MKS e-Vision+ User manual

e-Vision®& e-Vision+®
User Manual
LP101013.100
01 January 2004

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
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As part of our continuous product improvement policy, we are always pleased to
receive your comments and suggestions about how we should develop our product
range. We believe that the manual is an important part of the product and would
welcome your feedback, particularly relating to any omissions or inaccuracies you
may discover.
You can send your comments to:-
MKS Instruments Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.
[phone] Tel. International
[phone] Fax. International
Email: [email protected]
e-Vision®, e-Vision+® and EasyView are registered trademarks of MKS Instruments,
Spectra Products.
Conflat® is a registered trademark of Varian Associates.
Viton® is a registered trademark of E.I. Dupont de Nemours & Co., Inc.
Windows® is a trademark of the Microsoft Corporation.
All other brand or product names are trademarks or registered trademarks of their
respective companies and as such are fully recognised

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products 3
EC DECLARATION OF CONFORMITY
Spectra SensorTech Ltd.
Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom
DECLARES THAT THE FOLLOWING PRODUCTS:
LM62, LM10 VACSCAN 100
LM63, LM10, LM4 VACSCAN PLUS 100, 200
LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300
LM56 MICROVISION
LM70, LM76 MICROVISION PLUS
LM77 VISION 1000P
LM79 VISION 1000I
LM89 VISION 1000B
LM90 VISION 1000 C / E
LM78 VAC CHECK
LM80 MINILAB
LM98 e-Vision
LM102 e-Vision+
ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES:
89/336/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE
73/23/EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93/68 EEC
THE APPLICABLE STANDARDS ARE:
EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATORY USE
EN 61010-1:2001 SAFETY REQUIREMENTS FOR ELECTRICAL
EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATRY USE.
SIGNED:
T.R.ROBINSON
GENERAL MANAGER
DATE: 23rd February 2004

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
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Warning
The control unit must not be powered
up when not connected to the analyser

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products 5
Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be
followed:
A) INSTALLATION
1. The installation procedures given in the operating and technical manuals must be
followed in addition to these instructions.
2.The mains power cable must conform to local regulations and must have a
protective earth (PE) conductor securely connected to the power plug protective
earth contact.
3. The short earthing braid supplied with some products, must be fitted between
the terminal on the RF head and one of the CF40 vacuum flange bolts.
4. Only cables supplied with the equipment may be used for interconnections. If
extension cables are required to obtain a greater separation between control unit
and RF head, or if longer serial communications cables are required, they must be
supplied by MKS Instruments Ltd.
5. Cables attached to all other ancillary signal and control ports must have a length
of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be
contacted for technical guidance on possible EMC and safety issues.
6. The vacuum system on which the analyser/RF head is mounted must be
earthed, to a protective earth, preferably to the same protective earth as the
control unit.
B) OPERATION
1. The equipment is not authorised for use as a critical component in a life support
or safety critical system without the express written approval of MKS Instruments
Ltd.
2. All instructions given in the operating manual must be followed.
3. Adjustments are strictly limited to those accessible from the control panel and
computer keyboard and only when running software supplied by MKS Instruments
Ltd.

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
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C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS
Instruments, Spectra Products Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain
components are EMC and safety critical and must not be substituted. Replacement
parts are available from MKS Instruments, Spectra Products Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices
that affect EMC and safety performance. These must be correctly re-fitted after
servicing.

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
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1. Specification...........................................................................10
1.1 Mechanical .......................................................................10
1.2 Electrical ..........................................................................10
1.3 Environmental...................................................................10
1.4 Safety ..............................................................................11
1.5 Connectors .......................................................................11
1.6 Warning labels ..................................................................11
1.7 Ventilation ........................................................................12
2. Introduction ...........................................................................13
3. Connections............................................................................14
3.1 The rear panel ..................................................................14
3.2 Power connector ...............................................................14
3.3 Power indicator.................................................................15
3.4 Ethernet connector............................................................15
3.5 External trip......................................................................15
3.6 Reset switch .....................................................................16
3.7 Mode switch .....................................................................16
4. Analyser Installation ..............................................................17
4.1 Unpacking ........................................................................17
4.2 Inspecting the analyser .....................................................17
4.3 Installing the analyser .......................................................18
4.4 Checking the system pressure ............................................18
4.5 Mounting the analyser .......................................................19
5. e-Vision Installation...............................................................20
5.1 Installation .......................................................................20
5.2 Electrical connections ........................................................20
5.3 IP Address........................................................................21
5.4 Re-setting the IP address...................................................21
6. Baking ....................................................................................22

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
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7. Analyser Maintenance ........................................................... 23
7.1 Overview ......................................................................... 23
7.2 Ohmmeter analyser checks................................................ 25
7.3 Checking filaments ........................................................... 26
7.4 Changing filaments ........................................................... 27
7.4.1 Removing the filaments.................................................. 27
7.4.2 Fitting new filaments...................................................... 28
7.5 Ion Source cleaning .......................................................... 29
7.6 Cleaning or replacing the ion source................................... 30
7.6.1 Removing the ion source ................................................ 31
7.6.2 Dismantling the source assembly .................................... 31
7.6.3 Source Re-assembly....................................................... 32
8. Exploded Views...................................................................... 33
8.1 Analyser Flange pin-outs ................................................... 33
8.2 Exploded view of the Analyser ........................................... 34
8.3 Filament Plate .................................................................. 35
8.4 Source Assembly .............................................................. 36
8.6 Source Alignment Jig ........................................................ 37
8.5 Extract Plate .................................................................... 38
9. Returning Your Unit for Service ............................................ 39
Support Contact Numbers ....................................................... 39
10. FTP Mode ............................................................................. 42

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
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e-Vision and e-Vision+ LP101013.100 – 01 January 2004
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1. Specification
1.1 Mechanical
e-Vision & e-Vision+
Size: 127mm wide x 127mm deep x 159mm deep, plus 34mm over analyser
connector.
Weight: 2.0 kg
24VDC Power Supply
Size: 75mm wide x 45mm high x 170mm deep plus 30mm over strain relief.
Weight: 0.6 kg
Analyser
e-Vision - 2 inch single mass filter, 1 – 100amu, Faraday detector.
Max. Operating pressure 5x10-4 Torr (6.5x10-4 mbar)
e-Vision+ - 4 inch single mass filter, 1 -100amu & 1 – 200amu, Faraday and SEM
detector.
Max. Operating pressure 7.6x10-5 (1x10-4 mbar)
1.2 Electrical
Power Inlet: 100 to 120, 200 to 240 VAC rms 47- 63Hz 2.1A rms
Installation category (overvoltage category) II to IEC664
Fuses Internal, not user replaceable
Insulation Class I to IEC536
1.3 Environmental
Temperature range 0 to 400C, 80%RH non-condensing, operating and storage.
Pollution degree 2 to EN61010
Enclosure IP20 to EN60529