as the pump is not suitable for this
purpose.
Air Argon
Carbon monoxide Propane
Neon Carbon dioxide
Ethane Helium
Methane Hydrogen
Nitrogen Butane
Krypton

B756-50-880 Issue C
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TECHNICAL DATA
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times, vent the pump with dry, clean gases.
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reach 50% >15 sec
Table 1 - Technical data
Parameter EXT70/70/200H Notes
Mass (system) >23 kg Eyebolt positions are supplied
for lifting and handling
Mass (Cartridge pump) 9 kg
Outlet flange DN25NW
Main inlet pumping speed (TOF)
N2*170 ls-1
He*187 ls-1
Ar*164 ls-1
H2*169 ls-1
Front-side inlet pumping speed (Transfer chamber)
N2*110 ls-1
He*153 ls-1
Ar*100 ls-1
H2*133 ls-1
Back-side Inlet pumping speed (Tunnel optics)
N2*177 ls-1
He*167 ls-1
Ar*167 ls-1
H2*103 ls-1
Maximum continuous inlet pressure
Air cooling at 35°C†
Main inlet 1.6 x 10-2 mbar (1.6 Pa) Air cooling is beneficial to the
EXDC160 controller
Transfer 3.36 x 10-2 mbar (3.36 Pa)
Tunnel optics 3.62 x 10-2 mbar (3.621 Pa)
Nominal rotational speed 60000 r min-1
Starting time to 90% speed
EXDC160 115 sec
Noise level (at 1 metre) < 50 dB(A)
Recommended controller EXDC160 24 V
EXDC160 maximum VA input 250 VA
Quiescent power 25 W

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TECHNICAL DATA
B756-50-880 Issue C
2.4 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels,
fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin
and carbon-fibre reinforced epoxy resin. Further to this, the machined from solid chamber, the top interface plate,
and the junction piece are surface treated with Alocrom 1000 on both internal and external surfaces. Alocrom 1000
is a chromate conversion coating with a thickness of < 1 micron. The total weight of the coating on the chamber is
approximately 20 mg.
Recommended backing pump See Section 3.3.2
*Pumping speeds are without inlet screens
†Above this pressure, rotational speed drops below nominal.
Table 1 - Technical data (continued)
Parameter EXT70/70/200H Notes

B756-50-880 Issue C
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This page has been intentionally left blank.
Figure 1 - EXT70/70/200H dimensions

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INSTALLATION
B756-50-880 Issue C
3 INSTALLATION
3.1 Unpack and inspect
Take care when unpacking the pump to avoid excessive shocks. Excessive shocks could damage the bearings and
reduce the life of the pump. The pump is supplied with the inlet and outlet sealed with plastic covers to prevent
entry of dust and vapour. Do not remove these seals until the pump is installed on the vacuum system.
Fold down all outer cardboard packaging and check the pump. If the pump is damaged, notify the supplier and the
carrier in writing within three days. State the Item Number of the pump together with the order number and the
supplier's invoice number. Retain all packing materials for inspection. Do not use the pump if it is damaged.
Figure 2 - Opening procedures for packaging
Refer to Unpacking/Lifting instructions P400-40-300 supplied before attempting to remove the system from the
packaging.
Check that the package contains the items listed in Table 2. If any of these items is missing, notify the supplier in
writing within three days.
WARNING
Use gloves when handling the pump chamber to prevent skin contact with the Alocrom 1000
coating.

B756-50-880 Issue C
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INSTALLATION
If the system is not to be used immediately, store it in suitable conditions as described in Section 6.1. Do not discard
the packing materials; retain them to re-package the pump if it is returned for service.
3.2 Installation
CAUTION
Do not invert the system.
The EXT70/70/200H system is intended for installation on the Waters LCT Premier instrument only. Refer to the
customer system fitting instructions for further details.
Once the system has been removed from the packaging, the two eyebolts used to lift it can be unscrewed from their
positions. One of the supplied eyebolts should be temporarily fitted to the side position highlighted on Figure 3 to
aid manoeuvring the system on to the LCT Premier flight tube.
Table 2 - List of items supplied
Qty Description Check ()
1Systemchamber 
1 EXT70/70/200H Split Flow Turbomolecular pump (fitted to chamber) 
1 Top Interface Plate (fitted to chamber) 
1 Junction piece (fitted to chamber) 
2 Side Inlet screen (fitted to pump) 
2 133 x 3.0 section individually sealed O-ring seals 
1 EXDC160 controller (fitted to pump)*
*Only supplied with whole systems. The cartridge pump-only option does not have EXDC160
controller fitted when supplied.

WARNING
Install the pump into the vacuum system before connecting the controller to the power supply.
This will ensure that the pump cannot operate and injure people during the installation.
WARNING
Ensure that connections to the pump do not generate slip or trip hazards.
WARNING
If the pump seizes, the stored energy can cause rapid movement of the pump, which may cause
further damage and injury to people. Ensure the EXT70/70/200H is securely fixed to the system
chamber, and that the system chamber is securely fitted to the LCT PREMIER application.

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INSTALLATION
B756-50-880 Issue C
Figure 3 - EXT70/70/200H system fitted to the Waters LCT flight tube
3.3 Connection to the LCT Premier system
The system chamber can only fit on the Waters LCT Premier instrument in one orientation. However, it is possible to
incorrectly fit the integral cartridge pump. The cartridge pump should always be fitted into the chamber with the
exhaust port facing downwards, as shown in Figure 3.
The system chamber should be fixed to the LCT Premier using M6 bolts of an appropriate length through all four bolt
holes provided - refer to Figure 3.
The system mounting must be suitably rigid and capable of absorbing the rotational energy generated by the unlikely
event of a failure of the pump rotor. Contact Edwards for further information.
3.3.1 Connection of the EXDC160 module
The EXT70/70/200H is supplied with the EXDC160 module fitted. In case of disconnection, the EXDC160 module
mounts adjacent to the exhaust port at the bottom of the pump. Refer to Figure 3. The EXDC160 controller has a
keyed, multi-pin circular connector, which requires correct orientation before locking in place.
WARNING
The EXT70/70/200H system weighs in excess of 23 kg. Care should be taken when handling and
moving the system into place. Use suitable eyebolts in the positions included on the system
chamber if necessary.
1. System fixing locations (two per side)
2. Eyebolt side location
3. Exhaust port

B756-50-880 Issue C
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INSTALLATION
3.3.2 Backing connection
CAUTION
Do not use the EXT70/70/200H pump with a backing pressure below 5 x 10-4 mbar (5 x 10-2 Pa). Lower backing
pressures will increase the evaporation rate of the lubricating oil and may reduce the life of the bearings.
Use suitable vacuum tubing and connectors to connect the NW25 flange of the backing port to the backing pump. If
necessary, use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the EXT70/
70/200H Split Flow pump.
Edwards recommends using an Edwards E2M28 rotary vane or XDS35I scroll backing pump. It may be necessary to use
a larger backing pump if the pump is run at a high inlet pressure. The EXT70/70/200H is also suitable for use with
diaphragm backing pumps, although the effect of higher backing pressure on the pump's performance and cooling
requirements should be noted (see Table 1 and Section 3.6).
3.4 Vent options, vent valve connection and control
To maintain the cleanliness of the vacuum system, whenever the pump is switched off, vent the pump (or vacuum
system) when the speed of the EXT70/70/200H pump is between 100% and 50% of full rotational speed. At and above
50% of full rotational speed, the rotor spins fast enough to suppress any back streaming of hydrocarbon oil from the
backing pump. Venting may be accomplished by one of the following methods:
Use a TAV5 or TAV6 solenoid vent valve accessory (see Section 7) in place of the manual vent valve.
Use a TAV5 or TAV6 solenoid vent valve connected to a convenient flange on the vacuum system.
Use an alternative valve, with appropriate restriction, connected to the vacuum control system.
If the pump is manually vented when it is at full rotational speed, and the rate of pressure rise is too high, the pump
life may be reduced. When using the manual vent valve supplied, it is recommended to either limit the vent or only
open the vent valve after the EXT70/70/200H pump speed has fallen to 50% of full rotational speed.
Do not vent via the backing line; this may lead to contamination. If venting into the vacuum system, select a point
upstream of the pump to prevent oil back streaming from the backing line.
Table 3 gives an indication of the appropriate orifice size to be fitted to the vent valve for given vacuum system
volumes in order that the vent rate is kept within the limits given in Section 2.3.
3.5 Electrical installation
The EXT70/70/200H pump should be electrically bonded to earth. Refer to the customer system fitting specifications
for further details.
WARNING
Vent dangerous gases and gas mixtures safetly. Do not expose personnel to these gases.
Table 3 - Vent restructure orifice diameter (with atmospheric pressure at the inlet of the vent valve)
Vacuum system volume (l) Orifice diameter (mm)
< 20 < 1.0
< 10 < 0.7
< 5 < 0.5
< 2 < 0.35

© Edwards Limited 2013. All rights reserved. Page 11
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INSTALLATION
B756-50-880 Issue C
3.5.1 EXDC160 Controllers
An EXDC160 controller requires connection to a suitably rated power supply. The EXDC160 controller is designed to
allow the pumping system to operate in a fully automatic system.
The system is supplied with an EXDC160 controller (Part Number D396-46-510). Spare items can be ordered using Part
Number D396-46-600.
3.6 Cooling
3.6.1 Introduction
CAUTION
The pump must be cooled by forced-air cooling to prevent damage to the bearing.
Ensure that there is an adequate supply of cooling air to the pump. During operation, if the temperature of any
surface of the pump is higher than 45 ºC, the pump is too hot and the cooling must be increased.
If the pump will be located inside an enclosure, ensure that there is adequate ventilation so that the ambient
temperature around the pump does not exceed 40 °C.
3.6.2 Forced-air cooling
An air cooler accessory is available for the EXT pumps (refer to Section 7). Fit the air cooler as described in the
instruction manual supplied with it. If using an alternate fan for air cooling, ensure that the flow rate is above 70
m3h-1 (40 cfm).

B756-50-880 Issue C
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OPERATION
B756-50-880 Issue C
4OPERATION
4.1 Start-up procedure
Use the procedure below to start up a basic manually controlled pumping system with a manual vent valve and an
EXDC160 Controller.
1. Ensure that the manual vent valve is closed (turn clockwise to close it).
2. Switch on the power to the air cooler.
3. Start the backing pump.
4. When the vacuum system pressure is approximately 10 mbar or less, switch on the power supply to start the
EXT70/70/200H pump.
5. The pump will accelerate to full operating speed. Once nominal operating speed is reached, the normal speed
LED on the EXDC160 Controller will illuminate.
4.2 Shut-down procedure
Note: In an emergency only, open the vent valve quickly to decelerate the pump rotor in the shortest possible
time.
Use the procedure below to shut down a basic manually controlled pumping system with a manual vent valve and an
EXDC160 Controller.
1. Close the valve in the backing line connecting the EXT70/70/200H pump to the backing pump.
2. Switch off the backing pump.
3. Switch off the power supply to the EXT70/70/200H pump.
4. When the EXT70/70/200H pump rotational speed has fallen to below 50% speed, slowly turn the manual vent
valve anti-clockwise to open it. Ensure that the rate of pressure rise does not exceed the allowed rate of
pressure rise, otherwise the pump can be damaged. Refer to Section 3.4.
4.3 Safety interlocks and control system
The pump protection and safety interlock features are described in Section 4.3.1. Refer to the instruction manual
supplied with the controller for a full description of these features.
WARNING
Do not operate the EXT70/70/200H pump unless it is firmly mounted in the correct system
chamber and the chamber is bolted to the LCT premier system. The pump rotates at very high
speeds and the rotating blades may not be apparent. If the pump is not installed correctly, the
pump rotor can cause injury.
WARNING
Refer to the customer system instructions for correct start-up and shut-down procedures for the
LCT Premier system.

B756-50-880 Issue C
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OPERATION
4.3.1 EXDC160 Controller
The EXDC160 controller monitors the temperature of the EXT70/70/200H Split Flow pump and the electrical power
consumption of the pump. If the EXDC160 controller detects excessive power consumption or temperature, the
rotational speed of the pump motor is reduced until the power and temperature return to normal.

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MAINTENANCE
B756-50-880 Issue C
5 MAINTENANCE
5.1 Introduction
The maintenance operations for the EXT70/70/200H Split Flow pump are described in the following sections. The
procedure for extraction and fitting of the cartridge pump from the system chamber is also covered below. This
procedure should be followed at all times when removing and refitting the EXT70/70/200H Split Flow pump.
5.2 Removing the cartridge pump from the system
1. Shut down the system in accordance with operating instructions and raise it to atmospheric pressure.
2. Remove the electrical and vacuum fittings from the rear of the cartridge pump.
3. Remove the four M6 x 30 cap head bolts from around the flange of the cartridge pump (see Figure 4). A black
plastic plug screwed into the side of the body may obscure one of the M6 bolts. In this case, remove the plug
from the body to allow removal of the bolt and replace it when the bolt has been removed.
4. The cartridge pump is removed from the chamber by tightening of the two nylon jacking screws fitted to the
flange of the cartridge pump (see Figure 4). The screws should be finger tightened until they both rest firmly
against the body of the pump. They should then be tightened in sequence, half a turn at a time, until the pump
is backed out of the chamber. The cartridge pump will need to be backed off using the nylon screws by
approximately 5mm before the three piston seals come free of their normal seating areas and the pump is able
to be pulled free of the chamber. Great care must be taken when withdrawing the cartridge pump from the
envelope to avoid scratches and other damage to the internal bore of the chamber and the O-ring lands of the
cartridge pump.
5. Store the cartridge pump in an upright position on the four rubber feet at the base of the pump.
WARNING
Allow the pump rotor to stop, then disconnect the controller before removing the pump from the
vacuum system for maintenance or fault finding purposes.
WARNING
Ensure that the rotor has come to a complete standstill and that the cartridge pump is electrically
isolated before proceeding with its removal.

B756-50-880 Issue C
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MAINTENANCE
Figure 4 - Cartridge pump fixing positions
5.3 Refitting the cartridge pump to the system
1. Place the cartridge pump upright on a stable surface. Remove the plastic cap from the top inlet and the
rubberized black tape from the side inlets.
2. Remove one of the Ø159.5 O-rings from its packaging and apply a thin smear of "Apiezon M" grease to the
forefinger and thumb of your gloved hand. Slowly run the O-ring between the greased thumb and forefinger to
apply a light sheen of grease to the full diameter of the O-ring. It is very important that the O-ring does not have
an excessive coating of grease. Care should be taken not to stretch the O-ring when grease is applied.
3. Once a thin, even, sheen of grease is evident on the O-ring, slowly manoeuvre the O-ring over the pump until it
can be smoothed into the O-ring land nearest the body of the cartridge pump.
WARNING
Ensure that suitable protective gloves are worn when applying grease to the O-rings.
1. Nylon jacking screw
2. M6 x 30 bolts 3. Exhaust port 4. EXDC160