MKS Vision 2000-C User manual

Vision 2000-C/E
Manual
SP102005.102
March 2013

MKS Instruments UK Ltd
V2000-C/E Hardware Manual –SP102005.102 March 2013 2
As part of our continuous product improvement policy, we are always pleased to receive your
comments and suggestions about how we should develop our product range. We believe that the
manual is an important part of the product and would welcome your feedback particularly relating
to any omissions or inaccuracies you may discover.
You can send your comments to:
MKS Instruments, Spectra Products
Cowley Way
Weston Road
Crewe, Cheshire
CW1 6AG
United Kingdom
[phone] Tel.
[phone] Fax.
www.mksinst.com
MKS Products provided subject to the US Export Regulations.
Diversion or transfer contrary to U.S. law is prohibited.
Windows is a registered trademark of the Microsoft Corporation and is fully recognised.
Swagelok is a registered trademark of the Swagelok Company and is fully recognised.

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V2000-C/E Hardware Manual –SP102005.102 March 2013 3

MKS Instruments UK Ltd
V2000-C/E Hardware Manual –SP102005.102 March 2013 4

MKS Instruments UK Ltd
V2000-C/E Hardware Manual –SP102005.102 March 2013 5
AdditionalInstallationMaintenanceandOperatingInstructions
In order to comply with European regulations, the following procedures must be followed:
Installation
The installation procedures given in the operating and technical manuals must be followed, in
addition to these instructions:
The mains power cable must conform to local regulations and must have a protective
earth (PE) conductor securely connected to the power plug protective earth contact.
Only cables supplied with the equipment may be used for interconnections. If extension
cables are required to obtain a greater separation between control unit and RF head, or if
longer serial communications cables are required, they must be supplied by MKS
Instruments UK Ltd.
Cables attached to all other ancillary signal and control ports must have a length of less
than 3 metres. If greater length is required, MKS Instruments UK Ltd must be contacted
for technical guidance on possible EMC and safety issues.
The vacuum system on which the analyser/RF head is mounted must be earthed, to a
protective earth, preferably to the same protective earth as the control unit.
Operation
The equipment is not authorised for use as a critical component in a life support or safety critical
system without the express written approval of MKS Instruments UK Ltd.
All instructions given in the operating manual must be followed.
Adjustments are strictly limited to those accessible from the control panel and computer keyboard
and only when running software supplied by MKS Instruments UK Ltd.
Maintenance
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT
Maintenance functions must only be carried out by competent persons.
During the warranty period, faulty equipment must be returned to MKS Instruments UK Ltd.,
unless special arrangements are made.
There are no user replaceable parts in the electronic equipment. Certain components are EMC
and safety critical and must not be substituted. Replacement parts are available from MKS
Instruments UK Ltd.
Equipment enclosures embody certain special fastening and bonding devices that affect EMC and
safety performance. These must be correctly re-fitted after servicing.

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V2000-C/E Hardware Manual –SP102005.102 March 2013 7
Table of Contents
ADDITIONAL INSTALLATION MAINTENANCE AND OPERATING INSTRUCTIONS .................................................................. 5
INSTALLATION ............................................................................................................................................................................5
OPERATION ...............................................................................................................................................................................5
MAINTENANCE ...........................................................................................................................................................................5
TABLE OF CONTENTS ...................................................................................................................................................................7
HEALTH & SAFETY .............................................................................................................................................................. 8
WARNING SYMBOLS....................................................................................................................................................................9
FUSES .....................................................................................................................................................................................10
ELECTRICAL CONNECTIONS..........................................................................................................................................................10
INSTALLATION ................................................................................................................................................................. 11
SYSTEM OVERVIEW ...................................................................................................................................................................11
SYSTEM OPTIONS......................................................................................................................................................................12
UNPACKING .............................................................................................................................................................................13
VACUUM SYSTEM INSTALLATION ..................................................................................................................................................14
RGA vacuum chamber overview ......................................................................................................................................14
DIMENSIONSSYSTEM COMPONENTS .............................................................................................................................................15
MAIN CHAMBER INSTALLATION ...................................................................................................................................................19
Pneumatic actuation and Purge Gases ............................................................................................................................19
Connecting the foreline and SurgeProtector valve...........................................................................................................19
Heater jackets ..................................................................................................................................................................20
MicroVision2 installation .................................................................................................................................................20
ELECTRICAL INSTALLATION ..........................................................................................................................................................21
Equipment rack ................................................................................................................................................................22
Interconnecting cables .....................................................................................................................................................22
CONNECTING TO THE PROCESS TOOL ............................................................................................................................................23
Mains power ....................................................................................................................................................................23
Computer connection.......................................................................................................................................................23
OPERATION .............................................................................................................................................................................25
Overview ..........................................................................................................................................................................25
Start up ............................................................................................................................................................................26
Leak checking ...................................................................................................................................................................27
Heating and Baking..........................................................................................................................................................28
Inlet operation..................................................................................................................................................................29
System shut down procedure...........................................................................................................................................29
MAINTENANCE ................................................................................................................................................................ 31
Inlet gauge zero ...............................................................................................................................................................31
Operating pressure ..........................................................................................................................................................31
Removing the inlet valve assembly ..................................................................................................................................32
Refitting the inlet valve assembly ....................................................................................................................................32
Vision 2000C/E electronics ...............................................................................................................................................32
Turbo pump maintenance................................................................................................................................................32
Mass spec maintenance...................................................................................................................................................32
Removing the analyser.....................................................................................................................................................34
Re-fitting the analyser......................................................................................................................................................34
RETURNING YOUR EQUIPMENT....................................................................................................................................................35
Support Contact Numbers................................................................................................................................................35
Health and safety clearance form....................................................................................................................................35

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Health&Safety
WARNING
This section of the manual contains important safety information.
Please read it carefully.
Important safety information is highlighted by the use of WARNING and CAUTION boxes. The use of these
boxes is described below:
WARNING
WARNING boxes are used where failure to observe the instructions
could result in personal injury or death.
CAUTION
CAUTION boxes are used where failure to observe the instructions
could result in damage to the equipment or associated equipment.
Instructions in CAUTION and WARNING boxes MUST be observed.
MKS Instruments accepts no liability for any injury or damage resulting from a failure to observe instructions in
CAUTION or WARNING boxes.

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WarningSymbols
Various warning labels and symbols may be attached to the instrument their general use is explained below.
The Exclamation Mark (ISO 3864, No.B.3.1) label.
General caution.
Refer to the manual for detailed instructions.
The Electric Shock (ISO 3864, No.B.3.6) symbol.
This is generally used on the instruments to warn of
the presence of hazardous voltages.
The following warning labels used on the Vision 2000-C/E systems are explained below.
The Exclamation Mark (ISO 3864, No.B.3.1) label.
On the rear panel of the Microvision2 refers to:
Read all instructions carefully before use.
The control and signal ports are designed for
connection to MKS Instruments accessories via MKS
Instruments cables.
The Electric Shock (ISO 3864, No.B.3.6) symbol on
the:
Turbo controller, refers to possible risk of Electric
shock, if the covers are removed.
Only competent Service personnel should gain
access.
Remote Vacuum Controller, refers to possible risk of
Electric shock, if the covers are removed.
Only competent Service personnel should gain
access.
Front panel of the Microvision2, refers to accessible
hazardous voltages on the analyser connector, when
not mated to the analyser, which may result in a non-
hazardous electric shock if touched.
Tuning adjustment holes, which are not for operator
use.

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Fuses
The Vision 2000-C/E systems must be powered down and disconnected from the mains supply before changing
any fuses.
Although the fuses on the RVC2 are accessible, only competent persons should change them.
Although fuses sometimes wear out, this is rare. In most cases, fuses blow due to a fault condition. When a fuse
blows, every effort should be made to clear the fault before the fuse is replaced. For continued protection against
risk of fire, replace only with fuses of specified rating and type.
All fuses are 20mm X 5mm H.R.C. ceramic, 250V AC, characteristic (T) and compliant with IEC 127.
Details of fuse types and ratings can be found in the RVC2 manual and printed on the rear panel.
Electrical Connections
The Vision 2000-C/E must be powered down and isolated from the mains power supply before any electrical
connections are made.
On the rear panel of the Microvision2 there are no hazardous voltages on any of the ports (electrical connectors).
Connections must not be made that may place hazardous voltages or currents on these ports. MKS Instruments
must be consulted before any non-MKS Instruments cables or accessories are connected to these ports.
If you are unclear about any of the safety information contained in this section of the manual please contact your
local MKS Instruments facility before proceeding.

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Installation
SystemOverview
The Vision 2000-C/E is a self contained RGA system for sampling directly from a CVD or Etch process chamber.
It consists of five main parts:
The RGA vacuum chamber that bolts directly on to the process chamber.
The turbopump foreline isolation valve and gauge assembly (Surge Protector)
The equipment sub-rack.
The interconnecting cables.
The operating PC.
The RGA vacuum chamber contains the quadrupole residual gas analyser with a differentially pumped CVD ion-
source, a special MKS UniBloc™inlet sampling valve with integral pressure reduction orifices, process chamber
pressure gauge and a purged turbomolecular pump. This assembly is surrounded by a dual-zone electrically
heated jacket. The entire system is controlled via the rack-mounted RVC2 and the System Interface Module.
The standard V2000C/E turbopump foreline provision is connection to the foreline of the process tool itself. This
ensures that the small amounts of process gas that are sampled from the process chamber are returned to an
appropriate exhaust gas scrubber system. The Surge Protector assembly isolates the RGA turbopump foreline
from the tool foreline when the RGA system pump is off and when the tool foreline pressure is above 3 torr.
WARNING
The RGA system must never be operated without exhausting to a
hazardous gas scrubbing system that is appropriate for the process
gases it might sample!
In normal operation, sampled gas flow can be up to 0.06 sccm for 3-
valve inlets and up to 10 sccm for 4-valve inlets. In either case, the
exhaust gas will consist of any sampled process gas mixed with 6
sccm of turbopump purge gas (N2 or Ar).
A 19-inch sub-rack houses the Remote Vacuum Controller (RVC), the cables running between the sub rack and
the RGA vacuum chamber may be fitted into trunking (conduit) to give additional protection.
CAUTION
There are subtle differences among the various available
configurations of the Vision 2000-C/E systems.
There are small differences among Vision 2000-C/E systems. Variations are usually due to the type of process
tool to which the Vision 2000-C/E is to be fitted, the type of process to be monitored and the pressure regime
from which the system will be sampling.
The design variations are purely to give the user the best possible system to meet the needs of the application.
This manual covers all variations of Vision 2000-C/E. The shipment report will detail your particular system and
you should refer to this when the manual gives details of options. The most common variants are shown on the
next page.

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SystemOptions
Fig.1: 3-Valve “Etch” Configuration
Fig.2: 4-Valve, Fast-Response “LPCVD” Configuration
Fig.3: 4-Valve, High-Pressure “CVD” Configuration

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Unpacking
When you receive the equipment carefully check each item before removing the packaging to ensure that no
physical damage has occurred during shipment. Also check that all the boxes have been received by checking
against the packing slip.
If there has been obvious damage during shipment or if there are items listed on the packing slip as shipped
which have not arrived, immediately contact your local MKS Instruments facility or sales/service representative.
Carefully unpack the various parts of your Vision 2000-C/E system. Again, check for any signs of damage.
Find the shipment report and check for any missing items. Keep the shipment report safe, this is an important
document and you may need to refer to it later.
We suggest you keep the packaging material until the system is up and running as this seems to dramatically
reduce the chances of something needing to be returned!
Most insurance claims for shipment damage must be placed within 7 days from the date of delivery - in
WRITING. So, don’t delay - Check It Out !
You are now ready to assembly the Vision 2000-C/E system.

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VacuumSystem installation
As much of the system as possible has been shipped pre-assembled. The whole of your Vision 2000-C/E system
has been assembled and tested before being partially dissembled prior to shipping.
CAUTION
The vacuum system interface components are of high precision
and should only be fitted by competent personnel.
RGA vacuum chamber overview
The Vision 2000-C/E is supplied with the RGA vacuum chamber already assembled; the quadrupole analyser is
fitted into the chamber, the turbomolecular pump is also fitted as is the 3- or 4-valve UniBloc™inlet assembly.
The inlet valves are controlled from the Remote Vacuum Controller (RVC2).
Integral to the UniBloc™body are all necessary pressure-sampling orifices. The three basic UniBloc
configurations have been summarized on Page 10.
Please refer to the shipment report for details of the inlet configuration. The inlet configuration of your Vision
2000C/E has makes little difference to its installation. On the face of the UniBloc™inlet valve that connects to
the RGA chamber is a ceramic CIS (closed ion source) coupling.
Exchanging an inlet valve assembly is a reasonable operation to perform in the field, though advice must be
sought on the correct seating and conditioning of the valve’s sealing face.
It is also possible to change the internal orifices if they become plugged, or if it becomes necessary to change
the operating pressure range(s). However, changing internal components of a UniBloc™in the field is not
currently recommended.
If you suspect that you need to have your UniBloc™serviced, please consult the local MKS Instruments facility
regarding appropriate servicing options.
Fitted to the other side of the process valve there might be various adapting components, such as an elbow, an
elbow and nipple or two elbows. The exact configuration will depend on the type of process tool to which the
Vision 2000C/E is to be fitted.
CAUTION
The inlet flange of the UniBloc™ is tapped for bolts that are ¼” x
28 thread/inch by 7/8” long. Silver-plated bolts, or equivalent
lubrication, must be used to avoid damaging the UniBloc™ body.

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Dimensions
490mm
225mm
265mm
340mm
166mm

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SystemComponents
Item Ref
Description
1
HiVac OK –(1T or 10T depending on working pressure) 722 Baratron Gauge
2
LoVacOK –890B Gauge
3
UniBloc™ inlet assembly
4
Purge regulator assembly –3.5 to 8Bar Argon or dry Nitrogen supply required **
5
System Interface Module
6
Turbo molecular pump and controller
7
** The Purge supply regulator is factory set and requires no adjustment.
2
1
6
5
4
3
Purge Gas
Inlet

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Item Ref
Description
8
Pneumatic Manifold assembly –60 –80 psig dry air
9
Fore line connecting flange
10
Cable loom supporting bracket
8
9
10
Pneumatics supply
Use adaptor if
required
8
Surge Protect supply

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Item Ref
Description
15
V1
16
V2
17
V3
18
V4
19
UniBloc™ mounting face
20
16
15
17
18
19

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MainChamberinstallation
This is a job that requires two people - one to support the Vision 2000C/E system, while the other fits the bolts to
the flange. The Vision 2000C/E will operate in any orientation, but it is preferable to mount it with the quadrupole
analyser horizontal, and the turbo pump hanging down, vertically.
The turbopump must not be inverted, to any degree –that is, it must not be oriented with the exhaust end of its
shaft higher than its inlet end.
CAUTION
The V2000C/E vacuum system is heavy (~18kg, 40lb) and must
be adequately supported to avoid serious damage to the process
chamber! Independent support for the RGA vacuum system is
strongly recommended.
Installation should be performed by competent personnel using
appropriate installation components.
Note that care must be taken to support the weight of the V2000C/E assembly (approx. 18kg, =40lb) at the tool.
Most process tools have aluminium chamber walls with fittings that will not support this weight and torque,
directly.
MKS Spectra Products offers an adjustable stand to support the weight of the RGA at the tool without stressing
the point of vacuum connection (e.g., model 02184-4175). Please contact your MKS Spectra representative for
details on available sizes and configurations. Other support means that bear the weight of the system from the
turbopump flange or from under the turbopump are also permissible, provided that they do not generate a stress
between the mounting point and the inlet connection. Make the vacuum connection to the process chamber
using a clean CF35 copper gasket or O-ring, as required.
NOTE: With 4-valve UniBloc™inlets, if the path from the inlet flange face to the point of gas flow being sampled
is long, response time can be improved by using a length of 1/8” OD PTFE tubing from the point to be sampled
to the face of the UniBloc™.
Be sure that the tubing material is compatible with the process gases to which it will be exposed –PTFE is just a
suggestion. In this case, insert the end of the tubing approximately ½” into the V2 port on the face of the UniBloc
(angled hole pointing to V2 actuator). It must fit, snugly, so that it will not fall out. If this is done, ensure that the
other end will not interfere with the operation of the process tool. If this tube is later removed and replaced,
ensure that no debris is pushed up into the V2 actuator when inserting the new tube.
Pneumatic actuation and Purge Gases
Compressed air at 0.52 - 0.65 MPa (60-80 psig) must be supplied to “push-in” inlet fitting of the valve manifold
mounted on in the Interface Module. The size of this fitting is customer dependent. This gas opens the inlet
valves.
There is T- pneumatic fitting here for extending the gas supply to the SurgeProtector valve assembly.
Purge gas at 3.5 to 8Bar must be supplied to the 1/8” Swagelok™ fitting on the Purge Assembly. The absence
of adequate purge gas pressure is sensed by a pressure switch at the regulator. The RVC2 will interpret this
condition as “turbo-not-ready” and react to it the same as if the turbopump was not running at full speed. If this
condition persists more than a few minutes, the RVC2 will shutdown the RGA to protect the turbopump.
Either N2 or Ar of suitable purity (at least five 9’s is suggested) may be used. Purge gas consumption rate is
about 6 sccm.
Connecting the foreline and SurgeProtector valve
A length of metal bellows with KF-16 terminations is supplied for connecting the turbopump exhaust fitting to the
SurgeProtector valve assembly.
Connect the stainless steel foreline directly to the turbopump using a KF16 centering O-ring and clamp. The
valve assembly must be installed at the remote end of the foreline bellows, away from the RGA turbopump.

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Carefully note the valve labels regarding orientation and install it so that the port on the axis of the valve is
connected to the RGA turbo foreline and the “side” port is installed towards the tool foreline.
The integral gauge must sense the pressure in the process tool vacuum line. Finally, when it is permissible to
interrupt the process tool, connect the SurgeProtector to the tool vacuum. Connect the supplied length of 4mm
tubing from the spare fitting on the valve-solenoid manifold block to the SurgeProtector actuator and plug-in its
electrical cable to the matching connector at the harness near the RGA turbopump.
When operating the RGA, it is essential that the tool vacuum be kept <2 torr at all times. Depending upon the
dynamics of tool foreline pressure rises and the length of foreline bellows from the turbopump to the
SurgeProtector, the RGA system can tolerate up to 1 minute of isolation before shutting-down the RGA vacuum
system due to foreline over-pressure condition.
If the tool vacuum line cannot meet these requirements, and independent backing pump will be required for the
RGA. This pump must be appropriate to handle up to 20 sccm of gas flow at <2 torr, and be compatible with the
process gases being sampled. Furthermore, all appropriate safety and environmental regulations regarding
exhaust scrubbing and personnel exposure must be strictly followed.
Heater jackets
The Vision 2000C/E is supplied with two heater jackets fitted: one on the main RGA chamber; and another
around the inlet valve assembly.
There is no need to remove the heater jacket during the installation and testing procedure. The heater jacket
enables the quadrupole chamber to be kept warm during normal operation, and to be baked, which should be
done before attempting to acquire critical data. Note that the heater jacket is designed to be a tight fit.
When properly installed, the main chamber jacket covers from the face of the RGA analyser flange to the radial
tubulation for inlet purge gas fitting. The shorter inlet jacket installs similarly, with the snaps finishing on the same
side as those of the main jacket.
The temperature of the two heater jackets is monitored and controlled via the Interface Module mounted to the
turbo pump. No user adjustments are required.
MicroVision2 installation
Slacken the hex bolt on the clamping ring so the ring can be freely rotated. Line up the slot on the analyser
connector with the pip on the flange of the analyser.
Gently slide the Microvision2 unit on to the analyser. TAKE GREAT CARE the pins on the vacuum feedthrough
are easily damaged. DO NOT force the Microvision2 unit on to the analyser.
When all of the pins are engaged, push the Microvision2 firmly onto the analyser to ensure electrical continuity.
The last 3mm (1/8”) is important. When correctly fitted the front face of the RF/analyser connector should butt up
against the analyser flange.
Finally, tighten the clamping ring enough to securely hold the Microvision2 to the analyser.