Pfeiffer Vacuum CCR 351 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
CCR 351∣352∣353
Capacitive gauge

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support
you in your individual application with maximum performance and without malfunctions. The
name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and
complete range of top-quality products and first-class service. From this extensive, practical
experience we have gained a large volume of information that can contribute to efficient
deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/36

Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on product 8
1.3.4 Abbreviations 8
1.4 Trademark proof 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 12
2.4 Limits of use of product 12
2.5 Proper use 13
2.6 Foreseeable improper use 13
2.7 Responsibilities and warranty 13
2.8 Owner requirements 13
2.9 Personnel qualification 14
2.9.1 Ensuring personnel qualification 14
2.9.2 Personnel qualification for maintenance and repair 14
2.9.3 Advanced training with Pfeiffer Vacuum 14
2.10 Operator requirements 15
3 Product description 16
3.1 Function 16
3.2 Identifying the product 16
3.3 Scope of delivery 16
4 Transport and storage 17
4.1 Transporting the product 17
4.2 Storing the product 17
5 Installation 18
5.1 Establishing vacuum connection 18
5.2 Establishing electric connection 19
6 Operation 21
7 Dismantling 22
8 Maintenance 23
8.1 Cleaning of components 23
8.2 Calibrating gauge 24
9 Shipping 26
10 Recycling and disposal 27
10.1 General disposal information 27
10.2 Dispose of gauges 27
11 Service solutions by Pfeiffer Vacuum 28
12 Technical data and dimensions 30
12.1 General 30
Table of contents
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12.2 Technical data 30
12.3 Dimensions 32
EC Declaration of Conformity 33
UK Declaration of Conformity 34
Table of contents
4/36

List of tables
Tbl. 1: Applicable documents 7
Tbl. 2: Variants 7
Tbl. 3: Abbreviations used 9
Tbl. 4: Permissible ambient conditions 13
Tbl. 5: Constants for converting measuring signal and pressure 21
Tbl. 6: Recommended final pressure for zero point calibration 24
Tbl. 7: Conversion table: Pressure units 30
Tbl. 8: Conversion table: Units for gas throughput 30
Tbl. 9: Measured and pressure values 30
Tbl. 10: Electrical data 31
Tbl. 11: Internal volume and weight 31
Tbl. 12: Ambient conditions 31
Tbl. 13: Temperatures 32
Tbl. 14: Substances in contact with media 32
List of tables
5/36

List of figures
Fig. 1: Connection diagram 19
Fig. 2: Relation between measuring signal and pressure 21
Fig. 3: Zero point calibration with button 25
Fig. 4: Dimensions 32
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This document describes the function of the products listed in the following and provides the most im-
portant information for safe use. The description is written in accordance with the valid directives. The
information in this document refers to the current development status of the products. The document
retains its validity assuming that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
Declaration of conformity A component of these instructions
Tbl. 1: Applicable documents
You can find this document in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document applies to products with the following article numbers:
Article number Type Connection Measuring range min/max.
PT R27 559 CCR 351 4 VCO external thread 1 × 10-1 Torr/1000 Torr (FS)
PT R27 569 CCR 352 1 × 10-2 Torr/100 Torr (FS)
PT R27 579 CCR 353 1 × 10-3 Torr/10 Torr (FS)
Tbl. 2: Variants
You can find the part number on the rating plate of the product.
Pfeiffer Vacuum reserves the right to make technical changes without prior notification.
The figures in this document are not to scale.
Dimensions are in mm unless stated otherwise.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
About this manual
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Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on product
This section describes all the stickers on the product along with their meanings.
D-35614 Asslar
Mod.
P/N
S/N
Input
CCR 35x
PT R27 5x9
xxxxxxxxx
xx...xx V DC x W
Made in Liechtenstein 2023/10
3103457
Rating plate
The rating plate is located on the side of
the unit.
1.3.4 Abbreviations
Abbreviation Explanation
AC Alternating current (AC)
ATM Atmosphere
c Constant for converting measuring signal and pressure
DC Direct current
EMC Electromagnetic compatibility
FKM Fluorinated rubber
FS Measuring range max. (full scale)
GND Ground
HV High vacuum
LPS Limited power source
About this manual
8/36

Abbreviation Explanation
MSL Mean sea level
p Pressure
PE Protective earth (earthed conductor)
PELV Protective extra low voltage
U Measuring signal [V] (output voltage)
VCO Trademark of the Swagelok Company
Tbl. 3: Abbreviations used
1.4 Trademark proof
●VCO® is a trademark of the Swagelok Company.
About this manual
9/36

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during installation
DANGER
Danger to life due to dangerous contact voltage
Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If
you come into contact with dangerous contact voltage, this can result in injury through electric shocks
or even death.
►Only connect the product to devices which meet the following criteria:
●Requirements of the earthed protective extra-low voltage (PELV)
●Limited power source (LPS) Class 2
►Secure the line to the product.
–Pfeiffer Vacuum measuring and control equipment complies with this requirement.
Safety
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DANGER
Danger to life due to electric shock
An improperly grounded product is potentially fatal in the event of a fault.
►Connect the product galvanically with the earthed vacuum chamber.
►Ensure that the connection complies with the requirements of a protective connection according
to EN 61010.
–VCO connections comply with this requirement.
WARNING
Risk of poisoning from toxic process gases escaping
High mechanical, chemical, or thermal stress causes leaks in the sensor. In processes involving toxic
process media, there is a risk of injury and danger to life from poisoning by escaping gas in the event
of overpressure in the vacuum system.
►Prevent high mechanical, chemical, or thermal stress from occurring.
►Prevent overpressure from occurring in the vacuum system.
►Take appropriate measures to prevent hazards or damage caused by the release of process me-
dia, such as gas supply interruption, extraction, or leak testing.
Risks during maintenance
DANGER
Danger to life from electric shock caused by moisture ingress
Water that has entered the unit will result in personal injury through electric shocks.
►Only operate the unit in a dry environment.
►Operate the unit away from fluids and sources of moisture.
►Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service.
►Always disconnect the power supply before cleaning the unit.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Health hazards due to cleaning agent
The cleaning agent being used causes health hazards which could include, for example, poisoning,
allergies, skin irritations, chemical burns or damage to the airways.
►When handling cleaning agents, observe the applicable regulations.
►Adhere to safety measures regarding handling and disposal of cleaning agents.
►Be aware of potential reactions with product materials.
Risks when shipping
WARNING
Risk of poisoning from contaminated products
Where products that contain harmful substances are shipped for maintenance or repair purposes, the
health and safety of service personnel is at risk.
►Comply with the instructions for safe distribution.
Safety
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Risks during disposal
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
2.3 Safety precautions
The product is designed according to the latest technology and recognized safety engineering rules.
Nevertheless, improper use can result in danger to operator all third party life and limb, and product
damage and additional property damage.
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Pass on safety instructions to all other users.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the device.
►Observe the unit protection degree prior to installation or operation in other environments.
►Provide suitable touch protection, if the surface temperature exceeds 70 °C.
►Inform yourself about any contamination before starting work.
2.4 Limits of use of product
Parameter Value
Relative humidity of air At temperatures up to +31°C max. 80%
At temperatures up to +40°C max. 50%
Mounting orientation Arbitrary
Usage Only in indoor areas
Installation altitude max. 4000 m MSL
Safety
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Parameter Value
Degree of pollution 2
Protection degree IP40
Tbl. 4: Permissible ambient conditions
2.5 Proper use
The gauge is used for vacuum measurement of gases within its defined measuring range.
Use the product according to its intended purpose
►Operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit or with an
evaluation unit provided by the customer.
►Install, operate and maintain the gauge exclusively as prescribed in these operating instructions.
►Observe the limits of use according to the technical data.
►Observe the technical data.
2.6 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use; in particular:
●Use outside the mechanical and electrical limits of use
●Use with corrosive or explosive media, if this is not explicitly permitted
●Use for the measurement of highly flammable or combustible gases mixed with an oxidizing agent
(e.g. atmospheric oxygen) within the explosion limits
●Use outdoors
●Use after technical changes (inside or outside on the product)
●Use with replacement or accessory parts that are not suitable or not approved
2.7 Responsibilities and warranty
Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party:
●disregards this document
●does not use the product for its intended purpose
●carries out any modifications to the product (conversions, changes, etc.) that are not listed in the
corresponding product documentation
●operates the product with accessories that are not listed in the corresponding product documenta-
tion
The operator is responsible for the process media used.
2.8 Owner requirements
Safety-conscious working
1. Only operate the product in a technically flawless state.
2. Operate the product in line with its intended purpose, safety and hazard-conscious and only in
compliance with these operating instructions.
3. Fulfill the following instructions and monitor the observation of the following instructions:
–Proper use
–Generally applicable safety instructions and accident prevention regulations
–International, national and locally applicable standards and guidelines
–Additional product-related guidelines and regulations
4. Only use original parts or parts approved by Pfeiffer Vacuum.
5. Keep the operating instructions available at the place of installation.
6. Ensure personnel qualification.
Safety
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2.9 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.9.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.9.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.9.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
Safety
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2.10 Operator requirements
Observing relevant documents and data
1. Read, observe and follow this operating instruction and the work instructions prepared by the op-
erating company, in particular the safety and warning instructions.
2. Install, operate and maintain the product only in accordance with these operating instructions.
3. Carry out all work only on the basis of the complete operating instructions and applicable docu-
ments.
4. Comply with the limits of use.
5. Observe the technical data.
6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance
of the product are not answered in these operating instructions.
–You can find information in the Pfeiffer Vacuum service area.
Safety
15/36

3 Product description
3.1 Function
The gauge has a capacitive measuring element with a ceramic diaphragm. The pressure deflects the
ceramic diaphragm. The gauge detects the deflection of the diaphragm as a change in the capacitance.
The electronics convert the capacitance change to an output signal (DC). The output signal is linear
with the pressure to be measured. The output pressure value is independent of the gas type to be
measured.
3.2 Identifying the product
You will need all the data from the rating plate to safely identify the product when communicating with
Pfeiffer Vacuum.
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
3.3 Scope of delivery
The scope of delivery includes the following parts:
●Gauge (in clean room packaging)
●Stylus (Ø 1.1 mm)
●Calibration certificate
●Operating instructions
Unpacking the product and checking completeness of the shipment
1. Unpack the product.
2. Remove the transport fasteners, transport protection etc.
3. Store the transport fasteners, transport protection etc. in a safe place.
4. Check that the shipment is complete.
5. Ensure that no parts are damaged.
Product description
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4 Transport and storage
4.1 Transporting the product
NOTICE
Damage caused by incorrect transport
Transport in unsuitable packaging or failure to install all transport locks can result in damage to the
product.
►Comply with the instructions for safe transport.
Packing
We recommend keeping the transport packaging and original protective cover.
Transport product safely
►Observe the weight specified on the transport packaging.
►Where possible, always transport or ship the product in the original transport packaging.
►Always use dense and impact-proof transport packaging for the product.
►Remove the existing protective cover and transport protections only immediately prior to installa-
tion.
►Reattach transport locks and transport protections prior to each transport.
4.2 Storing the product
NOTICE
Damage caused by improper storage
Improper storage will lead to damage to the product.
Static charging, moisture, etc. will lead to defects on the electronic components.
►Comply with the instructions for safe storage.
Packing
We recommend storing the product in its original packaging.
Store product safely
►Store the product in a cool, dry, dust-free place, where it is protected against impacts and me-
chanical vibration.
►Always use dense and impact-proof packaging for the product.
►Where possible, store the product in its original packaging.
►Store electronic components in antistatic packaging.
►Maintain the permissible storage temperature.
►Avoid extreme fluctuations of the ambient temperature.
►Avoid high air humidity.
►Seal connections with the original protective caps.
►Protect the product with the original transport protection (where available).
Transport and storage
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5 Installation
5.1 Establishing vacuum connection
DANGER
Danger to life due to electric shock
An improperly grounded product is potentially fatal in the event of a fault.
►Connect the product galvanically with the earthed vacuum chamber.
►Ensure that the connection complies with the requirements of a protective connection according
to EN 61010.
–VCO connections comply with this requirement.
WARNING
Risk of poisoning from toxic process gases escaping
High mechanical, chemical, or thermal stress causes leaks in the sensor. In processes involving toxic
process media, there is a risk of injury and danger to life from poisoning by escaping gas in the event
of overpressure in the vacuum system.
►Prevent high mechanical, chemical, or thermal stress from occurring.
►Prevent overpressure from occurring in the vacuum system.
►Take appropriate measures to prevent hazards or damage caused by the release of process me-
dia, such as gas supply interruption, extraction, or leak testing.
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
►When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
►Only use clean tools.
►Make sure that the connection flanges are free of grease.
►Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
►Carry out all work in a well lit area.
NOTICE
Damage caused by vibrations
Vibrations and strikes destroy the ceramic sensor, which is sensitive to shocks.
►Treat the gauge carefully.
►Avoid vibrations and strikes.
►Do not drop the gauge.
Prerequisites
●Appropriate ambient conditions
●Operating temperature within permissible range
●Adequate room available for electrical connection (e.g. permissible bending radii for cables)
Recommendations
►If possible, make sure that the gauge is not exposed to any vibrations during operation, as vibra-
tions will lead to deviations in the measured values.
►Mount the gauge in a horizontal to upright mounting orientation (flange facing downwards).
–This prevents condensate and particles from accumulating in the measurement chamber.
►Ensure that the button of the gauge can be easily accessed with the stylus once fitted.
Installation
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Procedure
1. Remove the protective cap and store in a safe place.
2. Assemble the gauge with vacuum components from the Pfeiffer Vacuum Components Shop on
the vacuum system.
5.2 Establishing electric connection
DANGER
Danger to life due to dangerous contact voltage
Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If
you come into contact with dangerous contact voltage, this can result in injury through electric shocks
or even death.
►Only connect the product to devices which meet the following criteria:
●Requirements of the earthed protective extra-low voltage (PELV)
●Limited power source (LPS) Class 2
►Secure the line to the product.
–Pfeiffer Vacuum measuring and control equipment complies with this requirement.
Required tool
●Torque wrench (≤ 0.4 Nm)
Required materials
●Self-fabricated measurement cable for an evaluation unit provided by the customer
Remote
Zero
Adjust
100K
7
Ident
1
8
4
9
680nF
16 V
10W
Mess-
signal
case
Fig. 1: Connection diagram
1 Measuring signal 7 Identification or remote zero adjust
2, 3 not connected 8 Signal ground
4 Supply 9 Supply ground (GND)
5, 6 not connected case Plug housing
Manufacturing measurement cable
Additional information regarding the measurement cable type and conductor cross-sections can be ob-
tained from the technical data.
1. Observe the following steps to ensure optimum signal quality, whereby ground loops, differences
in potential or EMC will influence the measuring signal.
2. Use a cable with braided shield and metallic connector housing.
3. Connect the supply earth directly with the protective earth for power supply pack.
4. Use a differential measuring input with separate signal earth and supply earth.
5. Ensure that the potential difference for surge protection between the supply earth and the housing
is ≤ 16 V.
6. Install the D-sub cable socket.
Installation
19/36

Establishing electric connection
1. Connect the measurement cable to the gauge.
2. Tighten the locking screw on the D-sub cable socket.
–Tightening torque: ≤ 0.4 Nm
3. Connect the gauge to a Pfeiffer Vacuum total pressure measuring and control unit or an evalua-
tion unit provided by the customer.
Installation
20/36