Oerlikon DRYVAC Series User manual

Part Numbers
112045V15 /19 /20 /29 /30
112065V05 /15 /19 /20 /25 /30 /35 /36
112120V17
DRYVAC
DV 450, DV 650, DV 1200
Dry Compressing Vacuum Pumps
Operating Instructions 300314330_002_A7

Contents
2 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Page
0 Important Safety Information 5
Explanation of Warning Symbols 5
0.1 Mechanical Hazards 7
0.2 Electrical Hazards 9
0.3 Thermal Hazards 10
0.4 Hazards Caused by Materials and Substances 11
0.5 Ignition Risk 13
0.6 Noise Hazard 13
0.7 Dangers in connection with safety-related
measures and precautions 13
0.8 Danger of Pump Damage 14
1 Description 16
1.1 Design 16
1.2 Supplied Equipment 21
1.3 Technical Data 25
1.4 Ordering Information 28
2 Transport and Storage 29
3 Installation 32
3.1 Placement 32
3.2 Conforming Use 33
3.2.1 Non-conforming Use 33
3.3 Connecting the Intake and Exhaust Lines 35
3.3.1 Intake Lines 35
3.3.2 Exhaust Lines 36
3.4 Connecting Cooling Water 37
3.4.1 Water Quality 40
3.5 Connecting Purge Gas (Optional) 41
3.5.1 Gas Ballast Valve 43
3.6 Electrical Connection 45
3.6.1 Electrical Connection DRYVAC DV 450/650 and 450/650-r 46
3.6.2 Electrical Connection DRYVAC DV 450/650 49
3.6.3 Electrical Connection DRYVAC DV 450/650-r 51
3.6.4 Electrical Connection DRYVAC DV 1200 54
3.7 Leak Search after Installation 56
3.8 Mounting Accessories 57
3.8.1 Roots Pump Adapter 57
3.8.2 Non-return Valve 58

Contents
3300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Original installation and operating instructions.
4 Operation 59
4.1 Media Compatibility 59
4.2 Profibus Interface 59
4.3 Start-up 65
4.4 Operation 65
4.4.1 LED Operator and Keys 66
4.4.2 Frequency Converter Outputs 67
4.4.3 Relay Option Board 69
4.4.4 Option: Changing the Speed of the Pump 70
4.4.5 Warning and Shut-off Thresholds 71
4.4.6 Gas Ballast Operation 72
4.5 Shut-off and Venting 73
4.6 Removing from Service 74
5 Maintenance 75
5.1 Oerlikon Leybold Vacuum Service 75
5.2 Maintenance Intervals 75
5.3 Exchanging the Lubricant 76
5.4 Cleaning the Filter Insert in the Cooling Water Pressure Reducer 78
5.4.1 Option: Setting up the Cooling Water Pressure Reducer 79
5.5 Checking and Cleaning the Gas Ballast Filter 80
5.6 Replacing the Filter Cartridge in the Purge Gas Pressure Reducer 80
6 Troubleshooting 81
6.1 Pump Malfunctions 81
6.2 Fault and Alarms Displayed at the Frequency Converter 83
7 Wearing Parts 90
8 Waste Disposal 90
EC Declaration of Conformity 91
Certificates 92

Safety Information
4 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Oerlikon Leybold Vacuum DRYVAC has been designed for safe and effi-
cient operation when used properly and in accordance with these Operating
Instructions. It is the responsibility of the user to carefully read and strictly
observe all safety precautions described in this section and throughout the
Operating Instructions. The pump must only be operated in the proper condi-
tion and under the conditions described in the Operating Instructions. It must
be operated and maintained by trained personnel only. Consult local, state,
and national agencies regarding specific requirements and regulations.
Address any further safety, operation and/or maintenance questions to our
nearest office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
5300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
0 Important Safety Information
Explanation of Warning Symbols
Toxic gases
Danger of explosion
Fire danger
Reactive or corrosive
media
Contaminated parts
The pump must be leaktight.
When the pump has been used to
pump hazardous gases before,
introduce appropriate safety pre-
cautions before opening it. Before
opening the pump, purge it for a
longer period of time with an inert
gas. If necessary, wear gloves,
breathing protection or protection
clothing.
Hazardous Voltage
Disconnect power before opening
Contact causes electrical shock
High Leakage Current
Earth connection essential before connecting supply
Electrical Hazards
Danger of residual voltage for up to 5 min after disconnecting power
supply. Connect and disconnect the mains plug only in deenergized
condition
Hot Surface
Do not touch.
Allow this area to cool before servicing
Burn hazard
Hot Surface inside. Do not touch, wear protective equipment.

Safety Information
6 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Purge gas
Check compatibility with applications
Overpressure in the discharge line
Components can be thrown in all directions.
The pressure in the discharge line must not exceed atmospheric
pressure by 200 mbar max.
The discharge line must not be blocked or restricted.
Pumps with wheels
must only be placed and moved on levelled horizontal surfaces!
Vacuum
Avoid exposing any part of the human body to the vacuum.
Machinery starts automatically
Connect the pump so that it not will restart automatically after a mains
power failure, once the power returns.
Overhead load
Transport the pump only at the four crane eyes or secured
with a forklift.

Safety Information
7300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
0.1 Mechanical Hazards
1 In order to avoid the destruction of systems and injury to operating
personnel we urgently recommend to observe the information and
installation information provided in these Operating Instructions.
2 Avoid exposing any part of the human body to the vacuum.
3 Do not operate the pump with an opened intake port. There exists the
risk of suffering injury.
4 The pump is intended for generating a vacuum only. If an overpres-
sure can occur in the pump and the system then they must be pro-
tected against such an overpressure by an overpressure safety valve,
for example.
5 The maximum permissible discharge pressure for the DRYVAC is 1.2
bar abs.
We recommend to operate the pump with a silencer or a connected
discharge line. The pressure in the discharge line must not exceed
atmospheric pressure by 200 mbar max.
Make sure that the gas flow at the discharge is not blocked or restrict-
ed in any way, even when the pumped out gases need to be collected
or contained.
No shutoff devices are required in the discharge line for pump opera-
tion. If shutoff devices are installed, open them before starting the
pump.
In the case of processes involving much condensate, we recommend
the installation of a condensate separator in the discharge line.
6 When using purge gas, protect the purge gas supply so that in the
event of a malfunction or power interruption no overpressure can
occur within the pump system.
7 We recommend to design the discharge line in consideration of a pos-
sible overpressure of 5 bar. In the event of a malfunction, such a pres-
sure can occur briefly.
8 For transporting the pump use only suitable transport means.
When selecting the lifting and transport means take note of the total
weight before transporting the pump.
As standard, the pump has been equipped with four crane eyes.
When transporting the pump with a forklift or similar, ensure that the
pump has been secured on the forks or on a suitable pallet.
The lifting eye of the screw pump must never be used to lift any pump
combinations (Roots pump + backing pump).
WARNING

Safety Information
8 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
9 Select the location where the pump is installed so that all controls can
be easily accessed. Place the pump only on a floor which is level. It
can topple when it is tilted by more than 10° with respect to the verti-
cal axis.
For pumps on castors only
Because of the fitted castors, the pump must only be placed on a level
floor capable of supporting the pump’s weight, as otherwise there
exists the risk of the pump rolling away. Moreover, the pump may only
be moved on a level floor! Moving the pump along sloping paths or
ramps is prohibited! The pump must only be transported with a forklift
or a crane! At the installation location, screw down the adjustable feet.
10 Before beginning with any maintenance and servicing work always
ensure that no gas can flow backwards through the pump since
then the rotors might turn against the normal direction of rotation. For
this reason vent the vacuum chamber to the discharge pressure level
or ensure through suitable valves that the vacuum chamber and the
lines are reliably separated from the pump. When connecting several
pump systems, pressure differences between inlet and discharge can
give rise to uncontrolled turning of the pump’s shafts.
11 During operation, the cooling water circuit must not be shut off. A
cooling water discharge which has been blocked can cause the for-
mation of gas bubbles and result in excessively high pressures.
12 Lay electric feed and cooling water lines so that there is no risk of trip-
ping over these.
13 When changing the oil remove any escaped oil as otherwise there is
the risk of slipping.
14 Before doing installation work on the pump system make sure that no
vacuum is present in the pump and that all media connections have
been depressurised.
15 Before disassembling any cooling water lines, leave the pump to cool
down, shut off the feed line.

Safety Information
9300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
0.2 Electrical Hazards
1 The electrical connection must only be provided by a trained person.
Please observe the national regulations in the country of use like EN
50110-1 for Europe, for example.
2 Potentially lethal voltages are present at the mains connections. Before
beginning with any maintenance or service work on the pump, discon-
nect the pump from all power supplies (lockout/tagout). In addition,
there is the danger of residual voltage for up to 5 min after after dis-
connection.
3 Install a device for a safe disconnection from the power supply.
4 High electric voltages! When touching parts at high electric voltages,
there is the risk of suffering severe injuries by an electric shock! Covers
marked with this symbol must only be opened by trained electricians
after having reliably deenergised (lockout/tagout) the equipment.
5 Note the information on the IP type of protection.
6 Always operate the pump with a properly connected protective earth
conductor and make sure that the motor casing is closed
7 Observe the manufacturer’s information and operating instructions for
the respective frequency converter.
8 The pump must only be operated at the frequency specified for the
motor. Use only the OLV frequency converter.
9 For pumps with external frequency converter: after having connected
the motor and each time after having made changes to the wiring,
check the motor’s direction of rotation.
A wrong direction of rotation can cause a pressure buildup on the
intake side. Moreover, the pump may suffer severe damage.
10 Install a suitable motor protection for the electric motor before starting
up for the first time. Note the information in these Operating
Instructions and on the nameplate.
11 Before starting, check to ensure that the junction box is undamaged,
run a visual inspection on the seals.
12 Install add-on parts (pressure switches, for example) without any
mechanical tensions and protect these against being damaged by
impacts, for example.
13 Lay the connecting lines so that these cannot be damaged. Protect
the lines against humidity and contact with water. Avoid thermally
stressing the lines by unfavourable laying. Comply with the required
standards when designing and laying the electrical connections.
14 Provide strain relief for the connecting lines so that the plugs and the
line connectors are not subjected to excessively high mechanical
stresses.
15 Lay electric feed lines so that there is no risk of tripping over these.
DANGER

Safety Information
10 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
16 For models with external frequency converter only:
Consider the following precautions for the output circuit wiring.
Do not connect any other load than a 3 phase motor to the frequency
converters output.
Never connect a power source to the frequency converters output.
Never short or ground the output terminals.
Do not use phase correction capacitors.
17 The pump must be integrated in the system control arrangement so
that it can not run-up automatically after it has been shut down due to
overtemperature. This applies equally to emergency shut-down
arrangements. After having determined the fault cause, the pump
should be switched on manually again.
18 We recommend the use of the external display (accessory) to operat-
ing the frequency converter. Attach the external display appropriately if
it used permanently.
19 Work on the frequency converter within the motor casing must always
be left to suitably instructed personnel only.
0.3 Thermal Hazards
1 Under certain ambient conditions parts of the pump may attain tem-
peratures over 80° C. There then exists the risk of suffering burns.
Note the danger symbols on the pump and in the case of a hot pump
wear the required protection equipment. All work on a pump which is
“still warm from operation” should be done only whilst wearing protec-
tive gloves.
2 Handle the pump only while vented and after having let it cool down.
3 Before disassembling any cooling water lines, leave the pump to cool
down, shut off the feed line.
4 When uninstalling the cooling water lines, take note of splashing water.
Heated water can cause burns.
5 Never remove the oil-fill or oil-drain plugs while the pump is running.
There exists the risk of suffering burns. Always wear protective gloves
and protective goggles also for protection against the oil.
6 Operating the pump with less than the specified amount of cooling
water will result in excessively high surface temperatures. Moreover,
there exists the risk of suffering burns.
7 DRYVACs without cooling water unit:
(Basic versions) For these DRYVAC pumps do not connect the cooling
water using self-sealing quick locks or shut off the feed and discharge
lines with valves.
After switching off, the pump will continue to produce heat. If upon
switching off the pump someone would then interrupt the cooling
water flow (through quick locks or valves on both sides (feed and dis-
charge)) then the water will continue to heat up further but will not be
able to expand. The high pressure thus produced may cause damage
to the cooling water channels and seals. Moreover, hot water or steam
may escape.
CAUTION

Safety Information
11300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
0.4 Hazards Caused by Materials and Substances
1 The vacuum line must be leaktight. Hazardous process gases may
escape or the pumped gases can react with air or atmospheric humid-
ity. After installation of the pump and after servicing work on the vacu-
um system, a leak search will always be necessary.
When pumping toxic, corrosive and reactive gases we recommend a
leak search on a regular basis. Leaks in the pump cannot be ruled out
under all circumstances. When pumping hazardous gases, the opera-
tor must ensure that that leaks at the pump will not be a hazard.
2 Before commissioning the pump, make sure that the media which are
to be pumped are compatible with each other so as to avoid hazard-
ous situations.
All relevant safety standards and regulations must be observed.
3 If required additional monitoring of the purge gas quantities is neces-
sary from the side of the operator when a well-defined and ensured
dilution is necessary from the side of the process.
The type of protection depends on the specific process and needs to
be assessed by of the customer.
4 The cooling water from the return is not of drinking water quality and
should not be used for this purpose.
After having operated the pump, the cooling water lines may suffer
from microbiological contamination. Take appropriate safety precau-
tions.
5 Before operating the pump with a gas ballast or a purge gas (option)
check the compatibility of the gas with the pumped media so as to
avoid dangerous conditions during operation.
6 When operating the pump with a purge gas valve, secure the purge
gas supply so that in the event of a malfunction no overpressure can
occur in the system.
7 When the pump has been used to pump hazardous gases before,
introduce appropriate safety precautions before opening the intake or
the discharge connections. Before opening the pump, purge it for a
longer period of time with an inert gas. If necessary, wear gloves,
breathing protection or protection clothing and work under a fume
hood. Firmly seal off the pump. When shipping the decontaminated
pump for servicing please also indicate the type of hazard. For this see
Section 5.1 Service at Oerlikon Leybold Vacuum.
DANGER

Safety Information
12 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
8 Oerlikon Leybold Vacuum is not in a position to perform servicing
(repairs) and waste disposal of radioactively contaminated pumps.
Both needs to be ensured from the side of the user.
9 When disposing of the pump, used lubricants and used oil filters
observe the applicable environment regulations.
10 When pumping hazardous gases you must assume the presence of
hazardous residues in the pump.
11 If the pump has been contaminated by the process or through envi-
ronmental influences, it must be decontaminated professionally.
Contaminated parts can be detrimental to health and the environment.
Before beginning with any repair and maintenance work inform yourself
about any possible contamination. When handling contaminated parts
observe the pertinent regulations and comply with the necessary pro-
tection measures.
When shipping contaminated pumps which require approval by the
authorities, note the applicable regulations regarding packaging and
shipping.
12 Some pumps use perfluoropolyether (PFPE) as lubricant.
When handling PFPE you should observe the following:
During thermal decomposition at temperatures over 290 °C toxic and
corrosive gases are released. When handling PFPE keep it away from
open fires. Do not smoke with PFPE on your fingers.
Touch the inner sections of the pumps only while wearing clean gloves,
and use clean tools;
do the necessary work in clean and dry rooms;
after having removed the pump from its packaging, start it up as
quickly as possible;
as cleaning agents solvents based on hydrofluorether compounds may
be used.

Safety Information
13300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
0.5 Ignition Risk
1 The standard version of the pump is not suited for operation in explo-
sion hazard areas. Contact us before planning to use the pump under
such circumstances.
0.6 Noise Hazard
1 The noise level of the pump during ultimate pressure operation with
silencer or connected discharge line corresponds to the values stated
in the Technical Data. In other operating modes and with other equip-
ment, higher values must be expected. Make sure that suitable protec-
tion measures are taken to protect your hearing.
We recommend to wear hearing protectors (earmuffs), if local noise
levels exceed mandatory limits.
0.7 Dangers in connection with safety-related
measures and precautions
1 The pump is not equipped with an emergency shutdown facility.
2 The following applies to pumps being operated with a frequency con-
verter: after a mains power failure the pump will automatically start up
again once the power returns.
3 Take note of the warning information on the casing surface. If this
warning information was removed, covered or obstructed, then pro-
vide corresponding additional warning information.
DANGER
CAUTION
CAUTION

Safety Information
14 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
0.8 Danger of Pump Damage
1 Select an installation site for the pump so that all controls are easily
accessible.
2 The pumps are supplied filled with oil or PFPE. For this reason they
should, while being transported or shipped, not be subjected to much
tilting. Store the pumps only horizontally standing on their feet.
3 Do not allow the ingestion of any objects (screws, welding beads,
nuts, washers, pieces of wire, etc.) through the intake port of the
pump.
If possible, use the intake screen which has been fitted as standard
and clean it regularly.
In case the pump is operated without intake screen the operator has
to make sure that no objects can enter the pump through the intake
port. Objects falling into the pump can cause severe damage at the
pump including leaks to atmosphere.
The intake screen does not replace a filter. Prevent the intake of parti-
cles from the side of the process by fitting suitable filters. Upstream fil-
ters protect the pump against damage to the pump chamber.
4 When pumping dust containing media, install a dust filter in the pro-
cess gas flow upstream with respect to the pump.
5 If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
Please consult us to determine which pump types are required for
specific processes and applications.
6 When connecting the pump, provide a suitable valve on the intake side
for the purpose of shutting off the intake line so as to prevent the
pump from turning backwards in the event of a power failure.
Otherwise the pump may suffer damage or oil may contaminate the
pump chamber.
7 Lines and other vacuum connections should be clean and free of oil.
Special attention must be paid here when oil-sealed pumps have been
used on the vacuum side. Check the conditions before initial commis-
sioning. In the case of deviations, the pump can suffer contamination
with oil residues.
8 The pressure within a pump which has been switched off will increase
to ambient pressure within a few seconds. In such a case the pump is
vented through the discharge. We recommend to fit a nonreturn dis-
charge valve.
9 The discharge line should be laid so that it slopes down and away
from the pump so as to prevent condensed vapours from backstream-
ing into the pump.
10 In the case of wet processes we recommend the installation of liquid
separators, upstream and downstream of the pump so as to avoid
the influx of liquid into the pump.
NOTICE

Safety Information
15300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
11 During installation work on the intake and discharge lines do not sub-
ject flanges to any stresses. Check the rubber elements of the pump’s
feet as to any deformation.
12 Before pumping condensable vapours the pump should be at oper-
ating temperature. If a gas ballast is present, then it should be opened.
The pump will attain its operating temperature approximately 30 min-
utes after having started the pump. During this warm-up phase, the
pump should be left separated from the process by a valve in the
intake line, for example.
13 With the pump warm from operation do not clean it from the outside
with water or suddenly supply very cold cooling water. There is the risk
of a rotor crash due to shock cooling.
14 If condensable vapours have been pumped, the pump should before
switching off be purged with an inert gas or air (depending on the spe-
cific application). This process should also be run before cleaning the
pump chamber.
15 For shutting down the pump let the pump operate idle for at least 30
minutes. Disconnect the pump from the mains power. Place desiccant
into the intake flange and into the discharge flange and blank off the
flanges with a piece of foil.
When storing the pump for a longer period of time, drain out the oil
first. Package the pump airtight in polyethylene foil.
16 Improper maintenance or repair work can have an influence on the
service life and the performance of the pump and will void any warran-
ty claims.
17 Maximum cooling water pressure: 7 bar. When exceeded, there is
the risk of leaks.
Pressures given in bar or mbar are absolute values. If exceptionally a gauge
pressure is meant, a “g” is added (bar(g)).

Description
16 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
1 Description
1.1 Design
The DRYVAC is a dry compressing screw vacuum pump. The DRYVAC DV
450 and 650 pumps are equipped with one screw pumping stage, the
DRYVAC DV 1200 is equipped with two pump stages running in parallel.
We offer different pump models for different applications.
DRYVAC basic versions pumps cover all features needed for process
industry applications. E.g., they are equipped with a gas ballast facility.
DRYVAC basic versions and the DRYVAC S have optimized pumping
speeds at pressures >100 mbar. These models are specially suited for short
cycle operation, e.g. load lock applications.
Models from the DRYVAC C range have been designed to provide reliability
in harsh process duties. They are optimized for handling typical gases from
the production in the PV and FPD industry. They excel through their robust
design and meet industrial safety requirements. They are equipped with a
purge gas system that makes possible rotor purge and shaft seal purge.
All DRYVAC pumps are basically equipped with the same motor. The required
frequency converter has either been installed at the pump or is installed sep-
arately in a rack (-r models).
All DRYVAC pumps have been prepared for direct fitting of a RUVAC Roots
pump.
The pumps are water cooled. They are lubricated either with synthetic oil or
PFPE.
Fig. 1.1 Pump models
DRYVAC DV 450
DRYVAC DV 1200
DRYVAC DV 650
DRYVAC DV 650-r

Description
17300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Inlet
Pump stages: 2 screw pumps,
pumping parallel
Purge gas pressure setting and
condensate vessel
Cooling water pressure relief valve
Purge gas module
Exhaust
Fig. 1.2 DRYVAC DV 1200 without side covers

Description
18 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
DRYVAC Part Frequency Purge gas Gas ballast Cooling water Feet Lubricant
No. converter module module unit
(ambient air)
DV 450 112045V15 on board double 24 V valve none rubber feet LVO 210
DV 450 200 V 112045V19 on board double 24 V valve none rubber feet LVO 210
DV 450 S 112045V20 on board single none installed rubber feet LVO 410
DV 450 S 200 V 112045V29 on board single none installed rubber feet LVO 410
DV 450 C 112045V30 on board triple none installed rubber feet LVO 410
DV 650-r 112065V05 extern (Rack) double 24 V valve none rubber feet LVO 210
DV 650 112065V15 on board double 24 V valve none rubber feet LVO 210
DV 650-r 200 V 112065V19 extern (Rack) double 24 V valve none rubber feet LVO 210
DV 650 S 112065V20 on board single none installed rubber feet LVO 410
DV 650 S 112065V25 on board none none installed base plate, castors,
adjustable feet LVO 410
DV 650 C 112065V30 on board triple none installed rubber feet LVO 410
DV 650 C-r 200 V 112065V35 extern (Rack) triple none installed rubber feet LVO 410
DV 650 C-r 112065V36 extern (Rack) triple none installed rubber feet LVO 410
with relay option board
DV 1200 112120V17 on board (2x) double 24 V valve installed Housing, castors LVO 210
with Profibus adjustable feet
LVO 210: synthetic oil, LVO 410: PFPE

Description
19300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Fig. 1.3 Pumping speed curve
0
100
200
300
400
500
0,001 0,01 0,1 110 100 1000
0
4
8
12
16
20
DRYVAC DV 450
mbar
Einlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
Torr
0,1 110 100 750
0,001 0,01
0
100
200
300
cfm
Saugvermögen
Leistungsaufnahme
DRYVAC DV 450
Pumping speed
Power consumption
Pumping speed
Power consumption
Inlet pressure

Description
20 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum
Fig. 1.4 Pumping speed curves
0
100
200
300
400
500
600
700
0,001 0,01 0,1 110 100 1000
0
4
8
12
16
20
24
28
0
100
200
300
400
500
600
700
0,001 0,01 0,1 110 100 1000
0
4
8
12
16
20
24
28
DRYVAC DV 650 C
DRYVAC DV 650 S
mbar
Einlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
Saugvermögen
Leistungsaufnahme
mbar
Einlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
Saugvermögen
Leistungsaufnahme
Torr
0,1 110 100 750
0,001 0,01
0
100
200
300
400
cfm
Torr
0,1 110 100 750
0,001 0,01
0
100
200
300
400
cfm
DRYVAC DV 650 S
DRYVAC DV 650 C
Power consumption
Pumping speed
Pumping speed
Power consumption
Inlet pressure
Power consumption
Pumping speed
Pumping speed
Power consumption
Inlet pressure