Pfeiffer Vacuum Prisma 80 QMS 200 User manual

Operating Instructions
Incl. Declaration of Conformity
BG 805 204 BE / B (0203) 1
Prisma™ 80
Quadrupole Mass Spectrometer
QMS 200

2BG 805 204 BE / B (0203) QMS200.oi
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplates. For convenient reference copy the information for all items of
your system into the space provided below.
Typ:
No:
F-No:
VA
Pfeiffer Vacuum, D-35614 Asslar
Typ: No: F-No:
Pfeiffer Vacuum
D-35614 Asslar
Pfeiffer Vacuum
D-35614 Asslar
TalkStar
Version: x.xx
No: 450-490
Copyright (C)
VACUUM
This document applies to products with part numbers
PTM04100 comprising
PTM25250 (Analyzer)
PTM28515 (Electronics)
B 5181 408 KY (Power supply)
The part numbers can be taken from the product nameplates.
This document is based on firmware number
BG 509 725 –H (or higher)
450-465 (or higher)
If the product does not work as described in this document, please check that it is
equipped with the above firmware version (→![1]).
We reserve the right to make technical changes without prior notice.
The Prisma mass spectrometer is designed for partial pressure analysis at pres-
sures <10-4 mbar. Typical applications are measurement, monitoring and process
control functions in vacuum systems.
Prisma™ INFICON AG
Windows™ Microsoft Corporation
Product Identification
QME 200
QMA 200
Software TalkStar
Validity
Intended Use
Trademarks

BG 805 204 BE / B (0203) QMS200.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
Trademarks 2
1 Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 5
1.4 Liability and Warranty 5
2 Technical Data 6
2.1 Standards Complied With 6
2.2 Ambient Conditions 6
2.3 Prisma™ 80 6
2.4 QME 200 7
2.5 SP 200 7
2.6 Pin Assignment 8
3 Installation 10
3.1 Unpacking 10
3.2 Installation 10
3.2.1 Space Requirements [mm] 11
3.2.2 Required Tools 11
3.2.3 Installing the QMA 12
3.2.4 Installing the QME 13
3.3 Electrical Connections 13
3.3.1 Connecting the QME 13
3.3.2 Connecting the SP 200 Power Supply to the Prisma 14
3.3.3 Connecting the PC 15
3.4 Installing the Software 15
4 Operation 16
4.1 First Time Operation 16
4.2 Software Operation 17
4.3 Settings 21
4.3.1 Tuning the RF Generator 21
4.3.2 Optimizing the Ion Source Sensitivity 21
5 Maintenance 22
5.1 QMA 22
5.1.1 Changing the Filament 22
5.2 QME 24
5.2.1 Cleaning the Housing 24
5.2.2 Cleaning the Dust Filter 24
5.2.3 Replacing the Filter Mat 24
5.2.4 Tuning the RF Generator 25
5.2.5 Optimizing the Ion Source Sensitivity 26
5.2.6 Replacing the QME 28
6 Accessories and Spare Parts 29
7 Returning the Product 30
8 Disposal 30
Appendix 31
A: Literature 31
Declaration of Contamination 32
Declaration of Conformity 33
For cross-references within this document, the symbol (→"XY) is used, for cross-
references to other documents, the symbol (→![Z]).

4BG 805 204 BE / B (0203) QMS200.oi
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
The result is O.K.
The result is not as expected.
The lamp/display is lit.
The lamp/display flashes.
The lamp/display is dark.
Labeling
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
1.1 Symbols Used
1.2 Personnel Qualifications

BG 805 204 BE / B (0203) QMS200.oi 5
• Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials and the process media.
Consider possible reactions of the process media due to the heat generated by
the product.
• Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.) on the product
• use the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Training
Pfeiffer Vacuum offers application, operating and maintenance courses for the
best use of this product. Please contact your local Pfeiffer Vacuum representa-
tive.
1.3 General Safety
Instructions
1.4 Liability and Warranty
Training

6BG 805 204 BE / B (0203) QMS200.oi
2 Technical Data
Safety
QME/QMA EN 61010-1:1993
IEC1010-1:1990 +A1:1992
Protection class I
SP 200 DIN EN 60950
IEC 950, UL 1950
CSA 22.2 No. 234
EMC
Immunity
Emission
EN 50082-2
EN 50081-1
Operation Indoors only
Altitude max. 2000 m NN
Degree of protection IP 30
Pollution degree 2
Temperatures
Storage/transport –25 … +70 °C
Operation QME
SP
0 … +40 °C
0 … +40 °C
Relative humidity Max. 80% up to 31 °C,
Linearly decreasing to 50% at 40 °C
Mass range 1 … 80 u
Detector type Faraday
Detection limit <1×10-12 mbar
Unit resolution
(valley, full mass range)
at 10% peak height
adjustable to
<10%
0.5 … 2.5 u
Sensitivity to argon >1×10-3 A/mbar
Contribution to
neighboring mass 40/41 <10 ppm
Operating pressure ≤1×10-4 mbar
≤1×10-3 mbar at an emission <200 µA
Reproducibility of peak ratio
(constant conditions over 8 h,
N2and Ar from air)
±0.5%
QMA operating temperature 0 … +150 °C
Bakeout temperature
(QME removed) ≤200 °C
HS ion source Open design, radial symmetry,
2 filaments (yttrium oxide), degassing by
electron bombardment (10 mA, 300 V)
Mounting orientation Any (→"12)
Weight 3 kg
Connection flange DN 40 CF
2.1 Standards Complied
With
2.2 Ambient Conditions
2.3 Prisma™ 80

BG 805 204 BE / B (0203) QMS200.oi 7
Measurement channels 64
Measurement modes Scan analog, Scan Bargraph, MID
Measurement cycles Single- / Multi-channel 1 … 9999 Cycles
or Repeat
Measurement data buffer 128 Kbytes
MID dwell 10 ms … 60 s
Measurement speed
Scan Analog + Bargraph Peak
Scan Bargraph Stair
200 ms/u … 60 s/u
20 ms/u … 60 s/u
Electrometer amplifier 10-5 … 10-12 A (f.s.), fix and autorange
Signal filter FIR filter
Power supply 24 VDC / 2.0 A
Interfaces
RS-232-C
LAN
300 … 19200 bit/s
Arcnet, fiberoptic (≤1000 m) 2.5 Mbit/s
Inputs TalkStar does not support the inputs
Outputs
2 relays Normally open contact, 24 VAC, 30 VDC,
1 A
TalkStar does not support any additional
outputs
Weight 2.5 kg
Voltage
Frequency
Power requirements
90 … 260 VAC
47 … 63 Hz
1.5 A @ 115 V / 60 W
0.8 A @ 230 V / 60 W
Output voltage 24 VDC, stabilized
Insulation ≥10 MΩ, output to ground
Overvoltage category II (according to EN 61010)
Weight 0.7 kg
2.4 QME 200
2.5 SP 200

8BG 805 204 BE / B (0203) QMS200.oi
TalkStar does not support the gauge connection.
Pin Assignment
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Case
1)
1)
1)
1)
1)
1)
1)
1)
1)
1)
REL_1A
REL_1B
REL_2A
REL_2B
GND
Shield
tune
control LAN
ready
24V
RS-232-C
VACUUM
111
5
6
10
15
D-Sub H-Density
15-pin, female
1) TalkStar does not support this function.
WARNING
If this connection is used, a shielded cable is required for EMC reasons. The
shield must contact the connector housing. The opposite end should remain
open or be grounded so that no damaging compensating currents can occur.
TalkStar does not support the LAN interface.
Pin Assignment
1
2
3
4
5
6
7
8
9
Case
n.c.
Received Data (RXD)
Transmitted Data (TXD)
Data Terminal Ready (DTR) *)
Signal Ground (SGND)
n.c.
Request To Send (RTS) *)
Clear To Send (CTS) *)
n.c.
Shield
*) optional signal
tune
control LAN
ready
24V
RS-232-C
VACUUM
D-Sub
9-pin, male
61
95
WARNING
If this connection is used, a shielded cable is required for EMC reasons. The
shield must contact the connector housing. The opposite end should remain
open or be grounded so that no damaging compensating currents can occur.
2.6 Pin Assignment
control
LAN
RS-232-C

BG 805 204 BE / B (0203) QMS200.oi 9
Pin Assignment
1
2
3
Case
+24 VDC
GND
GND
Screen
tune
control LAN
ready
24V
RS-232-C
VACUUM
3-pin, female
1
2
3
DANGER
This connection carries hazardous voltages.
Pin Assignment
1
2
3
4
5
6
7
8
9
10
11
12
13
Reserve
Extr
Focus
HV–
Filament 1
Filament 2
Anode
RF–
GND
GND
RF+
Filament Common
EP
10
11
12 1
2
3
13
4
5
67
8
9
13-pin, male
24 VDC
QMA

10 BG 805 204 BE / B (0203) QMS200.oi
3 Installation
Store the transport safety devices and re-install them before transporting
the product again.
DANGER
Voltages up to 330 VDC appear on the QMA 200 during operation.
Other components in the vacuum chamber (e.g. gauges) may possibly be ex-
posed to this voltage under unfavorable conditions. If as a result, such parts
(including the lines and connected equipment!) become hazardous, they must be
arranged or protected in such a way that no sparkover and charge transfer can
occur.
If the QMA can be touched while the vacuum system is open, additional protec-
tion is needed, e.g.:
• mechanical protection against touching
• forced disconnection of the SP 200 power supply when the system is
opened.
DANGER
External hazardous voltages (e.g. due to contact, sparkover, plasma, ion or
electron beams) must not be allowed to be transferred to the electrodes of the
QMA 200. If such danger sources exist in the vacuum chamber, additional safety
measures (e.g. better placement, shielding, grounding, etc.) must be taken that
reliably prevent such influences. Also lower external voltages acting on the QMA
may damage the electronics and lead to unreliable measurement results.
Suitable precautions as mentioned above are to be taken.
WARNING
The QMA must be correctly installed from a vacuum engineering point of view,
i.e. the gases to be detected must have unhindered access to the analyzer.
Vacuum coating of the analyzer must be prevented.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
3.1 Unpacking
3.2 Installation

BG 805 204 BE / B (0203) QMS200.oi 11
ø37
118228 54(100)
141
127.5
DN 40 CF-F
KA 117
Caution
The QMA 200 may only be installed in flanges or tubes with an internal diameter
≥37 mm, otherwise short circuits to the wall can occur.
Note the required installation depth. Do not kink the cables.
3000
56
80
165
• 4 mm hexagon socket screw key
• 10 mm open-end wrench (2 pieces)
• Screwdriver (blade width 3 … 4 mm)
3.2.1 Space Requirements
[mm]
QMA 200, QME 200
SP 200
3.2.2 Required Tools

12 BG 805 204 BE / B (0203) QMS200.oi
DANGER
The analyzer flange must be properly grounded.
• Connect it with all 6 screws to the properly grounded vacuum system.
• If the vacuum system is not grounded, connect the QMA flange (grounding
screw M4) to ground by means of a separate ground conductor.
Establish this connection with yellow/green insulated or bare stranded
copper wire:
•2.5 mm²if mechanically protected according to DIN VDE 110 T540
•4.0 mm²if not protected
Caution
The QMA should preferably be mounted horizontally (with the guiding groove
downward). This results in optimum protection of the QME against falling objects
and allows easy installation and excellent access to the front panel.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's bare hands increases
the desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Transport tube
Mounting tool
!Set the QMA into the sup-
plied mounting tool.
"Carefully remove the trans-
port tube from the QMA and
save it for possible future
use.
#Flange the analyzer to the
vacuum chamber.
3.2.3 Installing the QMA
Removing the transport tube
and flanging the analyzer to
the vacuum chamber

BG 805 204 BE / B (0203) QMS200.oi 13
DANGER
The QME may be mounted only to a correctly installed QMA as the only ground
connection is established via the QMA flange.
The 24 V feeder line from the SP 200 must never be connected if the QMA is not
screw fastened to the QME.
Guide groove
Grounding tab
!With a 4 mm hexagon socket screw key loosen the two screws on the black
plastic connection piece of the QME so that the moving part has a play of
2 … 3 mm.
"Carefully slide the QME onto the mounted QMA up to the notch mark. Make
sure the positioning is correct (watch the grounding tab of the QME and the
guide groove of the QMA). Do not apply excessive force.
#Firmly tighten the two hexagon socket screws. These screws secure the
QME mechanically and ensure electrical safety by providing ground contact.
WARNING
All electrical connections must have cable strain relief. Route the cables sepa-
rately from EMI sources.
WARNING
For reasons of electromagnetic compatibility, a single central grounding point is
strongly recommended for all connected units (pumping station, SP 200, com-
puter, recorders, etc.). A multiple AC power outlet or a common line voltage dis-
tributor with power switch fulfills this requirement in a simple manner.
3.2.4 Installing the QME
3.3 Electrical Connections
3.3.1 Connecting the QME

14 BG 805 204 BE / B (0203) QMS200.oi
TalkStar does not support the gauge connection.
tune
control LAN
ready
24V
RS-232 -C
VACUUM
Digital input Digital outputs Analog inputs Analog outputs
TalkStar does not
support this function.
Switching thresholds
or e.g. open/close
valve
TalkStar does not
support this function.
TalkStar does not
support this function.
Specifications and pin assignment of connectors →"7, 8
2 isolated relay contacts (N.O.). They can be assigned to the switching functions
(peak height monitoring) or be used as software-controlled outputs (e.g. for valve
actuation).
Signal designation: REL_1A ; REL_1B !DO 0
REL_2A ; REL_2B !DO 1
Logic assignment: DO .. = true !Contact closed
WARNING
Do not yet plug in the SP 200 power plug (→"16).
!Set up the power supply in such a way that:
• it cannot get wet e.g. by spilled water on the floor
• air circulation is not impeded and the ambient conditions are met.
"Insert the outlet connector of the SP 200 into the 24 VDC connector of the
QME.
tune
control
LAN
ready
24V
RS-232 -C
VACUUM
SP 200
3.3.1.1 Connection
3.3.1.2 control Connection
Digital output
3.3.2 Connecting the SP 200
Power Supply to the
Prisma

BG 805 204 BE / B (0203) QMS200.oi 15
tune
control LAN
ready
24V
RS-232 -C
VACUUM
PC
RS-232-C interface:
Use the supplied 9-conductor null modem
cable. (If required use the extension cable.)
→![1]
LAN interface:
TalkStar does not support the LAN interface.
TalkStar is a 32 bit software and requires Windows™ 95, 98 ,ME, NT or
2000.
Install the enclosed TalkStar software as follows:
!Turn on the PC and start the operating system.
"
#Follow the instructions of the installation program.
After the installation has been successfully completed, the program can be started
from the Start menu under "Programs" – "TalkStar" or via the Desktop by clicking
the icon.
3.3.3 Connecting the PC
3.4 Installing the Software

16 BG 805 204 BE / B (0203) QMS200.oi
4 Operation
DANGER
Caution: damaged product
Putting a damaged product into operation can be extremely hazard-
ous.
In case of visible damages, make sure the product is not put into
operation.
DANGER
Caution: line voltage
Incorrectly grounded products can be extremely hazardous in the
event of a fault.
Use only a 3-conductor power cable with protective ground. The power
connector may only be plugged into a socket with a protective ground.
The protection must not be nullified by an extension cable without
protective ground.
WARNING
Check the pressure in the QMA before you insert the power plug of the
SP 200. The pressure must be <10-4 mbar.
WARNING
Do always make sure that the limits values specified in the Technical
Data (→"6) are not exceeded and that the ambient conditions are
met.
Insert the power plug.
WARNING
The power plug should be easily accessible. If this is not the case at the instal-
lation site, a power switch or connector must be provided at an easily accessible
location.
4.1 First Time Operation
SP 200

BG 805 204 BE / B (0203) QMS200.oi 17
WARNING
The QME may only be turned on and off by inserting or detaching the power
plug.
LED Status Function Remedial action
24 VDC
24 V supply available ---
24 VDC
24 V supply not available Check the line voltage +
power connection
ready
Ready for operation ---
ready
Not ready Contact Pfeiffer Vacuum
Service Center
Start the TalkStar software in the Start menu under "Programs" – "TalkStar" or via
the Desktop by clicking the icon.
Talkstar allow access to many settings and functions via a context menus. Context
menus are activated by clicking the corresponding item with the right mouse button.
Once you have started Talkstar, you can access all available recipes via the
"Recipes" entry in the tree.
When the recipes are started with a double
click, the Prisma automatically goes online,
activates the emission if necessary and starts
measuring.
QME
TalkStar Software
4.2 Software Operation
General
Measurement

18 BG 805 204 BE / B (0203) QMS200.oi
The Y axis can be switched from "Ion Current" to
"Partial Pressure" and vice-versa.

BG 805 204 BE / B (0203) QMS200.oi 19
When a recipe has been started and the measurement data are displayed, you can
access a parameter by double clicking the corresponding curve.
Definition of mass dependent
calibration factors
Parameterizing in the
measurement data display
The properties of the Prisma are accessed
via the "Prisma 80" context menu. You can
access the mass dependent calibration
factors on the "Calibration Factors" page.

20 BG 805 204 BE / B (0203) QMS200.oi
In the Measurement data display, all settings of the currently active recipe can be
accessed by clicking the "Display Properties" button. On the "Tasks" page, com-
ponents / scans can be added or removed.
As soon as the new settings have been confirmed with OK, they are applied in the
(current) measurement.
Measurement data can be recorded online.
• To start recording, choose the icon on the tool bar.
!Use a file name in the syntax supported by Windows. The extension *.tdf
(TalkStar Data File) is automatically added.
• To finish recording, click the icon on the tool bar again.
To access the recorded data, select the corresponding file under "Saved Data".
To print individual diagrams, proceed as follows:
!Start a recipe or load data from the memory.
"In the window that is subsequently displayed, select the desired diagram.
#Click the printer symbol on the tool bar.
Addition and removal of
components / scans
Recording measurements
Printing of diagrams