
©Newport Corporation MKS Spectra-Physics Confidential 2of 12
Table of Contents
Introduction _________________________________________________________________ 3
Pre-Installation Checklist _______________________________________________________ 4
Physical Location: __________________________________________________________________ 4
When the system Arrives _______________________________________________________ 4
Inspection ________________________________________________________________________ 4
When the system Arrives (Continued)_____________________________________________ 5
Review Instruction Manuals__________________________________________________________ 5
Laser Safety Considerations __________________________________________________________ 5
Diagnostics _______________________________________________________________________ 5
Pre-Installation Considerations __________________________________________________ 6
Location and Environment ___________________________________________________________ 6
System Components________________________________________________________________ 6
Pre-Installation Considerations (Continued)________________________________________ 7
System Weights ___________________________________________________________________ 7
Cable and Hose Descriptions _________________________________________________________ 7
Pre-Installation Considerations (Continued)________________________________________ 8
Pre-Installation Considerations (Continued)________________________________________ 9
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Environmental Specifications________________________________________________________ 9
Utility Requirements________________________________________________________________ 9
RoutineMaintenance _______________________________________________________________ 9
Pre-Installation Considerations (Continued)_______________________________________ 10
Cleaning the Output Window _______________________________________________________ 10
Pre-Installation Considerations (Continued)_______________________________________ 11
Power Supply Air Filter Replacement _________________________________________________ 11
Coolant Maintenance ______________________________________________________________ 11
Pre-Installation Considerations (Continued)_______________________________________ 12
Chiller Fluid ______________________________________________________________________ 12
General Procedures________________________________________________________________ 12