HP 4155A User manual

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Parameter Analyzer
Quick Start Guide

c
 Copyright Hewlett-Packard
Company 1993
All Right Reserved.
Reproduction, adaptation, or
translation without prior written
permission is prohibited, except as
allowed under the copyright laws.
HP Part Number
04155-90200
First edition, September 1993
Printed in Japan
Product Warranty
This Hewlett-Packard product is warranted against
defects in material and workmanship for a period of
one year from date of shipment. During the warranty
period, Hewlett-Packard will, at its option, either repair
or replace products which prove to be defective.
Warranty service of this product will be performed at
Buyer's facility at no charge within Hewlett-Packard
service travel areas. Outside Hewlett-Packard service
travel areas, warranty service will be performed at
Buyer's facility only upon Hewlett-Packard's prior
agreement and Buyer shall pay Hewlett-Packard's
round trip travel expenses. In all other cases, products
must be returned to a service facility designated b
y
Hewlett-Packard.
For products returned to Hewlett-Packard for warranty
service, Buyer shall prepay shipping charges to
Hewlett-Packard and Hewlett-Packard shall pay
shipping charges to return the product to Buyer.
However, Buyer shall pay all shipping charges, duties,
and taxes for products returned to Hewlett-Packard
from another country.
Hewlett-Packard warrants that its software and
rmware designated by Hewlett-Packard for use with
an instrument will execute its programming
instructions when properly installed on that instrument.
Hewlett-Packard does not warrant that the operation
of the instrument, or software, or rmware will be
uninterrupted or error free.
Limitation of Warranty
The foregoing warranty shall not apply to defects
resulting from improper or inadequate maintenance by
Buyer, Buyer-supplied software or interfacing,
unauthorized modications or misuse, operation outside
of the environment specications for the products, or
improper site preparation or maintenance.
No other warranty is expressed or implied.
Hewlett-Packard specically disclaims the implied
warranties of merchantability and tness for a
particular purpose.
Exclusive Remedies
The remedies provided herein are the Buyer's sole and
exclusive remedies. Hewlett-Packard shall not be liable
for any direct, indirect, special, incidental, or
consequential damages, whether based on contract,
tort, or any other legal theory.
Assistance
Product maintenance agreements and other customer
assistance agreements are available for
Hewlett-Packard products.
For any assistance, contact your nearest
Hewlett-Packard Sales Oce.
Certication
Hewlett-Packard Company certies that this product
met its published specications at the time of shipment
[from the factory]. Hewlett-Packard further certies
that its calibration measurements are traceable to the
National Institute of Standards and Technology
( NIST ), to the extent allowed by the Institute's
calibration facility, and to the calibration facilities of
other International Standards Organization members.
Yokogawa-Hewlett-Packard, Ltd.
9-1, Takakura-cho, Hachioji-shi, Tokyo 192 Japan

HP 4155A and HP 4156A
HP 4155A Semiconductor Parameter Analyzer and HP 4156A Precision
Semiconductor Parameter Analyzer are full automatic and high performance
instruments designed to measure, to display graphically, and to analyze the
dc parameters and characteristics of semiconductor devices such as diodes,
transistors, ICs, solar cells, and wafers during the fabrication process. So you
can evaluate device design, process design, fabrication environments, and so
on with the HP 4155A/4156A.
In semiconductor research and development laboratories
, the HP
4155A/4156A provides precise characteristics evaluation, which is an
important step in the development of new high performance devices
,
and gives design engineers an easy to use method of device parameter
acquisition|an essential element in computer aided design (CAD).
On the production line, the HP 4155A/4156A provides real-time feedback
on wafer evaluation to improve the semiconductor process and to increase
production yields.
For semiconductor end users, the HP 4155A/4156A is ideal for circuit design
applications and incoming inspection.
3

HP 4155A/4156A|At a Glance
Primary softkeys
Secondary softkeys
LINE switch
Flexible disk drive
Keyb oard interface
Rotary
knob
LINE switch You use the LINE switch to apply electric power
.
Flexible disk drive You can use 3.5-inch diskette as the mass storage
,
which is inserted in this exible disk drive.
Keyboard interface You can control the HP 4155A/4156A from keyboard,
which is connected to the keyboard interface, as well
as from the front-panel keys.
Primary softkeys You use primary softkeys to move pages and to change
the secondary softkey menu.
Secondary softkeys You use secondary softkeys to select variable names,
alternatives, and changing items.
Rotary knob You use rotary knob to change the setting value and to
move a marker.
4

HP 4155A
SMU terminals
Intlk interface
HP 4156A
SMU terminals
Intlk interface
SMU terminals Either voltage or current output is forced from the
SMU terminals, and measurement signal is put to the
SMU terminals.
Intlk interface To prevent you from electric shock, the HP
4155A/4156A has interlock function. The signals for
the interlock function go through the Intlk interface.
5

In This Guide Book
This guide book is a quick start guide for HP 4155A and HP 4156A. It
introduces a basic measurement and its analysis without a lot of explanation
and details.You can perform the following measurement and analysis through
this guide book:

Measuring Vg{
p
Id characteristics of a MOS FET.
 Analyzing its graph and nding threshold voltage (Vth).
You will nd quick instructions for starting measurements with an HP
4155A/4156A.
Key Conventions.
The following key conventions are used in this guide:
4
Front-panel key
5 Text shown like this represents a key physically located
on the HP 4155A/4156A.
NNNNNNNNNNNNNNNNNNNNNNNNNNNNN
Softkey Text shown like this represents a softkey.
Screen Text Text printed in this typeface indicates text displayed on
the HP 4155A/4156A.
Bold Text shown like this indicates a term dened in the
glossary.
Italic Text shown like this referees to a related document, or is
used for emphasis.
Finding Further Information.
This guide book is written for beginners of HP 4155A/4156A. See the
following books for further information on the HP 4155A/4156A:
HP 4155A/4156A User's Guide (HP part number 04155-90000)
provides information on how to use the HP 4155A/4156A.
HP 4155A/4156A Programmer's Guide (HP part number 04155-90100)
provides information on how to control the HP 4155A/4156A with remote
commands.
HP Instrument BASIC Users Handbook (HP part number E2083-90000)
provides information on how to use HP Instrument BASIC, which is
programming language built-in the HP 4155A/4156A.
6

Getting Started

Getting Started
This guide introduces how to use HP 4155A Semiconductor Parameter
Analyzer and HP 4156A Precision Semiconductor Parameter Analyzer. Basic
operations of the HP 4155A/4156A are provided.
This guide consists of the following three sections:
 Making a measurement : preparing for measurements and measuring a
sample device (MOS FET).
 Analyzing a result : analyzing the results graphically and searching for the
threshold voltage (Vth) of the MOS FET.
 If you have a problem : providing solutions to problems you may
encounter while using this guide.
Before going to the next page, make sure you have prepared the following:
 HP 4155A or HP 4156A
 HP 16442A test xture
 Test device (n-channel MOS FET, enhancement type)
In this guide, the test device used is a Siliconix SD214DE.
This guide book assumes that you have already installed
your HP 4155A/4156A. If not, refer to \Installation" in the
HP 4155A/4156A User's Task Guide. .
2

Making a Measurement
In this section, you learn how to execute the measurements with an
HP 4155A/4156A and to display the measurement results graphically.
Id-Vg measurement of a MOS FET is provided as an example.You learn
step-by-step how to perform this measurement.
You measure the device under test (DUT) by using the measurement circuit as
shown in the following diagram. SMU2 and SMU3 sweep the same voltage to
the gate and drain. SMU3 measures the drain current (Id). The source and
substrate are connected to circuit common.
You should get result similar to the following gure
. Gate voltage Vg (swept
from 0 V to 2 V) is assigned to X axis
,
p
Id is assigned to Y1 axis, and
@
@V g
p
Id is assigned to Y2 axis.
3

Getting Started
Making a Measurement
Step 1. Prepare for the measurement
Before executing measurement, congure HP 4155A/4156A and accessories.
1. Make sure that the HP 4155A/4156A is o.
2. Connect the HP 16442A test xture to HP 4155A/4156A. See next gure.
3. If you use the keyboard, connect it to the HP 4155A/4156A.
When you use the HP 4155A, connect as follows:
HP 4155A cable HP 16442A
Intlk ( Interlock/LED
1
) Intlk
SMU 1 ( Triaxial
2
) SMU 1 (blue label)
SMU 2 ( Triaxial
2
) SMU 2 (blue label)
SMU 3 ( Triaxial
2
) SMU 3 (blue label)
SMU 4 ( Triaxial
2
) SMU 4 (blue label)
HP 4155A cable HP 16442A
VSU 1 ( Coaxial
3
) VSU 1
VSU 2 ( Coaxial
3
) VSU 2
VMU 1 ( Coaxial
3
) VMU 1
VMU 2 ( Coaxial
3
) VMU 2
1 Interlock/LED cable: HP 16493J
2 Triaxial cable: HP 16493C.You do not need to connect SMU4 for this measurement.
3 Coaxial cable: HP 16493B.You do not need to connect VSUs and VMUs for this measurement.
HP 4155A
Coaxial cable
Interlock/LED
cable
Triaxial cable
HP 16442A
Connecting HP 4155A to HP 16442A Test Fixture
4

Getting Started
Making a Measurement
When you use the HP 4156A, connect as follows:
HP 4156A cable HP 16442A
Intlk ( Interlock/LED
1
) Intlk
SMU 1 ( Kelvin triaxial
2
) SMU 1
SMU 2 ( Kelvin triaxial
2
) SMU 2
SMU 3 ( Kelvin triaxial
2
) SMU 3
HP 4156A cable HP 16442A
VSU 1 ( Coaxial
3
) VSU 1
VSU 2 ( Coaxial
3
) VSU 2
VMU 1 ( Coaxial
3
) VMU 1
VMU 2 ( Coaxial
3
) VMU 2
1 Interlock/LED cable: HP 16493J
2 Kelvin triaxial cable: HP part number 04155-61602
3 Coaxial cable: HP 16493B.You do not need to connect VSUs and VMUs for this measurement.
Kelvin triaxial cable
HP 16442A
HP 4156A
Coaxial cable
Interlock/LED
cable
Connecting HP 4156A to HP 16442A Test Fixture
5

Getting Started
Making a Measurement
Step 2. Mount your DUT on the test xture
1. Select a suitable socket module for your DUT.
2. Mount the socket module on the test xture.
HP 16442A Test Fixture
Socket module
3. Mount your DUT on the socket module.
4. Make connections with four connection cables (miniature banana { pin
plug).
You make the following connections:
Source|SMU1
Gate|SMU2
Drain|SMU3
Substrate|SMU1
Both the source and substrate terminals are connected to SMU1.
5. After nishing connections, shut the lid of the test xture.
6

Getting Started
Making a Measurement
Connection cables
Drain
Gate
Source
Substrate
DUT
Wiring for HP 4155A
For this measurement by the HP 4156A, non-Kelvin connections are used. So,
connect only the force terminals as shown in the following gure:
Connection cables
DUT
Gate
Drain
Source
Substrate
Wiring for HP 4156A
7

Getting Started
Making a Measurement
Step 3. Dene the channel assignments
You set the connection information on the CHANNELS: CHANNEL
DEFINITION page.
1. Switch on the HP 4155A/4156A. Self-test starts.
2. After self-test is nished, make sure that CHANNELS: CHANNEL
DEFINITION page appears on the screen of the HP 4155A/4156A. If not,
press 4
Chan
5 front-panel key.
CHANNELS: CHANNEL DEFINITION page
MEASUREMENT MODE
Secondary
softkeys
Primary softkeys
3. Make sure that SWEEP is displayed in the MEASUREMENT MODE eld. If
not, select
NNNNNNNNNNNNNNNNN
SWEEP secondary softkey in the MEASUREMENT MODE eld.
4. Set the connection information in the CHANNELS table as follows:
8

Getting Started
Making a Measurement
Action on Front Panel on Keyboard
To move the pointer, use 4
(
5 , 4
)
5 , 4
*
5 ,or 4
+
5 of MARKER/CURSOR
area.
use 4
6
5 , 47
5 , 4
85
,or 4
95
.
To move the cursor to edit in display area, use
4
(
5 or 4
)
5 of Edit area. use 4
Backspace
5 key.
To enter \ VS " in VNAME eld, press
V
4
.
5
"
,
S
4
+
5
n
, then 4
Enter
5 . type VS , then press 4
Enter
5 .
To enter \ IS " in INAME eld, press
I
4
*
5
?
,
S
4
+
5
n
, then 4
Enter
5 . type IS , then press 4
Enter
5 .
To set \ V " in the MODE eld, select
FFFFFFFFFF
V secondary softkey. press 4
Shift
5 - 4
F1
5 keys.
To set \ VAR1' "inFCTN eld, select
FFFFFFFFFFFFFFFF
VAR1' secondary softkey. press 4
Shift
5 - 4
F4
5 keys.
To set \ VAR1 "inFCTN eld, select
FFFFFFFFFFFFF
VAR1 secondary softkey. press 4
Shift
5 - 4
F2
5 keys.
To disable a unit, select
FFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFF
DISABLE UNIT secondary softkey. press 4
Shift
5 - 4
F7
5 keys.
9

Getting Started
Making a Measurement
Step 4. Dene the user functions
You dene the user functions on the CHANNELS: USER FUNCTION
DEFINITION page.
1.
Select
NNNNNNNNNNNNNNNNNNNNNNNNNNNNN
USER FCTN primary softkey. The CHANNELS: USER FUNCTION
DEFINITION page appears.
2. Enter the user function information in the table as follows:
CHANNELS: USER FUNCTION DEFINITION page
You enter the following two user functions:
SQID =
p
Id
DSQID =
@
@ Vg
SQID =
@
@ Vg
p
Id
Where, Id is drain current and Vg is gate voltage.
10

Getting Started
Making a Measurement
Action on Front Panel on Keyboard
To move the pointer, use 4
(
5 , 4
)
5 , 4
*
5 ,or 4
+
5 of MARKER/CURSOR
area.
use 4
6
5 , 47 5 , 4
85
,or 4
95
.
To move the cursor to edit in display area, use 4
(
5 or 4
)
5 of Edit area. use 4
Backspace
5 key.
To enter \ SQID " in NAME eld, press
S
4
+
5
n
,
Q
4
2
5
'
,
I
4
*
5
?
,
D
4
/
5
;
, then
4
Enter
5 .
type SQID , then press 4
Enter
5 .
To enter \ SQRT(ID) "
1
in DEFINITION
eld,
press
S
4
+
5
n
,
Q
4
2
5
'
,
R
4
3
5
j
,
T
4
p
5
%
, 45
(blue key),
A
4
(
5
[
,
FFFFFFF
ID ,
B
4
)
5
]
, then 4
Enter
5 .
type SQRT(ID) , then press
4
Enter
5 .
To enter \ DSQID " in NAME eld, press
D
4
/
5
;
,
S
4
+
5
n
,
Q
4
2
5
'
,
I
4
*
5
?
,
D
4
/
5
;
,
then 4
Enter
5 .
type DSQID , then press 4
Enter
5 .
To enter \ DIFF(SQID,VG) "
2
in
DEFINITION eld,
press
D
4
/
5
;
,
I
4
*
5
?
,
F
4
7
5
f
,
F
4
7
5
f
, 45 (blue
key),
A
4
(
5
[
, 45 (blue key),
S
4
+
5
n
,
Q
4
2
5
'
,
I
4
*
5
?
,
D
4
/
5
;
, 45 (blue key),
X
4
,
5
>
,
FFFFFFF
VG ,
B
4
)
5
]
, then 4
Enter
5 .
type DIFF(SQID,VG) , then press
4
Enter
5 .
To disable a user function, select
FFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFF
DISABLE FUNCTION secondary softkey. press 4
Shift
5 - 4
F7
5 key.
1 Square root operator (
p
) is dened by \SQRT" built-in function.
2 Partial dierence (
@
@
) is dened by \DIFF" built-in function.
11

Getting Started
Making a Measurement
Step 5. Set up the measurement parameters
You set the output parameters on the MEASURE: SWEEP SETUP page.
1. Press 4
Meas
5 front-panel key. The MEASURE: SWEEP SETUP page appears.
MEASURE: SWEEP SETUP page
VAR1 information
VAR1'
information
2. Set the VAR1 information as follows:
12

Getting Started
Making a Measurement
Drain voltage sweeps from 0 V to 2 V with 10 mV step. The current
compliance is set to 100 mA.
Action on Front Panel on Keyboard
To move the pointer, use 4
(
5 , 4
)
5 , 4
*
5 ,or 4
+
5 . use 4
6
5 , 47 5 , 4
85
,or 4
95
.
To set \ SINGLE " in SWEEP MODE eld, select
FFFFFFFFFFFFFFFFFF
SINGLE secondary softkey. press 4
Shift
5 - 4
F1
5 keys.
To set \ LINEAR " in LIN/LOG eld, select
FFFFFFFFFFFFFFFFFF
LINEAR secondary softkey. press 4
Shift
5 - 4
F1
5 keys.
To enter \ 2.000 V "inSTOP eld, press
Q
4
2
5
'
, then 4
Enter
5 . type 2 , then press 4
Enter
5 .
To enter \ 10.00 mV " in STEP eld, press
P
4
1
5
$
,
U
4
0
5
#
,
E
4
m
5
@
, then 4
Enter
5 . type 10m , then press 4
Enter
5 .
3. Set the VAR1' information as follows:
To force the same voltage to the drain and gate
, set RATIO = 1 and
OFFSET = 0. Because VAR1' is dened as follows:
( VAR 1
0
output )= RAT I O 2 ( VAR 1 output )+ OFFSET
Action on Front Panel on Keyboard
To enter \ 0.000 V " in OFFSET eld, press
U
4
0
5
#
, then 4
Enter
5 . type 0 , then press 4
Enter
5 .
To enter \ 1.000 "inRATIO eld, press
P
4
1
5
$
, then 4
Enter
5 . type 1 , then press 4
Enter
5 .
13