
Before You Begin
Mini-Convectron Module Instruction Manual - 275512 9
Before You Begin Installation Operation Maintenance
Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple
a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Potential fatal electrical shock could then occur
because of the high voltage between these exposed conductors and ground.
1.5 Implosion / Explosion Danger of injury to personnel and damage to equipment exists on all
vacuum systems that incorporate gas sources or involve processes capable
of pressuring the system above the limits it can safely withstand.
For example, danger of explosion in a vacuum system exists during
backfilling from pressurized gas cylinders because many vacuum devices
such as ionization gauge tubes, glass windows, glass belljars, etc., are not
designed to be pressurized.
Do not attach cables to glass gauge pins while the gauge is under vacuum.
Accidental bending of the pins may cause the glass to break and implode.
Cables, once installed, should be secured to the system to provide strain
relief for the gauge tube pins.
Install suitable devices that will limit the pressure from external gas sources
to the level that the vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release pressure at a
level considerably below that pressure which the system can safely
withstand.
Suppliers of pressure relief valves and pressure relief disks are listed in
Thomas Register under "Valves, Relief", and "Discs, Rupture".
Confirm that these safety devices are properly installed before installing the
the Mini-Convectron Module. In addition, check that (1) the proper gas
cylinders are installed, (2) gas cylinder valve positions are correct on
manual systems, and (3) the automation is correct on automated systems.
1.6 Operation It is the installer's responsibility to ensure that the automatic signals
provided by the process control module are always used in a safe manner.
Carefully check manual operation of the system and the setpoint
programming before switching to automatic operation. Where an
equipment malfunction could cause a hazardous situation, always provide
for fail-safe operation. As an example, in an automatic backfill operation
where a malfunction might cause high internal pressures, provide an
appropriate pressure relief device.