Matsusada Precision PZM-0.12BS User manual

Instruction Manual
MODEL PZM-0.12BS
B/N 058.9.010 *058.9.010*Rev. 0.2

Note
◆All rights reserved.
◆No part of this publication may be reproduced, stored in a retrieval system, or
transmitted, in any form, or by any means, mechanical, electronic, photocopying,
recording, or otherwise, without the prior written permission of Matsusada Precision.
◆No patent liability is assumed with respect to the use of the information contained
herein. Moreover, because Matsusada Precision is constantly striving to improve its
high-quality products, the information contained in this manual is subject to change
without notice. Every precaution has been taken in the preparation of this manual.
Nevertheless, Matsusada Precision assumes no responsibility for errors or omissions.
Neither is any liability assumed for damages resulting from the use of the information
contained in this publication.
Trademarks
◆Company names and product names in this document are the trademarks or registered
trademarks of their respective companies.
Warranty
◆For details, refer to the following website.
https://www.matsusada.com/support/manufacturer_warranty.html

PZM-0.12BS
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Matsusada Precision
For Safe Use of the Product
◆Introduction
The product generates high-voltage and high-energy.
Therefore, wrongly handling or operating the product may result in death or serious injury and maybe
property damage as well. In order to use the product safely, read the instruction manual thoroughly
before use to understand how to use and operate it properly.
Please note that we will not be held responsible for any damage or loss caused by not following the
warnings, cautions, and procedures described in the manual.
Keep the manual with you so that you can read it whenever you want.
◆Symbols
Symbols are used in the manual and product, which indicate precautions to be observed for safe use.
Understand these symbols first and then read the manual thoroughly.
Some symbols below are not used in products.
Indicates a potentially hazardous situation, which, if not avoided, may
result in serious injury or death.
Indicates a potentially hazardous situation, which, if not avoided, may
result in minor or moderate injury or in property damage.
Indicates danger/warning/caution. Refer
to the instruction manual when this
symbol appears on the unit.
Frame or chassis terminal
Indicates the possible danger of electric
shock under specific conditions, which
may result in serious injury or death.
Ground terminal
High Temperature Caution:
Indicates the possible danger of injury by
high temperature under specific
conditions.
Power ON
Indicates general prohibitions, including
warnings.
Power OFF
Indicates what must be followed.
Standby
Protective earth terminal (ground terminal
for preventing electric shock)
Bistable push button switch
ON
Indicates the possible danger of death if
you drink it and burns or blindness if it
attaches.
Bistable push button switch
OFF
Indicates the possible danger of exposure
to radiation.
Alternative Current

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◆Understand the risks.
The Product generates high-voltage and high-energy.
The product is designed for electrical engineers or the equivalents who install, wire, and operate it.
Read the instruction manual thoroughly before use and familiarize yourself with the proper use and
danger of the product.
◆Make sure to allow only specific people to handle the product.
Make sure to allow only the following people to handle the product:
1. who are electrical engineers or the equivalents and have already familiarized themselves with the
proper use and danger of the product, or
2. who are electrical engineers or the equivalents and have already been trained by the above-
mentioned people, or
3. who work under the supervision of the above-mentioned people.
If people other than those listed above install, wire, or operate the product, it may cause electric
shock, burnout, or injury.
◆Do not open or remove the case or panel of the product.
Do not disassemble, repair, or modify the product by yourself. High-voltage is applied to the inside of
it.
Otherwise, it may cause electric shock, fire, or malfunction.
Moreover, if you do it, the safety and functions are not covered with the warranty.
◆The product does not suit to install and use in places where children may be present.
The product is designed to be installed in places such as factories or laboratories. Do not install and
use it where children may be present.
◆Make sure to ground it.
When the product has a protection ground terminal or GND terminal, make sure to ground it.
When the AC line input of it is an inlet type, connect the attached power cable or a power cable
suitable for your area to an outlet with the ground. Otherwise, it may result in electric shock or fire.
◆Regarding power cable
When a power cable is enclosed or attached to the product, do not use it for other products.
When no power cable is enclosed with the product, prepare the power cable suitable for the usage
environment and area by yourself.
◆Regarding the connection of power cable
Electrical engineers or the equivalents who have already been familiarized with the proper use and
danger of the product should connect the power cable to the AC input by referring to the instruction
manual.
Regarding products that have acquired the safety standard, check the page describing the over-
voltage categories too.
◆Do not process or damage power cables
It may result in electric shock or fire.
◆Regarding the input voltage
Check the page describing the input terminals and input voltage in the instruction manual.
Do not provide any voltage out of the specifications.

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◆Regarding the fuse
The product builds in a protective fuse. In the case where a fuse holder is arranged outside of the
product, you can replace it by yourself. Refer to the instruction manual to replace it.
In the case where a fuse holder is not arranged outside of the product, you cannot replace it by
yourself.
In this case, do not open the case or panel of the product and contact us.
◆The product is designed for indoor use.
Use the product indoors only, not outdoors. Even indoors, do not use it if there is a possibility of
water leakage, flooding, or snow covering.
◆Regarding operating temperature and humidity
Use the product within the range of the specifications describing in the instruction manual.
Do not use it in a place where the ambient temperature exceeds the specified range or a closed
place.
◆Do not install the product in places where condensation may occur.
Otherwise, insulation deteriorates and it may cause electric shock, fire, or malfunciton.
◆Do not place anything on top of the product.
Otherwise, they may fall or tumble from it.
◆Do not put anything into the product.
Do not put foreign objects such as metal or liquid into the product through the air inlets, air outlets,
or other openings. Otherwise, it may result in electric shock, fire, or malfunction.
◆Operate the product with the right hand.
Use only your right hand to operate the product and keep your left hand away from it, which can
reduce the risk of electric current flowing through the left hand to the vital organs of the body in the
event of an electric shock.
◆Do not touch the wiring/load connected to the output and any terminals/connectors during
the operation or just after turning output off.
Very high-voltage is on the terminals and connectors during the operation and even just after the
output is turned off. Touching them may result in serious injury or death by electric shock.
The terminals here mean all terminals like input and output terminals and terminals for
communications and remote controls.
◆Turn off the product before touching the wiring/load connected to the product and any
terminals/connectors on the product and cut it off from the AC input.
Before touching the terminals/connectors and wiring/load, turn off the product and unpug the AC
input cable from the outlet or turn off the AC input breaker. Then, check there is no voltage remained
using a tester.
Since the output and sense terminals are connected to condensers in it, there is high-voltage
remained on them even just after it is turned off.
In order to avoid electric shock, ground the terminals to discharge using a short-circuit grounding
apparatus and check the voltage again.
The terminals here mean all terminals like input and output terminals and terminals for
communications and remote controls.

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◆Level the product out to use for good heat dissipation.
Do not install the product upside down or sideways. If not, the inner heat dissipation will be
insufficient.
It may result in smoke or fire due to components deterioration.
◆Do not install the product in a place where cold air directly blows to it.
It may result in electric leakage or burnout due to condensation.
◆Do not install the product in a place where it is exposed to corrosive gases or liquids.
It may result in smoke or burnout due to components deterioration.
◆Do not install the product in a dusty place.
Accumulating dust in the air inlet will make hard to cool it down it, it may result in malfunction.
In that case, remove dust immediately.
◆Do not block the air inlet and outlet.
Secure 30 cm space at least around the openings.
If they are blocked, the product cannot show the rated performance due to the internal temperature
increase. Moreover, components deteriorate and it may result in smoke or fire.
◆Remove wirings to and from the product when work like welding near it are done.
◆Do not wipe the equipment with a dust cloth wet with chemicals (thinner or the like) or water.
Otherwise, it may result in an electric shock, electric leakage, or burnout due to water getting inside.
◆Regarding fan replacement
When products equip a fan, it has a lifetime. It will be worn out and deteriorated with the time
passed and its operation may become unstable. Also, its lifetime greatly varies depending on the
usage environment such as temperature, humidity, dust. It requires to be replaced at regular
intervals to extend the lifetime. For the replacement, contact us.
(It requires a replacement charge separately. Do not replace it by yourself, as there is a risk of
electric shock.)

PZM-0.12BS
Matsusada Precision
Table of Contents
Page
1. Introduction...........................................................................................................................................1
1-1 Greetings....................................................................................................................................1
1-2 Unpacking...................................................................................................................................1
1-3 Installation Conditions.................................................................................................................1
1-4 Handling Precautions..................................................................................................................2
1-5 Troubleshooting..........................................................................................................................2
2. External Appearance............................................................................................................................3
2-1 External Appearance ..................................................................................................................3
2-2 Control Connector Pin Assignment (15-pin, Female) ..................................................................4
3. Instruction for Handling.........................................................................................................................5
3-1 Overview.....................................................................................................................................5
3-2 Features .....................................................................................................................................5
3-3 Operation....................................................................................................................................6

1.Introduction
1PZM-0.12BS
Matsusada Precision
1-1 Greetings
Thank you very much for your purchase of Matsusada Precision piezo driver. This Instruction Manual
was written to provide the user with instructions on the safe operation of our piezo driver. Matsusada
Precision takes every precaution to ensure the quality of our products. Please refer carefully to this
manual in order to use this product correctly and safely, and to achieve the best possible performance.
We have made every effort to provide all of the necessary information in this manual. However, please
do not hesitate to contact us if you find any errors or omissions.
1-2 Unpacking
After unpacking the product and checking the power supply, make sure all of the following accessories
are included.
<Accessories>
・Instruction manual (1)
・Output cable (1)
・Sensor cable (1)
1-3 Installation Conditions
・The piezo driver should be installed horizontally.
・Do not put anything on the piezo driver.
・The piezo driver has cooling air intake and exhaust ports on the top and side, respectively.
Provide enough space around the piezo driver and use it in a good ventilation condition.
・Avoid using the piezo driver in a place exposed to dust or corrosive gases.
1. Introduction
When the piezo driver is purchased separately

1.Introduction
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Matsusada Precision
1-4 Handling Precautions
・Be sure to connect the case of the product to the earth.
・The case earth and load earth should be short and connected with a thick wire so that it becomes
a single earth ground.
・Be careful not to touch the load immediately after the output is turned off.
1-5 Troubleshooting
In case of no output voltage,
1. Check whether the specified voltage is input.
・Power supply voltage: 12 to 15Vdc
・External input voltage: 0 to 10V

2. External Appearance
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Matsusada Precision
2-1 External Appearance
(1)Output connector One-pin LEMO receptacle (00250)
(2)Sensor input connector Four-pin LEMO receptacle (0S304)
(3)LED (green) for Power ON
(4)LED (red) for Overload
(5)Displacement display monitor volume for gain adjustment
(6)Displacement mode volume for gain adjustment
(7)Zero adjustment volume
2. External Appearance
(3)
(4)
(5)
(6)
(7)
(1) (2)
4xM2.5 taps (back)

2. External Appearance
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Matsusada Precision
2-2 Control Connector Pin Assignment (15-pin, Female)
1. Vin
2. 0V
3. Vcon-in/Dcon-in
4. BIAS CW
5. BIAS CCW(COM)
6. Vmoni
7. Dmoni
8. Mode switching
9. Vin
10. 0V
11. COM
12. BIAS WIPER
13. DISPLAY
14. COM
15. GND
Precaution about connection
Connect this unit to a PZ series device as given below.
Main unit
LEMO
One-pin
connector
Output
cable
LEMO 4-pin
connector
Sensor cable (gray)
1
9
8
15
SENSOR

3. Instruction for Handling
5PZM-0.12BS
Matsusada Precision
3-1 Overview
This product is a piezo driving power supply that is designed optimally for driving piezo elements. It is
possible to pass peak current as large as two times of rated current to respond at high speed. The
exceptional correcting capability of hysteresis in piezo elements makes it possible for this product to
provide linear and high-accuracy displacement control. This product combines with a distortion sensor to
provide a superb micro-positioning system.
3-2 Features
This product is a piezo driver with an increased peak power. The average output current is 100mA, but
two times of the peak current up to 200mA can be obtained during the step driving.
The piezo element is capacitive so that as shown
in Fig. 1, output power (current) is required only
during driving (when the voltage changes). While
the piezo element is in static state (when the
voltage is constant), no output power is required.
This power supply is so designed to incorporate
such characteristics.
The output waveform of this product is as shown
in Fig. 2. Since a peak current of 200 mA can be
removed, the response of the piezo element
increases, making the operation faster.
3. Instruction for Handling
Output waveform at maximum 100mA
Fig. 1
Output waveform at maximum 200mA
Fig. 2
-200mA
≦15msec
200mA

3. Instruction for Handling
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Matsusada Precision
3-3 Operation
If this product is used only in the open loop (constant voltage) mode, it is not necessary to connect to the
sensor input (there is no problem with connecting.) If this product is used in closed loop or if
displacement display is used, connect this product as shown below and set it up, referring to "Initial
setting of displacement detector unit" on page 8. (If this product is purchased with our PZ series as a set,
the displacement detector unit has been adjusted.)
If you want to use this product in closed loop mode (displacement control mode), check the following:
1. Connect the output voltage positive
terminal+ to the positive side+ of the
piezo element.
(If connected inversely, the device won't
operate normally.)
2. The distortion sensor (700Ω) is affixed in
the extension direction.
If affixed in the shrinkage direction, the
device won't operate normally.
It is advisable to select a distortion gauge suitable for this product.
The standard circuit consists of two gauges (700Ω). As you select the option, the following configuration
of the resistance and number of distortion gauges are available.
Options
The piezo
element extends
in this direction
Piezo element
Piezo element
Output cable
Distortion gauge
Extension direction
No polarity
700Ωdistortion gauge
Sensor cable
Red
Neither green nor white is
used. Green and white
wires should be isolated.
Black

3. Instruction for Handling
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Resistance
Number of
gauges
Connected to
□120Ω
□1 gauge
I
□350Ω
□2 gauges
I, II
□700Ω
□4 gauges
I, II, III, IV
Make sure that lead wire ends that are not used be isolated.
Check that the distortion gauge I and II are attached along
with the stretching direction, while the distortion gauge IV is
along with the shrinking direction.
1. Set the loop mode (8) to open.
2. Input 12V between Vin (1) with (9) and 0V (2) with (10).
3. When a voltage of -2V to +12V is input between Vcon-in (3) and COM (11), a voltage of -20V to
+120V is output at the output terminal.
4. A voltage that is 1/100 of the output is output from Vmoni terminal (6).
5. If a bias VR is used, connect as follows:
The bias voltage can be adjusted between 0V and 100V.
6. If the displacement detector unit is set to the initial value, displacement can be monitored from the
Dmoni terminal. 10V/maximum displacement
It is also possible to display the amount of displacement by connecting the DISPLAY terminal to a
digital meter (1.999V of rating).
Use in the open loop mode
(1)
(2)
(4)
(3)
Red
Black
Green
White
Sensor cable
+
－
Distortion
gauge
White
Black
Vin
Wire end
Connector
Red
Green
III
II
I
IV
Vout
－
+
(4)
(5)
(12)
CCW
5kΩ
CW

3. Instruction for Handling
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PZT driver
Vcon-in
In order to use the closed-loop mode optimally, it is necessary to match (zero adjustment and gain
adjustment) the distortion sensor to be actually used and the sensor input unit of this device.
[Necessary instrument]: Get ready a displacement meter capable of measuring in the order of μm.
1. In the open loop mode mentioned in the previous paragraph, calibrate the built-in displacement
detector unit.
2. Connect the components as shown in the right sketch and put the meter in the displacement
measurement scale.
(1) With Vcon-in = 2V, drive the piezo
element with -20V.
(2) Reset the external displacement meter
to 0μm. Turn the zero trimmer on the
opposite side of the outpu until the PZJ
meter reads 0.0V.
(3) Input Vcon-in until the piezo element
is displaced at maximum*.
(4) Turn the gain trimmer on the PZJ front
panel until the external displacement
meter reads the maximum value.
* Check the maximum input voltage and maximum displacement of the piezo element being used.
(5) Return to step (1), and repeat the steps until (4).
(6) Check that the PZJ displacement meter reads 10.0V when the external displacement meter dreads the
maximum value. If the check result is satisfactory, calibration is over.
* Make zero and gain adjustments alternatively within the accuracy of 0.05 to 1.00 μm.
Repeat steps (1) to (4) several times to achieve satisfactory calibration.
(7) After calibration, the PZJ is ready for displacement control.
* Please note that if the sensor cable is extended unnecessarily, displacement may not be detected correctly
and zero adjustment may not be made properly within the specified range.
Initial setting of displacement detector unit
100.0
μm
Displacement
meter
SENSOR
Vout
Calibration of built-in
displacement meter

3. Instruction for Handling
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1. Connect the mode switch (8) to (14).
2. Input 12 V between Vin (1) with (9) and 0V (2) with (10).
3. When a voltage of 0V to + 10V is input between Dcon-in (3) and COM (11), the displacement varies
between 0 and maximum.
4. Voltage of 10V/max. displacement is output from the Dmoni terminal (7).
5. If a bias VR is used, connect as follows:
It is possible to set the bias within the range from 0 to maximum displacement.
6. It is possible to display the amount of displacement by connecting the DISPLAY terminal (13) to a
digital meter (1.999V of rating).
Monitor output: Outputs from the control connector (6) and (7). Output impedance is 1kΩ.
Output voltage monitor (Vmoni): 1.2V/120V output
Displacement monitor (Dmoni): 10V/max. displacement
Use in the closed-loop mode
Other functions
(4)
(5)
(12)
CCW
5kΩ
CW

PZM-0.12BS
Matsusada Precision
Revision History
Rev. No.
Rev. Date
Revised Contents
0.1
2020/10
First edition
0.2
2022/09
Corrected description.

PZM-0.12BS
Matsusada Precision