HP 4155A User manual

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Semiconductor Parameter Analyzer
User's Task Guide

c
 Copyright Hewlett-Packard
Company 1993 - 1995
All Rights Reserved.
Reproduction, adaptation, or
translation without prior written
permission is prohibited, except as
allowed under the copyright laws.
HP Part Number
04155-90010
Printing History
First edition, February 1994
Second edition, December 1994
Third edition, November 1995
Printed in Japan
MS-DOS
R
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is U.S. registered
trademark of Microsoft
Corporation.
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trademark of Lotus Development
Corporation.
PageMaker is a trademark of
Aldus Corporation.
Product Warranty
This Hewlett-Packard product is warranted against
defects in material and workmanship for a period of
one year from date of shipment. During the warranty
period, Hewlett-Packard will, at its option, either repair
or replace products which prove to be defective.
For warranty service or repair, this product must be
returned to a service facility designated by
Hewlett-Packard. Buyer shall prepay shipping charges
to Hewlett-Packard and Hewlett-Packard shall pay
shipping charges to return the product to Buyer
.
However, Buyer shall pay all shipping charges, duties,
and taxes for products returned to Hewlett-Packard
from another country.
Hewlett-Packard warrants that its software and
rmware designated by Hewlett-Packard for use with
an instrument will execute its programming
instructions when properly installed on that instrument.
Hewlett-Packard does not warrant that the operation
of the instrument, or software, or rmware will be
uninterrupted or error free.
Limitation of Warranty
The foregoing warranty shall not apply to defects
resulting from improper or inadequate maintenance by
Buyer, Buyer-supplied software or interfacing,
unauthorized modications or misuse, operation outside
of the environment specications for the products, or
improper site preparation or maintenance.
No other warranty is expressed or implied.
Hewlett-Packard specically disclaims the implied
warranties of merchantability and tness for a
particular purpose.
Exclusive Remedies
The remedies provided herein are the Buyer's sole and
exclusive remedies. Hewlett-Packard shall not be liable
for any direct, indirect, special, incidental, or
consequential damages, whether based on contract,
tort, or any other legal theory.
Assistance
Product maintenance agreements and other customer
assistance agreements are available for
Hewlett-Packard products.
For any assistance, contact your nearest
Hewlett-Packard Sales Oce.
Certication
Hewlett-Packard Company certies that this product
met its published specications at the time of shipment
[from the factory]. Hewlett-Packard further certies
that its calibration measurements are traceable to the
National Institute of Standards and Technology
( NIST ), to the extent allowed by the Institute's
calibration facility, and to the calibration facilities of
other International Standards Organization members.
Yokogawa-Hewlett-Packard, Ltd.
9-1, Takakura-Cho, Hachioji-Shi,
Tokyo, 192 Japan

Safety Summary
The following general safety precautions must be observed during all
phases of operation, service, and repair of this instrument. Failure to
comply with these precautions or with specic warnings elsewhere in
this manual may impair the protection provided by the equipment. In
addition it violates safety standards of design, manufacture, and intended
use of the instrument. Hewlett-Packard Company assumes no liability for
customer's failure to comply with these requirements.
NOTE
HP 4155A/4156A comply with INSTALLATION CATEGORY II and
POLLUTION DEGREE 2 dened in IEC 1010-1.
HP 4155A/4156A are INDOOR USE products.
 GROUND THE INSTRUMENT
To minimize shock hazard, the instrument chassis and cabinet must
be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission
(IEC) safety standards.
 DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of ammable gases
or fumes. Operation of any electrical instrument in such an
environment constitutes a denite safety hazard.
 KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component
replacement and internal adjustments must be made b
y qualied
maintenance personnel. Do not replace components with power cable
connected. Under certain conditions, dangerous voltages may exist
even with the power cable removed. To avoid injuries, always
disconnect power and discharge circuits before touching them.
 DO NOT SERVICE OR ADJUSTALONE
Do not attempt internal service or adjustment unless another person,
capable of rendering rst aid and resuscitation, is present.
 DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not
install substitute parts or perform any unauthorized modication to
the instrument. Return the instrument to a Hewlett-Packard Sales
and Service Oce for services and repair to ensure that safety
features are maintained.
 DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, precede potentially dangerous
procedures throughout this manual. Instructions contained in the
warnings must be followed.
WARNING
Dangerous voltages, capable of causing death, are present in this
instrument. Use extreme caution when handling, testing, and adjusting.
Safety Symbols
The general denitions of safety symbols used on equipment or in
manuals are listed below.
L
Instruction manual symbol: the product will be marked
with this symbol when it is necessary for the user to
refer to the instruction manual in order to protect
against damage to the instrument.
Indicates dangerous voltage (terminals fed from the
interior by voltage exceeding 1000 volts must be so
marked).
K
Indicates earth (ground) terminal.
Frame or chassis terminal. A connection to the frame
(chassis) of the equipment which normally includes all
exposed metal structures.
A Alternating current.
F Direct current.

ON (Supply).
OFF (Supply).
WARNING The warning sign denotes a hazard. It calls attention to
a procedure, practice, condition or the like, which, if
not correctly performed or adhered to, could result in
injury or death to personnel.
CAUTION The caution sign denotes a hazard. It calls attention to
an operating procedure, practice, condition or the like,
which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the
product.
Herstellerbescheinigung
GE

AUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T.19
Manufacturer's Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70 dB
operator position
normal operation
per ISO 7779

Introduction
HP 4155A/4156A is an electronic instrument for measuring and analyzing the
characteristics of semiconductor devices. This one instrument allows you to
perform both measurement and analysis of measurement results.
highly accurate measurements.
HP 4155A/4156A has four highly accurate source/monitor units (SMUs), two
voltage source units (VSUs), and two voltage measurement units (VMUs).
The HP 4156A is designed for Kelvin connections and has high-resolution
SMUs (HRSMUs), so HP 4156A is especially suited for low resistance and low
current measurements.You can measure voltage values with a resolution of
0.2  V by using the dierential measurement mode of VMUs.
reliability testing.
HP 4155A/4156A can perform stress testing. That is, can force a specied dc
voltage or current for the specied duration.
Also, you can force ac stress by using pulse generator units (PGUs), which are
installed in HP 41501A SMU/Pulse Generator Expander. The HP 41501A is
attached to HP 4155A or HP 4156A, and can be equipped with a ground unit
(GNDU), high power SMU (HPSMU), two medium power SMUs (MPSMUs), or
two PGUs.
data storing and printing.
HP 4155A/4156A can print and store, in addition to performing measurement
and analysis.You can store measurement setup information, measurement
data, and instrument setting information on a 3.5-inch diskette inserted into
the disk drive of HP 4155A/4156A. And you can print the setting information
and measurement results on a plotter or printer that is connected to
HP 4155A/4156A.
remote control.
HP 4155A/4156A can be controlled by an external controller via HP-IB by
using remote control commands. These commands are based on Standard
Commands for Programmable Instruments (SCPI), so you can easily develop
measurement programs.
HP 4155A/4156A has internal HP Instrument BASIC, so you can develop and
execute measurement programs by using the HP 4155A/4156A only, without
using an external controller.
ix

In This Manual
This manual gives step-by-step instructions for performing common HP
4155A/4156A tasks, and consists of the following chapters:
NOTE
If you have never used the HP 4155A/4156A or HP 4145A/B, read the HP 4155A/4156A Quick Start
Guide rst before reading this manual. The Quick Start Guide gives you an overview of the product
and a brief introduction, which is a good rst step for beginners.
 Introducing the HP 4155A/4156A
This chapter is an overview of the HP 4155A/4156A.
 Installation
This chapter describes how to install HP 4155A/4156A, accessories
, and
peripherals.
 Making a Measurement
This chapter describes device connections, making a sweep measurement,
knob sweep measurement, and sampling measurement, and forcing stress.
 Analyzing Measurement Results
This chapter describes how to analyze measurement results manually and
automatically.
 Filer and Hardcopy
This chapter describes how to print or plot out measurement results or
measurement setups.
 If You Have a Problem
This chapter provides problem-solving information that you may encounter.
 Manual Changes Depending on ROM Version
 Index
x

Other Manuals.
Also the following manuals about HP 4155A/4156A are available:
 User's Dictionary Reference
This manual is a dictionary reference for all parts and functions of the HP
4155A/4156A, and consists of the following chapters:
Measurement Units
Measurement Mode
Measurement Functions
Page Organization
Print/Plot Function
Data Variable and Analysis Function
Softkey Maps and External Keyboard
Specications
Accessories and Options
Manual Changes Depending on ROM Version
Index
 Programmer's Guide
This manual provides information about controlling the HP 4155A/4156A
by remote command via HP-IB interface and HP Instrument B
ASIC, and
consists of the following chapters:
Using HP Instrument BASIC
Reference: HP Instrument BASIC
Getting Started on Programming the HP 4155A/4156A
HP 4155A/4156A SCPI Programming
Running HP 4145A/B Program Directly on HP 4155A/4156A
Sample Application Programs
Manual Chages Depending on ROM Version
 HP-IB Command Reference
This manual is a complete reference of HP-IB commands
, and consists of
the following chapters:
SCPI Commands
HP 4145B Syntax Commands
Manual Changes Depending on ROM Version
Index
 Quick Start Guide
xi

This manual is mainly for beginners and provides brief instructions about
using HP 4155A/4156A.
Text Conventions.
The following text conventions are used in this manual:
4
Front-panel key
5 Represents a key physically located on HP 4155A/4156A
or external keyboard.
NNNNNNNNNNNNNNNNNNNNNNNNNNNNN
Softkey
Represents a softkey that appears on screen of
HP 4155A/4156A.
Screen Text Represents text that appears on screen of
HP 4155A/4156A.
Italic Refers to a related document, or is used for emphasis
.
xii

Contents
1. Introducing the HP 4155A/4156A
Overview of HP 4155A/4156A . . . . . . . . . . . . 1-3
Conguration of HP 4155A/4156A and HP 41501A . . 1-4
Front View of HP 4155A/4156A . . . . . . . . . . . 1-5
Rear View of HP 4155A/4156A . . . . . . . . . . . 1-9
L . . . . . . . . . . . . . . . . . . . . . 1-10
L . . . . . . . . . . . . . . . . . . . . . 1-10
L . . . . . . . . . . . . . . . . . . . . . 1-11
Front and Rear View of HP 41501A . . . . . . . . . 1-12
L . . . . . . . . . . . . . . . . . . . . . 1-13
An Overview of Functions . . . . . . . . . . . . . . 1-19
Operation and Control . . . . . . . . . . . . . . . 1-20
Measurements and Results Display . . . . . . . . . 1-22
Graphical Analysis . . . . . . . . . . . . . . . . 1-25
Data Storage . . . . . . . . . . . . . . . . . . . 1-26
Plotting and Printing . . . . . . . . . . . . . . . 1-27
2. Installation
L . . . . . . . . . . . . . . . . . . . . . 2-2
Requirements . . . . . . . . . . . . . . . . . . . . 2-3
Power Requirements . . . . . . . . . . . . . . . . 2-4
Power Cable . . . . . . . . . . . . . . . . . . . 2-5
Ventilation Requirements . . . . . . . . . . . . . . 2-7
Operating Environment . . . . . . . . . . . . . . 2-7
Cleaning . . . . . . . . . . . . . . . . . . . . . 2-7
Setting up HP 4155A/4156A . . . . . . . . . . . . . 2-8
To Inspect HP 4155A/4156A and Accessories . . . . . 2-8
To Install HP 41501A SMU/Pulse Generator Expander 2-9
To Check HP 4155A/4156A Operation . . . . . . . . 2-10
Installing Accessories . . . . . . . . . . . . . . . . 2-12
To Install Connector Plate . . . . . . . . . . . . . 2-13
To Connect Interlo ckTerminal . . . . . . . . . . . 2-17
Contents-1

Change 1
To Connect Connector Plate and DUT . . . . . . . . 2-22
To Install HP 16442A Test Fixture ........... 2-29
To Install HP 16441A R-Box . . . . . . . . . . . . 2-35
To Install HP 16440A SMU/Pulse Generator Selector . 2-38
To Connect HP 16440A Selector to HP 4155A/56A . . 2-45
3. Making a Measurement
Connection to Device Under Test (DUT) . . . . . . . . 3-3
To Mount a DUT on Test Fixture . . . . . . . . . . 3-4
To Make Connections to Reduce Leakage Current . . . 3-6
To Make Connections to Measure Low Resistance (For
HP 4156A Only) . . . . . . . . . . . . . . . . 3-8
Sweep Measurements . . . . . . . . . . . . . . . . 3-10
To Dene Sweep Measurement Units . . . . . . . . . 3-12
To Set up Primary Sweep Source . . . . . . . . . . 3-14
To Set up Secondary Sweep Source . . . . . . . . . 3-16
To Set up Synchronous Sweep Source . . . . . . . . 3-18
To Set up Constant Output . . . . . . . . . . . . . 3-20
To Set up SMU Pulsed Output . . . . . . . . . . . 3-21
To Set up PGU Pulsed Output . . . . . . . . . . . 3-24
To Output Same Value Before and After Measurements 3-27
To Dene a User Function . . . . . . . . . . . . . 3-28
To Set up Graphical Display of Measurement Results . 3-30
To Set up List Display of Measurement Results . . . . 3-32
To Execute or Stop Measurement . . . . . . . . . . 3-33
To Control R-Box . . . . . . . . . . . . . . . . . 3-34
Knob Sweep Measurements . . . . . . . . . . . . . . 3-37
To Execute Knob Sweep Measurement . . . . . . . . 3-38
To Stop Knob Sweep Measurement . . . . . . . . . 3-42
Sampling Measurements . . . . . . . . . . . . . . . 3-43
To Dene Sampling Measurement Units . . . . . . . 3-45
To Set up Sampling Parameters . . . . . . . . . . . 3-47
To Set up Constant Output . . . . . . . . . . . . . 3-49
To Dene Measurement Stop Conditions . . . . . . . 3-51
Stress Force . . . . . . . . . . . . . . . . . . . . 3-53
To Set up Stress Source Channels . . . . . . . . . . 3-55
To Set up Stress Condition/Timing . . . . . . . . . 3-57
To Set up AC (Pulse) Stress . . . . . . . . . . . . 3-60
To Set up DC Stress . . . . . . . . . . . . . . . . 3-62
ToForce Stress . . . . . . . . . . . . . . . . . . 3-64
To Control Selector for Switching SMU and PGU . . . 3-66
Contents-2

Change 1
4. Analyzing Measurement Results
Manual Analysis . . . . . . . . . . . . . . . . . . 4-3
To Specify a MeasurementPoint on Curve . . . . . . 4-4
To Specify b etween MeasurementPoints on Curve. . . 4-6
To DisplayorMove Cursor . . . . . . . . . . . . . 4-8
To Adjust Display Range to Measurement Curve
Automatically . . . . . . . . . . . . . . . . . 4-10
To Zo om the Display Range . . . . . . . . . . . . 4-11
To Center Display at Cursor Location . . . . . . . . 4-12
To Draw Line through Two Sp ecied Points . . . . . 4-13
To Draw Line through Specied Point with Specied
Gradient . . . . . . . . . . . . . . . . . . . 4-15
To DrawTangent to Specied Point of Measurement
Curve. . . . . . . . . . . . . . . . . . . . . 4-17
To Draw Regression Line for Sp ecied Region . . . . . 4-19
To Display and Select a Line . . . . . . . . . . . . 4-22
To Display Grid on the Graph . . . . . . . . . . . 4-23
To Change Data Variable on Graph . . . . . . . . . 4-24
To Change Range of X or Y Axis Scale . . . . . . . .
4-25
To Change Variable Assigned to X, Y1, or Y2 Axis . . 4-26
ToOverlayan Internal Memory Measurement Curve
onto Plotting Area . . . . . . . . . . . . . . . 4-27
To Scroll the LIST Page . . . . . . . . . . . . . . 4-29
To DisplayorMove Marker on LIST Page . . . . . . 4-30
To Change Variables of LIST page . . . . . . . . . . 4-32
Automatic Analysis . . . . . . . . . . . . . . . . . 4-33
To Draw Line by Sp ecifying TwoPoints . . . . . . . 4-34
To Draw Line by Sp ecifying Gradient and One Point. . 4-36
To DrawTangent to Specied MeasurementPoint. . . 4-38
To Draw Regression Line by Specifying TwoPoints . . 4-40
To Display Marker at Specied Point . . . . . . . . 4-43
5. Filer
File Op erations . . . . . . . . . . . . . . . . . . . 5-3
To List File Names Stored on Diskette . . . . . . . . 5-5
To Store Setup or Result Data onto Diskette . . . . . 5-7
To Store Setup or Result Data into Internal Memory . . 5-9
To Store Result Data in Spreadsheet Format . . . . . 5-11
To Load Setup or Result Data from Diskette . . . . . 5-13
To Load Setup or Result Data from Internal Memory . 5-16
To Rename a File on Diskette . . . . . . . . . . . . 5-18
Contents-3

Change 1
To Remove a File from Diskette . . . . . . . . . . . 5-19
To Copy File on Diskette to Another Diskette ...... 5-21
To Copy Setup or Result Data from Internal Memory to
Diskette . . . . . . . . . . . . . . . . . . . . 5-23
To Initialize a Diskette . . . . . . . . . . . . . . . 5-24
To Backup a Diskette . . . . . . . . . . . . . . . 5-26
6. If You Have A Problem
When You Install the HP 4155A/4156A . . . . . . . . 6-4
If HP 4155A/4156A cannot be Powered on . . . . . . 6-5
If Measurement Units of HP 41501A are not Displa yed
on the CHANNELS: CHANNEL DEFINITION Page 6-6
If External Keyboard does not Work . . . . . . . . . 6-7
If Display Page does not Appear after Applying P
ower . 6-7
If HP 16442A Test Fixture is not Stable . . . . . . . 6-7
When You Make A Measurement . . . . . . . . . . . 6-8
If Measured Value Oscillates when Measuring
High-Frequency Devices . . . . . . . . . . . . . 6-9
If Measured Value Oscillates when Measuring Negative
Resistance . . . . . . . . . . . . . . . . . . . 6-10
If Noise Aects the Measured Values . . . . . . . . . 6-12
If Measured Voltage has some Error when Forcing a
Large Current . . . . . . . . . . . . . . . . . 6-13
If Large Current Causes High Temperature (Thermal
Drift) . . . . . . . . . . . . . . . . . . . . . 6-13
If MeasurementTakes More Time than Specied . . . 6-14
If Measurement Damages the Device under Test . . . . 6-14
If You Get Unexp ected Data when Performing Sampling
Measurement . . . . . . . . . . . . . . . . . 6-15
If Errors Occur . . . . . . . . . . . . . . . . . . . 6-16
If Errors Occur when You Perform Self-calibration or
Diagnostics . . . . . . . . . . . . . . . . . . 6-17
If an error o ccurs when you op erate HP 4155A/4156A . 6-25
If a Measurement Data Status is Displayed. . . . . . . 6-40
7. Manual Changes Depending on ROM Version
Change 1 . . . . . . . . . . . . . . . . . . . . . . 7-3
Index
Contents-4

Figures
1-1. Front View of HP 4155A/4156A . . . . . . . . . . . . . . 1-5
1-2. Rear View of HP 4155A/4156A .............. 1-9
1-3. Front and Rear View of HP 41501A . . . . . . . . . . . . 1-12
1-4. Rear View of HP 41501A Option 402 ........... 1-14
1-5. Rear View of HP 41501A Option 410 ........... 1-15
1-6. Rear View of HP 41501A Option 412 ........... 1-16
1-7. Rear View of HP 41501A Option 420 ........... 1-17
1-8. Rear View of HP 41501A Option 422 ........... 1-18
2-1. Power Cables . . . . . . . . . . . . . . . . . . . . . . 2-5
2-2. Dimensions of Connector Plate for HP 4155A
(HP Part Number: 04155-60006) . . . . . . . . . . . . 2-14
2-3. Dimensions of Connector Plate for HP 4156A
(HP Part Number: 04156-60002) . . . . . . . . . . . . 2-15
2-4. Dimensions of Connector Plate for HP 41501A
(HP Part Number: 41501-60004) . . . . . . . . . . . . 2-16
2-5. Dimensions of Interlock Switch (HP part number 3101-0302) . 2-20
2-6. Dimensions of Interlock Switch (HP part number 3101-3241) . 2-20
2-7. Dimensions of LED (HP part number 1450-0641) .. .. .. 2-21
Tables
1-1. Conguration of HP 41501A ............... 1-4
2-1. Connectors on Connector Plate . . . . . . . . . . . . . . 2-15
Contents-5

Contents

1
Introducing the HP
4155A/4156A