Oerlikon SCROLLVAC SC 15 D User manual

Oil-free Vacuum Pump
SCROLLVAC SC 5 D
SC 15 D
SC 30 D
SC 60 D
Operating Instructions GA01423_002_A2
PartNos.
133 000
133 001
133 002
133 003
133 004
133 008
133 100
133 101
133 102

General Safety Information 3
1 Description 7
1.1 Design and Operation 7
1.2 Component Designations of the Individual Pump Types 9
1.2.1 Ordering Information 9
1.3 Technical Data 10
1.3.1 Motor Data 11
1.3.2 Dimensions 14
2 Transport and Storage 17
3 Installation 18
3.1 Checking the Product 18
3.2 Ambient Conditions 20
3.3 Setting up the Pump 21
3.4 Electrical Connections 22
3.4.1 Single-phase Motors 22
3.4.2 Three-phase Motors 25
3.5 Connection to the Vacuum System 28
4 Operation 29
4.1 Start-up 30
4.2 Pumping 31
4.3 Purge Gas Operation (pumping of vapours) 31
4.4 Shutdown 33
5 Maintenance 34
5.1 Table - Maintenance 36
5.2 Oerlikon Leybold Vacuum Service 37
5.3 Waste Disposal 37
6 Troubleshooting 38
7SpareParts 39
EC Conformance Declaration 40
Declaration of Contamination 42
Table of contents
2GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Page
Figures
The references to diagrams, e.g. (4/1/2) consist of Chapter No., consecutive
Fig. No. within the chapter and the Item No. in the figurein that order.
We reserve the right to modify the design and the specified data. The illustra-
tions are not binding

Safety information
3GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
General Safety Information
Indicates procedures that must be strictly observed to prevent hazards to
persons.
Indicates procedures that must be strictly observed to prevent damage
to, or destruction of the appliance.
The Oerlikon Leybold Vacuum oil-free scroll vacuum pumps are designed for
safe and efficient operation when used properly and in accordance with this
manual. It is the responsibility of the user to carefully read and strictly obser-
ve all safety precautions described in this section and throughout the
manual. T
Th hi is sp pr ro od du uc ct tm mu us st tb be eo op pe er ra at te ed da an nd dm ma ai in nt ta ai in ne ed db by yt tr ra ai in ne ed dp pe er rs so on nn ne el l
o
on nl ly y. .Consult local, state, and national agencies regarding specific require-
ments and regulations. Address any further safety, operation and/or mainten-
ance questions to your nearest Oerlikon Leybold Vacuum office.
Failure to observe the following precautions could result in serious
personal injury.
Never pump toxic, explosive, flammable, corrosive gases, chemicals,
solvents or powders. Flowing substances, explosion or fire can cause
bodily injury.
Install the pump in an area without explosive or flammable substances.
Otherwise, it can cause explosion or fire.
Wiring must be done by a qualified electrician. Otherwise there is the risk
of suffering an electric shock.
Prevent short-circuits with a ground fault circuit interruptor (GFCI) of pro-
per capacity.
Failure to do so can result in electric shock or fire.
Ask a specialist to perform repairs. Otherwise there exists the risk that the
pump may fail, is damaged or its service life is severely reduced. Trained
customers may perform maintenance themselves.
Be sure to install a main disconnect switch. Failure to do so can result in
damage, fire, or injury.
Be sure to disconnect the electric source before changing the wiring or
before an inspection. Failure to do so can result in electric shock or
damage by the rotating fan.
Caution
Warning
Warning
Disconnect from mains power

Ensure proper grounding of the pump. Otherwise there exists the risk of
suffering an electric shock or igniting a fire.
Never put fingers or foreign matter into the pump's inlet or the clearance
of fan blades. If done, it can cause injury.
Install in an area which is not exposed to moisture such as rain or steam.
Exposure to moisture can cause eIectric shock.
Never alter the equipment. Modifications can damage the equipment or
shorten its service life.
Be sure to check wiring diagram before connecting a power supply.
Failure to do so can result in damage.
Pumps with single-phase motors have an internal thermal protector.
These motors restart without warning after the protector trips back.
Be sure to switch off the electric power before maintenance or inspection.
Failure to do so can result in electric shock or bodily injury by rotating
objects.
Use at ambient temperatures of 5 - 40 °C (during operation). Operating
outside of this range can cause damage or shorten service life.
A
Al lw wa ay ys soperate the pump with the fan and terminal covers in place.
A
Al lw wa ay ys soperate the single-phase pumps with the capacitor cover in place.
Conduct periodic maintenance and inspections. Failure to do so can
cause damage or reduced service life.
Do the maintenance after the pump has fully cooled down. Performing
maintenance on a hot pump can cause burns.
Be sure to close the isolation valve between pump and vacuum system
(chamber) during startup and shutdown. If this valve is open, debris atta-
ched to the inside of pump can be drawn back into the vacuum chamber.
Safety information
4GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Do not touch
Avoid moisture
Do not alter
With a thermal protector
Use at designated temperature
Ensure grounding
Conduct periodic maintenance
Start or stop after closing iso-
lation valve

Safety information
Fig. 0.1 Placement of the warning stickers
Electric
shock
Terminal cover Capacitor
cover
SC 5 D
Single-phase
SC 15 D
Single-phase
SC 15 D
Three-phase
Always keep warning stickers clean. If they become dirty or lost, replace them with new ones.
If you need stickers, contact Oerlikon Leybold Vacuum.
Electric
shock
Terminal cover
Capacitor
cover
Cover for operating
hours counter
Electric
shock
Terminal cover Cover for operating hours
counter
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Safety information
SC 30 D
Single-phase
SC 30 D
Three-phase
Electric
shock
Terminal
cover
Cover for operating
hours counter
Capacitor cover
Electric
shock
Terminal cover Cover for operating hours
counter
Fig. 0.2 Placement of the warning stickers
Always keep warning stickers clean. If they become dirty or lost, replace them with new ones.
If you need stickers, contact Oerlikon Leybold Vacuum.
SC 60 D
Three-phase
Electric
shock
Terminal cover
Cover for operating hours
counter

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1 Description
1.1 Design and Operation
The SCROLLVAC vacuum pumps are oil-free vacuum pumps. Each
SCROLLVAC consists of two Archimedes spirals offset within each other by
180 °. Thus several crescent-shaped pockets of different sizes are created.
With the aid of an eccentric drive, the second spiral orbits about the fixed
spiral thereby reducing, respectively increasing the volume of the pockets
whereby the gases are conveyed from outside to inside thereby being com-
pressed.
Description
Fig. 1.1 Component designations (SC 5 D)
SC 5 D Inlet Fan
Motor
ON /OFF switch under the cover
Operating hours counter
Fixed scroll (1)
Orbiting scroll
Venting connection
Fixed scroll (2)
Fan
Fan cover
Inlet flange
(DN 25)
Fan cover
Venting connection
Exhaust flange
(DN 16)
Carrying handle
Motor
Direction indicating arrow
Motor terminal box

8GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
Fig. 1.2 Component designations (SC 15 D/30 D)
SC 15 D
SC 30 D
Motor
Direction indicating arrow
Direction indicating arrow Motor
Motor terminal box
Motor terminal box
Operating hours counter
Operating hours counter
Fan cover
Fan cover
Carrying handle
Venting connection
Rubber support
Outlet flange
DN 16
Inlet flange
DN 25
Crane eyelet
IN plate
OUT plate
Frame
Inlet flange
DN 40
Venting connection
Outlet flange
DN 25

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1.2 Component Designations of the Individual Pump Types
1.2.1 Ordering Information
Part No.
SC 5 D, single-phase motor, cable with Schuko plug 133 000
SC 15 D, single-phase motor, cable with Schuko plug 133 001
SC 30 D, single-phase motor, cable with Schuko plug 133 002
SC 15 D, three-phase motor 133 003
SC 30 D, three-phase motor 133 004
SC 60 D, three-phase motor 133 008
SC 5 D, single-phase motor, cable with NEMA plug 133 100
SC 15 D, single-phase motor, cable with NEMA plug 133 101
SC 30 D, single-phase motor, cable with NEMA plug 133 102
Fig. 1.3 Component designations (SC 60 D)
Belüftungsanschluss
Einlassflansch DN 40 KF
Auspuffflansch DN 40 KF
Ventilatorabdeckung
Drehrichtungsmarkierung Motor
Motoranschlusskasten
Betriebsstundenzähler
Rahmen
Kranöse
SC 60 D
Description
Fan opening
Direction indicating arrow Motor
Motor terminal box
Fan cover
Venting connection
Outlet flange DN 40 KF
Inlet flange DN 40 KF
Operating hours counter
Crane eyelet
Frame

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Description
1.3 Technical Data
Model SC 5 D SC 15 D SC 30 D SC 60 D
50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz
Displacement l · min-1 90 108 250 300 500 600 1000 1200
(swept volume) m3·h-156,48 15 18 30 36 60 72
cfm 3.1 3.8 8.8 10.6 17.6 21.2 35.3 42.3
Pumping speed1l · min-1 80 93 210 230 420 500 880 1020
m3· h-1 4,8 6,2 13,6 16,4 26,3 31,5 52 62
cfm 2.8 3.6 8 9.6 15.4 18.5 31.0 36.0
Ultimate pressure Pa # 5# 1.6 # 1.0 # 1.0
mbar # 0.05 # 0.016 # 0.01 # 0.01
Torr # 0.037 # 0.012 # 0.0075 # 0.0075
Leak rate3mbar · l · s-1 1.0 · 10-6 1.0 · 10-6 1.0 · 10-6 1.0 · 10-4
Max. inlet pressure Atmospheric pressure
Ambient operating °C 5 - 40 5 - 40 5 - 40 5 - 40
temperature range
Gas temperature at inlet °C max. 50 max. 50 max. 50 max. 50
Inlet connection DN 25 25 40 40
Exhaust connection DN 16 16 25 40
Cooling Air cooling
Protection class IP 20 20 20 20
Class of equipment Class 1
Miscellaneous With operating hours counter und
purge gas connection
Water vapour tolerance g/day 5 25 25 25
at 25 °C, humidity 60 %,
with opened purge gas4l · min-1 910 10 10

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1.3.1 Motor Data
Motor data SC 5 D
Type Single-phase induction motor / Motor 4P / totally enclosed
insulation class B IP 44
thermal protector TP 212 - automatic reset type
Power consumption W 150
Voltage V 100 115 200 230
Rated current 50 Hz A 2.6 – 1.3 1.6
60 Hz A 2.1 2.2 1.1 1.1
Speed at 50 Hz min-1 1430 – 1430 1440
60 Hz min-1 1730 1740 1730 1740
Noise level2at 1m dB(A) ≤52
with purge gas open (ON) dB(A) ≤57
Direction of inlet Vertical
Dimensions (L x W x H) mm 308 x 214 x 225
Weight kg 14
Part numbers 133 100 133 000
Motor Data SC 15 D
Type Single ph. induction motor 4P Three-phase induction motor54P
totally enclosed totally enclosed
insulation class B / IP 44 insulation class B / IP 44
thermal protector TP 212
automatic reset type
Power consumption kW 0.4 0.4
Voltage V 100 115 200 230 200 208 230 380 400 415 460
Rated current 50 Hz A 4.8 - 2.6 2.4 1.6 - - 0.9 0.9 1.0 -
60 Hz A 4.8 4.3 2.8 2.4 1.9 1.9 1.8 - - - 1.0
Speed at 50 Hz min-1 1440 - 1430 1450 1420 - - 1440 1440 1440 -
60 Hz min-1 1710 1740 1700 1730 1660 1660 1690 - - - 1720
Noise level2at 1m dB(A) #58
with purge gas open (ON) dB(A) #66
Direction of inlet Vertical
Dimensions (L x W x H) mm 400 x 252 x 336 370 x 252 x 336
Weight kg 25 23
Part numbers 133 101 133 001 133 003
Description

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Description
Motor Data SC 30 D
Type Single-phase induction motor 4P Three-phase induction motor54P
totally enclosed totally enclosed
insulation class B / IP 44 insulation class B / IP 44
thermal protector TP 212
automatic reset type
Power consumption kW 0.6 0.6
Voltage V 100 115 200 230 200 208 230 380 400 415 460
Rated current 50 Hz A 8.5 - 4.3 3.9 2.7 - - 1.57 1.57 1.63 -
60 Hz A 10 8.6 4.8 4.0 2.8 2.6 2.5 - - - 1.47
Speed at 50 Hz min-11430 - 1430 1450 1460 - - 1470 1470 1470 -
60 Hz min-1 1660 1720 1690 1730 1740 1740 1760 - - - 1770
Noise level2at 1m dB(A) #62 #60
with purge gas open (ON) dB(A) #70 #68
Direction of inlet Horizontal (arranged at the side)
Dimensions (L x W x H) mm 443 x 328 x 372 (443 x 298 x 397) 372 x 328 x 372 (372 x 298 x 397)
Weight kg 44 38
Part numbers 133 102 133 002 133 004
Motor Data SC 60 D
Type Three-phase induction motor54P
totally enclosed
insulation class B / IP44
Power consumption kW 1.4
Voltages V 200 208 230 380 400 415 460
Rated current 50 Hz A 5.5 -- -- 3.3 3.6 3.8 --
60 Hz A 5.8 5.8 5.7 -- -- -- 3.5
Speed at 50 Hz min-1 1460 -- -- 1470 1470 1470 --
60 Hz min-1 1730 1740 1750 -- -- -- 1760
Noise level2at 1m dB(A) 67
with purge gas open (ON) dB(A) 74
Direction of inlet Horizontal (arranged at the side)
Dimensions (L x W x H) mm 467 x 390 x 421
Weight kg 60
Part numbers 133 008
*Cannot operate at 115V/50 Hz, 208V/50Hz, 230V/50Hz, 460V/50 Hz, 380V/60 Hz or 415V/60 Hz
Note 1: Pumping speed remains unchanged independently of whether the purge gas inlet is open or closed
Note 2: Noise level is measured at ultimate pressure in an anechoic room
Note 3: The leak rate is measured when the pump is stopped and the purge gas supply is closed (condition as delivered)
Note 4: When the pump is delivered, the purge gas inlet is closed
Note 5: The three-phase motors do not have internal thermal protection. Be sure to install the protection from the side of the remaining system.

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Fig. 1.4 Pumping speed curves of the SCROLLVAC SC 5 D to SC 60 D
0,10
1,00
10,00
100,00
0,001 0,010 0,100 1,000 10,000 100,000 1000,000
50 Hz with and without Purge
60 Hz with and without Purge
SC5D
SC15D
SC30D
SC60D
Pumping Speed
Pressure
m3/h
mbar
Description

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Description
1.3.2 Dimensions
Fig. 1.5 Dimensional drawing of the SC 5 D
SC 5 D
(Dimensions in mm)

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Fig. 1.6 Dimensional drawing of the SC 15 D
3-phasig 1-phasig
SC 15 D
Description
(Dimensions in mm)
T
Th hr re ee e- -p ph ha as se eS
Si in ng gl le e- -p ph ha as se e

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Description
Fig. 1.7 Dimensional drawing of the SC 30 D
3-phasig 1-phasig
SC 30 D
(Dimensions in mm)
T
Th hr re ee e- -p ph ha as se eS
Si in ng gl le e- -p ph ha as se e

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2Transport and Storage
Lift the pump only at the provided handles, respectively crane eyelets.
Exclusively use lifting facilities with sufficient lifting capability. Never stand
under the hanging pump when it is being moved.
Avoid any other orientations during transportation.
Warning
Fig. 1.8 Dimensional drawing of the SC 60 D
390
218
285
163
320
467
133
421
35055
42
168
SC 60 D
Description
(Dimensions in mm)

18 GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Installation
3 Installation
3.1 Checking the Product
Check that the package is right-side-up and then open it.
Check that model of the product is one that you ordered.
Check that there is no damage. If there is any damage, file a damage
claim with the carrier.
Remove inlet blank flange and outlet blank flange. If you operate
the pump with blank flanges in place, it can cause damage.
Check that the silencer for the purge gas inlet is present in the plastic
bag.
Fig. 3.1 Product check (SC 5 D / SC 15 D)
SC 5 D
SC 15 D
Plastic bag
Silencer Clamp
Blank flange
O-ring
Inlet
Outlet
Clamp
Blank flange
O-ring
Plastic bag
Silencer
Clamp
Blank flange
O-ring
Clamp
Blank flange
O-ring
Caution
Inlet
Outlet

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Fig. 3.2 Product check (SC 30 D / SC 60 D)
Blank flange
O-ring Clamp
Inlet
Outlet
SC 60 D
Installation
SC 30 D
Plastic bag Silencer
Clamp
Blank flange
O-ring
Clamp
Blank flange
O-ring
Inlet
Outlet
Plastic bag
60 D
60 72
8
1,4

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Installation
3.2 Ambient Conditions
Danger of electric shock.
Install in an area which is not exposed to moisture such as rain or steam.
Moisture on electric power connections can cause bodily injury by short
circuit or electric shock.
Danger of explosion and fire.
Install in an area which is not exposed to explosives, flammable gas, or
other related hazards. Otherwise, the pump can cause an explosion or
fire.
Operate at an ambient temperature of 5 °C - 40 °C. Operating outside of
this ambient temperature range can cause damage, fire or failure.
Ensure proper ventilation.
Install in a well-ventilated area. Poor ventilation can cause abnormal
overheating, fire or failure since the scroll pump is air-cooled.
Necessary ventilation air:
SC 5 D over 2 m3· min-1
SC 15 D over 4 m3· min-1
SC 30 D over 8 m3· min-1
SC 60 D over 12 m3· min-1
Install in a proper location. Install in an area which is not exposed to dust or
corrosive gas. Failure to install in a proper location can result in damage or
failure.
Debris can clog silencers reducing the effectiveness of the purge gas.
Install in an area which is not exposed to sunshine. Direct sunshine can
cause high temperatures and failure.
Be careful about moisture
Warning
Temperature
Avoid dust
Avoid direct
sunlight