Matsusada Precision EJC Series User manual

MODEL EJC SERIES
Instruction Manual
Rev. 1.2
B/N 036.9.010 *036.9.010*

i
SAFETY
1. BE SURE TO GROUND!!
Be sure to ground the power supply unit before use.
2. DO NOT TOUCH ANY HIGH VOLTAGE TERMINALS!!
Do not operate the power supply unless someone who is familiar with the operation precede, the
hazards of high voltage, and the treatment for the electrical shock is present.
3. UNDERSTAND THE HAZARDS OF HIGH VOLTAGE!!
In case you let somebody operate the power supply for you, must be sure that he/she fully
understands the hazards of high voltage and the areas where never can be touched.
4. CUT OFF THE POWER BEFORE TOUCH THE UNIT!!
Cut off the power, and check that the power is OFF, before you touch the power supply.
Capacitors in the output circuit are still charged and dangerous even after the power has been
cut off.Discharge all remaining high voltage by grounding them.
5. DISCONNECT THE INPUT LINES(AC LINES) !!
In case you need to touch the inside of the power supply following instruction manual, cut off
the power and disconnect the input lines(AC lines), and ground all the capacitors and high
voltage section.
Don’t remove the case or touch the inside of power supply unless so instructed in the
instruction manual.
6. OPERATE THE POWER SUPPLY WITH YOUR RIGHT HAND!!
In order to avoid the electric shock to your important organs, operate the power supply with
your right hand and keep your left hand off from the power supply.
This power supply unit generates high voltage and energy.
Electric shock may lead to death or serious injury.
Be sure to follow the instructions below and handle the unit with caution.

ii
Various symbols are used in this instruction manual and on the product for ensuring safety.
What will be caused by ignoring the instructions given with the symbols or by improper handling
are classified as shown below. Read carefully and understand the descriptions before
proceeding to the main body of this manual.
Symbols
Meanings of the Symbols
Some of the symbols used
are shown on the right.
Indicates that which requires caution.
Indicates that which forbidden.
Indicates that which must be done.
Indicates electric shock hazard.
failure to follow the instructions with this indication may lead to death or serious injury.
failure to follow the instructions with this indication may lead to injury or damage in property.
Warning:
Caution:
！ 
！ 
！

！

！ 
Warning
Do not touch the output terminal or the
leads or load connected to it while the
unit is in operation or immediately after it
is stopped. Otherwise it may cause
electric shock or injury.
Do not install the unit in a place subject
to steam or water vapor.
Otherwise it may cause poor insulation
and lead to fire or electric shock.
Do not install the unit in a place subject
to dew condensation.
Otherwise it may cause electric shock.
Do not modify or damage the cables.
Otherwise it may cause electric shock.
Be sure to ground the unit to avoid a rare
possibility of electric shock.
Otherwise it may lead to fire, electric
shock or injury.
Do not place any object on the unit.
Dangerous situations may occur if the
object drops or falls.
Do not put any object in the unit.
It may cause damage.
Do not disassemble, remodel or repair the
unit. High voltage may be built up inside,
which may cause electric shock.
Disassembly, remodeling or repair hamper
ensuring of safety and may lead to
dangerous situations.
Do not install the unit outdoors or in a
place subject to leaking of water, flood
or snow.
Otherwise it may cause electric shock.
NO
NO
NO
NO
DISASSEMBLY
NO
NO
GROUND
NO

iii
■ After reading this manual, be sure to store it in a place convenient for the users so that it can be
referred to at anytime.
！ 
Caution
Do not install the unit upside down or
on a wrong side.
Insufficient heat release may cause
deterioration of parts, which may
generate smoke or set fire.
Do not use the unit in a place subject to
high temperature or in an enclosed,
limited area.
It not only hampers the unit from
achieving its performance but also
causes deterioration of parts leading to
smoking or burning.
Do not wipe the unit with chemicals
(such as thinner) or wet cloth.
It may allow water inside leading to
electric shock, electrical leak or burning.
Do not cover the vent holes of the unit.
Vent holes are provided to prevent
elevation of temperature inside.
Covering them not only hampers the unit
from achieving its performance but also
causes deterioration of parts, which may
generate smoke or set fire.
Do not install the unit and the remote
controller in a place subject to direct
cold air. Condensation may lead to
electrical leak/burning.
Do not install the unit in a place subject
to corrosive gas or liquid (such as a
place where chemicals are handled).
Deterioration of parts may cause
generation of smoke or burning.
NO NO
NO NO
NO NO

iv
RESCUE
1. Free victim from contact with live conductor quickly.
Avoid contact with neither live conductor nor victim’s body.
2. Shut off high voltage at once and ground the circuit. If high voltage cannot be turned off
quickly, ground the circuit to discharge, or cut high voltage line by an ax with dry wooden
handle. Be careful of electric flash.
3. If circuit cannot be broken or grounded, use a dry board, dry clothing, or other
nonconductor to free victim.
4. Call an ambulance immediately.
SYMPTOMS
NEVER TAKE ELECTRICALLY SHOCKED CONDITION AS DEATH.
Symptoms of electric shock may include unconsciousness, failure to breathe, absence of
pulse, pallor, and stiffness, as well as severe burns.
Whenever victim is not breathing properly, give artificial respiration(see next page).
TREATMENT
1. Start artificial respiration at scene of accident. Only in case victim’s or
operator’s life is endangered, remove victim to safe location nearby.
2. After starting artificial respiration, continue without loss of rhythm until victim start
breathing without help, or being passed to medical aid.
3. When operator change while giving artificial respiration, do so without losing the
rhythm of respiration.
4. After giving first aid, try to get a diagnosis by a doctor as soon as possible because
shock can cause internal burn, which can be lethal if left untreated.
AFTER VICTIM REVIVES
Be prepared to resume artificial respiration, as he may stop breathing again.
Keep victim warm and lying down until he or she has been conscious for at least thirty minutes.
First-aid procedures to be implemented in case of electrical shock

v
1. PLACE VICTIM
Place victim in face-upward position horizontally.
2. CLEAR THROAT
Turn head to one side quickly wipe out any fluid, mucus, or
foreign body from mouth and throat with fingers.
3. OPEN AIR PASSAGE
Tilt head back and extend neck to open air passage.
4. LIFT JAW FORWARD
Put thumb in victim’s mouth and grasp jaw firmly. Lift jaw
forward to pull tongue out of air passage. Do not hold or depress
tongue.
5. PINCH NOSTRILS CLOSED
With other hand pinch nostrils closed to prevent air leak.
6. BLOW AIR IN
Take a deep breath, seal victim’s open mouth and exhale firmly into
victim’s mouth until chest is seen to lift.
Make sure to open mouth widely to avoid air leakage.
7.REMOVE MOUTH AND CHECK
Check the sound of breathing out air and see normal breathing
when releasing mouth. If no sound, repeat from OPEN AIR
PASSAGE. Continue at a rate of 12 to 20 times per minute.
Quantity of air have to be increased gradually. Especially when victim is infant, be carefully not to be
too strong, not to blow in too much air.
Keep giving artificial respiration until victim start breathing without help, or being passed to medical
aid.
Artificial respiration
7.Remove mouth and
check
6.Blow air in
3.Open air
passage
2.Clear throat

vi
1. WARRANTY POLICY
Matsusada Precision Inc. ("Matsusada") warrants that the products supplied by it will be free from
defects in materials and workmanship for a period of twelve (12) months from the date of original
shipment to buyer. This warranty shall not apply to any product which has been repaired, modified
or worked on by persons unauthorized by Matsusada, used other than in accordance with the
instruction manuals, used in inappropriate environment (with corrosive gas, high humidity, etc) or
damaged by any event beyond Matsusada's control such as force majeure. Matsusada shall in no
way be liable for any incidental, special or consequential damages relating to this warranty.
Matsusada's sole liabilities and the buyer's sole remedies shall be limited, at Matsusada's discretion,
to a repair or replacement of the products.
The foregoing warranty is in lieu of all other warranties, express or implied, including those of
merchantability or fitness for a particular purpose.
As the products are not designed and manufactured for applications which require extraordinary
reliability or safety, or affecting people's life (nuclear energy, aerospace, socially fundamental
facility, medical equipment, etc), this warranty shall not be applied for such applications. The
specific design and manufacturing might be required for such applications.
No modification or supplement of this warranty shall be binding unless in writing and signed by a
duly authorized officer of Matsusada.
2. INSTRUCTION MANUAL AND TEST DATA
・Each rack mount and bench top power supply have 1 instruction manual. Extra instruction manuals
available with charge.
・Schematics of products shall not be submitted to users. Test result or test data for the products
shall be available upon request with charge.
WARRANTY

1
１ Introduction
1Introduction
１－１ Introduction
Thank you very much for your purchase of our product HIGH VOLTAGE POWER SUPPLY. We
have done our best for the quality control of the unit.
Please handle this unit properly according to this instruction manual so that you can use the full
performance of this unit safely for long.
We have carefully prepared this instruction manual, but if you find any doubtful or
unclear point or any omission, please kindly contact us shortly.
１－２ Unpacking the POWER SUPPLY
When unpacked the unit, you will please check the following accessories are enclosed with
power supply main body.
〈Accessories〉
・ AC input cord (1 pc)
・ Instruction manual (1 pc)
・ Output Cable (1 pc)
・ D –sub connector (1 pc)
・ Cover for D –sub connector (1 pc)
１－３ Installation conditions
・ Install the power supply unit horizontally when use
・ Do not put any object on the power supply unit.
・ The top and side surfaces are the cooling air supply and exhaust openings. The power
supply must be provided with adequate space and good ventilation.
・ Do not operate the power supply in a dusty area or in corrosive gas environment

2
1-4 Caution for handling
・ For your safety, make sure to connect the GROUND terminal of the case to earth.
・ The earth of case or load shall be grounded at one point on the ground with thick and short
wire.(more than 5SQ)
・ Connect the shielded wire of output cable to the chassis side.(This is for protection of power
supply of electrical shock against arc or discharge.)
・ Do not touch the load right after turning off the output. Before touching the load make
sure if POWER ON/OFF switch is off, and that the output voltage is 0 with output voltage
meter of this unit or with other voltage meter, or ground the output.
１－５ Troubleshooting
・No output voltage
１．Check if the specified voltage is input.
・ Power supply input voltage, AC +/-10%, 50/60Hz single phase
・ Control voltage in external voltage controlling is –10 to +10V.
２．Check if the connection of control on the rear panel is properly connected.
３．Check if the function of option is properly operated.
NOTE: AC input cord for 115VAC input type and 230VAC input type is different.
The cord for 115VAC input type can be used for standard outlet.
The cord for 230VAC input type have to be installed with switch board of
commercial supply with solderless terminal or something.
Switch board should be connected as -
NEUTRAL = BLUE
LINE = BROWN
GND( ) = YELLOW/GREEN
１ Introduction
How to ground
Output cable
GROUND terminal
Ground
Chassis
L
o
a
d
Handy Chassis

3
2 Exterior view diagram
2 Exterior view diagram
Output connector
GROUND terminal
FUSE(3A)
AC
Input connector
Fan
Control connector
GND
FUSE
Adj.
kV
mA
NORMAL
REVERSE
POWER HV
REMOTE
LOCAL
CONTROL
Output setting dial Output polarity change
switch (-LPo option)
POWER ON/OFF switch
HV ON/OFF switch
Local / Remote
change switch
Output voltage meter,
Current meter
Voltage,
Current display
change switch

4
3－1 Outline
This unit is a handy type high voltage power supply for electrostatic chuck application.
3－2 Operation method
1. Upon confirming the connection made with this unit as specified (Refer to 1-4[HOW TO
GROUND]), operate it. Be sure to connect the earth with the ground terminal of the body.
2. Connect the attached AC input cord with AC input connector at the rear panel and plug
socket. (For extra safety fix the cord on the vinyl clamp for cable fixation.)
3. Connect the interlock. (Refer to P6. d. Interlock)
4. Turn on the POWER Switch. The unit gets in stand-by mode. No high voltage is generated
on the output terminal when unit is in this mode.
5. When the HV ON/OFF switch is turned on, the red lamp lights on, and the unit gets in
enable mode.(when Local mode)
6. With the output voltage setting dial, set an desired voltage.
If you want to lock the output at a set voltage, move the locking lever to the direction of
arrow mark as illustrated.
Output voltage and current are
displayed at the digital-meter at front panel.
Switch of display of voltage and current can be done with the
toggle switch located in the right of meter.
7. For ending the operation of the power supply, be sure to return the output voltage setting
dial to 5 (if the same voltage is to be used again, leave it as it is), turn off the switches in
the order of HV ON/OFF switches, POWER ON/OFF switch.
3－3 Other function
a．Over voltage protection (O.V.P)
This unit has an over voltage protection. Even at the time of abnormality, it is limited at
approx. 110% of the maximum rated voltage, protecting power supply and load from
damage.
b．Over current protection (O.C.P)
This unit has an over current protection. When over current, the output current is limited
by decreasing the output voltage.
DIAL OUTPUT VOLTAGE
0（ccw）
5 0kV
10 （cw）
3.O
p
eration manual
3.Operation Manual
Locking
lever
OUTPUT
The output voltage setting dial
－rated volta
g
e
＋rated volta
g
e

5
Control connector ・・・ D-sub 25S type
c. Remote switch ON/OFF (LS)
The output of each channel can be turned on and off individually with remote switch,
no matter whether HV switch is on or off. (effective only in remote mode)
3.Operation Manual
Remote switch action by
switch switch SHORT
OPEN
…… Output ON
…… Output OFF
Remote Switch Action
Remote switch action by
open collector NOTE1
In place of switch, an open
collector will suffice for it.
E C
Polarity change PIN
8
Common PIN
9
HV ON/OFF PIN10
Over current status PIN11
Power on status PIN12
Local / Remote status PIN13
PIN 7 Output Relay
PIN 6 Forced grounding
PIN 5 Monitor Common
PIN 4 Output current monitor output
PIN 3 Output voltage monitor output
PIN 2 External control voltage common
PIN 1 External control voltage input
Status common PIN25
Interlock PIN24
N.C. PIN23
N.C. PIN22
N.C. PIN21
N.C. PIN20
PIN14 N.C.
PIN15 N.C.
PIN16 N.C.
PIN17 N.C.
PIN18 N.C.
PIN19 N.C.
13 1
25 14
D-sub M2.6 D-sub M2.6

6
d. Interlock
High voltage output can be cut off with external switch off. For safety reason, once the
output is cut off, the unit shall not resume the output even turning the external switch
back on.
To reset this status, turn the Power switch on after shorting the interlock terminal.
e. External voltage control
By turning Local/Remote change switch on the front panel to REMOTE, output voltage
can be set with external voltage –10V to +10V.
f. Output current monitor
±10V output for the maximum rated output current. Output impedance is 1K ohm. The
polarity of monitor output is identical to that of high voltage output.
3.Operation Manual
Interlock action by switch
switch
Interlock action
Interlock action by open
collector NOTE1
In place of switch, an open collector will
suffice for it.
E C
24 25
SHORT
OPEN
…… Output ON
…… Output OFF
② ①
COM
Vcon－in
COM
⑤
V
Imoni
④

7
g. Output voltage monitor
±10V output for the maximum rated output voltage. Output impedance is 1k ohm. The
polarity of monitor output is identical to that of high voltage output.
h. POWER ON status signal
Connection of internal relay is on when Power switch is on. Acceptance voltage for
relay connection is 30Vdc max, acceptance current for relay connection is 100mA max.
i. Over current status signal
TTL signal (L) output when output is in over current status.
j. Local/Remote status signal
TTL signal output for status of Local or Remote.
3.Operation Manual
COM
⑤
V
Vmoni
③
⑫
25
LOCAL
REMOTE
…… TTL (H)
…… TTL (L)

8
k. Forced discharge
High voltage output can be compulsory grounded with the function of forced grounding
terminal.
Precautions in using the open collector *1
Use the open collector according to the following rule.
Rule of open collector
Output Switch Open collector
ON Short
VCE
Under 0.4V
(10mA)
OFF Open
VCE
Over 2V
(Open 5V)
5V
3.Operation Manual
HV output
ＨＶ
Forced ground action by
switch SHORT
OPEN
…… Output Ground
…… Output
Forced
g
round action
Forced grounding action
by open collector NOTE1
In place of switch, an open collector will
suffice for it.
E C
switch
⑥
⑨
E C

9
４ Option function
This product is equipped with features of checked in the table below.
４－１ Output relay (LRy)
Connection and separation of power supply and load is possible by inputting signal to control
connector on rear panel.
Name of option
□ Output relay (-LRy)
□ ＲＦ filter 13.56MHz (-LRf(13.56M))
□ ＲＦ filter 500kHz (-LRf(500k))
□ Polarity change (-LPo)
□
４ Explanation of optional function
４ Explanation of optional function
LRy function shall not work when
terminals are tied together
(
maintain ON status
)
No relay ON/OFF action
is used.
SHORT
OPEN
…… Connect
…… Separate
Relay ON/OFF action
In place of switch, an open collector will
suffice for it.
Relay ON/OFF action by
open collector E C
Relay ON/OFF action by
switch switch
HV output
ＨＶ
LRy LRf
Forced grounding (standard)
⑨⑦
４ Explanation of optional function

10
４－２ RF Filter 13.56MHz (LRf (13.56M))
RF filter for 13.56MHz is incorporated at output terminal.
４－３ RF Filter 500kHz (LRf (500k))
RF filter for 500MHz is incorporated at output terminal.
４－５ Polarity change（LPo）
When local mode the polarity can be reversed( against polarity of Vcon)with toggle switch on
the front panel. When remote mode the polarity can be reversed by inputting signal to
control connector on the rear panel.
Polarity change action by
switch switch
SHORT
OPEN
……Reverse
……Normal
Polarity chan
g
e action
Polarity change action by
switch
In place of switch, an open collector will
suffice for it.
E C
⑨⑧
CH①