Oerlikon MAG W 300 P User manual

MAG W 300 to 700
MAG.DRIVE S
Turbomolecular Pumps with Magnetic Bearing
and Frequency Converter
Incorporation Declaration & Operating Instructions
17200045_002_A3
Part Nos.
410300Vxxxx
410400Vxxxx
410600Vxxxx
410700Vxxxx
and pumps modified by
Oerlikon Leybold Vacuum

Contents
2 17200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Page
0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 6
0.3 Thermal hazards 7
0.4 Hazards caused by materials and substances 7
0.5 Danger of ignition 8
0.6 Dangers in connection with safety-related
measures and precautions 8
0.7 Risk of damaging the pump 9
1 Description 10
1.1 Design and function 12
1.2 Supplied equipment 13
1.3 Technical data 14
1.4 Ordering data 22
1.5 Accessories 24
2 Transport and storing 26
3 Installation 27
3.1 Conforming utilization 27
3.1.1 Non-conforming utilization 27
3.2 Operating environment 29
3.3 Attach the pump to the vacuum chamber 30
3.4 Forevacuum connection 37
3.5 Connecting the cooling 39
3.5.1 Water Quality 40
3.6 Connect purge gas or a venting valve 43
3.7 Electrical connection for the integrated frequency converter 44
3.8 Separating the frequency converter from the pump 46
3.9 Electrical connection for the separate frequency converter 47
3.10 Relays, LEDs, PLC Interface 50

Contents
317200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Original installation and operating instructions.
4 Operation 52
4.1 Media compatibility / purge gas 52
4.2 Interfaces 53
4.2.1 Specific parameter data for the pumps 54
4.3 Switching on 55
4.4 Operation 55
4.4.1 Bakeout 56
4.5 Switching off 56
4.6 Venting 58
4.7 Removing the pump from the system 59
4.8 Display 60
4.8.1 Error messages 70
4.8.2 Warning messages 75
5 Maintenance 77
5.1 Cleaning 77
5.2 Changing the touch-down bearings 78
5.3 Oerlikon Leybold Vacuum Service 78
6 Troubleshooting 79
7 Waste Disposal 81
Certificates 82
EC Incorporation Declaration 83
EC Declaration of Conformity 84
Index 87

Safety Information
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Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Oerlikon Leybold Vacuum MAG W 300 to W 700 have been designed
for safe and efficient operation when used properly and in accordance with
these Operating Instructions. It is the responsibility of the user to carefully
read and strictly observe all safety precautions described in this section and
throughout the Operating Instructions. The pump must only be operated in
the proper condition and under the conditions described in the Operating
Instructions. It must be operated and maintained by trained personnel only.
Consult local, state, and national agencies regarding specific requirements
and regulations. Address any further safety, operation and/or maintenance
questions to our nearest office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
517200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
0 Important Safety Information
0.1 Mechanical hazards
1 Avoid exposing any part of the human body to the vacuum.
2 The pressure in the pump must not exceed 1.4 bar (absolute).
3 The pump is intended for generating a vacuum only. If there is a risk of
an overpressure within the system and the pump, then the pump must
be protected against this, by way of an overpressure safety valve, for
example.
4 Vent the pump only up to atmospheric pressure.
5 When using the pump with a purge gas valve, protect the purge gas
supply such that in the event of a malfunction no overpressure can
occur within the system.
6 The pump must be firmly mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump blockage could cause the pump
to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example)
without proper flanging to the vacuum chamber. Observe the informa-
tion in Section 3.3.
7 We recommend to change the rotor after 80,000 hours of operation at
the latest. Due to high-speed and temperature, the service life of the
rotor is limited. If the rotor is changed too late, it may be destroyed.
Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experi-
enced.
8 Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in
combination with the specific rotor mass. In case of a malfunction of
the system, for example rotor/stator contact or even a rotor crash, the
rotational energy is released.
9 To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
WARNING

Safety Information
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0.2 Electrical hazards
1 The electrical connection must only be provided by a trained person.
Please observe the national regulations in the country of use like EN
50110-1 for Europe, for example.
2 The frequency converter must only be connected to power supplies
which meet the requirements for functional extra-low voltages with
positive isolation in accordance with IEC 60364-4-41 (or local regula-
tions) (PELV).
3 Lethal voltages are present at the mains connections. Before starting
with any maintenance and service work, de-energise (lockout/tagout)
the product first.
4 Unplug any connectors only when the mains voltage is switched off
and the pump does no longer turn
5 At speeds approximately below 200 Hz, there will not be enough
power any more for the LEDs, i.e. the pump may still turn with out any
of the LEDs being on.
6 Unauthorized device conversion and modifications are prohibited for
safety reasons.
7 Hazardous voltages are present within the frequency converter. When
coming into contact with these, death or severe injury can result. After
the pump has arrived at standstill, disconnect the frequency converter
from the mains power and prevent it against being switched on inad-
vertently (lockout/tagout) before opening it. Basically there is no reason
why the frequency converter should be opened. There are no user ser-
viceable parts inside.
8 When the connector cable is attached, the outputs at the frequency
converter are not free of voltage.
9 Lay connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid any heat stress on
the line due to unfavourable laying conditions.
10 Suitably support the connecting lines so that the pumps are not
exposed to any major mechanical stress.
11 Do not expose pump, frequency converter and the connections to
dripping water. Note the information on the IP type of protection.
12 When storing pump, frequency converter and connecting lines in a
humid atmosphere, these can suffer corrosion. Corrosion gives rise to
conductive deposits which in turn can cause short-circuits and reduce
the insulation levels of electrical components
13 Transport pump, frequency converter and connecting cables only in
their original packaging so as to avoid any mechanical damage which
in turn may reduce air gaps and creepage distances.
14 When applying external voltages above 42 V to the connection termi-
nals, observe the applicable VDE safety regulations!
15 Make the electrical connections only after pump and accessories (e.g.
air cooler) have been installed mechanically
WARNING

Safety Information
717200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
0.3 Thermal hazards
1 Handle the equipment only while vented and cooled down.
2 During operation of the pump certain areas can get so hot (80 °C
max.) so that there is the risk of suffering burns. Protect hot parts
against being touched.
3 Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corre-
sponding additional warning notices.
0.4 Hazards caused by materials and substances
1 The pump is not suited for pumping of reactive, corrosive or toxic
media. If the rotor is attacked by process gases, it can suffer destruc-
tion. Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experi-
enced.
2 When pumping dusty media, use a dust filter.
3 If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
4 Please consult us as to which types of pump are required for specific
processes and applications.
5 The forevacuum line must be tight. Hazardous gases can escape at
leaks or the gases being pumped can react with air or humidity.
A leak search will always be required after having installed the pump
and after service work on the vacuum.
Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.
When pumping toxic gases we recommend a leak search on a regular
basis.
6 If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Before opening the pump, purge it for a longer period of time with an
inert gas.
If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have pre-
pared for you.
7 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
CAUTION
DANGER

Safety Information
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0.5 Danger of ignition
1 During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120°C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
0.6 Dangers in connection with safety-related
measures and precautions
1 The frequency converter is not equipped with its own emergency shut
down switch. Such a facility needs to be provided from the side of the
system.
CAUTION
CAUTION

Safety Information
917200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
0.7 Risk of damaging the pump
1 Never touch the rotor. Touching the rotor may cause injury and
damage the rotor bearing.
2 Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend installing an
inlet screen. Damages caused during operation without the inlet screen
are excluded from warranty.
3 The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure sufficient stability
in case the rotor seizes.
4 Also water cooled pumps need cooling air for the frequency converter.
5 Connect a purge gas or venting valve to the correct flange. Confusing
the forevacuum and purge gas flange can cause shock venting of the
pump.
6 Ensure correct polarity when connecting the MAG.DRIVE. A wrong
polarity may cause an internal fuse to blow. The fuse can only be
changed by Oerlikon Leybold Vacuum Service.
7 The interface connectors have UNC 4-40 threads. Do not use connec-
tors with M3 treads.
8 Disconnect and connect the cable connections only while the pump is
turning no longer (green status LED off) and with the mains power
switched off (yellow power LED off). Otherwise there is the risk of dam-
aging the frequency converter.
9 Do not stop the Mag with the mains. Switching off the mains while the
pump is running will wear out the touch down bearings.
10 Exposure of the pump to accelerating forces mus
11 Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
Pressures given in bar or mbar are absolute values. If exceptionally a gauge
pressure is meant, a “g” is added (bar(g)).
NOTICE

Description
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1 Description
The Oerlikon Leybold Vacuum MAG pumping system consists of:
■The MAG turbo pump
The MAG are turbomolecular pumps utilizing magnetic bearings.They are
designed to evacuate vacuum chambers down to pressure values in the
high-vacuum range.
The required frequency converter is integrated into the pump for the
MAG ... iP models.
■The MAG.DRIVE electronic frequency converter
The MAG.DRIVE S frequency converter is connected to the mains,
the MAG.DRIVE iS is connected to a DC supply.
They output an AC voltage synchronised to the speed for the pump’s
motor. Moreover, the electronic frequency converter processes the meas-
ured signals and controls the magnetic levitation arrangement.
Refer to Fig. 1.11 for system configurations.
■Optional air cooler or cooling water coils.

Description
1117200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Fig. 1.1 MAG models
MAG W 400 P
with DN 160 flange
MAG W 300 iP
with DN 100 flange
MAG W 600 iP
with DN 160 flange
MAG.DRIVE S

Description
12 17200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
1.1 Design and function
The turbomolecular pump comprises basically the pump housing, the multi-
stage rotor with the stator package, the drive, and a magnetic bearing.
The rotor is made from an aluminum alloy. In addition to the turbine stage the
rotor has a Holweck stage.
The MAG has a built-in precision 5-axes controlled magnetic bearing. The
rotor is suspended by trouble-free magnetic bearings:
■along two orthogonal axes in each of two radial planes
■and completely in the axial direction
The bearing concept allows low vibration operation and insures operation of
the pump in any mounting position. Magnetic bearings also guarantee ultra-
clean vacuum because no grease is used for lubrication of bearings.
Touch down bearings are provided to stabilize the rotor mechanically if
impacts occur during operation. They are only used in case of the breaking
of the power supply or internal cables during operation, strong shocks, or
faulty electronics.
The MAG has a purge gas device.
A controlled synchronous motor is used to power the rotor.
Rotor
Magnetic bearing
Touch-down bearings
High-vacuum flange
Rotor
Stator elements
Upper touch-down
bearings
Optional water
cooling
Holweck stage
Synchronous motor
and magnetic
bearing cartridge
Base flange
Bottom touch-down
bearings
Fig. 1.2 Schematic section of the MAG W 300 with frequency converter, other models similar
Frequency converter
Connection for
optional accessories
Service interface
Control interface
LEDs
Supply voltage
connection

Description
1317200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Drive voltage for the motor and the operating voltage for the magnetic bear-
ing are supplied by the MAG.DRIVE S or iS frequency converter. It also han-
dles the automatic monitoring of these systems.
The converter monitors continously all important operating parameters and
provides warning and alarm signals in case the operating conditions exceed
the specification or the set threshold.
Switching the motor to the generator mode keeps the magnetic bearing unit
in operation even in case of a mains power failure.
The frequency converter has the following interfaces:
■a control interface (24 V PLC),
■an interface for the Oerlikon Leybold Vacuum Service (RS 232) and
■a connection for optional accessories, e.g. an air cooler.
1.2 Supplied equipment
The pumps are shipped sealed in a PE bag with a desiccant to absorb mois-
ture.The maximum useful life of the desiccant is one year.
The flanges for forevacuum, venting, and purge gas are blank-flanged with
centering ring with FPM sealing ring and a clamping yoke.
The high-vacuum connection elements are not part of the standard
equipment.
————————————-
PE = Polyethylene
FPM = Fluororubber, resistant to temperatures up to 150°C (302 °F)
Frequency converter

Description
14 17200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
1.3 Technical data
MAG W 300 P/iP 300 P/iP 400 P/iP 400 P/iP
High-vacuum flange DN 100 ISO-K DN 100 CF DN 160 ISO-K DN 160 CF
Pumping speed (PNEUROP)
N2300 I · s-1 300 I · s-1 365 I · s-1 365 I · s-1
H2190 I · s-1 190 I · s-1 200 I · s-1 200 I · s-1
He 260 I · s-1 260 I · s-1 280 I · sv 280 I · s-1
Speed 58,800 min-1
Compression
N2> 1.0 · 1010
H23.2 · 103
He 9.2 · 104
Ultimate pressure < 10-8 mbar < 10-10 mbar < 10-8 mbar < 10-10 mbar
Max. bake-out temperature – 80 °C – 80 °C
temporary (see Section 4.4.1) – 120 °C – 120 °C
Max. forevacuum pressure for N28 mbar
Max. forevacuum pressure for N2for starting 6 mbar
Recommended backing pump TRIVAC D 2.5 B, D 8 B
Run-up time < 5 min
Forevacuum flange DN 16 KF (clamp shoe)
Purge gas / venting flange DN 16 KF (clamp shoe)
Optional cooling connection G 1/8”
Weight, approx. 12 kg
MAG W 600 P/iP 600 P/iP 700 P/iP 700 P/iP
High-vacuum flange DN 160 ISO-K DN 160 CF DN 200 ISO-K DN 200 CF
Pumping speed (PNEUROP)
N2550 I · s-1 550 I · s-1 590 I · s-1 590 I · s-1
H2410 I · s-1 410 I · s-1 430 I · s-1 430 I · s-1
He 570 I · s-1 570 I · s-1 600 I · s-1 600 I · s-1
Speed 48 000 min-1
Compression
N2> 1.0 · 1010
H23.4 · 104
He 1.7 · 106
Ultimate pressure < 10-8 mbar < 10-10 mbar < 10-8 mbar < 10-10 mbar
Max. bake-out temperature – 80 °C – 80 °C
temporary (see Section 4.4.1) – 120 °C – 120 °C
Max. forevacuum pressure for N26 mbar
Max. forevacuum pressure for N2for starting 4 mbar
Recommended backing pump TRIVAC
Run-up time < 6 min
Forevacuum flange DN 25 KF (clamp shoe)
Purge gas / venting flange DN 16 KF (clamp shoe)
Optional cooling connection G 1/8”
Weight, approx. 17 kg

Description
1517200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
0
100
200
300
400
500
600
700
1
l/s
mbar
MAG W 300
10-2
10-3 10-4 10-5 10-6 10-1
N2
Saugvermögen
Hochvakuumdruck
MAG W 400
MAG W 600
MAG W 700
Fig. 1.3 Pumping speed curves for Nitrogen
0
100
200
300
400
500
1
l/s
mbar
MAG W 300
10-2
10-3 10-4 10-5 10-6 10-1
H2
Saugvermögen
Hochvakuumdruck
MAG W 400
MAG W 600
MAG W 700
Fig. 1.4 Pumping speed curves for Hydrogen
High-vacuum pressure
Pumping speed
High-vacuum pressure
Pumping speed

Description
16 17200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Fig. 1.5 Compression curves for Nitrogen
1mbar
10-2
10-3 10
10-1
Kompression
Vorvakuumdruck
106
105
104
103
102
10
1
QHV = 100 sccm
QHV = 10 sccm
QHV = 1 sccm
MAG W 300 & 400, N2
1mbar
10-2
10-3 10
10-1
Kompression
Vorvakuumdruck
106
105
104
103
102
10
1
QHV = 100 sccm
QHV = 10 sccm
QHV = 1 sccm
MAG W 600 & 700, N2
Forevacuum pressure
Compression
Forevacuum pressure
Compression

Description
1717200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Fig. 1.6 Compression curves for Hydrogen
1mbar
10-2
10-3 10
10-1
Kompression
Vorvakuumdruck
MAG W 300 & 400, H2
104
103
102
10
1
Q
HV
= 100 sccm
QHV = 10 sccm
QHV = 1 sccm
1mbar
10-2
10-3 10
10-1
Kompression
Vorvakuumdruck
104
103
102
10
1
Q
HV
= 100 sccm
QHV = 10 sccm
MAG W 600 & 700, H2
QHV = 1 sccm
Forevacuum pressure
Compression
Forevacuum pressure
Compression

Description
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Fig. 1.7 Throughput curves for Nitrogen
Gasdurchsatz
mbar x l/s
10
1
0.1
Druck
1mbar
10-2
10-3 10
10-1
10-4 102
MAG W 300 & 400, N2
Umgebungstemperatur 25 °CWasserkühlung (KW 20 °C, 60 l/h)
Luftkühlung
Konvektion
Gasdurchsatz
mbar x l/s
10
1
0.1
Druck
1mbar
10-2
10-3 10
10-1
10-4 102
MAG W 600 & 700, N2
Umgebungstemperatur 25 °C
Wasserkühlung
(KW 20 °C, 60 l/h)
Luftkühlung
Konvektion
Pressure
Gas throughput
Ambient temperature 25 °C Water cooling (Cw 20 °C, 60 l/h)
Air cooling
Convection
Pressure
Gas throughput
Ambient temperature 25 °C
Water cooling
(Cw 20 °C, 60 l/h)
Air cooling
Convection

Description
1917200045_002_A3 - 04/2014 - © Oerlikon Leybold Vacuum
Fig. 1.8 Throughput curves for Argon
Gasdurchsatz
mbar x l/s
10
1
0.1
Druck
1mbar
10-2
10-3 10
10-1
10-4 102
MAG W 300 & 400, Ar
Umgebungstemperatur 25 °C
Wasserkühlung (KW 20 °C, 60 l/h)
Luftkühlung
Konvektion
Gasdurchsatz
mbar x l/s
10
1
0.1
Druck
1mbar
10-2
10-3 10
10-1
10-4 102
MAG W 600 & 700, Ar
Umgebungstemperatur 25 °C
Wasserkühlung (KW 20 °C, 60 l/h)
Luftkühlung
Konvektion
Pressure
Gas throughput
Ambient temperature 25 °C
Water cooling (Cw 20 °C, 60 l/h)
Air cooling
Convection
Pressure
Gas throughput
Ambient temperature 25 °C
Water cooling (Cw 20 °C, 60 l/h)
Air cooling
Convection

Description
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h
DN
215
65.5
b
l
Vorvakuum Sperrgas
Ø d1
Ansicht von unten
h1
h2
Ø d2
s1
s2
Fig. 1.9 Dimensional drawing of the pumps, dimensions in mm
DN Ø d1Ø d2h h1h2l b b* α s1s2
MAG W 300 100 ISO-K 130 155 250 77.7 70 156 250 233 16° 19 103
MAG W 300 100 CF 151.5 155 264.3 77.7 70 156 250 233 16° 15 129
MAG W 400 160 ISO-K 180 155 241 77.7 70 168.5 262.5 245.5 16° 19 106
MAG W 400 160 CF 202.5 155 234.7 77.7 70 181.2 273.7 256.7 16° 14 129
MAG W 600 160 ISO-K 180 204 281.5 90 80 204 274.5 257.5 21° 13 121
MAG W 600 160 CF 202.5 204 294 90 80 204 274.5 257.5 21° 10 150
MAG W 700 200 ISO-K 240 204 280.5 90 80 240 292.5 275.5 21° 13 130
MAG W 700 200 CF 253 204 275 90 80 253 299 282 21° 9 156
b*: width with plug of the DRIVE/BEARING cable connected instead of MAG.DRIVE iS
Bottom view
Forevacuum
connection
Purge gas
connection
(Frontplatte)213
129
(Gehäuse)111
198
122,5
111
347
2
129
327
Fig. 1.10 Dimensional drawing of the MAG.DRIVE S, dimensions in mm
Space for
DRIVE/BEARING cable
220
(Front Panel)
(Housing)