MKS e-Vision+ User manual

e-Vision®& e-Vision+®
User Manual
LP101013.100
01 January 2004

e-Vision and e-Vision+ LP101013.100 – 01 January 2004
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As part of our continuous product improvement policy, we are always pleased to
receive your comments and suggestions about how we should develop our product
range. We believe that the manual is an important part of the product and would
welcome your feedback, particularly relating to any omissions or inaccuracies you
may discover.
You can send your comments to:-
MKS Instruments Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.
[phone] Tel. International
[phone] Fax. International
Email: [email protected]
e-Vision®, e-Vision+® and EasyView are registered trademarks of MKS Instruments,
Spectra Products.
Conflat® is a registered trademark of Varian Associates.
Viton® is a registered trademark of E.I. Dupont de Nemours & Co., Inc.
Windows® is a trademark of the Microsoft Corporation.
All other brand or product names are trademarks or registered trademarks of their
respective companies and as such are fully recognised

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EC DECLARATION OF CONFORMITY
Spectra SensorTech Ltd.
Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom
DECLARES THAT THE FOLLOWING PRODUCTS:
LM62, LM10 VACSCAN 100
LM63, LM10, LM4 VACSCAN PLUS 100, 200
LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300
LM56 MICROVISION
LM70, LM76 MICROVISION PLUS
LM77 VISION 1000P
LM79 VISION 1000I
LM89 VISION 1000B
LM90 VISION 1000 C / E
LM78 VAC CHECK
LM80 MINILAB
LM98 e-Vision
LM102 e-Vision+
ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES:
89/336/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE
73/23/EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93/68 EEC
THE APPLICABLE STANDARDS ARE:
EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATORY USE
EN 61010-1:2001 SAFETY REQUIREMENTS FOR ELECTRICAL
EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATRY USE.
SIGNED:
T.R.ROBINSON
GENERAL MANAGER
DATE: 23rd February 2004

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Warning
The control unit must not be powered
up when not connected to the analyser

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Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be
followed:
A) INSTALLATION
1. The installation procedures given in the operating and technical manuals must be
followed in addition to these instructions.
2.The mains power cable must conform to local regulations and must have a
protective earth (PE) conductor securely connected to the power plug protective
earth contact.
3. The short earthing braid supplied with some products, must be fitted between
the terminal on the RF head and one of the CF40 vacuum flange bolts.
4. Only cables supplied with the equipment may be used for interconnections. If
extension cables are required to obtain a greater separation between control unit
and RF head, or if longer serial communications cables are required, they must be
supplied by MKS Instruments Ltd.
5. Cables attached to all other ancillary signal and control ports must have a length
of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be
contacted for technical guidance on possible EMC and safety issues.
6. The vacuum system on which the analyser/RF head is mounted must be
earthed, to a protective earth, preferably to the same protective earth as the
control unit.
B) OPERATION
1. The equipment is not authorised for use as a critical component in a life support
or safety critical system without the express written approval of MKS Instruments
Ltd.
2. All instructions given in the operating manual must be followed.
3. Adjustments are strictly limited to those accessible from the control panel and
computer keyboard and only when running software supplied by MKS Instruments
Ltd.

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C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS
Instruments, Spectra Products Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain
components are EMC and safety critical and must not be substituted. Replacement
parts are available from MKS Instruments, Spectra Products Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices
that affect EMC and safety performance. These must be correctly re-fitted after
servicing.

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1. Specification...........................................................................10
1.1 Mechanical .......................................................................10
1.2 Electrical ..........................................................................10
1.3 Environmental...................................................................10
1.4 Safety ..............................................................................11
1.5 Connectors .......................................................................11
1.6 Warning labels ..................................................................11
1.7 Ventilation ........................................................................12
2. Introduction ...........................................................................13
3. Connections............................................................................14
3.1 The rear panel ..................................................................14
3.2 Power connector ...............................................................14
3.3 Power indicator.................................................................15
3.4 Ethernet connector............................................................15
3.5 External trip......................................................................15
3.6 Reset switch .....................................................................16
3.7 Mode switch .....................................................................16
4. Analyser Installation ..............................................................17
4.1 Unpacking ........................................................................17
4.2 Inspecting the analyser .....................................................17
4.3 Installing the analyser .......................................................18
4.4 Checking the system pressure ............................................18
4.5 Mounting the analyser .......................................................19
5. e-Vision Installation...............................................................20
5.1 Installation .......................................................................20
5.2 Electrical connections ........................................................20
5.3 IP Address........................................................................21
5.4 Re-setting the IP address...................................................21
6. Baking ....................................................................................22

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7. Analyser Maintenance ........................................................... 23
7.1 Overview ......................................................................... 23
7.2 Ohmmeter analyser checks................................................ 25
7.3 Checking filaments ........................................................... 26
7.4 Changing filaments ........................................................... 27
7.4.1 Removing the filaments.................................................. 27
7.4.2 Fitting new filaments...................................................... 28
7.5 Ion Source cleaning .......................................................... 29
7.6 Cleaning or replacing the ion source................................... 30
7.6.1 Removing the ion source ................................................ 31
7.6.2 Dismantling the source assembly .................................... 31
7.6.3 Source Re-assembly....................................................... 32
8. Exploded Views...................................................................... 33
8.1 Analyser Flange pin-outs ................................................... 33
8.2 Exploded view of the Analyser ........................................... 34
8.3 Filament Plate .................................................................. 35
8.4 Source Assembly .............................................................. 36
8.6 Source Alignment Jig ........................................................ 37
8.5 Extract Plate .................................................................... 38
9. Returning Your Unit for Service ............................................ 39
Support Contact Numbers ....................................................... 39
10. FTP Mode ............................................................................. 42

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1. Specification
1.1 Mechanical
e-Vision & e-Vision+
Size: 127mm wide x 127mm deep x 159mm deep, plus 34mm over analyser
connector.
Weight: 2.0 kg
24VDC Power Supply
Size: 75mm wide x 45mm high x 170mm deep plus 30mm over strain relief.
Weight: 0.6 kg
Analyser
e-Vision - 2 inch single mass filter, 1 – 100amu, Faraday detector.
Max. Operating pressure 5x10-4 Torr (6.5x10-4 mbar)
e-Vision+ - 4 inch single mass filter, 1 -100amu & 1 – 200amu, Faraday and SEM
detector.
Max. Operating pressure 7.6x10-5 (1x10-4 mbar)
1.2 Electrical
Power Inlet: 100 to 120, 200 to 240 VAC rms 47- 63Hz 2.1A rms
Installation category (overvoltage category) II to IEC664
Fuses Internal, not user replaceable
Insulation Class I to IEC536
1.3 Environmental
Temperature range 0 to 400C, 80%RH non-condensing, operating and storage.
Pollution degree 2 to EN61010
Enclosure IP20 to EN60529

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1.4 Safety
IP20 to EN60529
The protective earth conductor of the power cord must be connected to the power
source protective earth terminal.
There are no operator replaceable parts within the 24VDC power supply unit or the
e-Vision / e-Vision+ unit.
1.5 Connectors
The connectors for external circuits are for use only with MKS Spectra equipment,
or equipment which has no accessible hazardous live parts.
The external circuits must comply with the requirements of EN61010-1 section
6.6.1.
Ports for connection of accessories do not carry hazardous potentials.
Do not position the 24VDC power supply so that it is difficult to unplug the supply
power cord.
Installation Category II comprises mains powered, local level appliances.
1.6 Warning labels
On the front panel refers to:
a. Accessible hazardous voltages on analyser connector, when not mated to the
analyser, which may result in a non-hazardous electric stock if touched.
b. Tuning adjustment holes, which are not for operator use.

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On the rear panel refers to:
a. Read all instructions carefully before use.
b. The control unit and signal ports are designed for connection to MKS Spectra
accessories via MKS Spectra supplied cables.
There are no accessible hazardous voltages or currents on these ports.
MKS Spectra must be consulted before any non-MKS Spectra supplied cables or
accessories are connected to these ports.
1.7 Ventilation
Openings in the front, top and bottom panels must not be obstructed.
Allow a minimum clearance of 50mm all round. Do not exceed the maximum
operating ambient temperature.

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2. Introduction
The e-Vision®is a complete quadrupole residual gas analyser (RGA), comprising of
a quadrupole analyser, an e-Vision control unit, a low voltage power supply and the
necessary interconnecting cables, incorporating all of the electronics normally found
in a separate control unit and RF power supply, into one compact unit, which fits
directly onto the quadrupole analyser.
The e-Vision is designed to be operated in several ways:
From a host computer, which will normally be an IBM compatible PC running the
MKS Spectra EasyView Windows software package.
By browsing to the e-Vision using a Java enabled web browser.
By integrating the e-Vision control into current systems through the use of the
ASCII protocol command set.
A complete RGA system comprises of an e-Vision connected to a single computer,
or network, using the Ethernet (RJ-45) connector.
This manual focuses on the e-Vision and e-Vision+hardware and should be used in
conjunction with the relevant user interface manual during installation.

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3. Connections
3.1 The rear panel
Please refer to Figure 1 for the arrangement of the connectors on the rear panel.
Pin numbers are marked on the various connectors.
Figure 1. Rear panel arrangement
3.2 Power connector
This 15-way D-Type socket labeled “POWER” on the rear panel of the unit is used
to connect the low voltage power supply unit.
The pin connections are as follows:
1, 2, 3 (joined together) +24 volts DC
9,10,11 (joined together) 0 volts (24 volt return)
Connector Shell functional earth
The power input is 24 volts DC ±10%, 2 Amps max.
The current drawn depends on the mass range and whether a filament is on or off.
The primary power circuit is galvanically isolated from the system ground.

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The maximum common mode voltage is 60V DC or Peak AC, current limited to
2mA.
3.3 Power indicator
The power indicator is a 3mm Green LED labeled “POWER” on the rear panel of
the unit. This is illuminated when power is applied to the unit.
3.4 Ethernet connector
This is an RJ45 style connector labeled “ETHERNET” on the rear panel of the unit.
It is used to connect the e-Vision to the host computer, this accepts standard Cat5
patch cables, as follows:
If connecting directly to a PC, use a crossover or cross-wired Cat5 Patch cable.
If connecting to a network, use a standard Cat5 Patch cable.
3.5 External trip
The external trip connector is a 3.5mm Jack socket mounted to the right of the
Power connector on the rear panel and labeled “X-TRIP”.
The external trip feature is used to protect the filaments and electron multiplier
from exposure to high pressures. It allows an independent total pressure gauge or
signal from a vacuum control system to be connected to the e-Vision.
It is the most effective of the trips available and we would always recommend its
use.
The external trip input can be driven in three ways.
1. Uncommitted relay contact
This is a low voltage (+5V, 1mA) contact. The contact should be closed for normal
operation, open to trip the filaments or if the protective equipment is switched off.
2. Open collector TTL drive
The output transistor should be on for normal operation, off for trip or if the
protective equipment is turned off.
3. Totem pole TTL drive
The signal should be low for normal operation, high for a trip condition or if the
protective equipment is switched off.
The external trip circuitry is galvanically isolated from the system ground. The
maximum common mode voltage is 60V DC or peak AC, current limited to 2mA.

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3.6 Reset switch
If a problem occurs, or during specific operations such as a software download, it
may be necessary to reset the e-Vision electronics.
3.7 Mode switch
See Section 10 for function details.

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4. Analyser Installation
This section deals with getting the equipment you have just bought out of its box
and installing it on your system. If you have any questions or experience any
difficulties, contact your local MKS Spectra representative who will be able to help
you.
4.1 Unpacking
When you receive the e-Vision carefully check each item before removing the foam
packaging and plastic wrapping, to ensure that no physical damage has occurred
during shipment. Also, make sure all items have been received correctly by
checking each item against the enclosed packing slip.
If there has been obvious damage during shipment, or if there are items listed on
the packing slip as shipped which are not in the box, immediately contact your local
MKS Spectra sales/service representative.
4.2 Inspecting the analyser
CAUTION
The analyser is both fragile and very easily contaminated by the
slightest touch from your fingers or undesirable surfaces.
Once you have inspected the analyser, return it to the protective
envelope until you are ready for installation.
The analyser is supplied vacuum sealed inside a vac-formed plastic envelope for
protection. Carefully unfold the envelope to allow access to the analyser.
Do not discard this packaging.
Hold the analyser ONLY at the vacuum flange.
Hold the analyser at the flange, with the quadrupole and ioniser structure vertically
up. Carefully inspect all the observable insulators for damage.
Look at each lead from the flange to its termination point to ensure that it does not
touch any other element of the analyser.

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4.3 Installing the analyser
The vacuum chamber in which you intend to mount the analyser must have a 2.75
inch UHV Conflat® flange fitted with a tube of 35.0mm (1.378 ") minimum ID,
inclusive of a good welded joint.
The distance from the end of the analyser to its mounting flange depends on the
type of system. Refer to the table below:
System Type Length
e-Vision
e-Vision +
81mm (3 ¼”)
146mm (5 ¾ ”)
There must be at least the distance given above free of obstructions inside the
vacuum chamber. If your chamber does not meet the above criteria, you should
use a specially designed adapter so that the analyser may be mounted outside the
chamber. Please contact your local MKS Spectra representative for assistance.
4.4 Checking the system pressure
Quadrupole analysers cannot be operated at pressures higher than 5 x 10-4 Torr
and in the case of dual detector analysers (faraday and electron multiplier
detectors), the multiplier should not be used at pressures above 7.6 x 10-6 Torr.
Operation above these limits will cause irreversible damage to the filaments and
possibly the ion source.
Permanent damage to the multiplier will be caused if it is used outside the above
ranges.
Make use of the X-Trip interlock to prevent accidental damage to the analyser.

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4.5 Mounting the analyser
The standard 2 ¾ " Conflat® flange on the analyser can be sealed to the vacuum
chamber with either a copper gasket, or a Viton® gasket with a square cross
section. Which one you choose depends on the ultimate pressure you expect in
your system and whether you intend to bake the system.
If it is not already clean then clean the gasket with suitable solvent and dry it.
Remove the analyser from its shipping envelope, slip the gasket over the
quadrupole structure and set it in the grooves of the flange surface.
Carefully insert the analyser into the vacuum chamber ensuring that you do not
allow the leads to touch the walls of the vacuum chamber. Make sure the gasket
does not slip part way out of its slot as you push the two flanges together.
Rotate the flange until the locating key on the feedthrough housing tube is as close
to 11 o'clock as the bolt holes will allow. This will ensure that the e-Vision is in its
preferred position, although it can be mounted in any orientation.
Bolt the feedthrough flange to the vacuum chamber flange using the torque
appropriate for the gasket material used.
Do not discard the plastic shipping envelope or the two-piece foam
packing surrounding it.
If in the future you need to return the analyser for service, it should
returned in its original packaging to avoid expensive damage.

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5. e-Vision Installation
Unless prevented by other considerations, it is desirable to position the e-Vision
Control Electronics package horizontally, with the lettering on the side panels “right
side up”. This facilitates cooling of the electronics, as well as being cosmetically
optimized, and affords the best thermal stability during operation. However, it is
permissible to operate the unit in any orientation, and the user should consider
easy access to the vacuum chamber as more important in the mounting of the e-
Vision.
5.1 Installation
Rotate the locking ring on the stainless steel analyser connector so that the slot
lines up with the keyway on the connector tube. Hold the e-Vision unit so that the
keyway lines up with the locating key on the analyser flange.
Gently slide the e-Vision unit on to the analyser.
Take great care, the pins on the vacuum feedthrough are easily
damaged. DO NOT force the e-Vision unit on to the analyser.
When all of the pins are engaged, push the e-Vision firmly onto the analyser to
ensure electrical continuity. The last 3mm (1/8”) is important. When correctly fitted,
the front face of the stainless steel RF/analyser connector should butt up against
the analyser flange.
Finally, rotate the locking ring to lock the e-Vision in place. You will not be able to
do this if the e-Vision is not pushed fully onto the analyser.
5.2 Electrical connections
Insert the 15-way D-Type socket on the output lead of the power supply unit into
the 15-way D-Type plug labeled “POWER” on the rear panel of the e-Vision.
Attach the line cord to the power supply. The power supply will automatically set
itself to operate with the local line voltage.
When power is applied, the LED on the rear of the e-Vision will illuminate.
Connect a cat5 patch lead to the socket marked “ETHERNET”. If a direct
connection to the host PC is required, use a crossover cable. If connecting via a
network hub, a standard patch lead may be used.
If required, connect your X-Trip signal cable to the socket marked “X-TRIP”. For
signal options, see Section 3.5.