
Preface
4
Ver1.1x→Ver1.2x (Controller, SMI) ··· 4-28
■Ver1.2x→Ver2.0x (Sensor head,
Controller , HL-D3SMI) ··················4-28
Ver2.01→Ver2.0x (Controller,
HL-D3SMI)··································4-29
■Ver2.02→Ver2.10 (Controller)··········4-29
Ver2.03→Ver2.10 (HL-D3SMI) ········ 4-29
4-4 Description of Each Function ··4-30
4-4-1 Main Screen and Function at
Start-up···································4-30
(1) Display on separate window··········· 4-31
(2) Controller operation ·····················4-31
(3) Controller connection status ··········4-32
(4) Sensor information ······················4-33
(5) Memory change ··························4-34
(6) Setting zone·······························4-35
(7) Menu········································ 4-36
4-4-2 Head Setting······················4-37
Head setting tab screen ·················4-37
Measurement mode selection··········4-37
Width (X) meas. rng. ·····················4-38
Height (Z) meas. rng. ····················4-38
Unit detection time························ 4-39
Sens. adjust. ······························· 4-39
Sensitivity ratio ···························· 4-39
Beam pwr ctrl cnt.························· 4-40
Measurement value extraction········· 4-41
X position correct. ························ 4-41
Height correct.·····························4-42
Slope correct.······························4-43
Moving average ···························4-47
Width smoothing ·························· 4-47
Point alarm delays························4-48
Mirror reflection coefficient ············· 4-48
Mask function······························4-49
Light intensity peak width limit·········4-53
4-4-3 Setting for Measurement Mode4-55
Setting tab screen for each mode····· 4-55
Items for multi-zone beam control
measurement mode ······················ 4-56
Items for constant pitch measurement
mode·········································4-57
Items for multi-select displacement
sensing mode ······························4-58
Item for X position correction settings4-59
Slope correction area (used in
non-multi-select displacement
sensing mode) ·····························4-61
Sending set value to sensor············4-61
4-4-4 OUT Setting·······················4-62
OUT setting tab screen (OUT1, OUT2,
OUT3)········································ 4-62
Target head selection ····················4-62
Hold measurement························ 4-63
Waveform calculation selection········ 4-64
Specification of calculation target area
················································ 4-67
Selection of calculation target area··· 4-68
Offset val.··································· 4-77
Hi judg. val. ································ 4-78
Low judg. val.······························ 4-78
Judgement hysteresis width············ 4-78
Filter ········································· 4-79
Sending set value to sensor············ 4-79
4-4-5 OUT-OUT calculation setting··4-80
OUT-OUT calculation setting tab
screen ······································· 4-80
OUT-OUT calculation setting tab
screen ······································· 4-80
4-4-6 Total judgment and Shape judgment
setting·····································4-82
Total judgment and Shape judgment
setting tab screen························· 4-82
Total judgment measurement ·········· 4-83
■Shape judgment measurement········· 4-85
■Setting of reference Z value ············ 4-88
■Setting of reference X position········· 4-89
■Setting of measurement position ······ 4-90
4-4-7 Common Setting ·················4-92
Common setting tab screen ············ 4-92
Continuous measurement trigger signal
source········································ 4-92
■Z-axis coordinate direction·············· 4-93
■Input terminal layout settings··········· 4-96
■Output terminal layout settings········· 4-97
Err. value rmvl lvl. ························ 4-98
Defect processing ························ 4-98
Judgement operation at measurement
value alram································· 4-99
Meas. alarm output delay cnt.················· 4-99
Output mode ······························4-100
Output OFF delay························4-100
4-4-8 HL-D3SMI System Settings·· 4-101
System setting window and function 4-101
Interpolation method ····················4-103
Graph display method ··················4-104
Set value list screen ····················4-104
4-4-9 Acquisition of Detected Light
Intensity Image and Shape Waveform
··········································· 4-105
How to use ································4-105
Detected light intensity image
acquisition windowand function·······4-105
Acquisition of detected light intensity
image ·······································4-107
Operation for acquisition of detected
light intensity image ·····················4-108
Display of acquisition image in each
measurement mode ·····················4-108
Display of shape waveform············4-110