Oerlikon TURBOVAC SL 80 User manual

PartNos.
800002V3001
to
800002V3004
TURBOVAC SL 80
Wide-Range Turbomolecular Pump with
Integrated or External Frequency Converter
Incorporation Declaration & Operating Instructions
130000760_002_A1

0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 6
0.3 Thermal hazards 7
0.4 Hazards caused by materials and substances 7
0.5 Danger of ignition 8
0.6 Dangers in connection with safety-related
measures and precautions 8
0.7 Risk of damaging the pump 8
1Description 9
1.1 Design 10
1.2 Standardequipment 10
1.3 Technical data 11
1.4 Ordering data 16
1.5 Accessories 16
2 Transport and storing 21
3Installation 22
3.1 Conforming utilization 22
3.1.1 Non-conforming utilization 22
3.2 Operating environment 24
3.3 Fitting accessories 25
3.4 Attach the pump to the vacuum chamber 28
3.5 Forevacuum connection 34
3.6 Connect the cooling 35
3.7 Connect purge gas or a venting valve 39
3.8 Electrical connection 40
3.8.1 Connecting pump and frequency converter 40
3.8.2 Connecting the power supply 42
3.8.3 Mounting the frequency converter 43
3.8.4 Relay status 46
Contents
2130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Page

3130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Contents
4 Operation 47
4.1 Media compatibility / purge gas 47
4.2 Start-up 47
4.3 Interfaces 48
4.3.1 RS 232 C interface (SERVICE X5) 49
4.3.2 RS 485 interface 50
4.3.3 Profibus DP 51
4.3.4 Ethernet/IP interface 51
4.3.5 Parameter list 52
4.3.6 Warning codes for parameter 227 56
4.4 Switching on 57
4.5 Shutting down 58
4.6 Venting 59
4.7 Bakeout 60
4.8 Removing the pump from the system 61
5 Maintenance 62
5.1 Cleaning 62
5.2 Oerlikon Leybold Vacuum Service 63
6 Troubleshooting 64
7Waste disposal 68
EC Incorporation Declaration 70
EC Declaration of Conformity 71
Index 73
Original installation and operating instructions.

Obligation to Provide Information
Before installing and commissioning the TURBOVAC, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Oerlikon Leybold Vacuum TURBOVAC SL 80 has been designed for
safe and efficient operation when used properly and in accordance with
these Operating Instructions. It is the responsibility of the user to carefully
read and strictly observe all safety precautions described in this section and
throughout the Operating Instructions. The pump must only be operated in
the proper condition and under the conditions described in the
Operating Instructions.It must be operated and maintained by trained per-
sonnel only. Consult local, state, and national agencies regarding specific
requirements and regulations. Address any further safety, operation and/or
maintenance questions to our nearest office.
DANGER indicates an imminently hazardous situation which, if not
avoided, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
Safety Information
4130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
DANGER
WARNING
CAUTION
NOTICE
NOTICE

0 Important Safety Information
0.1 Mechanical hazards
1 Avoid exposing any part of the human body to the vacuum.
2 The pressure in the pump must not exceed 1.4 bar (absolute).
3 The pump is intended for generating a vacuum only. If there is a risk of
an overpressure within the system and the pump, then the pump must
be protected against this, by way of an overpressure safety valve, for
example.
4 Vent the pump only up to atmospheric pressure.
5 When using the pump with a purge gas valve, protect the purge gas
supply such that in the event of a malfunction no overpressure can
occur within the system.
6The pump must be firmly mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump blockage could cause the pump
to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example)
without proper flanging to the vacuum chamber. Observe the informa-
tion in Section 3.4.
7 We recommend to change the rotor after 80,000 hours of operation at
the latest. Due to high-speed and temperature, the service life of the
rotor is limited. If the rotor is changed too late, it may be destroyed.
Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experi-
enced.
8Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in
combination with the specific rotor mass. In case of a malfunction of
the system, for example rotor/stator contact or even a rotor crash, the
rotational energy is released.
9To avoid the destruction of the equipment and to prevent injuries of the
operating staffthe leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
Safety Information
5130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
WARNING

0.2 Electrical hazards
1 The electrical connections must only be provided by a trained electri-
cian as specified, for example, by the regulations EN 50110-1.
Observe local regulations.
2 The frequency converter must only be connected to power supplies
which meet the requirements for functional extra-low voltages with
positive isolation in accordance with IEC 60364-4-41 (or local regula-
tions) (PELV).
3 Lethal voltages are present at the mains connections. Before starting
with any maintenance and service work, de-energise (lockout/tagout)
the product first.
4 Unplug any connectors only when the mains voltage is switched off
and the pump does no longer turn.
5 Unauthorized device conversion and modifications are prohibited for
safety reasons.
6 Hazardous voltages are present within the frequency converter. When
coming into contact with these, death or severeinjurycan result. After
the pump has arrived at standstill, disconnect the frequency converter
from the mains power and prevent it against being switched on inad-
vertently (lockout/tagout) before opening it. Basically there is no reason
why the frequency converter should be opened. There are no user ser-
viceable parts inside.
7 When the connector cable is attached, the outputs at the frequency
converter are not free of voltage.
8 Lay connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid any heat stress on
the line due to unfavourable laying conditions.
9 Suitably support the connecting lines so that the pumps are not
exposed to any major mechanical stress.
10 Do not expose pump, frequency converter and the connections to
dripping water.Note the information on the IP type of protection.
11 When storing pump, frequency converter and connecting lines in a
humid atmosphere, these can suffer corrosion. Corrosion gives rise to
conductive deposits which in turn can cause short-circuits and reduce
the insulation levels of electrical components
12 Transport pump, frequency converter and connecting cables only in
their original packaging so as to avoid any mechanical damage which
in turn may reduce air gaps and creepage distances.
13 When applying external voltages above 42 V to the connection termi-
nals, observe the applicable VDE safety regulations!
14 Make the electrical connections only after pump and accessories (e.g.
air cooler)have been installed mechanically.
Safety Information
6130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
WARNING

0.3 Thermal hazards
1 Handle the equipment only while vented and cooled down.
2 During operation of the pump certain areas can get so hot (80 °C
max.) so that there is the risk of suffering burns. Protect hot parts
against being touched.
3 Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corre-
sponding additional warning notices.
0.4 Hazards caused by materials and substances
1The pump is not suited for pumping of reactive or corrosive media.
If the rotor is attacked by process gases, it can suffer destruction.
Thus in the flange mounts high forces and torque conditions can
occur.The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entirepump can be experi-
enced.
2When pumping dusty media,use a dust filter.
3If low concentration corrosive or reactive gases arebeing pumped,
then operate the pump with purge gas.
4 Please consult us as to which types of pump are required for specific
processes and applications.
5 The forevacuum line must be tight. Hazardous gases can escape at
leaks or the gases being pumped can react with air or humidity.
Aleak search will always be required after having installed the pump
and after service work on the vacuum.
Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.
When pumping toxic gases we recommend a leak search on a regular
basis.
6 If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Beforeopening the pump, purge it for a longer period of time with an
inertgas.
If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have pre-
pared for you.
7Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
Safety Information
7130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
CAUTION
DANGER

0.5 Danger of ignition
1 During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120°C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
0.6 Dangers in connection with safety-related
measures and precautions
1 The frequency converter is not equipped with its own emergency shut
down switch. Such a facility needs to be provided from the side of the
system.
0.7 Risk of damaging the pump
1Never touch the rotor. Touching the rotor may cause injuryand
damage the rotor bearing.
2Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend installing an
inlet screen. Damages caused during operation without the inlet
screen areexcluded from warranty.
3 The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure sufficient stability
in case the rotor seizes.
4 Contact Oerlikon Leybold Vacuum first before planning to operate the
pump without air cooling.
5 Also water cooled pumps need cooling air for the frequency converter.
6 Ensure correct polarity when connecting the TURBO.DRIVE. A wrong
polarity may cause an internal fuse to blow. The fuse can only be
changed by Oerlikon Leybold Vacuum Service.
7The interface connectors have UNC 4-40 threads. Do not use connec-
tors with M3 treads.
8Disconnect and connect the cable connections only while the pump is
turning no longer (green status LED off) and with the mains power
switched off (yellow power LED off). Otherwise there is the risk of
damaging the frequency converter.
9 Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
Safety Information
8130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
CAUTION
CAUTION
NOTICE

Description
9130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
1 Description
The TURBOVAC SL 80 is a wide range turbomolecular pump designed to
evacuate vacuum chambers down to pressure levels in the high vacuum
range. It is suitable for pumping air and clean gases. The TURBO.DRIVE 400
frequency converter and a forevacuum pump arerequired for its operation.
Use
Fig. 1.1 Examples of SL 80
TURBOVAC SL 80 ... with air cooler and
purge gas connection
... with air cooler and frequency
converter mounted to the pump
... with frequency converter
mounted under the pump
... with water cooling and
frequency converter mounted
under the pump

Description
10 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
1.1 Design
The pumps comprise essentially the pump housing, a multi-stage rotor with
the stator group, and the drive.
The first section of the rotor is a turbomolecular pump rotor while the second
tile represents a Holweck stage. The Holweck pumping stage increases the
permissible forevacuum pressure level markedly when compared with the
classic turbomolecular pump.
The rotor shaft runs in two lifetime lubricated ceramic ball bearings.
The pump is driven by a split-cage DC motor. In this motor the rotor and
stator windings are separated by a vacuum-tight can. Consequently the
rotor runs inside the vacuum while the stator is outside the vacuum. This eli-
minates any need of vacuum feedthroughs.
The pump is equipped with a temperature sensor and a resistor code.
Water cooling or an air cooling fan is available as optional equipment.
The intake flange should be fitted with a wire mesh inlet screen to protect the
pump against mechanical damage caused by foreign objects.
The pump is driven by an electronic frequency converter TURBO.DRIVE. All
functions like, for example, speed control, pump sensing or temperature
monitoring are monitored by the TURBO.DRIVE. This unit is powered by an
external power supply.
The TURBO.DRIVE may be installed beside or underneath the pump or up to
5maway.
The pumps areequipped with a purge gas facility. The purge gas and venting
connection is blanked offby default with a M8 closure screw. A purge gas
and venting valve may be connected either directly or by using a M8 –
DN16KF adapter.
For space reasons, when the frequency converter is installed at the side, only
either the air cooler or a purge gas valve can be connected.
1.2 Standard equipment
The pumps are shipped sealed in a PE bag with a desiccant to absorb moi-
sture.The maximum useful life of the desiccant is one year.
The high- and forevacuum flanges are covered with protection caps.
The connection elements and the inlet screen are not part of the standard
equipment.
Asuitable DC coupling for the power supply is included: In the case of
pumps with integrated frequency converter it is supplied with the pump, in
the case of pumps with a separate frequency converter it is supplied with the
frequency converter.
————————————
PE = Polyethylene
FPM = Fluororubber, resistant to temperatures up to 150°C(302 °F)
Bearings
Motor
Cooling
Frequency converter
Purge gas connection

Description
11130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
1.3 Technical data
TURBOVAC SL 80
High-vacuum connection DN 40 KF DN 63 ISO-K DN 63 CF
Pumping speed (without inlet screen) for
N2on 65 l·s-165 l·s-1
Ar request 60 l·s-160 l·s-1
He 55 l·s-155 l·s-1
H249 l·s-149 l·s-1
Ultimate pressure
with two-stage, oil-sealed
rotary vane pump < 2·10-10 mbar
with diaphragm pump < 5·10-9 mbar
Max. permissible forevacuum pressure with N2
without purge gas 16 mbar
with 0.4 mbar·l·s-1 (24 sccm) purge gas 5mbar
Max. gas throughput with water cooling
N22.0 mbar·l·s-1
Ar 1.6 mbar·l·s-1
H20.5 mbar·l·s-1
He 1.2 mbar·l·s-1
Weight
Pump 1.8 kg 1.9 kg 3.1 kg
Pump with DN 63 ISO-K flange
with TURBO.DRIVE 400 2.5 kg
with TURBO.DRIVE 400 and air cooler 2.8 kg
with TURBO.DRIVE 400 and water cooling 3.1 kg
Recommended forevacuum pumps
TRIVAC D 2.5 E
Diaphragm pump DIVAC 0.8 T
Operating speed 72,000 rpm
Run-up time 1.5 min
Power consumption
at run-up 120 W
at ultimate pressure 17 W
Forevacuum connection DN 16 KF
Type of protection IP 20
Noise level < 46 dB(A)
Ambient temperature
during operation +15 - + 45 °C
storage – 15 - + 70°C
Max. rel. air humidity approx. 95%1)
(non-condensing)
1) More details in Applied technical standard IEC 721-3-3
3K3/ 3Z1/ 3B1/ 3C1/ 3S2/ 3M1

Option water cooling
Cooling water connections Hose nipples / G 1/8“
Cooling water data see Section 3.6
Option air cooling
Power consumption 0.9 W
Volume flow 20 m3/h
TURBO.DRIVE 400
Supply voltage 24 V (± 10%)
Residual ripple < 3 %
Output
Voltage 0 - 24 V 3~
Power 160 W
Frequency 0 - 1500 Hz
When operating a SL 80
Nominal voltage 24 V
Max. power consumption 140 W
Max. peak current, input side 6 A DC
Required power output from the power supply ≥150 W
Max. length of the DC cable (shielded)
at 3 x 1.5 mm25 m
at 3 x 2.5 mm220 m
Relay output rating 42 V, 0.5 A
Ambient temperature
during operation 5-45 °C
storage - 15 - + 70 °C
Relative air humidity 5 to 85 % non condensing
Overvoltage category II
Contamination grade 2
Temp. of the cooling surface 5 - 55 °C
For Part Nos. 800073V0004 /07 5 - 50 °C
Power consumption ≤20 W
Type of protection IP 20
Weight, approx. 0.5 kg
Description
12 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum

Description
13130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Purge gas and venting valve
Part No. 800152V0013 800152V0014 800152V0042
Gas flow rate at 1 bar 0.4 mbar·l·s-1 (24 sccm)
Solenoid valves 2, normally closed
Mains supply 24 V DC 230 V AC 115 V AC
Power consumption 4 W 6 W 4 W
Connection to pump DN 10 KF
Needed for this:
Adapter M8 – DN10/16KF, P/N 800110V0011
Including O-ring 9.25 x 1.78 and
Adapter centering ring DN 10/16 KF with sinter filter
Gas connection G1/4-in.
Recommended for this:
Adapter with filter including O-ring and gasket 800110V0012
Dimensions 60 x 65 x 45 mm 61 x 65 x 45 mm 61 x 65 x 45 mm
0
10
20
30
40
50
60
70
1
l/s
mbar
10-2
10-3 10-4 10-5 10-6 10-1
Saugvermögen
Hochvakuumdruck
N2
Ar
T
He
H2
Fig. 1.2 Pumping speed curves of the SL 80
Pumping speed
High-vacuum pressure

Description
14 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
h
Ø d
17°
114
57°
21°
20°
66
17
22
h
63 ISO-K 145
63 CF 166
DN
Purge gas connection
Ød
22 h+5
27
21°
17°
57°
59
66
117
101
5°
114
h
63
83
24 100
73
105
105 100
7°
23
88
23
°
48°
48°
61°
66
d
95
113,5
40 KF 15555
Ø d
h1
h1
227
248
237
Fig. 1.3 Dimensional drawings for SL 80 pumps (combination examples); dimensions in mm
Purge gas connection
(pump with flange
DN 63 ISO-K drawn)

Description
15130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Ød
101
155
88 70
66
23°
7°
30
100
50
109
25
100
h2
Ø d
105 100
h3
24 80
61°
23°
88
7°
23
63
85
66
82
h2
63 ISO-K 153
63 CF 174
DN d
95
113,5
40 KF 16355
h3
207
228
217
Fig. 1.4 Dimensional drawings for SL 80 pumps (combination examples); dimensions in mm

Description
16 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
1.4 Ordering data
TURBOVAC SL 80 Part No.
High-vacuum flange DN 63 ISO-K 800002V3001
High-vacuum flange DN 63 CF 800002V3002
High-vacuum flange DN 63 CF-VA 800002V3003
High-vacuum flange DN 40 KF 800002V3004
1.5 Accessories
Frequency converter TURBO.DRIVE 400
with RS 232 C interface 800073V0002
with RS 485 C interface 800073V0003
with Profibus interface 800073V0004
Connecting cable pump - frequency converter
0.2 m long 800152V0021
0.3 m long 800152V0023
0.4 m long 800152V0022
1.0 m long 152 47
2.5 m long 864 49
3.0 m long 864 40
5.0 m long 864 50
Mounting kit TD 400 for TURBOVAC SL80
Including 0.2 m long connection cable pump - frequency converter
For installing the frequency converter
... beside the pump 800110V005
... underneath the pump (not for TD 400
with Ethernet/IP interface) 800110V008
Water cooling with G 1/8”connections 800135V0001
incl. 2 hose nipples G 1/8”, Outer Ø 8 mm
for water hose,
2sealing rings approx. 10x4x1
4screws M4x20, DIN 912
4screws M4x30, DIN 912 (for mounting the
frequency converter under the pump)
Air cooler 800136V0001
(is powered by the pump)
4screws M4x10, DIN 912
Drive(X3)
HEAT SINK
DC24V (X4)
HEAT SINK

Description
17130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
OEM power supply (with screw terminals)
SITOP 24 V / 10 A 152 50
nsupplies the TURBO.DRIVE 400 with 24 V DC
nother power supplies on request
24 V DC cable (TURBO.DRIVE 400 – OEM power supply)
3m 200 12 732
5 m 200 12 733
10 m 200 12 734
20 m 200 12 735
Mains cable for power supply, 2 m long
with EURO plug 800102V0001
with US plug 5-15P 800102V1001
TURBO.DRIVE
TD 400
DRIVE (X3)
HEAT SINK HEAT SINK
24 V DC (X4)
73,3
100
18,2 63,8
15,9
41,0
79,0
100
50
27,6
18,5
Fig. 1.5 Dimensional drawing for the frequency converter; dimensions in mm

Part No.
Power supply unit - plug and play
TURBO.POWER 300 800100V0002
nsupplies the TURBO.DRIVE 400 with 24 V DC
nplug & play cables
ndesktop unit or rack mountable
24V DC Power cable (TURBO.DRIVE 400 – TURBO.POWER 300)
1m 800094V0100
3m 800094V0300
5m 800094V0500
10 m 800094V1000
20 m 800094V2000
Mains cable for TURBO.POWER 300, 3 m long
with EURO plug 800102V0002
with US plug 6-15P 800102V1002
with UK plug 800102V0003
Power supply and control unit
TURBO.CONTROL 300 800100V0001
nsupplies the TURBO.DRIVE 400 with 24 V DC
nplug & play cables
ndesktop unit or rack mountable
nwith power switch
nwith start/stop switch for the turbomolecular pump
nremote control
nstatus LEDs and status relays
24V DC Control cable
(TURBO.DRIVE 400 – TURBO.CONTROL 300)
1 m 800091V0100
3m 800091V0300
5 m 800091V0500
10 m 800091V1000
20 m 800091V2000
Mains cable for TURBO.CONTROL 300, 3 m long
with EURO plug 800102V0002
with US plug 6-15P 800102V1002
with UK plug 800102V0003
PC software "Turbo.Drive Server"for Windows 95
and higher, CD-ROM
nDisplay,change, save and compareparameter lists
nIntegration of customer’s software
nRecord parameter data 800110V0102
The softwarecan also be downloaded from
www.oerlikon.com in the menu Oerlikon Leybold Vacuum
→Documentation →Download Software
GSD file for Profibus DP
Can be downloaded from www.oerlikon.com
in the menu Oerlikon Leybold Vacuum
→Documentation →Download Software
Description
18 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
START
NORMAL
POWER
ERROR
START
STOP
TURBO.CONTROL 300
1
0
TURBO.POWER 300
T5A~250 V
T5A~250 V
100 - 240 V AC

Part No.
Mechanical accessories
Plug for connector REMOTE with integrated
ON/OFF switch for the pump (Sub-D plug, 9 way) 152 48
Heat sink for frequency converter 800110V0001
Top hat rail adaptor (mounting aid for
TURBO.DRIVE 400 and TURBO.POWER 300) 800110V0003
Purge gas and venting valve 0.4 mbar·l/s at 1 bar
24 V DC 800152V0013
230 V AC 800152V0014
115 V AC 800152V0042
DN 10 KF – G1/4”
Pump connection: Adapter M8 – DN-16-KF 800110V0011
incl. O-ring 9.25 x 1.78 and
Adapter centering ring DN 10/16 KF with sinter filter
Gas side connection: G1/4-in. adapter with filter 800110V0012
Including O-ring and gasket
Venting valve 24 V DC 800120V0011
Power failure venting valve 24 V DC 800120V0021
Spare filter E 200 18 517
Description
19130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
on
off
800152V0013 800110V0012
800110V0011

Part No.
inlet screen
DN 40 KF E 200 17 169
DN 63 ISO-K E 200 17 170
DN 63 CF E 200 17 171
Flange heater (only for pumps with CF flange)
DN 63 CF, 230 V 854 04
DN 63 CF, 110 V 854 07
Copper gasket rings for CF flange (Set of 10 pieces)
DN 63 CF 839 44
Set of hex. screws with nuts, screws
and washers for CF flange DN 63 CF 838 81
Centering ring (Al) with O-ring (FPM)
DN 63 ISO-K 268 41
Clamps (Set of 4 pieces) 267 01
Centering ring with O-ring for DN 16 KF
Al/CR 183 26
Al/FPM 182 06
Clamping ring (Al) DN 16 KF 183 41
Clamping Collar DN 40 KF for Ultra Sealing Rings 882 78
Description
20 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum