Pfeiffer Vacuum HIQUAD QMG 700 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
QMG 700 HIQUAD®
Quadrupole mass spectrometer system

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new mass spectrometer system is
designed to support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum represents high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. From this
extensive, practical experience we have gained a large volume of information that can
contribute to efficient deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 8
1.1 Validity 8
1.1.1 Applicable documents 8
1.1.2 Variants 8
1.2 Target group 8
1.3 Conventions 9
1.3.1 Instructions in the text 9
1.3.2 Pictographs 9
1.3.3 Stickers on the product 9
1.3.4 Abbreviations 9
1.4 Trademark proof 10
2 Safety 11
2.1 General safety information 11
2.2 Safety instructions 11
2.3 Safety precautions 13
2.4 Proper use 14
2.5 Foreseeable improper use 14
2.6 Responsibilities and warranty 14
2.7 Owner requirements 14
2.8 Personnel qualification 14
2.8.1 Ensuring personnel qualification 15
2.8.2 Personnel qualification for maintenance and repair 15
2.8.3 Advanced training with Pfeiffer Vacuum 15
2.9 Operator requirements 16
3 Product description 17
3.1 System design 17
3.2 Control unit QMS 700 18
3.2.1 System chassis SC 700 19
3.2.2 Quadrupole controller board QC 700 19
3.2.3 Ion source supply IS 716 19
3.2.4 High voltage supply HV 701 20
3.2.5 High voltage supply HV 702 20
3.2.6 Input/output module IO 700 20
3.2.7 Input/output module IO 720 20
3.3 HF generator QMH 40x 21
3.4 Analyzer QMA 4x0 21
3.5 Electrometer pre-amplifier EP 422 21
3.6 Ion counter pre-amplifier CP 400 22
3.7 Connections 23
3.7.1 ANALOG I/O connection, 15-pin 23
3.7.2 DIGITAL I/O connection, 25-pin 24
3.7.3 TP GAUGE connection 25
3.7.4 Connections on QC 700 26
3.7.5 Connections on IS 716 28
3.7.6 Connections on HV 701 31
3.7.7 Connections on HV 702 31
3.7.8 Connections on IO 700 32
3.7.9 Connections on IO 720 34
3.7.10Connections on EP 422 34
3.7.11Connections on CP 400 34
3.8 System wiring 34
3.8.1 Basic wiring for Faraday operating mode 35
3.8.2 Wiring for 90°-SEM operating mode with HV 701 36
3.8.3 Wiring for CP operating mode, ion counter, with HV 701 37
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3.8.4 Wiring for 90°-SEM operating mode with HV 702 38
3.8.5 Wiring for CD operating mode with HV 702 39
3.8.6 Wiring for CP operating mode, ion counter, with HV 702 40
3.9 Identifying the product 40
3.10 Scope of delivery 40
4 Transport and storage 41
4.1 Transporting the product 41
4.2 Storing the product 41
5 Installation 42
5.1 Installing QMG 700 overall system 43
5.2 Installing system chassis 43
5.2.1 Installing system chassis as 19" rack module 44
5.2.2 Installing system chassis as tabletop unit 44
5.3 Installing or replacing plug-in modules in system chassis 44
5.4 Establishing connections at QC 700 45
5.5 Installing electrometer pre-amplifier EP 422 on analyzer 46
5.6 Mounting ion counter pre-amplifier CP 400 46
5.7 Installing HF generator QMH 40x 47
5.8 Installing analyzer QMA 4x0 47
5.9 Connecting IO 700 47
5.10 Connecting IO 720 47
6 Commissioning 48
7 Operation 49
8 Decommissioning 50
9 Maintenance 51
9.1 Cleaning the control unit and system chassis 51
9.2 Cleaning the filter mat 52
9.3 Changing filter mat 52
9.4 Changing mains fuse 53
10 Malfunctions 54
11 Shipping 55
12 Recycling and disposal 56
12.1 General disposal information 56
12.2 Dispose of a mass spectrometer system 56
13 Service solutions by Pfeiffer Vacuum 57
14 Ordering information 59
14.1 Ordering parts 59
14.2 Spare parts and accessories 59
14.3 Cables and jump plugs 59
14.4 System components 60
15 Technical data and dimensions 61
15.1 Control unit QMS 700 61
15.1.1System chassis SC 700 61
15.1.2Quadrupole controller QC 700 62
15.1.3Ion source supply IS 716 63
15.1.4High voltage supply HV 701 64
15.1.5High voltage supply HV 702 64
15.1.6Input/output module IO 700 65
15.1.7Input/output module IO 720 66
15.2 HF generator QMH 40x 66
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15.3 Analyzer QMA 4x0 67
15.4 Electrometer pre-amplifier EP 422 67
15.5 Ion counter pre-amplifier CP 400 68
EC Declaration of Conformity 69
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List of tables
Tbl. 1: Applicable documents 8
Tbl. 2: Abbreviations used 10
Tbl. 3: CTRL pin assignment 27
Tbl. 4: Range code of the detector 27
Tbl. 5: AUX I/O pin assignment 28
Tbl. 6: Electrodes 30
Tbl. 7: Operating modes of HV 702 32
Tbl. 8: Basic wiring for Faraday operating mode 35
Tbl. 9: Wiring for 90°-SEM operating mode with HV 701 36
Tbl. 10: Wiring for CP operating mode, ion counter, with HV 701 37
Tbl. 11: Wiring for 90°-SEM operating mode with HV 702, operating mode 0 38
Tbl. 12: Wiring for CD operating mode with HV 702, operating mode 1 39
Tbl. 13: Wiring for CP operating mode, ion counter, with HV 702, operating modes 2
and 3
40
Tbl. 14: Status of the Ethernet connection 46
Tbl. 15: Malfunctions 54
Tbl. 16: Spare parts and accessories for QMS 700 59
Tbl. 17: Spare parts for QMA 4x0 59
Tbl. 18: System components 60
Tbl. 19: Limits of use QMS 700 61
Tbl. 20: Technical data, SC 700 61
Tbl. 21: Technical data, QC 700 62
Tbl. 22: Operating modes and parameters QC 700 62
Tbl. 23: Mass flow rate operating modes QC 700 62
Tbl. 24: Mass scale resolution QC 700 62
Tbl. 25: Measurement speeds QC 700 62
Tbl. 26: Detector types QC 700 63
Tbl. 27: Measuring ranges and resolution QC 700 63
Tbl. 28: Analog filter QC 700 63
Tbl. 29: Digital filter QC 700 63
Tbl. 30: Technical data, IS 716 64
Tbl. 31: Filament supply IS 716 64
Tbl. 32: Emission IS 716 64
Tbl. 33: Technical data, HV 701 64
Tbl. 34: High voltage part, HV 701 64
Tbl. 35: Technical data, HV 702 65
Tbl. 36: High voltage part, HV 702 65
Tbl. 37: Technical data, IO 700 65
Tbl. 38: External system supply, IO 700 65
Tbl. 39: Digital outputs IO 700 66
Tbl. 40: Digital inputs IO 700 66
Tbl. 41: Analog outputs IO 700 66
Tbl. 42: Analog inputs IO 700 66
Tbl. 43: QMH and QMA types 67
Tbl. 44: Technical data, EP 422 67
Tbl. 45: Amplifier data EP 422 67
Tbl. 46: Offset EP 422 68
List of tables
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List of figures
Fig. 1: Configuration example of QMG 700 18
Fig. 2: Control unit QMS 700 18
Fig. 3: System chassis SC 700 19
Fig. 4: Front and back panels of SC 700 19
Fig. 5: Quadrupole controller board QC 700 19
Fig. 6: Ion source supply IS 716 20
Fig. 7: High voltage supply HV 701 20
Fig. 8: High voltage supply HV 702 20
Fig. 9: Input/output module IO 700 20
Fig. 10: Input/output module IO 720 21
Fig. 11: HF generator QMH 40x 21
Fig. 12: Analyzer QMA 4x0 21
Fig. 13: Electrometer pre-amplifier EP 422 22
Fig. 14: Ion counter pre-amplifier CP 400 22
Fig. 15: ANALOG I/O connection diagram 23
Fig. 16: ANALOG I/O pin assignment 23
Fig. 17: Connection diagram for digital inputs 24
Fig. 18: Connection diagram for digital outputs 24
Fig. 19: DIGITAL I/O pin assignment 25
Fig. 20: TP GAUGE pin assignment 25
Fig. 21: Connections on QC 700 26
Fig. 22: CP pin assignment 26
Fig. 23: CTRL pin assignment 26
Fig. 24: LAN pin assignment 28
Fig. 25: Connections on IS 716 28
Fig. 26: AUX I/O pin assignment 28
Fig. 27: QMA pin assignment 29
Fig. 28: Ion potentials at max. pos. IONREF (+150 V), positive polarity 29
Fig. 29: Ion potentials at max. neg. IONREF (-150 V), negative polarity 30
Fig. 30: Connections on HV 701 31
Fig. 31: Connections on HV 702 31
Fig. 32: Connections on IO 700 32
Fig. 33: Block diagram of IO 700 33
Fig. 34: View of IO 700 from above with programming switch for node address 34
Fig. 35: Connections on EP 422 34
Fig. 36: Basic wiring for Faraday operating mode 35
Fig. 37: Wiring for 90°-SEM operating mode with HV 701 36
Fig. 38: Wiring for CP operating mode, ion counter, with HV 701 37
Fig. 39: Wiring for 90°-SEM operating mode with HV 702 38
Fig. 40: Wiring for CD operating mode with HV 702 39
Fig. 41: Wiring for CP operating mode, ion counter, with HV 702 40
Fig. 42: Insert plastic feet in the bores 44
Fig. 43: Press in locking pins 44
Fig. 44: Standard positions of the plug-in modules in the chassis 45
Fig. 45: Connection to the PC with crossed connection cable (red) 45
Fig. 46: Connection to the network with non-crossed connection cable (gray) 46
Fig. 47: "Ethernet" (LAN) connection 46
Fig. 48: EMC cable gland with sequence of individual parts suitable for assembly 47
Fig. 49: Green symbol in Quadera turns red 50
Fig. 50: Changing filter mat 52
Fig. 51: View of the SC 700 back panel 53
Fig. 52: Dimensions SC 700 61
Fig. 53: Filter time constant QC 700 63
Fig. 54: Dimensions EP 422 67
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
"Ion counter pre-amplifier" CP 400 operating instructions BG 5812
"Input/output module" IO 720 operating instructions BG 5402
"Analyzer" QMA 4x0 operating instructions BG 5983
"High-frequency generator" QMH 40x operating instructions BG 5982
"Quadrupole mass spectrometer" QMG 700 communication instructions BG 5401
QUADERA software documentation Part of the software
Declaration of conformity A component of these in-
structions
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to products with the following article numbers:
Article number Designation
PT Q11 xxx xxx QMG 700 HiQuad
PT Q12 xxx xxx
PT Q14 xxx xxx
PT Q15 xxx xxx
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
About this manual
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1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meanings.
SC 700
D-35614 Asslar
Mod.
P/N
S/N
Input
QMS 700
PT M27 580
xxxxxxxxx
100 ... 240 V AC 500 W
Made in United States 2022/07
Rating plate
Example for control unit QMS 700: The
rating plates of the individual HiQuad
system components are to be found on
the respective components.
1.3.4 Abbreviations
Abbreviation Explanation
AI Analog input
AO Analog output
AUX Auxiliary
CD Conversion dynode (operating mode)
CP Counter pre-amplifier
CTRL Control
DI Digital input
DIP Dual in-line package
DO Digital output
ECL Emitter-coupled logic
About this manual
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Abbreviation Explanation
ELM Low-pass filter output
ESD Electrostatic discharge
EP Electrometer pre-amplifier
EXT External
FA Field axis
FB Field bus
FIR Finite impulse response
FS Full scale
GND Ground
HF High Frequency
HV High voltage
IO, I/O Input/Output
IS Ion supply
MID Multiple ion detection
MSL Mean sea level
PZ Pozidriv
QC Quadrupole controller
QMA Quadrupole mass spectrometer analyzer
QMH Quadrupole mass spectrometer high-frequency generator
QMS Quadrupole mass spectrometer control unit
SC System chassis
SEM Secondary electron multiplier
SEV Secondary electron multiplier
HP Horizontal pitch
TTL Transistor-transistor logic
USB Universal Serial Bus
Tbl. 2: Abbreviations used
1.4 Trademark proof
●HiQuad® is a registered trademark of Pfeiffer Vacuum GmbH.
●QUADERA® is a registered trademark of Inficon GmbH.
●WAGO® is a registered trademark of WAGO Kontakttechnik GmbH & Co. KG.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during installation
DANGER
Danger to life caused by electric voltage on the analyzer
During operation, dangerous voltage is present on the electrode system of the QMA analyzer. Com-
ponents in the vacuum system are dangerous to touch under certain conditions. There is danger to
life due to electric voltage.
►Protect installed parts, connected units and lines against galvanic connections, flashover or
charge carrier flow.
►Make sure that the QMA, vacuum chamber, and entire apparatus always have a proper connec-
tion to protective ground.
►Provide additional protection if the user can touch the analyzer when the vacuum system is open.
►Ensure mechanical protection against contact of the analyzer and the parts installed.
►Ensure compulsory separation of the current supply when opening the system (using a door con-
tact, for example).
Safety
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DANGER
Danger to life from electric shock
Inadequate or incorrect grounding of the unit leads to contact-sensitive voltage on the housing. When
making contact, increased leakage currents will cause a life-threatening electric shock.
►Before the installation, check that the connection leads are voltage-free.
►Conduct the electrical connection in accordance with locally applicable regulations.
►Make sure that the local mains voltage and frequency match rating plate specifications.
►Make sure that the mains cable and extension cable meet the requirements for double isolation
between input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
►Use only a 3-pin mains cable and extension cable with properly connected protective earthing
(earthed conductor).
►Plug the mains plug into a socket with earthing contact only.
►Always connect the mains cable prior to all other cables, to ensure continuous protective earth-
ing.
Risks during operation
DANGER
Danger to life from electric shock caused by moisture ingress
Water that has entered the unit will result in personal injury through electric shocks.
►Only operate the unit in a dry environment.
►Operate the unit away from fluids and sources of moisture.
►Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service.
►Always disconnect the power supply before cleaning the unit.
Risks during maintenance
DANGER
Danger to life due to electric voltage
High voltages are present inside the device. When touching parts that are live, there is a risk of
death. If there is visible damage, there is a risk of death when commissioning the device.
►Work on the open device must only be carried out by trained specialist personnel.
►Before carrying out any installation and maintenance work, switch the device off and disconnect
it from the current supply.
–After switching off, wait about 60 seconds and then disconnect all cables (power cable at the
end).
►Never open the device with the current supply connected.
►Secure the current supply against unauthorized or unintentional reactivation.
►Do not insert any objects into the vent openings.
►Never open an external power supply pack.
►Never operate an open or defective device.
►Secure a defective device against accidental operation.
►Protect the device against moisture.
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Safety
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WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
health and safety of service personnel is at risk.
►Comply with the instructions for safe distribution.
Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
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►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Proper use
The quadrupole mass spectrometer system QMG 700 HiQuad is for gas analysis in the high vacuum
range.
►Install, operate and maintain the product only in accordance with these operating instructions.
►Comply with the limits of use.
►Observe the technical data.
2.5 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use; in particular:
●Use outside the limits of use in accordance with the technical data
●Use for measurements whose results determine the safety of persons or large values
●Use with corrosive or explosive media
●Use outdoors
●Use after technical changes (inside or outside on the product)
●Use with replacement or accessory parts that are not suitable or not approved
2.6 Responsibilities and warranty
Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party:
●disregards this document
●does not use the product for its intended purpose
●carries out any modifications to the product (conversions, changes, etc.) that are not listed in the
corresponding product documentation
●operates the product with accessories that are not listed in the corresponding product documenta-
tion
The operator is responsible for the process media used.
2.7 Owner requirements
Safety-conscious working
1. Only operate the product in a technically flawless state.
2. Operate the product in line with its intended purpose, safety and hazard-conscious and only in
compliance with these operating instructions.
3. Fulfill the following instructions and monitor the observation of the following instructions:
–Proper use
–Generally applicable safety instructions and accident prevention regulations
–International, national and locally applicable standards and guidelines
–Additional product-related guidelines and regulations
4. Only use original parts or parts approved by Pfeiffer Vacuum.
5. Keep the operating instructions available at the place of installation.
6. Ensure personnel qualification.
2.8 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Safety
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Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.8.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.8.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.8.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
Safety
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2.9 Operator requirements
Observing relevant documents and data
1. Read, observe and follow this operating instruction and the work instructions prepared by the op-
erating company, in particular the safety and warning instructions.
2. Install, operate and maintain the product only in accordance with these operating instructions.
3. Carry out all work only on the basis of the complete operating instructions and applicable docu-
ments.
4. Comply with the limits of use.
5. Observe the technical data.
6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance
of the product are not answered in these operating instructions.
–You can find information in the Pfeiffer Vacuum service area.
Safety
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3 Product description
3.1 System design
The QMG 700 consists of the following components:
●Control unit QMS 700 with 4 plastic feet 1)
●HF generator QMH 40x
●Analyzer QMA 4x0
●Electrometer pre-amplifier EP 422 or ion counter pre-amplifier CP 400 (dependent on configura-
tions)
Performing ion count
►For ion counting, use the CP 400 ion counter pre-amplifier instead of the EP 422 electrometer pre-
amplifier.
The following block diagram shows the basic QMG 700 system design and the designations of the indi-
vidual modules. Numerous configurations are possible depending on the application.
1) for use as a tabletop unit
Product description
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1
2 3 4 5
6
7
8
9
QMA 4x0
10
Ion Supply
QMS 700
14
11
12 16
13 15
1718
19
20
DI AI DO AO
Fig. 1: Configuration example of QMG 700
1 Analyzer QMA 4x0 11 Control unit QMS 700
2 Ion source 12 Quadrupole controller board QC 700
3 Mass filter 13 Ion source supply IS 716
4 90° deflection unit 14 High voltage supply HV 70x
5 Faraday collector 15 Input/output module IO 700 or IO 720
6 SEV 16 Power supply pack
7 Electrometer pre-amplifier EP 422 (2) 17 Mains connection (AC)
8 Electrometer pre-amplifier EP 422 (1) 18 Analog and digital inputs and outputs
9 Ion counter pre-amplifier CP 400 19 Connection to the PC (Ethernet)
10 HF generator QMH 40x 20 PC
3.2 Control unit QMS 700
Control unit QMS 700 consists of system chassis SC 700 and quadrupole controller board QC 700.
Plug-in modules are mounted in the system chassis, depending on the configuration. QMS 700 does
not have any manual control elements of its own.
Fig. 2: Control unit QMS 700
Product description
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3.2.1 System chassis SC 700
System chassis SC 700 contains the power supply pack, the internal system bus and the unit ventila-
tion. It provides plug-in positions for the plug-in modules QC 700, IS 716, HV 701, HV 702, IO 700 and
IO 720.
Fig. 3: System chassis SC 700
4
1
2
3
5
6
Fig. 4: Front and back panels of SC 700
1 Fan cover 4 Module plug-in positions
2 Mains unit plug 5 "Power" mains switch
3 Fuse holder 6 "DC" LED
3.2.2 Quadrupole controller board QC 700
Quadrupole controller board QC 700 contains:
●QMG 700 system controller and LAN/USB interfaces to the PC
●Control of the HF stage
●Measurement signal processing
●Interface to CP 400
Fig. 5: Quadrupole controller board QC 700
3.2.3 Ion source supply IS 716
The ion source supply IS 716 provides the ion source with the required operating voltage and has the
following properties:
●Short-circuit proof, programmable potentials
●Reversible polarity for positive and negative ions
●Normal operation / degas operation
●Suitable for all ion source types of analyzer QMA 4x0
Product description
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Fig. 6: Ion source supply IS 716
3.2.4 High voltage supply HV 701
The high voltage supply HV 701 supplies SEM 217 of analyzer QMA 4x0 with the required high voltage
for detecting positive ions.
Fig. 7: High voltage supply HV 701
3.2.5 High voltage supply HV 702
The high voltage supply HV 702 supplies
●SEM 217 of analyzer QMA 4x0 with the required high voltage for detecting positive and negative
ions (raised).
●SEM 218 of analyzer QMA 4x0 with the required high voltage for detecting positive ions.
Fig. 8: High voltage supply HV 702
3.2.6 Input/output module IO 700
I/O module IO 700 provides programmable digital and analog inputs and outputs.
Fig. 9: Input/output module IO 700
3.2.7 Input/output module IO 720
I/O module IO 720 provides programmable digital and analog inputs and outputs and the connection
option for an ActiveLine total pressure transmitter.
Product description
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