Omron V640-HAM11 User manual

Cat. No. Z167-E1-01
USER'S MANUAL
CIDRW SYSTEM
V640 SERIES
CIDRW CONTROLLER
V700-L21
AMPLIFIER UNIT
V640-HAM11
CIDRW HEAD
V640-HS61
LINK UNIT
V700-L11

Special or Critical Applications
When the CIDRW System will be used in one of the conditions or applications listed below, allow extra safety margins in
ratings and functions, add extra safety feature such as fail-safe systems, and consult your OMRON representative.
• Operating conditions or environments which are not described in the manual.
• Nuclear power control systems, railroad systems, aviation systems, vehicles, combustion systems, medical equipment,
amusement equipment, or safety equipment.
• Other systems, machines, and equipment that may have a serious influence on lives and property and require extra
safety features.
Product Availability
Some of the products listed may not be available in some countries. Please contact your nearest OMRON sales
office by referring to the addresses provided at the back of this manual.
 OMRON, 2003
All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in
any form, or by any means, mechanical, electronic, photocopying, recording, or otherwise, without the prior written
permission of OMRON.
No patent liability is assumed with respect to the use of the information contained herein. Moreover, because
OMRON is constantly striving to improve its high-quality products, the information contained in this manual is sub-
ject to change without notice. Every precaution has been taken in the preparation of this manual. Nevertheless,
OMRON assumes no responsibility for errors or omissions. Neither is any liability assumed for damages resulting
from the use of the information contained in this publication.

ÇÕǹÇ?Ç ëÊ 1èÕ ëÊ 2èÕ ëÊ 3èÕ ëÊ 4èÕ
INTRODUCTION
SECTION 1 SECTION 2 SECTION 3 SECTION 4 SECTION 5 SECTION 6
Introduction
SECTION 1
SECTION 2
SECTION 3
SECTION 4
SECTION 5
SECTION 6
Table of Contents/Precautions on Safety
Product Outline
Installation and Connections/Wiring
Preparing for Communications
Reading from/Writing to ID Tags
Troubleshooting
Appendix
CIDRW System
V640-HAM11 Amplifire Unit
V640-HS61 CIDRW Head
V700-L21 CIDRW Controller
V700-L11 Link Unit
User's Manual

2
INTRODUCTION
Table of Contens
CIDRW System
User’s Manual
INTRODUCTION
Table of Contents
Table of Contents
Introduction 1
Table of Contents 2
General Safety Precautions 4
General Safety Precautions 4
Warning 4
Caution 4
Notice 5
Applicable SEMI Standards 7
Applicable Standards 8
Editor’s Note 10
SECTION 1 Product Outline 11
What is a CIDRW System? 12
Features 13
System Configuration 14
Component Names and Functions 15
Flowchart for Getting Started 19
SECTION 2 Installation and Connections/Wiring 21
Installation 22
Connections and Wiring 27
SECTION 3 Preparing for Communications 43
Set the Communications Conditions for the CIDRW Controller 44
Set the Communications Conditions for Amplifier Units 55
Set the Communications Conditions for Link Units 57
Communications Test 59
SECTION 4 Reading from/Writing to ID Tags 63
When SECS is Used 64
When SECS is Not Used 74

3
CIDRW System
User’s Maual
INTRODUCTION
Table of Contents
INTRODUCTION
Table of Contents
SECTION 5 Troubleshooting 83
When SECS is Used 84
When SECS is Not Used 90
SECTION 6 Appendix 95
Specifications and Dimensions 96
System Configuration Examples 100
Characteristic Data depending on Conditions of Use 102
Data Segment Area 111
Regular Inspection 112
SECS Protocol Specifications 113
ASCII Code Table 118
Protective Construction 119
Revision History 124

4
INTRODUCTION
General Safety Precautions
CIDRW System
User’s Manual
INTRODUCTION
General Safety Precautions
OMRON products are manufactured for use according to proper procedures by a qualified operator and only for the
purposes described in this manual.
The following conventions are used to indicate and classify precautions in this manual. Always heed the information
provided with them. Failure to heed precautions can result in injury to people or damage to property.
DANGER
Indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury.
WARNING
Indicates a potentially hazardous situation which, if not avoided, could result in death or serious injury.
Caution
Indicates a potentially hazardous situation which, if not avoided, could result in minor or moderate injury, or property
damage.
WARNING
Failure to read and understand the information provided in this manual may result in personal injury or death, damage to
the product, or product failure. Please read each section in its entirety and be sure you understand the information
provided in the section and related sections before attempting any of the procedures or operations given.
Caution
General Safety Precautions
To ensure safety, observe the following points.
Caution • Do not insert water or wires through gaps in the case. This could cause fire or electric shock.
Caution • In the event of a malfunction, stop using the product immediately, turn off the power, and
consult your OMRON dealer.
Caution • Dispose of this product as industrial waste.
Caution

5
CIDRW System
User’s Manual
INTRODUCTION
Notice
INTRODUCTION
Notice
The CIDRW System is highly reliable and resistant to most environmental factors. The following guidelines, however, must
be followed to ensure reliability and optimum use of the CIDRW System.
Installation Site
Install the product at a location where:
• It is not exposed to direct sunlight.
• It is not exposed to corrosive gases, dust, metal chips, or salt.
• The working temperature is within the range stipulated in the specifications.
• There are no sudden variations in temperature (no condensation).
• The relative humidity is within the range stipulated in the specifications.
• No vibration or shock exceeding the values stipulated in the specifications is transmitted directly to
the body of the product.
• It is not subject to splashing water, oil, or chemical substances.
Mounting
• This product communicates with ID Tags using the 134 kHz frequency band. Note that some trans-
ceivers, motors, monitoring equipment, and power supplies (power supply ICs) generate electrical
waves (noise) that interfere with communications with ID Tags. If you are using the product in the
vicinity of any of these devices, check the effect on communications in advance.
• In order to minimize the effects of noise, ground nearby metal bodies with a grounding resistance not
exceeding 100 ohms.
• When mounting Amplifier Units, tighten the screws with a torque no greater than 1.2 N·m.
• When mounting CIDRW Heads, tighten the screws with a torque no greater than 0.6 N·m.
• When multiple CIDRW Heads are mounted next to each other, communications performance could
be impaired by mutual interference. Note the information in this manual on mutual interference when
installing multiple heads.
Refer to page 105.

6
INTRODUCTION
Notice
CIDRW System
User’s Manual
INTRODUCTION
Power and Ground Cables
• Use the power supply voltage specified in this manual.
• Ensure correct polarity when connecting to the +/- power supply terminals.
• The ground terminals must be connected to a ground with a grounding resistance not exceeding 100
ohms.
Wiring Work
• Always turn the power off before starting wiring work or connecting/disconnecting cables.
• Do not run high-voltage lines and power lines though the same conduit.
• To prevent damage by static electricity, wear a wrist strap or equivalent, and take measures to pre-
vent charging, before touching terminal components or parts inside connectors.
Screw Locking Adhesive
• Screw locking adhesive (screw lock) may cause deterioration and cracking of resin parts: do not use
it for screws in resin parts or anywhere where resin washers are used.
Cleaning
• Do not use organic solvents such as thinner or benzene.

7
CIDRW System
User’s Manual
INTRODUCTION
Applicable SEMI Standards
INTRODUCTION
Applicable SEMI Standards
This CIDRW system complies with the following standards.
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.

8
INTRODUCTION
Applicable Standards
CIDRW System
User’s Manual
INTRODUCTION
Applicable Standards
1. FCC Rules (Federal Communications Commission)
This device complies with Part 15 Subpart C of the FCC Rules.
FCC ID: E4E6CYCID6400202
Operation is subject to the following two conditions:
(1) this device may not cause harmful interference, and
(2) this device must accept any interference received, including interference that may cause undesired oper-
ation.
FCC NOTICE
This equipment has been tested and found to comply with the limits for a Class B digital device, pursu-
ant to part 15 of the FCC Rules. These limits are designed to provide reasonable protection against
harmful interference in a residential installation.
This equipment generates, uses and can radiate radio frequency energy and, if not installed and used
in accordance with the instructions, may cause harmful interference to radio communications. How-
ever, there is no guarantee that interference will not occur in a particular installation. If this equipment
does cause harmful interference to radio or television reception, which can be determined by turning
the equipment off and on, the user is encouraged to try to correct the interference by one or more of
the following measures:
• Reorient or relocate the receiving antenna
• Increase the separation between the equipment and receiver.
• Connect the equipment into an outlet on a circuit different from that to which the receiver is
connected.
• Consult the dealer or an experienced radio/TV technician for help.
FCC WARNING
Changes or modifications not expressly approved by the party responsible for compliance could void
the user's authority to operate the equipment.
Properly shielded and grounded cables and connectors must be used for connection to host
computer and/or peripherals in order to meet FCC emission limits.
CAUTION
This device must be professionally installed.
This CIDRW Head [Model: V640-HS61 (-X)] is dedicated to Amplifier Unit [Model: V640-HAM11 (-X)].

9
CIDRW System
User’s Manual
INTRODUCTION
Applicable Standards
INTRODUCTION
2. EC Declaration of Conformity
Hereby, Omron, declares that this V640(-X) is in compliance with the essential requirements and other
relevant provisions of Directive 1999/5/EC, and satisfy tests for the appropriate requirements of the following
relevant standards.
Radio: EN300 330 V1.2.1 (May 1999)
EMC: EN301 489-3 (EN301 489-1)
Safety: EN61010-1: 1993+A2
Countries of intended use:
Austria, Belgium, Denmark, Finland, France, Germany, Iceland, Ireland, Italy, Liechtenstein, Luxem-
bourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland, United Kingdom
English Hereby, Omron, declares that this V640(-X) is in compliance with the essential
requirements and other relevant provisions of Directive 1999/5/EC.
Finnish Omron vakuuttaa täten että V640(-X) tyyppinen laite on direktiivin 1999/5/EY oleellis-
ten vaatimusten ja sitä koskevien direktiivin muiden ehtojen mukainen.
Dutch Hierbij verklaart Omron dat het toestel V640(-X) in overeenstemming is met de
essentiële eisen en de andere relevante bepalingen van richtlijn 1999/5/EG
French Par la présente Omron déclare que l'appareil V640(-X) est conforme aux exigences
essentielles et aux autres dispositions pertinentes de la directive 1999/5/CE
Swedish Härmed intygar Omron att denna V640(-X) står I överensstämmelse med de
väsentliga egenskapskrav och övriga relevanta bestämmelser som framgår av direk-
tiv 1999/5/EG.
Danish Undertegnede Omron erklærer herved, at følgende udstyr V640(-X) overholder de
væsentlige krav og øvrige relevante krav i direktiv 1999/5/EF
German Hiermit erklärt Omron, dass sich dieser/diese/dieses V640(-X) in Übereinstimmung
mit den grundlegenden Anforderungen und den anderen relevanten Vorschriften der
Richtlinie 1999/5/EG befindet". (BMWi)
Italian Con la presente Omron dichiara che questo V640(-X) è conforme ai requisiti essen-
ziali ed alle altre disposizioni pertinenti stabilite dalla direttiva 1999/5/CE.
Spanish Por medio de la presente Omron declara que el V640(-X) cumple con los requisitos
esenciales y cualesquiera otras disposiciones aplicables o exigibles de la Directiva
1999/5/CE
Portuguese Omron declara que este V640(-X) está conforme com os requisitos essenciais e out-
ras disposições da Directiva 1999/5/CE.

10
INTRODUCTION
Editor’s Note
CIDRW System
User’s Manual
INTRODUCTION
Editor’s Note
Visual Aids
Indicates an explanation of a point that must be observed to ensure that the product is capable of its proper functions and perfor-
mance. Read this information carefully and follow the cautions: if the product is used incorrectly, data or the equipment itself
could be destroyed.
Indicates summaries of points of particular importance relating to product performance, e.g. points to note during operation and
advice on how to use the product.
Indicates the number of a page where related information can be found.
Indicates information for reference when you encounter a problem.
Indicator Statuses
The following symbols are used to show the status of the indicators on the CIDRW Controller and Amplifier
Units.
OFF
Flashing
ON

SECTION 1
Product Outline
11
CIDRW System
User’s Manual
SECTION 1
Product Outline
What is a CIDRW System? 12
Features 13
System Configuration 14
Component Names and Functions 15
Flowchart for Getting Started 19

12
SECTION 1
What is a CIDRW System?
CIDRW System
User’s Manual
SECTION 1
Product Outline
What is a CIDRW System?
The CIDRW system writes data to, and reads data from, the carrier IDs (ID Tags) mounted on the carriers
(FOUP) in semiconductor manufacturing processes without contacting these ID Tags. CIDRW is the
abbreviation of "Carrier ID Reader/Writer" and this abbreviation is used throughout this manual.
Reading and writing information such as models, process instructions, lots, and inspection results to and from
ID Tags makes it possible to manage work instruction information from a host device.
Example: Management of information in semiconductor and wafer manufacturing processes
ID Tag
(holder is separate)
CIDRW Head
Reading and writing
information
• Model information
• Process instruction
information
• Completion
information
• Lot information
• Inspection results
Etc.
Host
Amplifier Unit
CIDRW Controller

13
CIDRW System
User’s Maual
SECTION 1
Features
SECTION 1
Product Outline
Features
CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4)
List of Applicable Standards
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
Host
SECS I/II
CIDRW Controller
V700-L21
Amplifier Unit
V640-HAM11 CIDRW Head
V640-HS61
ID Tag
RI-TRP-DR2B
(Made by Texas
Instruments)
CIDRW System Conforming to SEMI Standards

14
SECTION 1
System Configuration
CIDRW System
User’s Manual
SECTION 1
Product Outline
System Configuration
When SECS is Used
Communication with the host device is possible using the SECS protocol.
When SECS is Not Used
Communications with the host device follow the OMRON proprietary protocol.
The Amplifier Units are connected directly to the host device without using a CIDRW Controller.
These are antennae for
reading the carrier IDs
from the ID Tags and
writing the carrier IDs.
These are units that
control a CIDRW Head.
This is e.g. a host,
or equipment con-
troller.
CIDRW Head
V640-HS61
Amplifier Unit
V640-HAM11
CIDRW Controller
V700-L21
Host
Multiple Amplifier Units
are controlled in
response to commands
(SECS) from the host
device.
RS-232C
SECS I/II RS-232C
These are antennae for
reading the carrier IDs
from the ID Tags and
writing the carrier IDs.
These are units that
control a CIDRW Head.
This is e.g. a host,
or equipment con-
troller.
CIDRW Head
V640-HS61
Amplifier Unit
V640-HAM11
Host
RS-232C
OMRON proprietary protocol

15
CIDRW System
User’s Maual
SECTION 1
Component Names and Functions
SECTION 1
Product Outline
Component Names and Functions
CIDRW Controller V700-L21
No. Name Function
1 Power indicator (green) An LED that indicates whether the power is ON or OFF. Lit while the power is ON.
2 OPERATING indicator (green) Lit while the CIDRW system status model is operating.
3 ALARMS indicator (green) Lit when the status of "AlamStatus" of the CIDRW system is "Alarm (1)."
4 BUSY indicator (green) Lit when the status of "OparationalStatus" of the CIDRW system is "BUSY."
5 ERROR indicator (red) When a processing error is detected (when SSACK is other than "NO"), this indicator is
lit for 50 ms.
6 24 VDC power supply termi-
nals
(with cover)
Connect to the 24 VDC power supply.
7 Frame ground terminal
(with cover) The grounding wire is connected here. (Ground to 100 Ωor less)
8 MODE switch Used to select the mode of operation.
Refer to page 44.
0 : Normal Operation mode. When mounting the Controller, set the switch to this posi-
tion.
3 : Setting mode, selected to set information such as the communication conditions.
When the switch on the bottom face of the Controller cannot be accessed, the opera-
tion mode can be changed from the host device while the switch is left at the "0" set-
ting.
1 - 2, 4 - 7 : Setting prohibited
9 RESET switch Restarts the CIDRW Controller.
10 SECS port Port for connecting the host device. Conforms to SECS I/II.
11 ID port An Amplifier Unit or Link Unit is connected here.
12 Maintenance port (with cover) Not used. Do not remove the cover.
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16
SECTION 1
Component Names and Functions
CIDRW System
User’s Manual
SECTION 1
Product Outline
Amplifier Unit V640-HAM11
No. Name Function
1 Dedicated power supply con-
nector Connect to the 24 VDC power supply.
2 RS-485 port When using multiple CIDRW Heads, connect this to the RS-485 port of another Amplifier
Unit or to the multi-connection port of a Link Unit.
3 RS-232C port Connected to a CIDRW Controller or a host device.
Uses the OMRON proprietary communications protocol.
4 RUN indicator (green) Turns ON when the Amplifier Unit is in normal operation.
5 COMM indicator (yellow) Turns ON during communications with the host device or during communications with an
ID Tag.
6 NORM indicator (green) Turns ON when the communications finish with no error.
7 ERROR indicator (red) Turns ON when an error occurs during communication with the host device, or during
communication with an ID Tag.
8 CIDRW Head connection port A CIDRW Head is connected here.
9 Setting DIP switches Used to set the node number, the communications conditions, and the RS-485 terminal
resistance.

17
CIDRW System
User’s Maual
SECTION 1
Component Names and Functions
SECTION 1
Product Outline
CIDRW Head V640-HS61
No. Name Function
1 Antenna Used to communicate with ID Tags.
2 Antenna center This is the center of the communications area.
3 Connector Connect to an Amplifier Unit.
V640-HS61
CIDRW HEAD

18
SECTION 1
Component Names and Functions
CIDRW System
User’s Manual
SECTION 1
Product Outline
Link unit V700-L11
No. Name Function
1 Multi-connection port
(RS-485) This is the port that connects to the Amplifier Units when multiple CIDRW Heads are connected to a CIDRW Controller. The GR (frame ground) terminal is also at this port.
2 RUN indicator (green) Turns ON while the Link Unit is in normal operation.
3 ID indicator (green) Turns ON during data communications with a V700 series IDRW Head.
4 COMM indicator (green) Turns ON during data communications with the host device.
5 ERR indicator (red) Turns ON when an error occurs during data communications with the host device or
head.
6 Host device connection port
(RS-232C) This is a port for connecting to the CIDRW Controller via an RS-232C interface. A dust cover is fitted on shipment from the factory. Remove this cover before using the port.
7 ID connection port This is a dedicated port for connecting a V700 series IDRW Head. Connect either a
V700-HMD13 or V700-HMD11-1 IDRW Head.
8 24 V power supply terminals
(inside the cover) Connect to the 24 VDC power supply.
9 Setting DIP switches
(inside the cover) Used to set the equipment number, the communications conditions, and the RS-485 ter- minal resistance.