Halma ALICAT SCIENTIFIC M User manual

OPERATING MANUAL
FOR MASS FLOW METERS
Models M · MQ · MS · MW · MB · MBQ · MBS · MWB

2 Introduction
Thank you for purchasing your mass flow meter.
If you have any questions, or if something is not working
as expected, please contact us. We are eager to help you
in any way possible.
Contact Information
World Headquarters,
Tucson, Arizona, USA
[e-mail]
alicat.com
7641 N Business Park Dr.,
Tucson, AZ 85743 USA
[phone]
Europe
[email protected]om
Geograaf 24
6921 EW Duiven
The Netherlands
+31 (0)26 203.1651
China & SE Asia
[e-mail]
alicat.com.cn
2nd Floor, Block 63, No. 421,
Hong Cao Rd,
Shanghai 200233
PRC
[phone] ext. 801
India
[e-mail]
Halma India Pvt. Ltd.
Plot No . A-147, Road No. 24,
Next to Spraytech Circle
opp. Metropolitan Company,
Wagle Industrial Estate
Thane-West
Mahārāshtra 400 604
[phone]
Recalibrate your mass flow meter every year.
Annual calibration is necessary to ensure the accuracy of
readings, and extend the Limited Lifetime Warranty. Fill out
the Service Request Form at alicat.com/service, or contact
us directly when it is time for recalibration.
For devices ordered with CSA, ATEX, ISO 17025, or
other certifications, please visit alicat.com/certifications.
For information about our limited lifetime warranty, visit
alicat.com/warranty.
Serial #:
Next Calibration:
This device comes with a NIST-
traceable calibration certificate.
This device conforms to the European
Union’s Restriction of Use of
Hazardous Substances in Electrical
and Electronic Equipment (RoHS)
Directive 2011/65/EU.
This device complies with the
requirements of the Low Voltage
Directive 2014/35/EU and the
EMC Directive 2014/30/EU and
carries the CE Marking accordingly.
This device complies with the
requirements of the European Union’s
Waste Electrical & Electronic Equipment
(WEEE) Directive 2002/96/EC
DOC-MANUAL-M Rev 3, 2021.05.25
M-20SLPM
MB-0.5SSCM
MS-20SLPM
MWB-500SLPM

2021.05.25  REV. 3  MASS FLOW METER OPERATING MANUAL 3
Introduction
Your flow meter has a variety of innovative features:
• High-accuracy performance for all your gases.
Use your flow meter with any of the 98+ gases
included with Gas Select™, page 13.
• 1000 readings per second guarantees high
resolution data, page 10.
• Monitor live pressure and temperature during
flow control, page 10.
• Backlit display with adjustable contrast is easy
to read even in direct sunlight. In dimly lit areas,
press the logo to turn on the backlight, page 17.
• Change your STP (standard temperature and
pressure) to match any standard temperature and
pressure reference, page 15.
• Connection to a computer for control and data
logging to capture all pressure data for logging
and analysis, page 18.
This manual covers the following instruments:
• M-Series: gas mass flow meters
• MQ-Series: high-pressure gas mass flow meters
• MS-Series: anti-corrosive gas mass flow meters
• MW-Series (WHISPER™): low pressure drop gas
mass flow meters
• MB-Series: portable gas mass flow meters
• MBQ-Series: portable high-pressure gas mass
flow meters
• MBS-Series: portable anti-corrosive gas mass
flow meters
• MWB-Series (WHISPER™): portable low pressure
drop gas mass flow meters
For support or questions regarding the use or
operation of this device, please contact us using
the information on page 2.
Alicat oers countless combinations of device sizes,
accessories, connections, and configurations. These
custom solutions are oered to meet a variety of
application challenges brought forth by users pushing
the boundaries of our standard oerings.
If you have an idea for a new process or a challenging
application, contact Alicat for specialized engineering
and application support.
MQ-10SCCM
M-100SLPM
M-5000SLPM

4 Table of Contents
Contents
Introduction 3
Quick Start Guide 5
Getting Started 6
Getting to Know Your Mass Flow Meter 6
The Flow Meter Display 6
Status Messages 6
Mounting 6
Filters 6
Device Ports 7
Connecting Your Gas Flow Meter 7
Option: Charging Your Portable Meter 8
Power and Signal Connections 8
Analog Signals 9
Displaying Live Data 10
Option: Color TFT Display 11
Option: Collecting Totalized Flow Data 11
Device Information 12
Setup 13
Gas Selection 13
Gas Select™ 13
Using COMPOSER™ Gas Mixes 13
Creating New Mixes in COMPOSER™ 14
Viewing, Deleting, and Creating Similar Mixes 14
Sensor Setup 15
Choosing Engineering Units 15
Defining STP/NTP Reference Values 15
Flow and Pressure Averaging 15
Zero Band 15
Configuring Serial Communications 16
Unit ID 16
Modbus RTU Address 16
Baud Rate 16
Display Setup 17
Main Screen Options 17
Screen Lighting 17
Display Rotation 17
Advanced Setup 17
Serial Communication 18
Modbus RTU Communication 18
Establishing Communication 18
Polling Mode 18
Streaming Mode 19
Taring 19
Collecting Data 19
Using Gas Select™ and COMPOSER™ 20
Quick Command Guide 21
Troubleshooting 22
General Use 22
Flow Readings 22
Serial Communications 23
Maintenance 23
Cleaning 23
Recalibration 23
Reference Information 24
Engineering Units 24
Gas List by Number 25
Gas List by Category 26
Pinouts 27
8-Pin Mini-DIN (Default) 27
Locking Industrial Connector Pinout 27
9-Pin D-Sub Connector Common Pinouts 28
15-Pin D-Sub Connector Common Pinouts 28
M12 Connector Common Pinouts 29

2021.05.25  REV. 3  MASS FLOW METER OPERATING MANUAL 5
Quick Start Guide
Setup
• Connect your flow meter. Ensure that
flow will pass through your device in the
same direction as the arrow on the flow
body (usually left to right).
• Choose your engineering units. You
can choose the measurement units by
selecting MAIN MENU →SETUP →Sensor
→Engineering Units, see page 15
for more details.
Operation: Flow Verification
• Monitor live flow, temperature, and
pressure readings. Readings are
updated and displayed on your device
in real time. See page 6.
• (Optional) Capture totalized readings.
The totalizer option displays the total
flow that has passed through the device
since the last time the totalizer was reset.
If your device has a totalizer, press NEXT
from the main live data display to access
the totalizer. See page 11.
Connectors and Buttons
The drawing to the right represents a typical
configuration of a standard mass flow meter.
Your device’s appearance and process
connections may differ. See page 2
for more examples.
Backlight
The monochrome display comes equipped
with a backlight. To toggle the backlight
power, press the logo on the front of
your device.
For optional color TFT displays, pressing
this button will turn off the display to
conserve power. See page 11.
Maintenance and Care
• Flow meters do not require cleaning
when flowing clean, dry gases. Read
more on page 23.
• Calibrate your flow meter annually. To
schedule a calibration, please contact
support (page 2).
+0.0 +0.0
+13.49 +22.73
Mass Flow
CCM SCCM MENU
PSIA ¤C TARE
FLOW
SCCM
A ir
+0.0 +0.0
+13.49 +22.73
Mass Flow
CCM SCCM MENU
PSIA ¤C TARE
FLOW
SCCM
A ir
Mounting holes
Softkey buttons
Power input Data I/O
Micro-USB
(data & power)
Power switch
Enclosed
battery
Meters
(M-Series) Battery-Powered Meters
(MB-Series)
Display
Process ports
Flow body
Light button
This M-20SLPM-D model mass
flow meter is a typical unit. The
flow body can vary significantly,
generally depending on
full-scale flow rate.

6 Getting Started
Getting Started
Getting to Know Your Mass Flow Meter
The Flow Meter Display
The figure to the right identifies the various features of the flow meter display.
Highlights pressure in the center of the device.
Highlights temperature in the center of the device.
Tares the device’s flow measurement (page 10).
Highlights volumetric (actual) flow rate in the center of the device.
Highlights mass flow rate in the center of the device (default).
MENU enters the main menu system.
NEXT accesses the optional flow totalizer (page 11).
Toggles the backlight.
Status Messages
Status messages are shown to the right of the main readout number. In the example to the
right the OVR message shows that the totalizer rolled over to zero.
ADC Analog-digital converter error
LCK Front display is locked
MOV Mass flow over range of device
OVR Totalizer rolled over to zero
POV Pressure over range of device
TMF Totalizer missed out-of-range flow
TOV Temperature over range of device
VOV Volumetric flow over range of device
Mounting
Flow meters do not require straight runs of pipe upstream or downstream. Most flow meter
models can be mounted in any position, including upside-down. Corrosive-resistant flow
meters use media-isolated sensors that must be tared after changing orientation.
Filters
When pressure drop is not a concern, use in-line sintered filters to prevent large particulates
from entering the flow body of the meter. Suggested maximum particulate sizes are as follows:
• 5 microns for units with flow ranges ≤1 .
• 20 microns for units with flow ranges between 1  and 1 .
• 50 microns for units with flow ranges ≥1 .
The main display. Note the button
behind the logo, which toggles the
device backlight.
The main display with barometer
(PSIG) and an OVR status
message.

2021.05.25  REV. 3  MASS FLOW METER OPERATING MANUAL 7
Device Ports
Your meter has been shipped with plastic plugs fitted into its ports. To decrease the chance
of contaminating the flow stream, do not remove these plugs until you are ready to install
the device.
Standard gas flow meters have female inlet and outlet ports. VCR®-compatible and other
specialty fittings may have male connections.
• If you are using a fitting that does not have a face seal, use thread-sealing Teflon tape to
prevent leakage around the port threads, but do not wrap the first two threads entering
the device. This will minimize the possibility of getting tape into the flow stream and
clogging the laminar flow elements.
• Face seal fittings do not need Teflon tape applied to the threads.
!
Warning: It is not recommended to use pipe dopes or sealants on the process connections
as these compounds can cause permanent damage to the meter should they get into
the flow stream.
Connecting Your Gas Flow Meter
Your flow meter can measure flow generated by positive pressure and/or suction. Connect
the meter so that the flow travels in the same direction as the flow arrow, usually from left
to right from the front of the device.
!
Warning: Using the flow meter above the maximum specified common mode or dierential
pressure will result in permanent damage to the internal pressure sensors.
A common cause of this problem is the instantaneous application of high-pressure gas,
as from a snap-acting solenoid valve either upstream or downstream of the flow meter.
If you suspect that your pressure sensor is damaged, please discontinue use of the
device and contact support. See the chart below for pressure limits.
Model
Maximum Common
Mode Pressure
Maximum Differential
Pressure
Standard meters 175  75 
Low-pressure-drop meters 80  10 
High-pressure meters 400  75 
A mass flow meter with male
VCR®-compatible connections.
A mass flow meter’s basic
process connections.
A mass flow meter with male
VCO®-compatible connections.
Inlet
Connection
Outlet
Connection
Flow Direction Indicator

8 Getting Started
Option: Charging Your Portable Meter
Portable meters’ batteries are partially charged before shipping. When fully charged,
typical battery life is 18 hours with a monochrome display, or 8 hours with a TFT color
display. Dimming the backlight will increase battery life. When the battery indicator
displays it is completely empty, about 15 minutes of battery life remain.
Charge the device using the supplied USB cable (micro-B to type A) or a similar cable.
Any USB outlet on a computer or portable power supply may be used, but charging will
be fastest (approximately 3.5 hours) when connected to the supplied 2.0 A power supply.
The red indicator LED on top of the device lights up to indicate that the unit is charging,
and turns o when the battery is charged.
Your meter may be used while it is charging. If the battery has been fully depleted, you may
need to charge the pressure gauge for a full minute before the device can be turned on.
!
Warning: The safe charging temperature range is 0–45°C (32–113°F). If internal
sensors detect temperatures outside of this range, the battery will not charge.
Power and Signal Connections
Power can be supplied to your meter through either the power jack or the multi-pin
connector on top of your device.
✓
Note: Power requirements vary based on configuration. Please reference the
associated specification sheet at alicat.com/specs for power requirements.
Standard 8-Pin Mini-DIN Pinout
Pin Function
Not Connected Optional: 4–20 mA primary output signal
Static 5.12 Vdc Optional: secondary analog output (4–20 mA,
0–5 Vdc, 1–5 Vdc, 0–10 Vdc) or basic alarm
Serial RS-232RX / RS-485(–) input signal (receive)
Remote tare (ground to tare)
Serial RS-232TX / RS-485(+) output signal (send)
0–5 Vdc Optional: 1–5 Vdc or 0–10 Vdc output signal
Power In (as described above)
Ground (common for power, digital communications, analog signals and alarms)
The above pinout is applicable to all devices with the Mini-DIN connector. The availability of dierent output
signals depends on the options ordered. Optional configurations are noted on the unit’s calibration sheet.
▲
Caution: Do not connect power to pins 1 through 6, as permanent damage can occur.
It is common to mistake pin 2 (labeled 5.12 Vdc Output) as the standard 0–5 Vdc
analog output signal. Pin 2 is normally a constant 5.12 Vdc.
For more pinout configurations, see page 27 to page 29.
The main display with battery
information and an active charging
indicator (the lightning bolt).
MC-1SLPM-D mass flow meter with
the 8-pin Mini-DIN connector.
Male Connector: Cable
Female Connector: Device
1
4
5
68
7
3
2 1
4
5
6
87
3
2

2021.05.25  REV. 3  MASS FLOW METER OPERATING MANUAL 9
Analog Signals
Primary Analog Output Signal
Most devices include a primary analog output signal, which is linear over its entire range.
For ranges that start at 0 Vdc, a zero-pressure condition is indicated at approximately 0.010
Vdc. Full scale pressure is indicated by the top of the range: 5 Vdc for 0–5 Vdc, 20 mA for
4–20 mA signals, and so on.
Option: Secondary Analog Output Signal
The default 8-pin Mini-DIN connector places the primary analog output on pin 6 for voltage
signals, and Pin 1 for 4–20 mA current signals. Ground for these signals is common on pin 8.
Using Ground to Tare
You can tare your pressure gauge remotely by momentarily grounding pin 4. When the
switch is closed, the device will tare. Operation will resume when the switch is released.
You can also tare with the front controls (page 11) or serial commands (page 19). This
should only be done in a true zero-flow condition.
Option: Second Analog Output Signal
Alicat’s default 8-pin Mini-DIN connector places the secondary analog output on pin 2 for
both voltage and current signals. Your device’s secondary analog signal may dier from its
primary output signal.
✓
Note: See the calibration sheet that shipped with your meter to determine which output
signals were ordered.
Option: 4–20 mA Current Output Signal
If your meter has a 4–20 mA current primary or secondary output signal, your flow meter
will require 12–24 Vdc power.
▲Caution: Do not connect 4–20 mA devices to “loop powered” systems, as this will damage
portions of the circuitry beyond repair and void the warranty. If you must interface with
existing loop powered systems, always use a signal isolator and a separate power supply.
Pin 8
Ground
Pin 4
Pin 4
Pin 8
Connect to tare

10 Getting Started
Displaying Live Data
Main Display
The main display has these primary functions:
• Displaying live temperature, pressure, and flow data
• Accessing the main menu (MENU) or the optional totalizer (NEXT) (page 11)
• Taring the flow measurement (page 10)
This screen displays live data for all flow parameters simultaneously. Live data is measured
1000 times per second and the LCD display is updated 10 times per second. The button
next to the measurements highlight their values in the center.
Taring Your Flow Meter
MENU →TARE FLOW or TARES
Taring ensures your flow meter provides its most accurate measurements. This function
gives the flow meter a zero reference for flow measurements. For meters with a barometer,
the absolute pressure reading can also be tared when the device is exposed to the local
barometric pressure.
How to Tare
Taring Flow
MENU →TARES →TARE FLOW
Flow tares should take place at the expected process pressure, with no flow. A message,
"ENSURE NO FLOW BEFORE PRESSING TARE" will be displayed. Press TARE to complete the
taring process.
Optional: Taring Pressure
MENU →TARES →TARE PRESS
Absolute pressure tares require an optional barometer, and the meter open to atmosphere.
A message, "PRESS TARE WHEN VENTED TO AMBIENT WITH NO FLOW". The oset between the
absolute pressure sensor in the flow body and the internal barometer will also be displayed.
When to Tare
• Before every new flow measurement cycle
• After significant changes in temperature or pressure
• After dropping or bumping the flow meter
• After changing the device’s orientation
Tare mass flow by selecting
TARES from the main menu.
The tare confirmation screen.
The main display.