Pfeiffer Vacuum Prisma QMS 200 User manual

Operating manual
incl. Declaration of conformity
BG 805 201 BE (9911) 1
QMS 200
Quadrupole mass spectrometer
Prisma
Installation
Operation
Maintenance
Technical data
PRODUCT SERVICE
geprüfte
Sicherheit

2BG 805 201 BE (9911) QMS200.om
In all communications with Pfeiffer, please specify the information given on the
product nameplates. For convenient reference copy the information for all items of
your system into the corresponding nameplate replicas in this document (→6).
This manual applies to products with part numbers
BK M25 250 QMA 200 Faraday/Iridium
BK M25 251-1 QMA 200 Faraday/Tungsten
BK M25 252 QMA 200 Channeltron/Iridium
BK M25 253-1 QMA 200 Channeltron/Tungsten
BK M25 272 QMA 200 Channeltron/Iridium, 300°C
BK M25 273-1 QMA 200 Channeltron/Tungsten, 300°C
PT D28 500 QME 200 Faraday, M=200
PT D28 501 QME 200 Channeltron, M=200
PT D28 502 QME 200 Faraday, M=300
PT D28 503 QME 200 Channeltron, M=300
PT D28 504 QME 200 Faraday, M=100
PT D28 505 QME 200 Channeltron, M=100
PT D28 506 QME 200 Faraday, M=200, Prisma with 90° connection
PT D28 507 QME 200 Channeltron, M=200, Prisma with 90°connection
PT D28 508 QME 200 Faraday, M=300, Prisma with 90°-connection
PT D28 509 QME 200 Channeltron, M=300, Prisma with 90° connection
PT D28 510 QME 200 Faraday, M=100, Prisma with 90°-connection
PT D28 511 QME 200 Channeltron, M=100, Prisma with 90° connection
B 5181 408 KY SP 200
The part number can be taken from the nameplate.
This document is based on the firmware version
BG 509 725 -H (or higher)
BG 509 726 -H (or higher)
If the unit does not function as described, check that it is equipped with this
firmware version (→Balzers Quadstar™ [1])
We reserve the right to make engineering changes without prior notice.
The Prisma mass spectrometer is designed for partial pressure analysis at
pressures below approx. 10-4 mbar. Typical applications are measurement,
monitoring and process control functions in vacuum systems.
Training
Pfeiffer Vacuum offers application, operating and maintenance courses for the
best use of this product. Please contact your local Pfeiffer Vacuum
representative.
Product identification
Validity
Intended use
Training

BG 805 201 BE (9911) QMS200.om 3
Table of contents
Product identification 2
Validity 2
Intended use 2
Training 2
1 Safety 4
1.1 Symbols used 4
1.2 Personnel qualifications 5
1.3 General safety instructions 5
1.4 Liability and warranty 5
2 Technical data 6
2.5 System overview 6
2.6 Standards complied with 8
2.7 Ambient conditions 8
2.8 QMS 200 F 8
2.9 QMS 200 M 9
2.10 QME 200 9
2.11 SP 200 10
2.12 Pin assignment 10
3 Installation 12
3.1 Unpacking 12
3.2 Montage 12
3.2.1 Required space 13
3.2.2 Required tools 14
3.2.3 QMA installation 15
3.2.4 QME installation 16
3.3 Electrical connections 16
3.3.1 QME connection 16
3.3.2 Connecting the SP 200 power supply to Prisma 19
3.3.3 Connecting the PC 20
3.4 Installing the software 20
4 Operation 21
4.1 Commissioning 21
4.2 Configuration 22
5 Maintenance 23
5.1 QMA 23
5.1.1 Filament change 23
5.2 QME 24
5.2.1 Cleaning 24
5.2.2 Replacing the filter mat 25
5.2.3 “TUNE” of RF generator 26
5.2.4 Optimizing the ion source sensitivity 26
5.2.5 Replacing the QME 27
6 Accessories and spare parts 28
7 Disposal 29
Appendix 30
A: LAN Interface 30
B: Literature 31
Declaration of contamination 32
Declaration of conformity 33
For cross-references within this document, the symbol (→XY) is used, for cross-
references to other documents, the symbol (→[Z]).

4BG 805 201 BE (9911) QMS200.om
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Note
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
DANGER
Caution: mains voltage
Products that are not professionally connected to ground can be
extremely hazardous in the event of a fault.
Connect the product according to the local regulations and ground it
correctly.
Note
Caution: dirt sensitive area
Dirt causes malfunctions or failures.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Note
Store the transport fastening devices and re-install them before
transporting the product again.
... please contact your nearest Pfeiffer Service Center.
The result is O.K.
The result is not as expected.
The lamp/display is lit.
The lamp/display is dark.
Labeling
1.1 Symbols used
Pfeiffer-
Vacuum

BG 805 201 BE (9911) QMS200.om 5
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials and the process media.
Consider possible reactions of the process media due to the heat generated by
the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before you begin to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to other users.
Pfeiffer assumes no liability and the warranty becomes null and void if the end-user
or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of changes (modifications, alterations etc.) to the product
•use the product with accessories, not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
1.2 Personnel qualifications
1.3 General safety
instructions
1.4 Liability and warranty

6BG 805 201 BE (9911) QMS200.om
2 Technical data
Note
In all communications with Pfeiffer please specify the information given
on the nameplate. For convenient reference transfer this information of
all assemblies into the nameplate replicas in this manual.
2.5 System overview
QME 200
QME 200 with 90° connection
QMA 200 F
Faraday
QMA 200 M
Channeltron
Typ: QME 200
No: BG D28
F-No:
24 V / 2 A
Pfeiffer Vacuum, D-35614 Asslar
Typ: QME 200
No: BG D28
F-No:
24 V / 2 A
Pfeiffer Vacuum, D-35614 Asslar
Typ: No: F-No:
Pfeiffer Vacuum
D-35614 Asslar
Typ: No: F-No:
Pfeiffer Vacuum
D-35614 Asslar

BG 805 201 BE (9911) QMS200.om 7
Balzers Limited
FL-9496 Balzers
QUADSTAR 422
Version: 6.xx
No: BN 882 236 -T
Copyright (C)
→28
SP 200
Power cable
Software Balzers Quadstar™
Accessories

8BG 805 201 BE (9911) QMS200.om
Safety
QME/QMA EN 61010-1:1993
IEC1010-1:1990 +A1:1992
Protection class I
SP 200 DIN EN 60950
IEC 950, UL 1950
CSA 22.2 Nr.234
EMV
Immunity EN 50082-2
Emission EN 50081-1
Operation Only in inside rooms
Altitude max. 2000 m NN
Protection IP 30
Pollution degree 2
Temperatures
Storage/transport -25°C...+70°C
Operation QME 0°C....+40°C
SP 0°C....+40°C
Relative humidity max. 80% up to 31°C,
linearly decreasing to 50% at 40°C
QMS 200 F1 QMS 200 F2 QMS 200 F3
Mass range u 1 ... 100 1 ... 200 1 ... 300
Detector type Faraday
Detection limit mbar <1×10-12 <2×10-12 <4×10-12
Unit resolution (valley,
full mass range)
at 10 % peak height
adjustable to
%
u
<10
0.5 ... 2.5
Sensitivity to Argon A/mbar >1×10-3 >6×10-4 >3×10-4
Contribution to
neighboring mass
40/41 ppm <10 <20 <50
Max. operating
pressure
mbar 1×10-4
Reproducibility of peak
ratio (constant
conditions over 8 h, N2
and Ar from air)
%±0.5
QMA operating
temperature °C 0 ... +150
Bakeout temperature
(QME removed) °C max. +200
HS ion source Open type, radial symmetric, 2 thoriated
iridium filaments (tungsten optional),
degassing by electron bombardment (10 mA,
300 V)
Mounting orientation any (→15)
Weight kg 3 (3.3 at 90° connection)
Connection flange DN 40 CF
2.6 Standards complied
with
2.7 Ambient conditions
2.8 QMS 200 F

BG 805 201 BE (9911) QMS200.om 9
QMS 200 M1 QMS 200 M2 QMS 200 M3
Mass range u 1 ... 100 1 ... 200 1 ... 300
Detector type Channeltron / Faraday
Detection limit mbar <10-14 /
<5×10-12
<10-14 /
<10-11 <2×10-14 /
<2×10-11
Unit resolution (valley,
full mass range)
at 10 % peak height
adjustable to
%
u
<10
0.5 ... 2.5
Sensitivity for argon A/mbar >200 /
>5×10-4
>200 /
>3×10-4
>100 /
>1.5×10-4
Contribution to
neighboring mass 40/41
ppm
<10 <20 <50
Max. operating pressure mbar 1×10-4
Reproducibility of the
peak ratio (constant
conditions over 8 h, N2
and Ar from air)
%±0.5
QMA operating
temperature °C 0 ... +120 / 0 ... +150
Bakeout temperature
(QME removed)
°C max. +200
HS ion source I Open, radial symmetric, 2 thoriated iridium
filaments (tungsten optional), degassing by
electron bombardment
(10 mA, 300 V)
Mounting orientation any
Weight kg 4.4 (4.7 at 90° connection)
Connection flange DN 40 CF
Measurement channels 64
Measurement modes Scan analog, Scan Bargraph, MID
Measurement cycles Mono- / Multichannel 1 ... 9999 Cycles
or Repeat
Measurement data buffer 128 Kbytes
MID dwell 10 ms ... 60 s
Measurement speed
Scan analog + Bargraph Peak
Scan Bargraph Stair
200 ms/u ... 60 s/u
20 ms/u ... 60 s/u
Electrometer amplifier 10-5 ... 10-12 A (f.s.), fix and autorange
Signal filter FIR Filter
Power supply 24 V= / 2.0 A
Interfaces RS-232-C
LAN 300 ... 19200 bit/s
Arcnet, fiberoptic (1000 m max.) 2.5 Mbit/s
Inputs
2 Analog differential
1 compact gauge head or
external interlock
1 digital In (EXT_RUN)
-5.12 ... +5.12 V, 11 bit, 1)
TPR 250, PKR 250
Sink current 0.5 mA (5 V=)
TTL, pull up 4.7 kOhm to +5 V
Outputs
4 Analog
2 Relays
-5.12 ... +5.12 V, 16 bit, 1 mA max., 200 Ohm
NO contact, 24 V~, 30 V=, 1 A
Weight 2.5 (2.8 at 90°) kg
1) Through series connection of two 110 kOhm resistors, 1%, in both lines, the
range is extended to ±10.24 V.
2.9 QMS 200 M
2.10 QME 200

10 BG 805 201 BE (9911) QMS200.om
Voltage 90 ... 260 V~
Frequency 47 ... 63 Hz
Power requirements 1.5 A @ 115 V / 60 W
0.8 A @ 230 V / 60 W
Output voltage 24 V=, stabilized
Insulation 10 MOhm min., output to ground
Overvoltage category II (according to EN 61010)
Weight 0.7 kg
TPR or PKR Digital Input Amphenol C91b
6-pin female
Pin Assignment
1 IDENT EXT_PROT
2 SUPP_COM COM
3SIGNAL -
4SIG_COM -
5 SCREEN SCREEN
6 SUPPLY -
WARNING
When this connection is used a shielded cable is
required for EMC reasons. The shield must contact
the connector housing. The opposite end should
remain open or be grounded so that no damaging
compensating currents can occur.
control
Pin Assignment Pin Assignment D-Sub.
H-Density
15-pin, female
1 AO_CH 1 + 9 AI_CH 1 -
2 AO_CH 2 + 10 EXT_RUN
3 AO_CH 3 + 11 REL_1A
4 AO_CH 4 + 12 REL_1B
5 AO_COM 13 REL_2A
6 AI_CH 0 + 14 REL_2B
7 AI_CH 0 - 15 GND
8 AI_CH 1 + Case Shield
WARNING
When this connection is used a shielded cable is required for EMC reasons. The
shield must contact the connector housing. The opposite end should remain
open or be grounded so that no damaging compensating currents can occur.
2.11 SP 200
2.12 Pin assignment
tune
control LAN
ready
24V
RS-232-C
VACUUM
12
63
45
11
15
6
10
1
5

BG 805 201 BE (9911) QMS200.om 11
LAN
Pin Assignment JIS F07
(TOSLINK)
T Transmit
R Receive
RS-232-C
Pin Assignment Pin Assignment D-Sub.
9-pin male
1 n.c 6 n.c
2 Received Data (RXD) 7 optional signal
Request To Send (RTS)
3 Transmitted Data (TXD) 8 optional signal
Clear To Send (CTS)
4 optional signal
Data Terminal Ready
(DTR)
9n.c
5 Signal Ground (SGND) Case Shield
WARNING
When this connection is used a shielded cable is required for EMC reasons. The
shield must contact the connector housing. The opposite end should remain
open or be grounded so that no damaging compensating currents can occur.
24 V DC
Pin Assignment 3-pin female
1 + 24 V DC
2GND
3GND
Case Screen
QMA
Pin Assignment 13-pin, male
1 Reserve
2Extr
3Focus
4HV-
5 Filament 1
6 Filament 2
7 Anode
8RF-
9GND
10 GND
11 RF +
12 Filament Common
13 EP
DANGER
This connection carries hazardous
voltages
tune
control LAN
ready
24V
RS-232-C
VACUUM
tune
control LAN
ready
24V
RS-232-C
VACUUM
T
R
61
95
1
23
6
7
8
9
10
11
13
12 1
2
3
4
5

12 BG 805 201 BE (9911) QMS200.om
3Installation
Note
Store the transport fastening devices and re-install them before
transporting the product again.
DANGER
Voltages up to 330 VDC appear on the QMA 200 during operation.
Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed to
this voltage under unfavorable conditions. If as a result such parts (including the
lines and connected equipment!) become hazardous, they must be arranged or
protected in such a way that no sparkover and charge transfer can occur.
If the QMA can be touched while the vacuum system is open, additional
protection is needed, e.g.:
•mechanical protection against touching
•forced disconnection of the SP 200 power supply when the system is opened.
DANGER
No external hazardous voltages are allowed to be transferred to the electrodes of
the QMA 20. If such danger sources exist in the vacuum chamber, additional
safety measures (e.g. better placement, shielding, grounding, etc.) must be taken
that reliable preclude such influences. Also lower external voltages acting on the
QMA may damage the electronics and lead to unreliable measurement results.
Suitable precautions are to be taken as mentioned above.
WARNING
The QMA must be correctly installed from a vacuum engineering point of view,
i.e. the gases to be detected must have unhindered access to the analyzer.
Vacuum coating of the analyzer must be prevented.
Note
Make sure you adhere to the special requirements concerning cleanliness and
damage prevention when working with vacuum components.
3.1 Unpacking
3.2 Montage

BG 805 201 BE (9911) QMS200.om 13
Note
Note the required installation depth. Do not kink the cables.
Note
The QMA 200 F may only be installed in flanges or rubes with an internal
diameter ≥37 mm, otherwise short circuits to the wall can occur.
The diameter of the extension tube for the QMA 200 M must be at least
40.5 mm.
3.2.1 Required space
Faraday
Channeltron + Faraday
Prisma with 90° connection
Faraday
ø37
228 83(100)
DN 40 CF-F
KA 118
184
130
141
127.5
228
(100)
DN 40 CF-F
KA 138
ø37
11854.6 27
313
141
127.5
ø37
118228 54(100)
141
127.5
DN 40 CF-F
KA 117

14 BG 805 201 BE (9911) QMS200.om
4 mm hexagon socket screw key
10 mm open-end wrench (2 pieces)
Screwdriver (blade width 3…4 mm)
Prisma with 90° connection
Channeltron + Faraday
SP 200
3.2.2 Required tools
228
(100)
DN 40 CF-F
KA 139
ø37
130
54.6 27
313
83
141
127.5
3000
56
80
165

BG 805 201 BE (9911) QMS200.om 15
DANGER
The analyzer flange must be properly grounded.
•By connecting with all 6 screws to the properly grounded. vacuum system.
•If the mounting flange is not grounded, the QMA 200 flange (grounding screw
M4) must be connected to the protective ground by means of a separate
ground conductor. Establish this connection with yellow/green insulated or
bare stranded copper wire.
•2.5 mm² if mech. protected according to DIN VDE 110 T540
•4.0 mm² if unprotected
Note
The QMA should preferably be mounted horizontally (with the guiding groove
downward). This results in optimum protection of the QME against falling objects
and affords easy installation and excellent access to the front panel.
On the Prisma with 90° connection this results in a vertically suspended
arrangement of the QME 200.
QMA 200 F QMA 200 M
3.2.3 QMA installation
Removing the transport brace
and flanging the analyzer to
the vacuum chamber
n
Set the QMA into the
supplied mounting tool.
oCarefully remove the
transport brace on the
QMA and save it for
possible future use.
pTransport brace
Carefully pull off the
transport brace and
save it for possible
future use
qFlange the analyzer to
the vacuum chamber
nØ
nØ
o×
o×
p×
Transport brace
Mounting tool
Guide groove

16 BG 805 201 BE (9911) QMS200.om
DANGER
The QME may be mounted only to a correctly installed QMA as the only ground
connection is via the QMA flange.
The 24 V feeder line from the SP 200 must never be connected if QMA is not
screw fastened to the QME.
nWith a 4mm hexagon-socket-screw key loosen the two screws on the black
plastic connection piece of the QME so that the moving part has a play of
2…3 mm.
oCarefully slide the QME onto the mounted QMA up to the notch mark.Make
sure the positioning on the QME through the grounding tab and the guide
groove is correct. Do not apply excessive force.
pFirmly tighten the two hexagon-socket-head screws. These screws secure
the QME mechanically and ensure electrical safety by providing ground
contact.
WARNING
All electrical connections must have cable strain relief. Route the cables
separately from EMI sources.
WARNING
For reasons of electromagnetic compatibility a single central grounding point is
strongly recommended for all connected units (pumping station, SP 200,
computer, recorders, etc.). A multiple AC power outlet or a common line voltage
distributor with power switch fulfills this requirement in a simple manner.
Exception:
The LAN interface should be used for a remotely installed PC and/or an
environment with strong electromagnetic fields.
3.2.4 QME installation
3.3 Electrical connections
3.3.1 QME connection
np
o
Grounding
tab
Guide groove

BG 805 201 BE (9911) QMS200.om 17
This connection allows vacuum measurements with a TPR 250 or PKR 250
compact gauge head, and protection of the filament FIL and Channeltron SEM
against inadequate vacuum conditions.
•TPR
Pirani Compact Gauge
5×10-4 ... 1000 mbar
or
•PKR
FullRange™ Compact Gauge
5×10-9 ... 1000 mbar
or
•Digital input
•Control input for interlocking the Channeltron
and filament supply
or
•Free digital input
When the TPR or PKR gauge head is connected, total-pressure dependent control
and monitoring of the SEM and filament supply can be activated. The switching
thresholds can be set by software (→Balzers Quadstar™ Tune Up / Tune / Ion
Source).
The function is selected with the SEM+FIL parameter:
→Balzers Quadstar™ - Chapter “Parameter Setup: QMS-Configuration“
EXTERN:
The SEM and filament supplies are automatically turned on and off as a function of
the total pressure.
EXT_PROT:
The SEM and filament supplies are turned off when the specified total pressure
threshold (Protection) is exceeded. They are turned on under software control if the
total pressure is below the power off threshold.
INTERN:
Turned on and off under software control.
If no gauge head is connected the filament and Channeltron can be controlled by a
floating contact between the signal lines EXT-PROT and COM.
The function is selected with the SEM+FIL parameter:
→Balzers Quadstar™ - Chapter “Parameter Setup: QMS-Configuration“
EXTERN:
Direct on/off switching of the SEM and filament supplies:
Contact open →switched off
Contact closed →switched on
EXT_PROT:
Only the SEM and filament supply (Protection) are turned off. They are switched on
under software control, provided the contact was previously closed.
Open the contact →Switch-off
3.3.1.1 - connection
Total pressure
measurement and protective
functions
Control with TPR / PKR
Control with contact
tune
control LAN
ready
24V
RS-232-C
VACUUM

18 BG 805 201 BE (9911) QMS200.om
If SEM+FIL control is not used, the input can be used as a digital input for a
floating contact between the signal lines EXT_PROT and COM. In this case the
configuration parameter SEM+FIL must be set to INTERN.
Logic assignment: Contact open: →DI 0 = true
Contact closed: →DI 0 = false
Digital input Digital outputs Analog inputs Analog outputs
•External
measurement
cycle start or
•Free digital
input
(a second digital
inputs is available
according to the
connection)
Switching thresholds
or e.g. valve
open/close
Reading of
measured values,
e.g. pressure,
temperature, gas
flow
•Measured
values, e.g. ion
currents
•Calculated
values, e.g.
concentration
Specifications and connector pin assignment →9,10
External measurement cycle start with a floating contact between the signal lines
EXT_RUN and GND. There are four control methods:
→Communication line QMS 200: [4]
(Frame No. 60; not supported by Balzers Quadstar™):
INTERN:
The measurement cycle is started and stopped under software control
EXT-AUTO:
The start is initiated with the positive edge of the EXT_RUN signal. The
measurement cycle continues until it is canceled with <halt> or until the preset
number of measurement cycles has been performed.
EXT-NORM
The start is initiated with the positive edge of the EXT_RUN signal. The
measurement cycle keeps running as long as the trigger level is high or until it is
canceled <halt> or until the preset number of cycles has been performed.
EXT-SNGL:
The start is initiated with the positive edge of the EXT_RUN signal. However, the
unit must first be prepared by entering <run>. The measurement cycle continues
until it is canceled with <halt> or until the preset number of measurement cycles
has been performed.
Digital input
3.3.1.2 control connection
External measurement cycle
start
Parameter: cycle /TRIG
tune
control LAN
ready
24V
RS-232-C
VACUUM

BG 805 201 BE (9911) QMS200.om 19
If “External measurement cycles/Start” is not used, the EXT_RUN connection is
available as a digital input for interrogating a contact state. For this application the
cycle/TRIG parameter must be set to INTERN:
Logic assignment Contact open: →DI 1 = true
Contact closed: →DI 1 = false
2 isolated relay contacts (N.O.). They can be assigned to the switching functions
(peak height monitoring) or be used as software-controlled outputs (e.g. for valve
actuation).
Signal designation: REL_1A ; REL_1B →DO 0
REL_2A ; REL_2B →DO 1
Logic assignment DO .. = true →Contact closed
4 analog output channels with a common reference point AO_COM
They can be assigned to measurement channels or be controlled directly by the
software, e.g. for outputting calculated concentration values.
Signal designation: AO_CH 1 + ; AO_COM →AO - Channel 1
AO_CH 2 + ; AO_COM →AO - Channel 2
AO_CH 3 + ; AO_COM →AO - Channel 3
AO_CH 4 + ; AO_COM →AO - Channel 4
2 differential, high-impedance analog inputs. They can be assigned to
measurement channels or be read directly by the software.
Signal designation: AI_CH 0 + ; AI_CH 0 - →AI - Channel 0
AI_CH 1 + ; AI_CH 1 - →AI - Channel 1
WARNING
Do not yet plug in the SP 200 power plug →21
nSet up the power supply in such a way that:
• it cannot get wet e.g. by spilled water on the floor,
• air circulation is not impeded and the ambient conditions are satisfied.
oInsert the outlet connector of the SP 200 into the 24 V= connector of the
QME.
Digital input
Digital output
Analog output
Analog input
3.3.2 Connecting the SP 200
power supply to Prisma
tune
control LAN
ready
24V
RS-232-C
VACUUM
SP 200

20 BG 805 201 BE (9911) QMS200.om
nSwitch on your PC and install the supplied Balzers QuadstarTM software.
The RGA program is also loaded during this installation procedure.
→Balzers QuadstarTM [1]
The installation program creates the group "QUADSTAR 422“ (if it does not exist
yet).
3.3.3 Connecting the PC
3.4 Installing the software
nOpen the enclosed Balzers
QuadstarTM software package.
oRemove the enclosed cables.
pEstablish the connections.
RS-232-C Interface:
Use the supplied 9-conductor null
modem cable.
(If required use the extension cable
and/or the DB9 male / DB25 female
Adapter).
→Balzers QuadstarTM [1]
LAN interface:
If a LAN interface is used:
→29
→Balzers QuadstarTM [1]
ARCNET
Karte im PC
tune
control LAN
ready
24V
RS-232-C
VACUUM
PC