MKS HPQ2 User manual

HPQ2
Manual
SP101007.206
7 July 2009

HPQ2 SP101007.206 7 July 2009
MKS Instruments, Spectra Products 2
As part of our continuous product improvement policy, we are always pleased to
receive your comments and suggestions about how we should develop our product
range. We believe that the manual is an important part of the product and would
welcome your feedback particularly relating to any omissions or inaccuracies you
may discover.
You can send your comments to:-
MKS Instruments, Spectra Products
Cowley Way
Weston Road
Crewe, Cheshire
CW1 6AG
United Kingdom
Tel: [phone]
Email: [email protected]
Windows and Windows95 are trademarks of the Microsoft Corporation and as such are fully
recognised.
Conflat is a registered trademark of Varian Associates.
Viton is a registered trademark of E.I. Dupont de Nemours & Co., Inc.
All other brand or product names are trademarks or registered trademarks of their respective
companies.

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Declaration of Conformity
Spectra SensorTech Ltd.
Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom
DECLARES THAT THE FOLLOWING PRODUCT :
LM75 HPQ2 Control Unit
IS IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES:
2004/108/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE
2006/95/EC LOW VOLTAGE DIRECTIVE
THE APPLICABLE STANDARDS ARE:
EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL &
LABORATORY USE.
EN 61010-1:1993 SAFETY REQUIREMENTS FOR ELECTRICAL
EQUIPMENT FOR MEASUREMENT, CONTROL
& LABORATORY USE.
WARNING
This apparatus shall not be used in the residential, commercial, and light
industrial environment unless further mitigation measures are taken.
For advice please contact Spectra SensorTech Ltd.
SIGNED:
J.M.Higgins
GENERAL MANAGER
DATE: 7th July 2009

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MKS Instruments, Spectra Products 4
Safety
IP20 to EN60529
The protective earth conductor of the power cord must be connected to the power
source protective earth terminal.
There are no operator replaceable parts within the 24VDC power supply unit or the
HPQ2 unit.
Connectors
The connectors for external circuits are for use only with MKS Spectra equipment, or
equipment which has no accessible hazardous live parts.
The external circuits must comply with the requirements of EN61010-1 section
6.6.1.
Ports for connection of accessories do not carry hazardous potentials.
Do not position the 24VDC power supply so that it is difficult to unplug the supply
power cord.
Installation Category II comprises mains powered, local level appliances.
Warning labels
On the front panel refers to:
a. Accessible hazardous voltages on analyser connector, when not mated to the
analyser, which may result in a non-hazardous electric stock if touched.
b. Tuning adjustment holes, which are not for operator use.

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On the rear panel refers to:
a. Read all instructions carefully before use.
b. The control unit and signal ports are designed for connection to MKS Spectra
accessories via MKS Spectra supplied cables.
There are no accessible hazardous voltages or currents on these ports.
MKS Spectra must be consulted before any non-MKS Spectra supplied cables or
accessories are connected to these ports.
Ventilation
Openings in the front, top and bottom panels must not be obstructed.
Allow a minimum clearance of 50mm all round. Do not exceed the maximum
operating ambient temperature.

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Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be
followed:
A) INSTALLATION
1. The installation procedures given in the operating and technical manuals must be
followed in addition to these instructions.
2. The mains power cable must conform to local regulations and must have a
protective earth (PE) conductor securely connected to the power plug protective
earth contact.
3. The short earthing braid supplied with some products, must be fitted between
the terminal on the RF head and one of the CF40 vacuum flange bolts.
4. Only cables supplied with the equipment may be used for interconnections. If
extension cables are required to obtain a greater separation between control unit
and RF head, or if longer serial communications cables are required, they must be
supplied by MKS Instruments Ltd.
5. Cables attached to all other ancillary signal and control ports must have a length
of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be
contacted for technical guidance on possible EMC and safety issues.
6. The vacuum system on which the analyser/RF head is mounted must be earthed,
to a protective earth, preferably to the same protective earth as the control unit.
B) OPERATION
1. The equipment is not authorised for use as a critical component in a life support
or safety critical system without the express written approval of MKS Instruments
Ltd.
2. All instructions given in the operating manual must be followed.
3. Adjustments are strictly limited to those accessible from the control panel and
computer keyboard and only when running software supplied by MKS Instruments
Ltd.

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C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS
Instruments, Spectra Products Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain
components are EMC and safety critical and must not be substituted. Replacement
parts are available from MKS Instruments, Spectra Products Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices
that affect EMC and safety performance. These must be correctly re-fitted after
servicing.

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Safety .....................................................................................................4
Connectors................................................................................................. 4
Warning labels............................................................................................ 4
Ventilation.................................................................................................. 5
1. Specification.....................................................................................10
2. Introducing HPQ-2 ...........................................................................12
3. Control Unit Overview......................................................................13
3.1 The Rear Panel................................................................................... 14
3.2 Power Connector............................................................................. 14
3.3Indicators ........................................................................................ 15
3.4 RS232 Connector............................................................................. 15
3.5 RS422/485 Plug and Socket ............................................................. 16
3.6 Audio Output................................................................................... 16
3.7 Analog I/O Connector...................................................................... 16
3.8 Analog Connector Pin Connections.................................................... 17
3.9 Digital I/O Connector....................................................................... 18
3.10 Reset Switch ................................................................................. 19
3.11 Volume Control.............................................................................. 19
3.12 External Trip ................................................................................. 19
4. Analyser Installation ........................................................................20
4.1 Unpacking .......................................................................................... 20
4.2 Inspecting the Analyser....................................................................... 20
4.3 Installing the Analyser......................................................................... 21
4.4 Checking the System Pressure............................................................. 21
4.5 Mounting the Analyser......................................................................... 21
5. Control Unit Installation...................................................................23
5.1 Connecting the Control Unit to the Analyser.......................................... 23
5.2 Electrical Connections.......................................................................... 24
6. Baking..............................................................................................25
7. Analyser Maintenance ......................................................................26
7.1 General Overview................................................................................ 26
7.2 Maintenance of Your Analyser.............................................................. 27
7.3 Failed Filaments.................................................................................. 28
7.4 Ohmmeter Analyser Checks................................................................. 29
7.5 Checking for shorts.......................................................................... 29
7.6 Checking Filaments.......................................................................... 30
7.7 Changing Filaments......................................................................... 30
7.9 Fitting New Filaments ...................................................................... 32
7.10 Ion source, replacing and cleaning..................................................... 33
7.11 Removing the Ion Source............................................................... 33
7.12 Cleaning the Source....................................................................... 34
7.13 Re-fitting the Ion Source................................................................ 35
8. Exploded Views ................................................................................36
8.1 Analyser Flange pin-outs ..................................................................... 36

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8.2 Exploded View of the Analyser............................................................. 37
9. Ion Source Parameters.....................................................................39
10. Returning Your Unit for Service .....................................................40

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1. Specification
General
Mass Range Capability 2 to 80 amu
Detector System Faraday Cup
Maximum Recommended
Operating Pressure 1 x 10-2 mBar
(8 x 10-3 Torr)
Maximum Permissible
Operating Pressure 2 x 10-2 mBar
(1.6 x 10-2 Torr)
Minimum Detectable Partial
Pressure 1 x 10-10 mBar
(8 x 10-11 Torr)
Mass Stability Better than 0.1 amu over 8
hours at constant ambient
temperature
Resolution <1.2 amu at 10% peak height
Total shipping weight 6.0kg
Analyser
Maximum Bakeout
Temperature 2500C
Mounting Flange 2 ¾ inch Conflat (CF35)
Insertion Length 1.0 inch (25.4mm)
Ion Source Sensitivity 5 x 10-5 A/Torr
Electron Energy 40 and 70 eV nominal
(adjustable from PC)
Emission Current 0.1 and 0.7mA nominal
(adjustable from PC)
Filaments 2, independent, tungsten

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Control unit
Control Unit Weight 2.3kg
Dimensions 127mm x 127mm x 182mm
Overall length 229mm
Maximum Ambient
Operating Pressure 350C non-condensing
PC Software Process Eye V1.6 or RGA for
Windows V2.4
Power 24V DC 3A External supply
included
Serial Communication RS232, RS422, RS485
Baud Rate & Distance RS232C 9600 baud, 15 metres
(50ft)
RS422 /485 115k baud,1.2km
(4000ft)
Maximum RGA Heads 30

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2. Introducing HPQ-2
The HPQ-2 is a complete quadrupole residual gas analyser (RGA) designed to
operate at higher pressures than traditional quadrupole instruments. The HPQ-2
system is based around an extremely compact quadrupole analyser which has an
insertion length into the vacuum of 1 inch (25.4mm) and mounts on a CF35 (2 ¾
inch) Conflat flange.
The HPQ-2 incorporates all of the electronics normally found in a separate control
unit and RF power supply into one extremely compact unit, which fits directly onto
the quadrupole analyser. A separate low voltage power supply connects to the HPQ-
2 control unit.
The HPQ-2 is designed to be operated from an IBM compatible PC running either
Process Eye Professional or RGA for Windows software. Communication between
the PC and the HPQ-2 is via an RS232, RS422 or RS485 serial link.
The complete HPQ-2 system will comprise; HPQ-2 analyser, HPQ-2 control unit, low
voltage power supply, interconnecting cables, manual, tool kit and either RGA for
Windows or Process Eye Professional software. HPQ-2 may be used in multi-headed
applications and this is detailed in the manual for the relevant software package.
This manual focuses on the HPQ-2 hardware and should be used in conjunction
with the manual for the operating software, RGA for Windows or Process Eye
Professional.
Note: one RS232 or RS422 port is required for each HPQ-2 or one RS485 port is
required for each 18 HPQ-2 units.

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3. Control Unit Overview
The HPQ-2 control unit is a single unit incorporating all the necessary power supply
and data acquisition electronics for the residual gas analyser.
Power is derived from a dedicated low voltage power supply which is supplied as
part of the standard package. Alternatively, power may be derived from a suitable
Spectra Remote Vacuum Controller if the complete system incorporates one.
The HPQ-2 control unit plugs directly onto the HPQ-2 quadrupole analyser via the
connector mounted on the front panel of the unit. All external connections including
the power supply and serial communications link are made via connectors mounted
on the rear panel of the control unit. The HPQ-2 control unit contains no user
serviceable parts and the only manual adjustment is the volume control for the
audio, which is mounted on the rear panel.

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3.1 The Rear Panel
3.2 Power Connector
This is a 15 way D-Type socket labelled POWER on the rear panel of the unit to
connect to the low voltage power supply unit.
Pin connections are:-
1, 2, 3 (joined together) +24 volts DC
9, 10, 11 (joined together) 0 volts (24 volt return)
The power input is 24 volts DC 10%, 3 Amps max.
The current drawn depends on the mass range and whether a filament is on or off.

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3.3 Indicators
On the rear panel of the HPQ-2 control unit there are five LED indicators, their
functions are described below.
Filament Indicators
An indicator, Fil1 or Fil2 is lit to show the currently active filament.
SEM Indicator
The indicator is lit when the SEM detector is active. This is not implemented on the
HPQ-2 as there is no SEM detector fitted.
Power
The indicator is lit when power is supplied to the HPQ2 unit.
Comms
This indicator will flash to show a comms event to the HPQ-2 unit. If there are no
active communications with the HPQ-2, this indicator will pulse at approximately
2Hz, depending on the RGA software version used.
3.4 RS232 Connector
This is a 9-way D-Type socket labelled RS232. It is used to connect the HPQ-2 to
the host computer when the RS232 interface is being used. This socket is also
configured to provide a power feed for an Amplicon 490 fibre optic converter
Pin connections are:-
Pin 1, 7, 9 Not Connected
Pin 2 TXD transmit data
Pin 3 RXD receive data
Pin 4, 6, 8 Commoned and connected to fused +15V
Pin 5 0 volts

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3.5 RS422/485 Plug and Socket
These are a 9-way D-Type socket and a 9-way D-Type plug labelled RS422/485.
Pin connections are:-
Pin 1 0V (for termination network)
Pin 2, 3, 7 Not Connected
Pin 4 RXD (-)
Pin 5 RXD (+)
Pin 6 +5V fused (for termination network)
Pin 8 TXD (-)
Pin 9 TXD (+)
3.6 Audio Output
This is a 3.5mm Jack socket mounted on the rear panel and labelled AUDIO. It is
used to connect headphones, wireless headsets or an external speaker so that
audio tones generated in some of the modes can be heard. e.g. Leak checking tone
and audio alarms. The minimum load impedance should be 8 ohms and the power
handling is 2 watts max.
3.7 Analog I/O Connector
The Analog Input / Output connector is a 15 way D-Type socket mounted on the
rear panel of the HPQ-2 unit and labelled ANALOG I/O. It consists of;
one analog output 0 to +10V and four quasi-differential analog inputs 0 to ±10V
with a maximum voltage on the return of ±0.5V.
±15V power outputs both fused at 100mA, fuses are self resetting.

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3.8 Analog Connector Pin Connections
Pin Function
1 -15V fused
2 Analog input 4 return
3 Analog input 3 return
4 Analog input 2 return
5 Analog input 1
6,7,14 Not Connected
8 0V analog
9 +15V fused
10 Analog input 4
11 Analog input 3
12 Analog input 2
13 Analog input 1 return
15 Analog output
Note that the total power consumption on each rail (+5V and ±15V) for
both the Analog and Digital I/O ports must not exceed 100mA.

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3.9 Digital I/O Connector
The Digital I/O connector is a 25-way D-Type socket mounted on the rear panel of
the unit and labelled DIGITAL I/O. It is used to provide alarm output signals and
process trip signals. It can also be used to connect accessories such as a Remote
Vacuum Controller, analogue output module, analogue input module and Valve
Controller.
The Digital I/O port provides:
Two 8 bit bi-directional ports, one interrupt / strobe input
+5V fused at 100mA
±15V fused at 100mA
DIGITAL I/O Connector Pin Assignment
Pin Description Notes
1 H1 interrupt / strobe
2 PA1
3 PA3
4 PA5
5 PA7
6 PB1
7 PB3
8 PB5
9 PB7
10 0V Digital
11 0V Analogue
12 -15V fused
13 +15V fused
14 PA0
15 PA2
16 PA4
17 PA6
18 PB0
19 PB2
20 PB4
21 PB6
22 +5V fused
23 Not Connected
24 Not Connected
25 Not Connected
Note that the total power consumption on each rail (+5V and ±15V) for
both the Analog and Digital I/O ports must not exceed 100mA.

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3.10 Reset Switch
The reset switch is accessible through a hole in the rear panel and is labelled
RESET. Pressing the switch performs a hardware reset on the microprocessor in the
HPQ-2 control unit.
3.11 Volume Control
This controls the volume of the audio tone generated by the external speaker in the
Leak Check and Peak Jump Alarm modes. Note that in the Leak Check mode it is
the frequency (pitch) of the audio tone which increases with increasing signal not
the volume.
The volume control should be turned clockwise to increase the volume and turned
anti-clockwise to decrease the volume.
3.12 External Trip
The external trip connector is a 3.5mm Jack socket mounted to the right of the
Power connector on the rear panel and labelled X-TRIP.
The external trip feature is used to protect the filaments from exposure to high
pressures. It allows an independent total pressure gauge or a signal from a vacuum
control system to be connected to the HPQ-2. It is the most effective of the trips
available and we would always recommend its use. The external trip input can be
driven in three ways.
1. Uncommitted relay contact
This is a low voltage (+5V, 1mA) contact. The contact should be closed for normal
operation, open to trip the filaments or if the protective equipment is switched off.
2. Open collector TTL drive
The output transistor should be on for normal operation, open for trip or if the
protective equipment is turned off.
3. Totem pole TTL drive
The signal should be low for normal operation, high for a trip condition or if the
protective equipment is switched off.
The external trip circuitry is fully isolated from the system ground.

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4. Analyser Installation
This section deals with getting the equipment you have just bought out of its box
and installing it on your system. If you have any questions or experience any
difficulties, contact your local MKS Spectra representative who will be able to help
you.
4.1 Unpacking
When you receive the HPQ-2 carefully check each item before removing the foam
packaging and plastic wrapping, to ensure that no physical damage has occurred
during shipment. Also, make sure all items have been received correctly by
checking each item against the enclosed packing slip.
If there has been obvious damage during shipment, or if there are items listed on
the packing slip as shipped which are not in the box, immediately contact your local
MKS Spectra sales/service representative.
4.2 Inspecting the Analyser
CAUTION
The analyser is both fragile and very easily contaminated by the
slightest touch from your fingers or undesirable surfaces.
Once you have inspected the analyser, return it to the protective
envelope until you are ready for installation.
The analyser is supplied vacuum sealed inside a vac-formed plastic envelope for
protection. Carefully unfold the envelope to allow access to the analyser.
Do not discard this packaging.
Hold the analyser ONLY at the vacuum flange.
Hold the analyser at the flange, with the quadrupole and ioniser structure vertically
up. Carefully inspect all the observable insulators for damage.
Look at each lead from the flange to its termination point to ensure that it does not
touch any other element of the analyser.