Oerlikon TURBOVAC series User manual

TURBOVAC
Turbomolecular pumps with grease-lubricated bearings
TURBOVAC 35 LS, 35 LS2
TURBOVAC 50
TURBOVAC 151, 151 C
TURBOVAC 361, 361 C
TURBOVAC 600 C
TURBOVAC 1000 C
and pumps modified by Oerlikon Leybold Vacuum
Operating Instructions GA05118_1502

Important Safety Information 3
1Description 6
1.1 Design and Operation 6
1.2 Supplied Equipment 6
1.3 Technical Data 7
1.4 Ordering Information 12
1.5 Operating environment and cooling 13
2Transport and Storing 14
3Installation 15
3.1 Conforming Utilisation 15
3.2 Ambient Conditions 15
3.3 Connecting the pump to the vacuum chamber 16
3.4 Forevacuum connection 20
3.5 Connecting the cooling 20
3.6 Connecting the purge gas and airing device 22
3.7 Connecting the TURBOTRONIK 23
4Operation 24
4.1 Media Compatibility / Purge Gases 24
4.2 Start-up 25
4.3 Bakeout 26
4.4 Operation 26
4.5 Switching Off 26
4.6 Venting 27
5Maintenance 29
5.1 Maintenance Intervals 29
5.2 Oerlikon Leybold Vacuum Service 29
5.3 Cleaning 30
5.4 Removing the pump from the system 30
6Troubleshooting 31
7Waste Disposal 33
EC Manufacturer’s Declaration 34
Contents
2GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Page

3GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Important Safety Information
Indicates procedures that must be strictly observed to prevent hazards to
persons.
Indicates procedures that must be strictly observed to prevent damage to, or
destruction of the product.
The Oerlikon Leybold Vacuum TURBOVAC have been designed for safe
and efficient operation when used properly and in accordance with these
Operating Instructions. It is the responsibility of the user to carefully read
and strictly observe all safety precautions described in this section and
throughout the Operating Instructions. The TURBOVAC must only be
operated in the proper condition and under the conditions described
in the Operating Instructions. It must be operated and maintained by
trained personnel only. Consult local, state, and national agencies regar-
ding specific requirements and regulations. Address any further safety,
operation and/or maintenance questions to our nearest office.
Failure to observe the following precautions could result in serious
personal injury!
Mechanical hazards
Risk of injury!
Avoid exposing any part of the human body to the vacuum. Only handle
the pump when it is vented.
Turbopumps as described in the following operation manual contains a
high portion of kinetic energy due to their high rotational speed in combi-
nation with the specific rotor mass.
In case of a malfunction of the system for example rotor/stator contact or
even a rotor crash the rotational energy is released.
To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual!
Never operate the pump (in bench tests, for instance) without its being
flanged to the vacuum chamber.
The small-flange connector for the high-vacuum flange at the TURBOVAC
50 is not strong enough to keep the pump from rotating if it should sud-
denly seize. Rotation of the pump can cause leaks in the forevacuum
line. Secure the pump additionally to prevent rotation in case it should
suddenly seize.
Safety Information
Warning
Caution
Warning

Safety Information
4GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Electrical hazards
Risk of injury!
Dangerous voltages are present at the mains connections. Before begin-
ning with any maintenance or service work on the pump, disconnect the
pump from all power supplies.
Operate the pump only with the matching frequency converter and
connector line.
Voltages of up to 400 V will be present at the connection cable between
the frequency converter and the pump; mains voltage will be present at
the fan, the flange heater, the valves and their supply leads.
Route the conductors and cables so as to protect them from damage.
When the connector cable to the TURBOVAC is attached, the outputs of
the TURBOTRONIK frequency converter are not free of voltage.
Thermal hazards
Risk of injury!
The pump can become so hot during operation (> 70°C, 158 °F) as to
represent a burn hazard. Shield the hot components against contact.
Note the symbols on the pump pointing to the hazards, and in the case of
a hot pump wear the required protective clothing.
Hazards caused by materials and substances
The forevacuum line must be tight.
Hazardous gases could escape from leaks or the gases being pumped
could react with air or humidity.
Take the appropriate precautionary measures prior to opening the intake
or discharge connection if the pump has previously handled hazardous
gases.
If necessary, use gloves, a respirator and/or protective clothing and work
under an exhaust hood.
Risk of explosion!
The standard version of the pump is not suited for operation in
explosion hazard areas. Contact us before planning to use the pump
under such circumstances.
Contaminated parts can be detrimental to health and environment. Before
beginning with any work , first find out whether any parts are contamina-
ted. Adhere to the relevant regulations and take the necessary precauti-
ons when handling contaminated parts.
Warning
Warning
Warning

Failure to observe the following precautions could result in damage
to the pump!
Unauthorized opening of the pump or modifications of the mechanical or
electrical components of the pump void the warranty.
The pump must only be opened by such persons who have been authori-
sed by Oerlikon Oerlikon Leybold Vacuum Vacuum to do so.
The rotor is precision balanced; any change whatsoever, such as loose-
ning or bending any rotor component, will make re-balancing necessary.
Unless appropriate accessories and attachments are used, the TURBO-
VAC is not suitable for aggressive or corrosive media, or those containing
dust. When handling corrosive media the C version pump must be
operated with purge gas; when handling media containing dust, a fine-
mesh filter must be installed.
Observe the information on media compatibility, to be found in Section
4.1.
Take care not to damage the plugs and coolant connections during move-
ment.
Exposure of the pump to accelerating forces must be avoided or reduced
to such an extent that the rotor unit will not be excited by vibrations. In
the case of critical applications you must consult our Applications Dept.
first.
The references to diagrams, e. g. (1/2) consist of the Fig. No. and the Item
No. in that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
Safety Information
5GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Caution
Figures

1Description
1.1 Design and Operation
The TURBOVAC models 35 LS to 1000 are turbomolecular pumps featuring
grease-lubricated bearings. These units are engineered to pump vacuum
chambers down to pressures in the high-vacuum range. A TURBOTRONIK
frequency converter and a forevacuum pump are required for the operation of
the TURBOVAC.
1.2 Supplied Equipment
The TURBOVAC is shipped in a sealed PE bag which also contains a desic-
cant. The maximum effective life of the desiccant is one year.
TURBOVAC 35 LS / 35 LS2
The pumps are shipped without splinter guard or connection accessories.
TURBOVAC 50 to 1000
For high-vacuum port with ISO-K flange:
Splinter guard, centering ring with FPM sealing ring; outer ring.
For high-vacuum port with CF flange: Splinter guard.
For high-vacuum port with KF flange: Splinter guard, centering ring with FPM
O-ring and clamping ring.
For high-vacuum port with ANSI flange: Splinter guard.
Forevacuum port: Centering ring with O-ring and clamping ring.
Both the purge gas port and the airing port are blanked off for shipping.
In addition the pivoted threaded fittings used to make the coolant connection
are included as standard equipment for the TURBOVAC 151, 361 and 600; if
needed, they can be used to replace the hose nipples installed at the factory.
The electronic frequency converter and the connector cables required for
operation are not included as standard equipment with the pump.
——————————
PE = Polyethylene
FPM = Fluoroelastomer, resistant to temperatures of up to 150°C (300 °F)
Description
6GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum

Description
7GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
1.3 Technical Data
Special Versions for Leak Detectors
TURBOVAC 35 LS 35 LS2
High-vacuum port DN 40 KF 40 KF
Pumping speed
He, high vacuum I · s-1 25 32
He, interstage vacuum I · s-1 4.5 5.5
Max. gas throughput in permanent operation
with water cooling at 10-2 mbar,
He mbar · I · s-1 0.25 0.25
Max. idle compression
He, high vacuum 1.5 · 1032 · 104
He, interstage vacuum 70 600
Max. forevacuum pressure for He mbar 1 6
Forevacuum port DN 16 KF 16 KF
Recommended forevacuum pump TRIVAC D 2,5 E Diaphragm pump
Run-up time to 95% nominal speed min 2
Weight, approx. kg 2
Max. power consumption / at ultimate pressure W 45 / 15
Max. ambient temperature at operation °C 45
TURBOVAC 35 LS and 35 LS2
High-vacuum port
Forevacuum port
Electrical connection
Interstage vacuum
port

Description
8GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC 50
TURBOVAC 50
High-vacuum port
Forevacuum port
Electrical connection
O-Ring sealed O-Ring sealed Metal sealed
40 KF 63 ISO-K 63 CF
Aluminium Aluminium Stainless steel
33 55 55
36 48 48
28 30 30
0.30 0.40 0.40
0.25 0.35 0.35
0.20 0.25 0.25
2 · 1062 · 1062 · 108
< 5 · 10-8 < 5 · 10-8 < 5 · 10-8
1 · 10-1
16 KF
TRIVAC D 2,5 E
2
10
2
45 / 15
55
80
High-vacuum port DN
Pump housing
Pumping speed at 10-3 mbar
N2I · s-1
He I · s-1
H2I · s-1
Max. gas throughput in permanent operation
with water cooling at 10-2 mbar
N2mbar · I · s-1
He mbar · I · s-1
H2mbar · I · s-1
Max. idle compression N2
Ultimate pressure with TRIVAC D 2,5 E mbar
Max. forevacuum pressure for N2mbar
Forevacuum port DN
Recommended forevacuum pump
Run-up time to 95% nominal speed min
Cooling water connection (hose nozzle)
(for Part No. 854 08) mm
Weight, approx. kg
Max. power consumption / at ultimate pressure W
Max. ambient temperature at operation °C
Max. bakeout temperature at CF flange °C

Description
9GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC 151 TURBOVAC 361 / 361 C
100 ISO-K / 100 CF
145
150
135
115
3
3
1.7
1 · 109
2 · 104
8 · 102
< 1 · 10-10
5 · 10-2
5 · 10-1
D 4 B to D 16 B
≈2
25 KF
10 KF
10
8
680 / 480
55
100
High-vacuum port DN
Pumping speed N2I · s-1
Ar I · s-1
He I · s-1
H2I · s-1
Max. gas throughput N2mbar · I · s-1
Ar mbar · I · s-1
H2mbar · I · s-1
Compression N2
He
H2
Ultimate pressure mbar
Max. Inlet pressure (permanent)
with water cooling mbar
Max. forevacuum pressure for N2mbar
Recommended forevacuum pump TRIVAC
Run-up time to 95% nominal speed min
Forevacuum port DN
Purge gas / vent port DN
Cooling water connection (hose nozzle) mm
Weight, approx. kg
Max. power consumption / at ultimate pressureVA
Max. ambient temperature at operation °C
Max. bakeout temperature at CF flange °C
100 ISO-K • 100 CF 160 ISO-K • 160 CF
345 400
350 –
340 380
340 370
7.5 –
7.5 –
1 · 109
6 · 104
3 · 103
< 1 · 10-10
5 · 10-2
5 · 10-1
D 16 B to D 25 B
≈2
25 KF
10 KF
10
12
680 / 480
55
100
TURBOVAC 151 C; TURBOVAC 361 C similar
High-vacuum port
Forevacuum port
Electrical connection
Vent port
Connection
for water
cooling
Purge gas
port

Description
10 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC 600 C TURBOVAC 1000 C
High-vacuum port DN
Pumping speed N2I · s-1
He I · s-1
H2I · s-1
Max. gas throughput N2mbar · I · s-1
Ar mbar · I · s-1
Compression N2
He
H2
Ultimate pressure mbar
Speed rpm
Run-up time (freq. converter), approx. min
Max. Inlet pressure (permanent)
with water cooling mbar
Max. forevacuum pressure for N2mbar
Recommended forevacuum pump
at standard operation TRIVAC
at purge gas operation TRIVAC
Run-up time to 95% nominal speed min
Forevacuum port DN
Purge gas / vent port DN
Cooling water connection (hose nozzle) mm
Weight, approx. kg
Max. power consumption /
at ultimate pressure VA
Max. ambient temperature at operation °C
Max. bakeout temperature at CF flange °C
1) As of 1995 in some cases 16 mm KF
2) 11 mm with 40 mm type KF forevacuum port
10 mm with 63 mm type ISO-K forevacuum port
160 ISO-K /CF 200 CF /6“ ANSI 250 ISO-K
850 1100 1150
---
---
-
-
-
-
-
< 10-10
36,000
9
-
5 · 10-2
TRIVAC D 40 B
-
40 KF /63 ISO-K 40 KF 40 KF /63 ISO-K
10 KF1) 10 KF1) 10 KF1)
11 / 102) 11 11 / 102)
25
-
55
100
160 ISO-K • 160 CF
560
600
570
< 4
< 4
> 109
2 · 104
1.1 · 103
< 10-10
36,000
4
1 · 10-2
5 · 10-2
D 25 B / 40 B
40 B
3
40 KF
10 KF
10
12
680 / 480
55
100

Description
11GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
AHigh-vacuum port
BForevacuum port
CVent port
DPurge gas port
EConnection for water cooling
FElectrical connection
TURBOVAC 1000 C
TURBOVAC 600 C
A
B
F
A
C
E
D
B
F
C
E
D
Fig. 2

Description
12 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
1.4 Ordering Information
TURBOVAC 35 LS 35 LS 2 50 151 151 C 361 361 C 600 C 1000 C
High-vacuum
port
DN 40 KF 856 64 856 66 854 00
DN 40 CF 853 99
DN 63 ISO-K 854 01
800150V0010
DN 63 CF 854 02
DN 100 ISO-K 856 31 856 35 856 70 856 75
800150V0005
3)
800150V0018
4)
DN 100 CF 856 32 103 41 856 71
DN 160 ISO-K 856 72 856 77
800150V0015 855 351)
855 382)
DN 160 CF 856 73 800150V0017 854 911)
DN 200 CF 117 641)
DN 200 ISO-K 153 001)
6“ ANSI 894 891)
DN 250 ISO-K 855 361)
855 392)
Cooling water unit for
TURBOVAC 35 LS, 35 LS2, 50 854 08
1) With forevacuum flange DN 40 KF
2) With forevacuum flange DN 63 ISO-K
3) Venting flange, turned by 180°
4) Clean room packaging

Description
13GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
TURBOVAC
35 LS
35 LS2
50
151, 151 C,
361, 361 C
600 C
1000 C
Air or water cooling required
Ambient temperature 30 - 40 °C
Bakeout operations
High-vacuum pressure 10-3 to
5·10-2 mbar
Forevacuum pressure 5·10-1 to
2 mbar
Bakeout at ambient temperature
< 40 °C
Continuous operation at high-
vacuum pressure > 10-4 mbar
Rapid-cycling operation
Bakeout at ambient temperature
< 35 °C or
High-vacuum pressure < 10-3
mbar and ambient temperature
< 45 °C
Bakeout at ambient temperature
< 35 °C o
high-vacuum pressure < 10-3
mbar and ambient temperature
< 45 °C
Bakeout at ambient temperature
< 35° C or
high-vacuum pressure < 10-4
mbar and ambient temperature <
45 °C
Water cooling required if any one
of these conditions prevails
Ambient temperature 40 - 45 °C
Bakeout operations
High-vacuum pressure > 5·10-2
mbar
Forevacuum pressure > 2 mbar
Ambient temperature 45 - 55 °C
Bakeout at ambient temperature >
40° C
Bakeout at ambient temperature
> 35 °C
High-vacuum pressure > 10-3 mbar
Ambient temperature 45 - 55 °C
Bakeout at ambient temperature
> 35 °C
High-vacuum pressure > 10-3 mbar
Ambient temperature 45 - 55 °C
Bakeout at ambient temperature
> 35 °C
High-vacuum pressure > 10-4 mbar
Ambient temperature 45 - 55 °C
No additional cooling
required if all these condi-
tions are satisfied
Ambient temperature < 30° C
No bakeout operations
High-vacuum pressure
< 10-3 mbar
Forevacuum pressure
< 5·10-1 mbar
Continuous operation at high-
vacuum pressure < 10-4 mbar
Ambient temperature < 45 °C
—
—
—
1.5 Operating environment and cooling
°C°F
30 86
35 95
40 104
45 113
50 122
55 131
mbar Torr
10-4 8·10-5
10-3 8·10-4
10-2 8·10-3
5·10-2 4·10-2
5·10-1 4·10-1
21.5

Transport and Storing
14 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
2Transport and Storing
When moving the heavier pumps, the lower surfaces on the base flange are
suitable for accepting a lifting fork; see Fig. 3.
Take care not to damage the plugs and coolant connections during move-
ment.
The TURBOVAC is shipped in a sealed PE bag which also contains a desic-
cant. The maximum effective life of the desiccant is one year.
Do not open the packaging until immediately prior to installation.
Fig. 3 Transportation
Caution

3Installation
3.1 Conforming Utilisation
The TURBOVAC models are engineered to pump vacuum chambers down to
pressures in the high-vacuum range. A TURBOTRONIK frequency converter
and a forevacuum pump are required for the operation of the TURBOVAC.
The TURBOVAC 35 LS and 35 LS2 are only intended for integration into a
Helium leak detector.
These units are not suitable for operation without a forevacuum pump.
Turbomolecular pumps are not suitable for pumping either gases which con-
tain dust particles or liquids.
Turbomolecular pumps without a purge gas feature are suitable only for
moving air or inert gases. They are not suitable for pumping aggressive or
reactive gases.
TURBOVAC versions identified with a “C” in the model number are equipped
with this purge gas feature, it protects only the bearing area and the motor in
the TURBOVAC.
3.2 Ambient Conditions
When using the TURBOVAC inside a magnetic field, the magnetic induction at
the pump housing surface may not exceed the following values:
TURBOVAC 50: B = 7 mT
TURBOVAC 151 – 1000:
B = 5 mT in case of radial impingement
B = 15 mT in case of axial impingement
Provide suitable shielding measures if these values are exceeded.
The standard version is resistant to radiation at levels up to 103Gy.
——————————————-
1 mT (milliTesla) = 10 G (Gauss)
1 Gy (Gray) = 100 rad
Installation
15GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Magnetic field

3.3 Connecting the pump to the vacuum chamber
Remove the covers and the blank flanges at the turbomolecular pump only
just before installing, to ensure that the TURBOVAC is installed under the clea-
nest possible conditions.
Do not stand below the TURBOVAC pump while it is being connected to or
detached from the system.
Turbopumps as described in the following operation manual contains a
high portion of kinetic energy due to their high rotational speed in combi-
nation with the specific rotor mass. In case of a malfunction of the system
for example rotor/stator contact or even a rotor crash the rotational ener-
gy is released.
To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual!
The high-vacuum flange must be securely attached to the vacuum cham-
ber. If the pump were to become blocked, insufficient attachment could
cause the pump to break away from its mount or allow internal pump
parts to be discharged. Never operate the pump (in bench tests, for
instance) without its being flanged to the vacuum chamber.
If the pump should suddenly seize, the ensuing deceleration torque will have
to be absorbed by the system. To accomplish this, the following are required
when securing an ISO-K type high-vacuum flange:
Braking Clamping
TURBOVAC torque [Nm] bolts
35 LS / LS2 150 4
50 63 4
151/151 C 283 4
361/361 C 580 6
600 C 1486 10
1000 C DN 160 1500 16
DN 250 1500 10
Clamping bolts made of steel must be torqued down to 35 Nm, those of
quality 12.9 to 50 Nm.
When installing CF flanges, use only the bolts specified (tightening torque is
15 Nm for DN 40 CF, 30 Nm for DN 63 CF and larger).
You will find the order numbers for the (clamping) bolts in the Oerlikon
Oerlikon Leybold Vacuum Catalog.
The clamping bolts are not included as standard equipment with the pump.
Nm 15 30 35 50
ft-lb 11 22 26 37
Installation
16 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Warning

The small-flange connector for the high-vacuum flange at the TURBOVAC
50 is not strong enough to keep the pump from rotating if it should sud-
denly seize. Rotation of the pump can cause leaks in the forevacuum
line. Secure the pump additionally to prevent rotation in case it should
suddenly seize.
In most applications the TURBOVAC will be flanged direct to the high-vacuum
flange for the system. The design of the lubricating system makes it possible
to mount and run the TURBOVAC in any desired attitude. It is not necessary
to support the pump.
If there is a danger that dust could pass from the vacuum chamber into the
TURBOVAC, install a fine-mesh filter between the vacuum chamber and the
TURBOVAC.
The TURBOVAC is precision balanced and is generally operated without a
vibration damper. A special-design vibration damper is available for mounting
at the TURBOVAC high-vacuum flange to decouple extremely sensitive equip-
ment and to prevent external vibrations from being transferred to the TURBO-
VAC. If the TURBOVAC 1000 C are flanged via a vibration damper secure it in
addition at the base flange.
Installation
17GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Warning
max. 100 mm
max.
100 mm
max.
100 mm
Incorrect
Fig. 4 Fixed flanging of the TURBOVAC to the vacuum chamber
Vibration damper
Fine-mesh filter

Design with ISO-K clamp flange
Fit the O-ring at the centering ring.
The O-ring should be flat and even; it must not be twisted. Then add the
outer ring.
A collar flange with retaining ring and suitable sealing washer can also be
used to connect the TURBOVAC.
A collar flange is required when using ultra-high-vacuum sealing washers.
Splinter guard
A splinter guard is installed in the high-vacuum flange to protect the TURBO-
VAC.
Operate the pump only with this splinter guard in place as foreign objects
passing through the intake port and into the pump can cause serious
damage to the rotor. Damage caused by foreign objects in the rotor section
is excluded from the guarantee.
Installation
18 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Fig. 5 Using ISO-K flanges
Install outer
centering ring

Flange heating
(only for pumps with the CF flange)
The flange heater is used to bake out, under automatic control, the high-
vacuum connection port at the TURBOVAC and the mating flange on the
vacuum chamber.
The bakeout jacket or flange heater is mounted directly to the TURBOVAC
intake flange. This can be done even with the pump flanged to the vacuum
chamber.
Risk of injury!
The pump can become so hot during operation (> 70°C, 158 °F) as to
represent a burn hazard. Shield the hot components against contact.
The pump running noise is below 70 dB(A); no noise-insulating measures are
required.
Installation
19GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Fig. 6 Schematic of a turbomolecular pump system
1Turbomolecular pump
2Forevacuum test point
3Forevacuum pump
4Anti-vibration bellows
5Adsorption trap
6Forevacuum valve
7Airing valve
8High-vacuum valve
9Purge gas connection
10 Valve in the roughing pump line
11 Electronic frequency converter
— — — — Roughing pump line; recommended
to achieve the shortest possible cycling times
— · — · — · — · Drive and control line
Warning

3.4 Forevacuum connection
A suitable forevacuum pump is to be connected to the forevacuum connec-
tion flange.
Fig. 6 shows schematically the design of a pump system incorporating a
TURBOVAC turbomolecular pump and a TRIVAC forevacuum pump with anti-
suckback valve.
When using a forevacuum pump not having an anti-suckback valve, a sepa-
rate safety valve should be provided. The safety valve keeps oil from back-
streaming from the forevacuum pump and into the TURBOVAC when the
system is not running.
We recommend installing a sorption trap in the forevacuum line to insure that
the forevacuum chamber in the TURBOVAC remains largely free of oil vapors
during operation, as well.
Install a roughing pump line to achieve the shortest possible cycling times.
Be sure that there is sufficient vibration decoupling between the TURBOVAC
and the forevacuum pump.
The forevacuum line must be tight.
Hazardous gases could escape from leaks or the gases being pumped
could react with air or humidity.
3.5 Connecting the cooling
Air cooling
The air cooling unit is available as a supplementary kit for retrofitting.
When installing the air-cooled TURBOVAC, ensure that there is an unrestricted
flow of air to the fan.
Always maintain a minimum distance of 20 cm (8 inch) to the nearest object.
Ensure that no heated air from neighboring equipment will be drawn in by the
fan.
Connect the fan in the air ventilation unit to the AC mains.
Make the electrical connection for the ventilation unit in such a way that it will
be started and stopped together with the pump itself.
Observe the information given in the operating instructions for the air ventilati-
on unit (GA 05.199).
Installation
20 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum
Warning
Forevacuum pump
Anti-suckback valve
Sorption trap