Pfeiffer Vacuum HIQUAD QMG 700 User manual

BG 5400 BEN / A (1605)
Translation of the original instructions
HIQUAD™
QMG 700 Quadrupole Mass Spectrometry System
EN
OPERATING INSTRUCTIONS

2
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
QUADERA®INFICON AG, LI-9496 Balzers, Liechtenstein
WAGO®WAGO Kontakttechnik GmbH, 32423 Minden, Deutschland
HiQuad®Pfeiffer Vacuum, 35614 Asslar, Deutschland
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However,
Pfeiffer Vacuum assumes no responsibility for its use and shall not be liable for any special,
incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change
without notice.
Copyright
©2016 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Contents
3
Contents
Trademarks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Disclaimer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Copyright . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Symbols Used. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Intended Use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3 Basic Safety Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.4 Liability and Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.5 Training . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2System Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.1 QMG 700 Quadrupole Mass Spectrometer,
Components and Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2 System Chassis SC 700 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.3 Quadrupole Controller QC 700 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.4 Ion Supply IS 716 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.5 High Voltage Supply HV 701. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.6 High Voltage Supply HV 702. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.7 I/O System IO 700 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.8 Field Bus FB 711. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.9 Electrometer Preamplifier EP 422. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.10 Ion Counter Preamplifier CP 400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
4Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.1 QMG 700 Overall System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.2 Installation of the System Chassis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.3 Installation/Replacement of Modules in the System Chassis . . . . . . . . . . 32
4.4 Installation of the Fieldbus FB 711 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
4.5 Electrometer preamplifier EP 422 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.6 Ion counter preamplifier CP 400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.7 HF-Generator QMH 4xx . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.8 Analyzer QMA 4x0 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.9 System Wiring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
4.10 PC Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.11 IO 700 Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
4.12 Two and More Chassis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
5Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
5.1 Initial Start Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
6Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
6.1 Maintenance of the Air Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
7Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
7.1 Replacing the Mains Fuse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
8Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
9Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
10 Returning the Product. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
11 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Appendix A Connection Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Appendix B Literature. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Declaration of Conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

4
Safety
1 Safety
1.1 Symbols Used
1.2 Intended Use
The QMG 700 is a mass spectrometer designed for gas analysis in the high vacuum
range. It may be used only for this purpose. The instructions in this operating manual and
those of the accessories must be followed.
1.3 Basic Safety Instructions
Please follow the relevant instructions and take the necessary precautions when
handling the process media used.
Please obtain information before working with contamination. Please follow any
relevant instructions and take the necessary precautions when handling devices
used with contaminated parts.
Pass these safety instructions on to other users.
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
CAUTION
Information on correct handling or use. Disregard can lead to malfunctions or minor
equipment damage.
NOTE
All work described in this document may only be carried out by persons who have
suitable technical training and the necessary experience or who have been instructed
by the end-user of the product.
DANGER
The QMG 700 is not intended to produce measurement results on which the safety of
persons or material depend. For such applications the safety must be ensured by
additional measures.

Safety
5
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
custodian or third parties:
disregard the information in this document
use the product in a non-conforming manner
make any kind of changes (modifications, alterations, etc.) to the product
use the product with accessories not listed in the corresponding product
documentation
The custodian assumes the responsibility in conjunction with the process media used.
1.5 Training
NOTE
For the optimal use of this product, Pfeiffer Vacuum offers application, operation, and
maintenance courses. Your Pfeiffer Vacuum partner would be glad to provide the
information.

6
System Overview
2 System Overview
System components The QMG 700 comprises of the controller QMS 700 (system chassis SC 700 including
the modules: QC 700, FB 711, IS 716, HV 701, HV 702, and IO 700). From the 42x
system the modules RF generators (QMH 4xx-x), analyzers (QMA 4x0), the
electrometer preamplifier (EP 422), and the ion counter preamplifier CP 400 are utilized
as well.
System structure
QMG 700
The following block diagram shows the general QMG 700 system structure. Depending
on the application, various configurations are possible.
For ion counting the electrometer preamplifier EP 422 is replaced by the ion counter
preamplifier CP 400.
Individual modules are described in detail on the following pages.The block diagram
below shows a configuration example.
SEM or CD-SEM
QMA 4x0
Ion source Mass filter
Faraday collector
Ion Supply
IS 716
High Voltage
Supply
HV 70x
Preamp
EP 422 (2)
Preamp
EP 422 (1)
Ion counter
CP 400
Power supply
(SC 700)
I/O System
IO 700
QMS 700
Field Bus
FB 711
(Option)
Quadrupole
Controller
QC 700
Field bus
PC
PC link
(Ethernet / USB)
DI AI DO AO Bus
IN
Bus
Out
Mains
AC
(90° ion deflec-
tion unit)
RF generator
QMH 4xx

System Overview
7
2.1 QMG 700 Quadrupole Mass Spectrometer,
Components and Modules
Controller QMS 700
SC 700
QC 700
FB 711
(QC 700 option)
IS 716
Controller
Comprises the system chassis SC 700 and the modules
described below.
System Chassis
Comprises the power supply, the internal bus plane and
the system ventilation. It houses the modules described
below.
Quadrupole Controller
Comprises:
QMG 700 system controller and LAN/USB PC
interface
Control circuits for the RF generator
Measuring signal processing
Interface for the CP 400
Field Bus
Enables the integration of the QMG 700 in a CANopen
network.
Ion Source Supply
Supplies all necessary operating voltages for the ion
source.
Programmable potentials, short-circuit-proof
Polarity reversible for positive and negative ions
Normal mode / degas mode
Suitable for all ion source types of the QMA 4x0

8
System Overview
HV 701
HV 702
IO 700
42x Components 42x components have initially been designed for the QMG 420/421 and QMG 422
system, however they are fully compatible to the QMG 700 system.
EP 422
High Voltage Supply
Supplies high voltage to the SEM 217 for positive ion
detection.
High Voltage Supply
Supplies high voltage to the SEM 218 for positive ion
detection or the required voltages to the SEM 217 for
positive and negative ion detection (biased potentials).
I/O System
Provides programmable digital and analog inputs and
outputs.
Electrometer Preamplifier
The EP 422 amplifies the very small ion current signals of
the analyzer to voltage levels that are suitable for further
processing. It is installed directly on the analyzer in order
to minimize parasitic noise.
Compact, simple installation on QMA 4x0
Low-noise, low-drift, little vibration sensitivity
Fast response and quick recovery from overdriving
NOTE
On analyzers with 90°off-axis SEM, two EP 422 can be connected. This allows simple
changeover from Faraday to SEM mode.

System Overview
9
CP 400
QMH 4xx
QMA 4x0
Ion Counter Preamplifier
Comprises the pulse coupling, amplifier, and pulse
height discriminator with adjustable threshold.
It is installed directly on the QMA 4x0 with 90°off-axis SEM.
HF-Generator
Produces the high frequency voltage required for mass
separation (separate operating instructions).
QMH-Typ Range QMA type Rod ø
QMH 400-1
QMH 400-5
QMH 400-5
QMH 410-1
QMH 410-2
QMH 410-3
QMH 402-2
128 amu
300 amu
512 amu
1024 amu
2048 amu
340 amu
16 amu
QMA 410
QMA 430
QMA 400
QMA 400
QMA 400
QMA 410
QMA 410
16 mm
8 mm
8 mm
8 mm
8 mm
16 mm
16 mm
NOTE
In the following QMH 4xx or QMA 4x0 always refers to all types if not specified
otherwise.
Analyzer
Comprises the ion source, mass filter, ion collector and housing.
Ion collector types:
Faraday collector
SEM 217 (90° off-axis with integrated Faraday collector)

10
Technical Data
3 Technical Data
3.1 General
This information applies to all QMS 700 modules unless specified otherwise.
Ambient conditions
3.2 System Chassis SC 700
Front panel
Rear panel
Power supply
Temperature
Storage
Operation
–40 °C … +65 °C
+5 °C … +40 °C
Relative humidity 80% up to +31 °C,
decreasing linearly to 50% at +40 °C
Use indoors, altitude up to 2000 m NN
Type of protection IP 30
Overvoltage category II
Pollution degree 2
Mains switch
Power
LED DC
Filter cover
Module slots Mains connector
Fuse holder
Mains connection
Mains voltage
Power requirement
Connector
100 … 240 VAC, 50 … 60 Hz
500 W
mains connector with integrated fuse holder
Fuse 6.3 AT HBC, 520 mm
Mains cable country specific

Technical Data
11
Dimensions [mm]
Weight 7.5 kg (without modules)
Module slots 18 (4U each)
System expansion In order to expand system functionality, up to four SC 700 chassis can be cascaded.
Two versions of the SC 700 chassis are available:
Standard system chassis (operated as a single chassis).
System chassis with the expansion option (up to four chassis can be operated on a
bus, interconnection between chassis is made via bus cable 1).
Module arrangement in chassis No. 2 … 4 differs from chassis No. 1.
1) Chassis version with the expansion option is configured in the factory and will be delivered with an
additional set of documents.
NOTE
BUS IN, BUS OUT, and 24 VDC power supply connectors are not equipped on this
version.
SC 700 chassis No. 3
HV 701
or
IS 716
SC 700 chassis No. 1
(Master)
QC 700
SC 700 chassis No. 2
HV 701
or
IS 716
SC 700 chassis No. 4
HV 701
or
IS 716
BUS IN
( D-Sub,
9 pins, male)
BUS OUT
(D-Sub,
9 pins, male)
24 VDC
power supply
SC 700
CAN termination
CAN termination

12
Technical Data
BUS IN Connector for optional chassis expansion, must be terminated with a resistor if not used.
BUS OUT Connector for optional chassis expansion, must be terminated with a resistor if not used.
24 VDC power supply
3.3 Quadrupole Controller QC 700
CAUTION
This 24 VDC supply may only be used for an external bus node. Do not use it for any
other purpose.
Connector type: M8, female
Pin Signal Comment
1 +24V I
max. 2A
3 0V
4 Not connected
4
31
General
Compatibility system chassis SC 700
Number of slots occupied 2
Modules per system 1
Slot No. 1 and 2
(lefthand side of system chassis)
Weight 0.4 kg
QMH
Connector for
RF generator
(QMH 4xx)
CTRL
Connector for
test-, monitor and
special purpose
signals
CP
Connector for ion
counter preamplifier
(CP 400)
LAN
Ethernet interface-
(PC) with integrated
status LEDs
USB
USB interface (PC)

Technical Data
13
Operation Modes and
Parameters
Mass scan modes
Mass scale resolution
1) 32 at mass range 2048
64 at mass range 4096
Measurement speeds
Detector types
Number of
measuring channels 128
Operation modes MONO- / MULTI channel
Measuring cycles 1 ... 10,000 or REPEAT
Time required for a
channel change 100 ... 200 s (at min. PAUSE in Cycle)
mass-MODE Measuring method
SCAN-N
SCAN-F
STAIR
SAMPLE
PEAK-L
PEAK-F
ADJUST-C
ADJUST-F
Analog scan normal
Analog scan with FIR filter for measuring value
Scan bargraph in steps of 1 amu
Single mass and MID (Multiple Ion Detection)
Scan bargraph using level criterion
Scan bargraph using FIR FILTER
Coarse search
Fine search
STEPS per mass
Scan-SPEED FIX-
Range
AUTO-Range
125 s/amu 8/amu ---
250 s/amu 16/amu ---
0.5…1ms/amu 32/amu 1) ---
2 … 20 ms/amu 64/amu 1) 32/amu 1)
50 ms/u ...60 s/amu 64/amu 1) 64/amu 1)
EP 422 or external inputs Ion counter (CP 400)
mass-MODE FIX-Range AUTO-Range AUTO-Range
SAMPLE 125s…60s 0.5 ms … 60 s 125s…60s
STAIR 125s/amu … 60 s/amu 2ms/amu…60s/amu 0.5ms/amu…60s/amu
SCAN 125s/amu … 60 s/amu 5ms/amu…60s/amu 1.25ms/amu…60s/amu
PEAK 125s/amu … 60 s/amu 5ms/amu…60s/amu 1.25ms/amu…60s/amu
detect-TYPE
FARAD Faraday collector, EP 422
SEM SEM (type configurable), EP 422
ION-CNT Ion counter CP 400
EXTERN 1 External analog input of QC 700 (EXT IN 1)
EXTERN 2 External analog input of QC 700 (EXT IN 2)
A-INPUT (1 …n) Analog signal via IO 700 (analog channels 1 … n)

14
Technical Data
Measurement ranges
and resolution
1) Further increased by averaging.
Analog filter
Digital filter
Detector
type
Measurement
ranges
Modes Resolution
FARAD,SEM 10-12 …10
-5 A fsd FIX- and
AUTO-Range
16 bit 1) (per range)
EXTERN GAIN 1: ±10.240 V
GAIN 10: ±1.024 V
FIX-Range 16 bit 1)
ION-CNT 10-2 …10
8cps
(meaningful use up
to 106…10
7cps)
AUTO-Range in mass-MODE:
SAMPLE: 1 / DWELL
STAIR: 2 / SPEED
SCAN: amu/ SPEED
Filter type Two stage low pass
Effective for preamp and external inputs
Filter time constant Automatic or selectable in 9 steps:
5, 18, 85, 400 µs
1.7, 8, 40, 180, 800 ms
Filter step response
63: filter time constant
Settling time to ±1‰: ts4 × 63
63
ts
NORMAL (N) Low pass (average value)
FIR (F) Finite Impulse Response

Technical Data
15
Electrical
Connections QC 700
QMH connection Connector for RF generators (QMH 4xx) (D-Sub 25 pin, female).
LAN connection Ethernet connector (RJ45).
The interface status is indicated by two LEDs integrated in the RJ45 connector:
USB connection USB PC connector.
LED Status Meaning
green lit data transfer rate
100 Mbit/s
dark data transfer rate
10 Mbit/s
yellow lit
(flickering)
data transfer in
progress
dark no data transfer
(or no connection)
Green
RJ45
Yellow
USB connector type B

16
Technical Data
CTRL connector,
pin assignment
1) Reserved for Range Code of detector in monitor mode:
NOTE: In ion counter mode, the output voltage is 0 V.
2) Reserved for intensity signal in monitor mode (various configurations are possible):
Linear (±10 V / decade)
Logarithmic (±10 V FS, 1 … 10 decades)
Pin Signal Signal type Description
1 GND GND via 100 Ωto GND
10 GND GND via 100 Ωto GND
26 GND GND via 100 Ωto GND
2 RUN IN TTL input input for external start of measuring cycle, low true,
internal pull-up 5.6 kΩto +5 V
14 SYNC IN TTL input reserved for future use, low true,
internal pull-up 5.6 kΩto +5 V
15 IN 0 TTL input internal pull-up 5.6 kΩto +5 V (can only be used if jumper
J2 is in place)
3 IN 1 TTL input internal pull-up 5.6 kΩto +5 V (can only be used if jumper
J4 is in place)
16 IN 2 TTL input internal pull-up 5.6 kΩto +5 V
23 OUT 0 TTL output
11 OUT 1 TTL output
25 SYNC
OUT+
TTL output positive edge marking start of measurement,
scope trigger
13 SYNC OUT- GND referece point SYNC OUT+,via 200 Ωto GND
4 EXT IN 1+ analog input terminals for external voltmeter (differentially),
max. ±10 V, with low pass filter/amplifier
17 EXT IN 1– analog input
5 EXT IN 2+ analog input terminals for external voltmeter (differentially),
max. ±10 V, with or without low pass filter/amplifier
18 EXT IN 2– analog input
6 ELM OUT+ analog output output of low pass filter/amplifier, ±10 V,
max 0.1 mA via 200 Ω
19 ELM OUT– GND referece point for ELM OUT+, via 200 Ωto GND
7 AO MON 0+ analog output user configurable output 1), ±10 V, 12 Bit,
max. 0.1mA via 200 Ω
20 AO MON 0– GND referece point for AO MON 0+, via 200 Ωto GND
8 AO MON 1+ analog output user configurable output 2), ±10 V, 12 Bit,
max. 0.1 mA, via 200 Ω
21 AO MON 1– GND referece point for AO MON 1+ via 200 Ωto GND
9 SCO+ analog output output "mass number", 0 … +10 V, 16 Bit,
max. 0.1 mA, via 200 Ω
22 SCO– GND referece point for SCO+, via 200 Ωto GND
12 EP OUT+ analog output electrometer signal, max. 0.1 mA, via 200 Ω
24 EP OUT– GND referece point for EP OUT+, viar 200 Ωto GND
Detector range Output voltage
110-5 A8V
110-6 A7V
110-7 A6V
110-8 A5V
110-9 A4V
110-10 A3V
110-11 A2V
110-12 A1V

Technical Data
17
3.4 Ion Supply IS 716
General
Compatibility System chassis SC 700
Number of slots occupied 4
Modules per system max. 2
Slot No. 13
Weight 1 kg
Filament power supply
Voltage 0…+10V
Current max. 5 A
Power max. 50 W
Operation modes Fil 1, Fil 2
Filament protection 0 … 5 A
Emission
Normal 0 … 10 mA
Degas 0 … 20 mA
QMA
Connector for
analyzer
AUX I/O
Connector for
filament protection
and reserved I/Os

18
Technical Data
Potentials IS 716
Ion potentials at max. pos.
IONREF (+150 V),
positive polarity
DANGER
The QMS 700 may not be switched on without a correctly connected QMA cable.
DANGER
The maximum current of the external voltage source V0 has to be reliably limited
to 2mA.
0.............+150
-125V.........0
-150V.............0...+60V
-60V.......0
-150V.............0...+60V
-450V.........................................................0..................+300V -450V.........................................................0..................+300V -450V.........................................................0..................+300V -450V.........................................................0..................+300V
V1
V9
V3 V4
V5 V6 V7 V8
V2
V0
QMA-GND
IONREF (V1)
V1 referenced to V0
V2...V8 referenced to V1
V9 referenced to V2

Technical Data
19
Ion potential at max. neg.
IONREF (–150 V),
negative polarity
1) Referenced to V0.
2) Normally V0 is connected to QMA GND (vacuum system GND). For special applications V0 may be
rised to max. ±200 V respective to QMA GND.
3) In Faraday mode, V6 and V7 are connected to QMA GND.
Electrode
Name
Range Nominal
Current
Resolution Offset Gain
Error
Potential
at Degas
1)
V0 2)
V1 IONREF -
150 … +150 V
2.5 mA 20 mV 120 mV 1.6% +550 V
V2 CATH 0 … -125 V -10 mA 10 mV 60 mV 1.6% +7 V
V3 FOCUS 3mA 20 mV 120 mV 1.6% 0 V
V4 F-AXIS 3mA 20 mV 120 mV 1.6% 0 V
V5 EXTRACT 100 µA 58.82 mV 240 mV 1.6% 0 V
V6 DEF-I 3) 100 µA 58.82 mV 240 mV 1.6% 0 V
V7 DEF-O 3) 100 µA 58.82 mV 240 mV 1.6% 0 V
V8 Res 100 µA 58.82 mV 240 mV 1.6% 0 V
V9 WEHNELT 0 … -60 V -500 µA 3.92 mV 30 mV 1.6% 0 V
-150..............0
-125V.........0
-60V.......0
-60V....0............+150V
-300V....................0........................................................+450V
V1
V9
V3 V4
V5 V6 V7 V8
V2
V0
QMA-GND
IONREF (V1)
V1 referenced to V0
V2...V8 referenced to V1
V9 referenced to V2
-300V....................0........................................................+450V -300V....................0........................................................+450V -300V....................0........................................................+450V
-60V....0............+150V

20
Technical Data
Electrical
Connections IS 716
QMA connector pin
assignment
DANGER
The QMS 700 may not be switched on without a correctly connected QMA cable.
16 pin LEMO socket, view
on IS 716
Pin Signal Description
1QMAGND
2 SPEC SRC RET Reference signal for SPEC SRC ON
3 V6, inner Deflection
4V3,Focus
5 V9, Wehnelt
6 V5, Extraction
7 Filament +
8 Filament – / Cathode
9 Filament Common
10 V4, Field Axis
11 V0, Ref GND
12 Screen
13 V8, Reserve
14 V1, Ion Ref
15 SPEC SRC ON +24 V if activated, max. 200 mA
16 V7, outer Deflection
1
11
2
34
5
6
7
8
9
10
12
13 14
15
16
QMA