Parker Porter MPC Series Assembly instructions

MPC SERIES PANEL MOUNT
MASS FLOW CONTROLLER
“INSTALLATION & PROGRAMMING”
USER’S MANUAL
FM-1038 Rev. 0 4/08

TABLE OF CONTENTS
SAFETY PRECAUTIONS .................................................................................................................1
Section 1 – INTRODUCTION............................................................................................................2
Preface ...................................................................................................................... 2
Features .................................................................................................................... 2
Functions................................................................................................................... 3
Model Selection Guide .............................................................................................. 4
Section 2 – PRODUCT SPECIFICATIONS ..................................................................................... 5
Section 3 – DISPLAY TERMS AND FUNCTIONS........................................................................... 7
Display (Front View) .................................................................................................. 7
Definition of Terms .................................................................................................... 7
Functions................................................................................................................... 7
Rear View.................................................................................................................. 8
Section 4 – MOUNTING AND WIRING ........................................................................................... 9
Location ..................................................................................................................... 9
Dimensional Data ...................................................................................................... 9
Mounting Procedure .................................................................................................. 9
External Electrical Connections .............................................................................. 11
Section 5 – BASIC OPERATION ................................................................................................... 13
Switching Displays .................................................................................................. 13
Setting the Flow Rate .............................................................................................. 15
Selecting the Operation Mode................................................................................. 17
Section 6 – APPLICATION OPERATION ...................................................................................... 18
Function Setup ........................................................................................................ 19
Function Setup Item List.......................................................................................... 19
Parameter Setup ..................................................................................................... 22
Parameter Setup Item List....................................................................................... 22
Section 7 – TROUBLESHOOTING................................................................................................ 24
Alarm Code Display................................................................................................. 24
Miscellaneous Errors............................................................................................... 25
Section 8 – POLICIES AND CERTIFICATE OF WARRANTY ...................................................... 26
Policies .................................................................................................................... 26
Certificate of Warranty............................................................................................. 27

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SAFETY PRECAUTIONS
WARNING
Warnings are indicated when mishandling this product might result in death or serious injury to the user.
CAUTION
Cautions are indicated when mishandling this product might result in minor injury to the user or only
physical damage to this product.
WARNING
Never allow gases within explosive limits to pass through the MPC Series Panel Mount Mass
Flow Controller (MFC). Doing so may result in an explosion.
Do not use the MPC Series Panel Mount MFC for gases other than compatible gas types.
CAUTION
Prevent foreign materials from entering the MPC Series Panel Mount MFC. If foreign materials
are introduced to the MFC, measurement error may occur and result in damaging the MFC. To
eliminate contamination from foreign materials, start-up cleaning is highly recommended prior to
MFC installation. Start-up cleaning must remove weld debris, tube scale and any loose
particulate generated during system fabrication. Install an upstream filter and periodically inspect
the filter.
Do not allow foreign materials to enter the MFC housing. Failure to do so may result in
malfunction or faulty operation.
Use the MPC Series Panel Mount MFC within the operating differential pressure range. Do not
exceed the maximum allowable operating pressure.
The control valve in the MPC Series Panel Mount MFC does not offer positive shut-off. If positive
shut-off is a system requirement, install a separate shut-off valve. When a separate shut-off
valve is closed, the user must command the MFC control valve fully closed by one of the
following methods:
Establish a zero setpoint signal.
Set the operation mode to the fully closed mode.
If the MFC’s control valve is maintained in the control mode despite closing the separate shut-off
valve (resulting in no flow through the MFC), a flow surge will occur upon opening of the shut-off
valve. With Model MPC20, if the separate shut-off valve is closed for more than five (5) minutes
while in the control mode or the valve is forced full open, the valve overheat limit (‘AL71’) is
activated and the valve driving current is limited. If this status exists for greater than 30 minutes,
the valve is forced to a fully closed condition.
When the MPC Series Panel Mount MFC is panel-mounted, use tubing that does not stress the
MFC housing. If metal piping is directly connected to the 1/8” FNPT connector of the MFC, the
housing could be damaged.
The MPC Series Panel Mount MFC’s power supply circuitry and the input/output circuitry are not
isolated. Ensure the MFC’s power supply is isolated from the power supply for external devices.
If a common power supply is used for both the MFC and the external devices, MFC malfunction
or faulty operation may occur.
Do not supply a negative setpoint voltage or a setpoint voltage greater than 5 Vdc to the MFC.
Doing so may cause MFC malfunction or faulty operation.
A surge suppressor is recommended should power spikes occur.

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SECTION 1 – INTRODUCTION
PREFACE
Thank you for purchasing Porter’s MPC Series Panel Mount Mass Flow Controller (MFC). Please keep
this user’s manual available for future reference. Before operating the MPC Series Panel Mount MFC,
please note the safety precautions (warnings and cautions). It is recommended these instructions be
read and understood before performing any operation. Failure to do so could result in serious injury
and/or damage to the equipment.
This “Installation & Programming” user’s manual explains the handling precautions, specifications,
installation, start-up, programming, maintenance, and troubleshooting of your MPC Series Panel Mount
MFC. The “Installation & Programming” user’s manual also contains information on the various functions
of the MPC Series Panel Mount MFC. For basic instructions on how to use this product, refer to the MPC
Series Panel Mount MFC “Quick-Start” user’s manual # FM-1032. A copy of user’s manual # FM-1032 is
included with every MPC Series Panel Mount MFC.
When unpacking the MPC Series Panel Mount MFC, confirm the following components were received.
The original shipping container in which your MPC Series Panel Mount MFC was received should not be
discarded in case reshipment is necessary.
COMPONENT QUANTITY
MPC Series Panel Mount MFC One (1)
Mounting Bracket One (1)
Mating Electrical Connector One (1)
User’s Manual # FM-1032 One (1)
FEATURES
The MPC Series Panel Mount MFC is a mass flow controller featuring high performance in a
compact package design. Integrating the advanced technologies of an ultra-high speed response
thermal flow velocity sensor, a sensor assembly made utilizing proprietary technology, a
miniature proportional solenoid valve, a new flow channel system and advanced actuator control
technology achieves the realization of the MFC which has panel-mount capabilities.
The MPC Series Panel Mount MFC is a compact (1.89 x 1.89 inches [48 x 48 mm] front panel
size) and lightweight (approximately 10.6 ounces [300 grams]) MFC.
A wide variety of functions are provided as a standard features to satisfy the various user needs.
Simple mounting and operation make the MPC Series Panel Mount MFC a viable option when
replacing from a variable-area (i.e. float and glass tube-type) flowmeter. In addition, the
automatic control of flow rate and remote setting value change can be performed.
The effects of temperature and pressure fluctuations are negligible when compared to a variable-
area flowmeter.
With a variable-area flowmeter, pressure and temperature compensation is inevitable.
Additionally, if the original sizing conditions (i.e. specific gravity, operating temperature or
operating pressure) are different from the actual operating conditions, the indicated flow rate must
be corrected to compensate for the change in operating parameters. Since the MPC Series
Panel Mount MFC controls mass flow, these corrections are not necessary.

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FUNCTIONS
MULTI-SETTING FUNCTION
Up to four (4) preset flow rate settings can be instantaneously switched to by key operation or
external switching input.
GAS TYPE SWITCHING FUNCTION
The gas type to be used can be selected from the standard compatible gases by key operation.
GAS TYPE SETTING FUNCTION
The user can set conversion factors for any gas type, including mixed gases, to accommodate
gases other than standard compatible gases.
VALVE FULL OPEN/FULL CLOSE FUNCTION (SELECTING THE OPERATION MODE)
The valve can be driven fully opened or fully closed by key operation or external switching input.
SLOW START FUNCTION
Sudden changes in the controlled flow rate, when control is initiated or when the flow rate setting
value is changed, can be suppressed. The control speed can be changed in eight (8) stages
within the range from approximately 1 to 6 seconds.
FLOW RATE TOTALIZATION FUNCTION
The flow rate can be totalized up to eight (8) digits (99,999,999 counts) (the display is switched in
four [4] digits at a time). The display resolution is:
Model MPC95:............................... 0.01L
Models MPC02 and MPC05: ......... 0.1L
Model MPC20:............................... 1L
The count can be reset by key operation or external switching input. Totalization start/stop/reset
can be remote-controlled by external switching input.
After a reset-by-key operation, the totalization calculation is started automatically. However, if a
reset (contact ON) is carried out by external switching input, totalization is resumed by the contact
turning OFF.
VALVE DRIVE OUTPUT DISPLAY
The valve drive output can be displayed as a range of 0.0 to 100.0%. This allows detection of
supply pressure fluctuations and excessive pressure drop due to piping restrictions.
ALARM DISPLAY/OUTPUT/SHUT-OFF
The flow rate deviation alarm can be output by detecting the deviation between setting flow rate
and controlled flow rate. The alarm judgment delay time can also be programmed. When a flow
rate alarm occurs or an alarm occurs during MFC self-diagnostics, the event signal is output and,
at the user’s option, the valve can be driven fully closed or fully opened.
EVENT LAMP LIGHTING/OUTPUT
Two (2) of the following event types can be output:
Alarm output (when the flow rate deviation alarm or self-diagnostics occurs).
Flow rate upper/lower limit output (output by comparison to the optional upper/lower flow
rate limit setting value).
Totalization count up output (when the totalization setting flow rate is exceeded).
Totalization pulse output (pulse can be output for each totalization display unit).
‘OK’ output (when the control flow rate is within the range of "setpoint ± allowable range").

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The operating mode can be identified and output externally as an event.
The output ON delay time can also be programmed. However, the delay cannot be set to
totalization pulse output. In addition, the output logic can be reversed (during normal operation:
ON; at event occurrence: OFF). However, the output is always OFF when power is off.
‘OK’ LAMP LIGHTING/OUTPUT
The ‘OK’ lamp can be made to light when the controlled flow rate is within the “setting value ±
allowable range”. This function is beneficial for visual verification whether or not the new setting
value is being followed properly when a setting value is changed. The ‘OK’ lamp output can also
be used as an interlock signal for subsequent processes by assigning it to an event output and
loading it to a sequence program.
AUTOMATIC SHUT-OFF FUNCTION
The valve can be automatically closed under the following conditions:
When the totalization count value reaches the setting value.
When one of the alarms, including flow rate alarms, occurs.
Please note the control valve in the MPC Series Panel Mount MFC does not offer positive shut-
off. If positive shut-off is a system requirement, install a separate shut-off valve.
AUTOMATIC RESET OF TOTALIZATION COUNT AT START OF CONTROL FUNCTION
Start of control and totalization count reset can be carried out simultaneously by a single action
(key operation or external switching input). Combining this function with the automatic shut-off
function described above is handy for shutting the valve off when a fixed number of totalization
values have been counted repeatedly.
DIRECT SETUP FUNCTION
Allows users to easily change the flow rate setup. This function is useful when you frequently
change setting values, for example, when you adjust the preset flow rate during trial operation.
LOADER COMMUNICATION FUNCTION
The connection of a dedicated loader cable (available separately) to the loader jack on the rear of
the MFC enables direct communication with a personal computer in the form of one-to-one using
the user-supplied communication program. By using this loader communication, various settings
in the function setup and the flow rate setup can be configured from a personal computer. The
controlled flow rate or alarm status can be observed with the personal computer.
MODEL SELECTION GUIDE
MODEL NUMBER FLOW RANGE
MPC95-BBNSP1 0.02-0.5 SLPM Nitrogen
MPC02-BBNSP1 0.08-2.0 SLPM Nitrogen
MPC02-BBNHP1 0.08-2.0 SLPM Helium
MPC05-BBNSP1 0.1-5.0 SLPM Nitrogen
MPC20-BBNSP1 0.4-20 SLPM Nitrogen

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SECTION 2 – PRODUCT SPECIFICATIONS
Model Number MPC95 MPC02 MPC05 MPC20
Control Valve Type Normally closed proportional solenoid valve
Maximum Flow Capacity (N2unless otherwise
noted) (Note 1) 0.5 SLPM 2.0 SLPM (N2
or Helium)
5.0 SLPM 20 SLPM
Compatible Gases Nitrogen/air, oxygen, argon, carbon dioxide (all models except Model MPC02-BBNHP1);
Helium (Model MPC02-BBNHP1 only) - Gas must be dry, clean and oil-free.
Rangeability (Control Range)
(Refer to Table 1) 25:1 (4-100% full scale [FS]) 50:1 (2-100% FS)
Response Time 1.0 second to within ±2% FS of setpoint (typical)
Accuracy
±2% FS (at 20°C and 30 PSIG)
Repeatability ±1% FS
Temperature Coefficient ±0.1% FS/°C (±0.056% FS/°F)
Flow ≥40% FS 0.7% FS 0.4% FS 0.2% FS
Flow ≥10% FS
Flow <40% FS 1.2% FS 0.7% FS 0.3% FS
Control
Pressure
Coefficient (Per
14.5 PSI)
Flow <10% FS 2% FS 1.2% FS 0.5% FS
0.2% FS
Minimum Differential Pressure
(Note 3) 7 PSIG 7 PSIG 14.5 PSIG 22 PSIG
Maximum Differential Pressure
(Note 4) 40 PSIG
Calibration Pressure (Note 2) 30 PSIG (Inlet pressure: 30 PSIG and outlet pressure: 0 PSIG)
Pressure
Maximum Operating Pressure 75 PSIG
Calibration Temperature (Note 2) 20°C
Operating Temperature Range -10 to 50°C (14 to 122°F)
Temperature
Storage Temperature Range -10 to 60°C (14 to 140°F)
Humidity Operating Humidity Range 10 to 90% Relative Humidity (non-condensing)
Setpoint Input Keypad Operation or External Setpoint Voltage Input
Resolution Refer to Table 1
Setpoint
Setpoint Input Voltage 0 to 5 Vdc or 1 to 5 Vdc (selectable)
Display Type 7-segment LED; 8 digits (Instantaneous flow rate display: 4 digits; Setpoint flow rate display: 4 digits)
Display Resolution Refer to Table 1
Flow Rate
Indication
Indication Accuracy ±2% FS ±1 digit
Display Range 0.00 to 999,999.99L 0.0 to 9,999,999.9L 0.0 to 9,999,999.9L 0 to 99,999,999L
Display Resolution 0.01L 0.1L 0.1L 1L
Every 5L count Every 20L count Every 50L count Every 200L count
Totalizer
Function
Totalizer Backup Timing
Every hour (time) from the previous backup
Output Scale 0 to full scale flow rate (scaling selectable)
Output Signal Voltage 0 to 5 Vdc or 1 to 5 Vdc (selectable)
Maximum Output Signal Voltage 7 Vdc maximum (maximum output signal when flow rate exceeds maximum flow capacity)
Flow Rate
Output
Accuracy
±0.5% FS (Input impedance of the connected device must be 100k ohms or greater).
Overall output accuracy: Indication accuracy ±0.5% FS
Number of Outputs 2
Output Rating 30 Vdc, 15 mAdc maximum (Open collector non-isolated output)
Totalizer Pulse Output Width 100 ms (±10%) (when totalizer pulse output is selected)
Event Output
Totalizer Pulse Output Rate 0.01L/pulse 0.1L/pulse 0.1L/pulse 1L/pulse

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PRODUCT SPECIFICATIONS (continued)
Number of Inputs 2
Input Type Potential-free contact or open collector
Contact OFF Terminal Voltage 2.0 Vdc (±0.5Vdc)
Contact ON Terminal Current Approx. 0.5 mAdc (contact current)
Allowable ON Contact Resistance
250 ohms maximum
Allowable OFF Contact
Resistance 100k ohms minimum
Allowable ON Residual Voltage
1.0 Vdc maximum (with open collector)
External
Contact Input
Allowable OFF Leakage Current
50 µAdc maximum (with open collector)
System (Note 5) Loader communication (dedicated cable required)
Communication
Transmission Speed 19200 bps
Power Supply Requirements 24 Vdc (±5%); current consumption 300 mAdc maximum
Materials of Construction Brass (nickel-plated), stainless steel, Teflon®, Viton®
Process Connections 1/8” FNPT
Mounting Orientation Housing horizontal with inlet & outlet ports vertically oriented (‘IN’ - bottom & ‘OUT’ - top)
Weight (Approximate) 10.6 oz. (300 grams)
Applicable Standard CENELEC # EN61326: 1997; Amendment A1: 1998; Amendment A2: 2000
Accessory Components (Included With Every
MFC) Mounting bracket and mating electrical connector
Note 1: SLPM indicates the volumetric flow corrected to 20°C and 1 atmosphere (14.7 PSIA). The reference temperature can also
be changed to 0°C, 25°C and 35°C. The controllable flow range varies according to the gas type. Refer to Table 1.
Note 2: Temperature and pressure during calibration.
Note 3: Differential pressure required for obtaining maximum flow capacity.
Note 4: Operation is possible with less than required minimum differential pressure, however, rangeability (control range)
decreases.
Note 5: Loader communications package (available separately) is required.
TABLE 1 – FLOW RANGES
MPC95
MPC02
MPC05
MPC20
Flow Range
(SLPM)
Setpoint/
Display
Resolution
(SLPM)
Flow Range
(SLPM)
Setpoint/
Display
Resolution
(SLPM)
Flow Range
(SLPM)
Setpoint/
Display
Resolution
(SLPM)
Flow Range
(SLPM)
Setpoint/
Display
Resolution
(SLPM)
Nitrogen
/Air
Oxygen
Argon
0.020 to 0.500 0.002 0.08 to 2.00 0.01 0.10 to 5.00 0.02 0.4 to 20.0 0.1
Carbon
Dioxide 0.012 to 0.300 0.001 0.040 to 1.200 0.005 0.06 to 3.00 0.01 0.3 to 16.0 0.1
Helium Not
Applicable
Not
Applicable 0.08 to 2.00 0.01 Not Applicable
Not
Applicable
Not
Applicable
Not
Applicable
Teflon® - E.I. DuPont de Nemours & Co.
Viton® - DuPont Dow Elastomers L.L.C. Specifications and dimensions subject to change

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SECTION 3 – DISPLAY TERMS AND FUNCTIONS
DISPLAY (FRONT VIEW)
DEFINITION OF TERMS
SP (Setpoint): Set flow rate value.
PV (Process Variable): Instantaneous flow rate value (i.e. controlled flow rate).
Operation mode: Three (3) modes of ‘Valve Fully Closed’/’Valve Control’/’Valve Fully Open’.
FUNCTIONS
UPPER DISPLAY
Displays the instantaneous flow rate value (7-segment display).
When the display is switched, also displays the totalized flow rate value (upper 4 digits),
parameter setup item, function setup item or alarm details.
LOWER DISPLAY
Displays the set flow rate value (7-segment display).
When the display is switched, also displays the operation mode, totalized flow rate value
(lower 4 digits), valve drive output, parameter setup values or function setup values.
OPERATION LAMP
‘L’: Indicates the totalized flow rate is displayed. Blinks when a totalization
event occurs.
‘OK’: Lights when the controlled flow rate is within the “setting value ±
allowable range”. Blinks when the operating mode is ‘Valve Fully Open’.
‘SP1’ to ‘SP3’: The lamp corresponding to the SP number that is used at multi-setting is
lit.
‘EV1’ & ‘EV2’: Lights when the event output is ON.
[DISP] key: Used when switching the details of the display.
[<], [∨
∨∨
∨] & [∧
∧∧
∧] keys: Used when incrementing/decrementing the digit or moving to a desired
digit.
[ENT] key: Used when setting the SP value and storing the value. This key may
also be used for the totalized flow rate resetting and alarm resetting.

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REAR VIEW
LOADER JACK: The connection of a dedicated loader cable (available separately) to the
loader jack on the rear of the MFC enables direct communication with a
personal computer.
‘IN’ CONNECTOR:1/8” FNPT inlet connector.
‘OUT’ CONNECTOR: 1/8” FNPT outlet connector.

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SECTION 4 – MOUNTING AND WIRING
LOCATION
Avoid mounting the MPC Series Panel Mount MFC in locations subject to:
High and low temperature and humidity.
Sudden changes in temperature and condensation.
Corrosive and/or flammable gas-containing environments.
Environments containing high amounts of dirt, dust, salt, conductive substances (e.g. metal particles,
water, oil mist, etc.) and organic solvents.
Mechanical shock or vibration.
Direct sunlight or precipitation.
Splashing of oil or chemicals.
Sources of electrical interference and magnetic fields.
DIMENSIONAL DATA
MOUNTING PROCEDURE
PROCESS CONNECTION INSTALLATION
While installing the inlet and outlet process connections to the inlet and outlet 1/8” FNPT connectors,
do not hold the housing of the MPC Series Panel Mount MFC. Doing so may damage the MFC.
Inspect the process connections for any dirt or particulate matter. Apply an appropriate amount of
thread sealant to the 1/8” MNPT threads of both process connections.
Using a 14 mm wrench to secure the inlet and outlet 1/8” FNPT connectors and an appropriate size
wrench for the process connections, install each process connection according to the applicable
process connection manufacturer’s specific recommendations regarding installation and tightening.
Overtightening the process connections will damage the 1/8” FNPT connectors.

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PANEL MOUNTING
To panel-mount the MPC Series Panel Mount MFC, the panel thickness must be 2 to
9 mm (.079 to .35”) and a panel cut-out be made to accommodate the MFC’s 44.8 x 44.8 mm (1.764
x 1.764”) housing. To panel-mount multiple MFC’s, refer to the panel cutout dimensions below.
Remove the mounting bracket from the MFC’s housing.
From the front of the panel, insert the MFC through the panel cutout until the MFC’s bezel rests
against the front of the panel.
With the mounting bracket screws oriented vertically (i.e. 6 o’clock and 12 o’clock), slide the mounting
bracket onto the MFC’s housing and up against the back of the panel.
Fasten the MFC onto the panel by tightening the mounting bracket screws. Tighten the screws an
additional half turn when there is no space between the mounting bracket and panel. Overtightening
the screws may damage the MFC’s housing.

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TUBING CONNECTION
When the MPC Series Panel Mount MFC is panel-mounted, use tubing that does not stress the MFC
housing. If metal piping is directly connected to the 1/8” FNPT connector of the MFC, the MFC
should not be panel-mounted.
Connect the tubing to ensure the gas flows in the direction from ‘IN’ to ‘OUT’ as indicated on the
housing.
After connecting the tubing, check for any gas leaks. While performing the leak check, exercise
caution to avoid spillage or contact of the leak detection fluid to the housing, electrical wiring or
mating electrical connector. If fluid contact occurs, MFC malfunction or faulty operation may occur.
EXTERNAL ELECTRICAL CONNECTIONS
Prior to wiring, confirm:
Power supply source is off prior to wiring connection.
Wiring is correct prior to introducing power.
The event output does not exceed the specified output rating of the MFC. When driving a relay,
use a relay with a built-in diode for coil surge suppression.
ELECTRICAL CONNECTOR SPECIFICATIONS
Part No.: MCVW1.5/9-STF-3.5 (Phoenix Contact Mfg.)
Wire type: Either of single core wire or stranded wire applicable.
Compatible cable: 0.08 to 1.5mm2(SWF=28 to =16)
Appropriate length of stripped wire: 7mm
Compatible screw driver: Tip size 2.5 x 0.4mm (a flat-head driver)
INPUT/OUTPUT DESIGNATIONS
PIN
NUMBER NAME/FUNCTION
DESCRIPTION COMMENTS
1 POWER (24V) Power (+24 Vdc)
2 POWER GND Power supply ground
3 EV1 Event output 1
4 EV2 Event output 2 Open collector non-isolated output
5 DI1 External switch input 1
6 DI2 External switch input 2 Switching input (OPEN/GND)
7 AI Analog setpoint voltage input
8 A0 Analog flow rate voltage
output
0 to 5 Vdc or 1 to 5 Vdc
(selectable)
9 SIGNAL GND Signal ground
Input/output signal common.
Signal ground is connected with
power supply ground within MFC.

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WIRING
TYPICAL WIRING

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SECTION 5 – BASIC OPERATION
SWITCHING DISPLAYS
Each press of the [DISP] key switches the display as shown in the example below.
*1: The operation mode indication is not displayed when the ‘0: no operation mode selection by key
setting’ is selected at the operation mode selection ‘C-02’in the function setup.
*2: If no operation is made while the operation mode is displayed, the display is automatically returned to
the instantaneous flow rate indication after approximately ten (10) seconds.
*3: When the [ENT] key is pressed for three (3) seconds or longer while the totalized flow rate is
displayed, the totalized flow rate is reset.
*4: The multi-setting flow rate is displayed only when the multi-setting (1 to 3) is selected at flow rate
setup number selection ‘C-04’in the function setup. For details on function setup method, refer to
‘SECTION 6 – APPLICATION OPERATION’.
*5: If no setting change is made while the multi-setting flow rate is displayed, the display will
automatically return to the instantaneous flow rate indication after approximately ten (10) seconds.
Instantaneous
flow rate
flow rate
Instantaneous
Instantaneous
flow rate
Set flow rate
Operation mode
Totalized flow rate
Valve drive output
(SP value)
Setting flow rate
Setting flow rate
No. (SP No.)
Totalized flow rate
Power ON
Multi-setting
flow rate indication *4, *5
output indication
Valve drive
flow rate indication *3
Totalized
indication *1, *2
Operation mode
flow rate indication
Instantaneous
Lights Blinking
Any key is not pressed
for 10 seconds or
longer
Press [DISP] key (1 second or longer)
Press [DISP] key or any key is not
pressed for 10 seconds or longer.
Press [DISP] key (less than 1 second)
Press [DISP] key
(3 seconds or longer)
Press [V] key
Press [DISP] key
Press [DISP] key

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INSTANTANEOUS FLOW RATE DISPLAY (SETTING FLOW RATE DISPLAY)
When power is turned ON, the instantaneous flow rate value is indicated on the upper display and the
setting flow rate value is indicated on the lower display. Please note the number of effective digits
displayed differs according to the MFC’s maximum flow.
The operating mode is also indicated on the upper display when the operating mode is changed. For
details, refer to ‘SECTION 5 – SELECTING THE OPERATING MODE’.
OPERATING MODE DISPLAY (INSTANTANEOUS FLOW RATE DISPLAY)
When the [DISP] key is pressed (for less than 1 second) while the instantaneous flow rate is
displayed (the display at power ON), the upper display maintains the instantaneous flow rate and the
lower display shows the operation mode, enabling the selection of the operation mode. The table
below shows the lower display contents for each operation mode.
For details regarding operating mode selection, refer to ‘SECTION 5 – SELECTING THE
OPERATING MODE’.
If no operation is made while the operation mode is displayed, the display will automatically return to
the instantaneous flow rate indication after approximately ten (10) seconds
OPERATION MODE LOWER DISPLAY
Fully closed mode ‘OFF’
Control mode ‘ON’
Fully open mode ‘FULL’
INTEGRATED FLOW RATE DISPLAY
When the [DISP] key is pressed while the operation mode is displayed, the ‘L’ lamp lights and the
totalized flow rate value is indicated on the upper display and lower display. For example, if the
totalized flow rate is 1,234,567.8L, the “1234” is indicated on the upper display and the “567.8” is
indicated on the lower display.
To reset the totalized flow rate, depress the [ENT] key for three (3) seconds or longer while the
totalized flow rate is displayed.
VALVE DRIVE OUTPUT DISPLAY (INSTANTANEOUS FLOW RATE DISPLAY)
When the [∨
∨∨
∨] key is depressed for three (3) seconds or longer while the totalized flow rate is
displayed, the valve drive output value (indication range: 0.0 to 100.0%) is indicated on the lower
display while the instantaneous flow rate is indicated on the upper display.
To differentiate the valve drive output display from other indication, the decimal point indication blinks
while the valve drive output is displayed.
MULTI-SETTING FLOW RATE DISPLAY (ONLY WHEN THE MULTI-SETTING IS ENABLED)
When the [DISP] key is depressed for one (1) second or longer while the instantaneous flow rate is
displayed, the setpoint flow rate number (SP number) currently being selected is indicated on the
upper display and the setpoint flow rate value (SP value) is indicated on the lower display. If no key
is pressed within ten (10) seconds while the multi-setting flow rate is displayed, indication is
automatically returned to the instantaneous flow rate display.

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SETTING THE FLOW RATE
PROCEDURE FOR CHANGING FLOW RATE IN DIGITAL SETTING
Single SP (Setpoint) Setting Mode (Single Setpoint Per Function Setup ‘C-04’)
Follow the procedure below to change the SP (setpoint) value (set flow rate):
1. Press the [DISP] key (the instantaneous flow rate and SP values are displayed [display at
power supply ON]).
2. Press the [∧
∧∧
∧] key or [∨
∨∨
∨] key to change the SP value (the digit being changed blinks. Also,
when the [<] key is pressed, the digit being changed is moved.).
3. When you have reached the desired value, press the [ENT] key (the SP value is stored).
If the [DISP] key is pressed without pressing the [ENT] key, the SP value is not stored
and returns to the previous value.
Note: By changing the function setup, the multi-setting (4 maximum) or analog voltage setting
may be selected.
Direct Setup Function
Flow control can be achieved using the SP value currently being changed (indicated by blinking
display) when the direct setup function is enabled at function setup ‘C-21’ (the direct setup
function is enabled as the default setting). For instructions to change the function setup modes,
refer to ‘SECTION 6 – APPLICATION OPERATION’.
The [ENT] key does not to be pressed to establish the SP value. However, to switch the display
by pressing the [DISP] key, press the [ENT] key to establish the SP value prior to switching the
display. This function is useful when performing incremental changes to the SP value.
Multi-SP (Setpoint) Setting Mode (Multiple Setpoints Per Function Setup ‘C-04’)
Up to four (4) SP (setpoint) values (setting flow rate values) can be programmed by key operation
or by external switch inputs.
To program by key operation, follow the procedure below to change to SP number and SP value:
1. Press the [DISP] key (the instantaneous flow rate value and SP value are displayed
[display at power supply ON]).
2. Press the [DISP] key for one (1) second or longer (the SP number currently being
selected [SP-0, SP-1,SP-2 or SP-3] is indicated on the upper display and the SP value is
indicated on the lower display).
3. Press the [∧
∧∧
∧] key or [∨
∨∨
∨] key to change the SP number.
4. When the desired SP number is displayed, press the [ENT] key.
5. Press the [∧
∧∧
∧] key or [∨
∨∨
∨] key to change the SP value (the digit being changed blinks; move
to the digit to be changed by pressing the [<] key).
6. When the desired SP value is displayed, press the [ENT] key (the SP value is
programmed). Both the SP value and SP number are now updated.
Direct Setup Function
Flow control can be achieved using the SP value currently being changed (indicated by blinking
display) when the direct setup function is enabled at function setup ‘C-21’ (the direct setup
function is enabled as the default setting). For instructions to change the function setup modes,
refer to ‘SECTION 6 – APPLICATION OPERATION’.
The [ENT] key does not need to be pressed to establish the SP value. However, to switch the
display by pressing the [DISP] key, press the [ENT] key to establish the SP value prior to

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switching the display. This function is useful when performing incremental changes to the SP
value.
As shown in the following table, up to four (4) SP values can be switched according to the
ON/OFF status of the external switch inputs when the ‘3: Switching of SP No.’ is selected at the
external switch input function assignments ‘C-10’ and ‘C-11’ in the function setup. If the number
of SP values is two (2), set either one of ‘C-10’ or ‘C-11’ to ‘3: Switching of SP No’. However, in
this situation, the SP number cannot be updated using the [∧
∧∧
∧] key or [∨
∨∨
∨] key. Only the SP value
can be updated.
EXTERNAL SWITCH INPUT STATUS
INPUT 1 (DI1) INPUT 2 (DI2) SP NUMBER BEING SELECTED
OFF OFF SP-0
ON OFF SP-1
OFF ON SP-2
ON ON SP-3
Notes:
1. If the [DISP] key is pressed during the setup operation while the setpoint is blinking, the
SP number and SP value cannot be stored and are returned to the previous value.
2. When ‘1: Analog Setup’ is selected at the function setup ‘C-03’ and the SP value is
established via the analog setting voltage, the SP number and SP value cannot be
changed using the [ ∧
∧∧
∧ ] key or [ ∨
∨∨
∨ ] key.
3. If no key is pressed within ten (10) seconds while the multi-setting flow rate is displayed,
indication is automatically returned to the instantaneous flow rate display.
PROCEDURE FOR CHANGING FLOW RATE IN ANALOG SETTING
To change the SP value using an external setpoint voltage, confirm ‘1: Analog Setup’ is selected at
the function setup ‘C-03’ (the analog setup function is disabled as the default setting). For
instructions to change the function setup modes, refer to ‘SECTION 6 – APPLICATION
OPERATION’.
The setpoint voltage range is selected at the function setup ‘C-05’. The analog setpoint voltage value
to the SP value can be calculated from the calculation formulas in the following table:
‘C-05’ VOLTAGE
RANGE HOW TO CALCULATE SETPOINT VOLTAGE
0 0 to 5 Vdc Setting Voltage [V]= Setting Flow Rate÷Full-Scale Flow Rate X 5.00
1 1 to 5 Vdc Setting Voltage [V]= Setting Flow Rate÷Full-Scale Flow Rate X 4.00+ 1.00
Notes:
1. When ‘1: Function enabled’ is selected at the function setup ‘C-28’, the full-scale flow rate
can be set. Both the full-scale flow rate output voltage (PV output voltage) and the setpoint
input voltage are changed. The scaling flow rate is set in the parameter setup mode. For
instructions to change the function setup and parameter setup modes, refer to ‘SECTION 6 –
APPLICATION OPERATION’.
2. Do not supply a negative setpoint voltage or a setpoint voltage greater than 5 Vdc to the
MFC. Doing so may cause MFC malfunction or faulty operation.

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SELECTING THE OPERATION MODE
When the [DISP] key is pressed (for less than 1 second) while the instantaneous flow rate is displayed
(the display at power ON), the upper display maintains the instantaneous flow rate indication and the
lower display shows the operation mode, enabling the selection of the operation mode.
Follow the procedure below to select the operation mode:
1. Press the [DISP] key (the operation mode is displayed).
2. Press the [∧
∧∧
∧] key or [∨
∨∨
∨] key (the display is changed as shown below). Select the desired
operation mode (display blinks).
3. Press the [ENT] key to select the desired operating mode.
[^] key
FULL
[^] key [v] key
ON
[^] key [v] key
OFF
[v] key
If no operation is made while the operation mode is displayed, the display will automatically return to the
instantaneous flow rate indication after approximately ten (10) seconds.
Notes:
1. By changing the function setup, the operation mode selection can be made by an external switch
input
2. When ‘0: Operating mode selection by key operation is disabled’ is selected at the function setup
‘C-02’, the operating mode is not displayed even if the [DISP] key is pressed.
3. When the [DISP] key is pressed while the display is flashing (step 2 of “Selecting the Operating
Mode” procedure above) the operating mode selection is cancelled.
4. When ‘5: Valve fully closed’, ‘6: Valve fully open’, or ‘8: Switching of operating mode – Contact
ON: control mode; Contact OFF: fully closed mode’ is selected at function setup ‘C-10’ and
‘C-11’, the operating mode selection (valve fully closed/valve fully open) by the ON/OFF
operation of external switch inputs can be performed.
5. For instructions to change the function setup mode, refer to ‘SECTION 6 – APPLICATION
OPERATION’
6. When each operation mode is entered, even while the instantaneous flow rate is displayed, the
operation mode is indicated on the upper display as shown below. The ‘OK’ lamp blinks in fully
open mode.
Following is a table of operation mode displays while the instantaneous flow rate is displayed:
OPERATING
MODE
UPPER
DISPLAY
‘OK’
LAMP REMARKS
Fully closed
mode OFF Off ‘OFF’ is displayed at all times after zero flow rate is confirmed.
Control mode ON On or Off ‘ON’ is displayed for one (1) second when the
control mode is entered
Fully open
mode FULL Blinking ‘FULL’ is displayed for one (1) second when the fully open mode is entered
FULL: Fully open mode
ON: Control mode
OFF: Fully closed mode

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SECTION 6 – APPLICATION OPERATION
When the following operation is performed while the totalized flow rate is displayed, the parameter setup
mode and function setup mode are entered and each setting value can be changed.
Function setup
Parameter setup
indication
(3 seconds or longer)
press [<] key
(3 seconds or longer)
(3 seconds or longer)
Setting
Mode
Operation
Basic
Application
Operation
press [DISP] key
press [DISP] key
press [<] key
press [DISP] key
press [<] key
(3 seconds or longer)
press [DISP] key (less than 1 second)
press [DISP] key or any key is not
pressed for 10 seconds or longer.
press [DISP] key (1 second or longer)
flow rate indication *3
Totalized flow rate
Totalized flow rate
Lights
Totalized
Operation mode
press [DISP] key
press [V] key
flow rate indication
Power ON
for 10 seconds or
Any key is not pressed
Operation mode
indication *1, *2
longer
Instantaneous
flow rate
Set flow rate
flow rate
Instantaneous
Instantaneous
Valve drive output
Valve drive
output indication
flow rate
Instantaneous
Setting
Mode
indication
Blinking
flow rate indication *4, *5
No. (SP No.)
Setting flow rate
Setting flow rate
(SP value)
Multi-setting