Pfeiffer Vacuum PrismaPlus QMG 220 User manual

Operating Instructions
EN
BG 5214 BEN / B (1603)
PrismaPlus®
QMG 220™
Compact Mass Spectrometer

2
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
PrismaPlus®is a trademark of Pfeiffer Vacuum GmbH.
QUADERA®is a trademark of INFICON AG.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, Pfeiffer Vacuum assumes no
responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this
product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2016 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Contents
3
Contents
Trademarks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Disclaimer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Copyright . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Product Identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.3 Intended Use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Personnel Qualifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.3 General Safety Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.5 Training . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 System Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 System Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
3.3 Dimensions [mm] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.1 Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.2 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.3 Space Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.4 Required Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.5 QMA 200 Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.6 QME 220 Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
4.7 Input/Output Module IO 220 Installation/Removal . . . . . . . . . . . . . . . . . . 24
4.8 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4.9 Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
5Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
5.1 Initial Start Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
5.2 Note before start up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
6Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
6.1 QMA 200 (Filament Replacement) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
6.2 QME 220. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
7Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
8Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
9Spare Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
10 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
11 Returning the Product. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
12 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
13 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

4
Introduction
1 Introduction
1.1 Product Identification
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy all system information into the spaces
provided.
CAUTION
Read through the operating instructions carefully before operating the QMG 220. Keep
this document in the vicinity of the equipment, accessible by all users.
The chapter 'Safety' contains important information concerning the symbols used. It is
essential to take note of this information in order to operate the QMG 220 safely.
Model:
PN:
SN:
V A
Pfeiffer Vacuum, D-35614 Asslar

Introduction
5
1.2 Validity
This document applies to products with part numbers listed.
Analyzers (All analyzers type QMA 200)
Part
number
Detector Filaments Additional technical data
RemarksFaraday C-SEM Tungsten
Iridium,
yttriated Closed
Molybdenum
wiring 300 °C
Extraction
orifice
2mm
PT M25 250 ■■
PT M25 251 ■■
PT M25 252 ■■
PT M25 253 ■■
PT M25 254 ■■ ■
PT M25 255 ■■ ■
PT M25 256 ■■■
PT M25 257 ■■■
PT M25 261 ■■ ■
PT M25 270 ■■ ■
PT M25 271 ■■ ■
PT M25 272 ■■ ■
PT M25 273 ■■ ■
PT M25 274 ■■ ■ ■
PT M25 275 ■■ ■ ■
PT M25 276 ■■■ ■
PT M25 277 ■■■■ ■
PT M25 278 ■■ ■ ■ ■
PT M25 282 ■■ ■ ■
PT M25 283 ■■■
PT M25 285 ■■ Grid ion source
PT M25 286 ■■ ■ Grid ion source
PT M25 290 ■■ Cross-Beam ion source
filament 0.15 mm
PT M25 291 ■■ Cross-Beam ion source
filament 0.13 mm
PT M25 292 ■■ adjustable
PT M25 293 ■■ ■Cross-Beam ion source
filament 0.15 mm
PT M25 294 ■■ ■ Cross-Beam ion source
filament 0.13 mm
PT M25 295 ■■ ■adjustable
PT M25 296 ■■ Cross-Beam ion source,
rotated 90°
PT M25 297 ■■ ■ Cross-Beam ion source
filament 0.15 mm

6
Introduction
IO 220 PT M28 699 I/O module IO 220 complete.
QME 220
SP 220 24 VDC power supply (type P66A 6PI)
The part number can be taken from the product nameplates.
1.3 Intended Use
The PrismaPlus®mass spectrometer is designed for partial pressure analysis at
pressures <10-4 mbar. Typical applications are measurement, monitoring, and process
control functions in vacuum systems.
The PrismaPlus is not intended to produce measurement results on which the safety of
persons or large assets depend. For such applications the safety must be ensured by
additional measures.
Part number Mass range,
amu
Analyzer connection IO 220
PT M28 601 1 … 100 straight without
PT M28 602 1 … 200 straight without
PT M28 603 1 … 300 straight without
PT M28 611 1 … 100 straight with
PT M28 612 1 … 200 straight with
PT M28 613 1 … 300 straight with
PT M28 621 1 … 100 90° without
PT M28 622 1 … 200 90° without
PT M28 623 1 … 300 90° without
PT M28 631 1 … 100 90° with
PT M28 632 1 … 200 90° with
PT M28 633 1 … 300 90° with

Safety
7
2 Safety
2.1 Symbols
2.2 Personnel Qualifications
All work described in this document may only be carried out by persons who have
suitable technical training and the necessary experience or who have been instructed by
the end-user of the product.
2.3 General Safety Instructions
Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Adhere to the applicable regulations and take the necessary precautions for all work
you are going to do and consider the safety instructions in this document.
Before beginning to work, find out whether any vacuum components are
contaminated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
2.4 Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties:
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.) on the product
use the product with accessories and options not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media used.
2.5 Training
Pfeiffer Vacuum offers application, operating and maintenance courses for the best use
of this product. Please contact your local Pfeiffer Vacuum representative.
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
CAUTION
Information on correct handling or use. Disregard can lead to malfunctions or minor
equipment damage.
NOTE
Notice.

8
Technical Data
3 Technical Data
3.1 System Overview
The mass spectrometer system comprises of the following components:
NOTE
In all communications with Pfeiffer Vacuum please specify the information given on the
nameplate. For convenient reference transfer this information of all assemblies into the
nameplate replicas in this manual.
PC
Link to PC
(Ethernet)
DI AI DO AO
C-SEM
Analyzer QMA 200
Ion source Mass filter
Faraday detector
Electric unit
QME 220
Input/output
module IO 220
Power supply
SP 220
Mains
Quadera software
Vacuum gauge
Model:
PN:
SN:
V A
Pfeiffer Vacuum, D-35614 Asslar

Technical Data
9
Electronic unit
QME 220
or
Electronic unit
QME 220 with
90° connection
Input/output module
IO 220 (option)
Analyzer QMA 200 F,
Faraday detector
Analyzer QMA 200 M,
secondary electron
multiplier (C-SEM)

10
Technical Data
Power supply SP 220
Mains cable
Software QUADERA®See the Online Help of QUADERA®software (CD-ROM).

Technical Data
11
3.2 System Data
QME 220 front panel
elements
Front panel QME 220 without IO 220 Front panel QME 220 with
IO 220 installed
Front panel element Description
Connectors < 24 V= > Connector for QME 220-power supply
SP 220 (1)
= connector on the IO 220 for an additional
power supply SP 220 (2) for vacuum gauges
with a high power consumption
p. 27
p. 36
LED < 24 V= > Indicator: 24 V o.k. p. 38
LED < RUN > Indicator: QME 220 firmware running p. 38
LED < EMISS > Indicator: Emission on p. 38
Connector < LAN > Ethernet connection (PC) p. 28
Connector < USB > USB connection
(only for service purposes)
-
Connector < I/O > interconnection to IO 220
EXT_PROT input
p. 29
Connector < TP GAUGE > Vacuum gauge connector
(analog)
p. 35
Connector < ANALOG I/O > Analog inputs / outputs p. 30
Connector < DIGITAL I/O > Digital inputs / outputs p. 32
Connector < SERIAL > Vacuum gauge connector
(digital)
p. 35
VACUUM
24V=
24V= RUN EMISS
LAN USB I/O
VACUUM
24V=
24V= RUN EMISS
LAN USB I/O
ANALOGI/O
DIGITALI/OSERIAL
TP
GAUGE
1
2
3
4
56
VACUUM

12
Technical Data
QMG 220 F,
Faraday detector
General Data
HS ion source (High
sensitivity- ion source)
Closed HS ion source
1) For non overlapping components with mass >4 u.
Detector type Faraday
Unit resolution (valley, entire mass
range) at 10 % peak height adjustable to %
u
<10
0.5 … 2.5
Max. operating pressure mbar 1×10-4
Reproducibility of the peak ratio
(constant conditions during 8 h, N2and
Ar from air) % ±0.5
QMA 200 operating temperature °C 0 … +150
Bakeout temperature
(QME 220 removed) °C max. +200
Mounting orientation any (p. 21)
Weight kg 2.4 (2.7 with 90° connection)
Connection flange DN 40 CF
Design principle,
field of application
open design, radial symmetrical, suitable for residual gas
analysis, 2 filaments (yttriated iridium or tungsten), degassing
by electron bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar <1×10-12 <2×10-12 <4×10-12
Sensitivity for argon A/mbar >1×10-3 >6×10-4 >3×10-4
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
closed design, suitable for quantitative gas analysis, effective
suppression of residual gas components, 2 filaments (yttriated
iridium or tungsten)
Mass range u 1 … 100 1 … 200 1 … 300
Conductance l/s 1 1 1
Minimum detectable partial pressure 1) ppm 10 20 50
Contribution to neighboring mass (40/41) ppm <10 <20 <50

Technical Data
13
Cross-Beam
ion source
Grid ion source
QMG 220 M
(C-SEM detector)
General data
Design principle,
field of application
open design, suitable for molecular beam experiments,
2 filaments (yttriated iridium or tungsten), degassing by
electron bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 3×10-11 6×10-11 1.2×10-10
Sensitivity A/mbar 4×10-5 2×10-5 1×10-5
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for residual gas analysis in the UHV
range, 2 filaments (tungsten), degassing by electron
bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 5×10-12 2×10-12 1×10-12
Sensitivity A/mbar 2×10-4 1×10-4 5×10-5
Contribution to neighboring mass (40/41) ppm <50 <100 <200
Detector type C-SEM / Faraday
Unit resolution (valley, entire mass
range)
at 10 % peak height adjustable to
%
u
<10
0.5 … 2.5
Max. operating pressure mbar 1×10-4
Reproducibility of the peak ratio
(constant conditions during 8 h, N2and
Ar from air) % ±0.5
QMA 200 operating temperature °C 0 … +150
Bakeout temperature
(QME 220 removed) °C max. +200
Mounting orientation any (p. 21)
Weight kg 3.8 (4.1 with 90° connection)
Connection flange DN 40 CF

14
Technical Data
HS ion source (High
sensitivity- ion source)
Closed HS ion source
1) For non overlapping components with mass >4 u.
Cross-Beam ion source
Grid ion source
Design principle,
field of application
open design, radial symmetrical, suitable for residual gas
analysis, 2 filaments (yttriated iridium or tungsten), degassing
by electron bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 1×10-14 /
5×10-12
1×10-14/
3×10-4
2×10-14/
1.5×10-4
Sensitivity for argon A/mbar >200 /
>5×10-4
>200 /
>3×10-4
>100 /
>1.5×10-4
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
closed design, suitable for quantitative gas analysis,
effective suppression of residual gas components
2 filaments (yttriated iridium or tungsten)
Mass range u 1 … 100 1 … 200 1 … 300
Conductance l/s 1 1 1
Minimum detectable partial pressure 1) ppm <1 / 20 <1 / 40 <1 / 100
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for molecular beam experiments,
2 filaments (yttriated iridium or tungsten), degassing by
electron bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 3×10-13 /
5×10-11
6×10-13 /
1×10-12
1.2×10-12 /
2.5×10-12
Sensitivity A/mbar 100 /
2×10-5
100 /
1×10-5
50 /
7×10-6
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for residual gas analysis in the UHV
range, 2 filaments (tungsten), degassing by electron
bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 1×10-13 /
1×10-11
2×10-13 /
2×10-11
4×10-13 /
4×10-11
Sensitivity A/mbar 200 /
1×10-4
200 /
5×10-5
100 /
3×10-5
Contribution to neighboring mass (40/41) ppm <50 <100 <200

Technical Data
15
QME 220
Power supply SP 220
Measuring system
Measurement channels 128
Measurement modes Scan analog, Scan Bargraph, MID
Measurement cycles mono- / multichannel 1 … 9999 cycles
or repeat
MID-dwell 2 ms … 60 s
Measurement speed
scan analog + bargraph peak
scan bargraph stair
20 ms/u … 60 s/u
2 ms/u … 60 s/u
Electrometer amplifier 110-5 …110-12 A (f.s.),
fix and autorange
Signal filter FIR filter
Power supply 24 VDC / 2.0 A, SP 220
Interfaces
Operation, control Ethernet
Extension input/output module IO 220
EXTERNAL_PROTECTION floating contact
Inputs/outputs
Analog IO 220
Digital IO 220
Weight 1.9 kg (2.2 kg with 90° connection)
Mains voltage 90 … 264 VAC
Mains frequency 47 … 63 Hz
Mains current consumption 1.5 A (100 VAC)
Output voltage 24 VDC, stabilized
Output current 2.75 ADC
Isolation 100 MOhm / 500 VDC
Safety standard EN 60950
Weight 0.6 kg

16
Technical Data
Input/output module
IO 220
Analog inputs
Analog outputs
Digital inputs
EXTERNAL_PROTECTION
(EXT_PROT)
1) See following Function table EXT_PROT input:
QUADERA\Online Help\Cross-References from Manuals\#004)
Connector (<ANALOG I/O>) X7, 15 pin D-Sub connector (female)
Number of channels 5
Input configuration differential
Input voltage range nominal 10 V, max. 14 V ref. to GND
Input resistance 50 kOhm
Resolution 14 bit
Connector X7, 15 pin D-Sub connector (female)
Number of channels 4
Output configuration single ended
Output voltage range 0 … +10 V
Output current ≤100 µA
Output resistance 200 Ohm
GND reference via 33 Ohm to GND (Imax. 50 mA)
Resolution 12 bit
Connector (<DIGITAL I/O>) X2, 25 pin D-Sub connector (male)
Number of channels 4 (+ EXT_PROT 1))
Input voltage <+5 V (low)
nominal +24 V (high), max. +28 V
Input current 1.9 mA
Supply voltage for floating contact +24V via 1.2 kOhm (Imax. 10 mA)
GND reference for external supply via 100 Ohm to GND (Imax. 50 mA)
Electrical data same as digital inputs
Function control function, depending on
EXT_PROT mode selected 1)
EXT_PROT-Mode Input
EXT_PROT
Function
INTERN-OFF not relevant FIL and SEM can be switched on and off
(manually, no external protection).
EXTERN-ON-OFF +24 V FIL and C-SEM on
0 V (open) FIL and C-SEM off
EXTERN-OFF +24 V FIL and SEM can be switched on and off
(manually).
0 V (open) FIL and C-SEM off. To switch on again,
the input EXT_PROT has to be
connected to +24 V, after that FIL and
C-SEM can be operated manually again.

Technical Data
17
Digital outputs
1) Internally, the 16 channels are split in two groups:
Group A: odd channel numbers 1 … 15
Group B: even channel numbers 2 … 16
For thermal reasons, the channels used have to be assigned equally to both groups
(example: 2 channels to group A and 2 channels to group B).
Digital interface
for vacuum gauges
Vacuum gauge interface
(analog)
Ambient conditions
Connector (<DIGITAL I/O>) X2, 25 pin D-Sub connector (male)
Number of channels 16
Output configuration open collector (sink), optically isolated
Output voltage nominal +24 V, max. +28 V
Saturation voltage (low) +0.9 V
Output current (sink) All 16 channels used: 60 mA/channel
4 channels used: 250 mA/channel 1)
Connector (<SERIAL>) X1, 9 pin D-Sub connector (female)
Interface type RS485
Use utilization of vacuum gauges with digital
interfaces
Connector (<TP GAUGE>) X5, 6 pin Amphenol C91 socket
Interface type analog
Use utilization of vacuum gauges with
analog interfaces
Operation only inside rooms
Altitude max. 2000 m NN
Protection category IP 30
Pollution degree 2
Temperatures
Storage/transport –25 … +70 °C
Operation 0 … +40 °C
Relative humidity max. 80% up to 31 °C,
linearly decreasing to 50% at 40 °C

18
Technical Data
3.3 Dimensions [mm]
Electronic unit
QME 220 +
QMA 200 F analyzer
with Faraday detector
Electronic unit
QME 220 +
analyzer QMA 200 M
with
C-SEM + Faraday
detector
Electronic unit
QME 220 90°+
analyzer QMA 200 A
with Faraday detector
118168 54(60)
141
127.5
DN 40 CF-F
ø37
83168 184(60)
141
127.5
DN 40 CF-F
ø37
130
168(60)
141
127.5
DN 40 CF-F
ø37
118 127.4
253
27

Technical Data
19
Electronic unit
QME 220 90°+
analyzer QMA 200 M
with C-SEM detector
Electronic unit
QME 220
+ input/output
module IO 220
Power supply SP 220
168(60)
141
127.5
DN 40 CF-F
ø37
83
253
130 127.4
27
16831
141
127.5
(55)
QME
IO 220
(X2)
43.5

20
Installation
4Installation
4.1 Unpacking
4.2 Assembly
NOTE
Store the transport fastening devices and re-install them before transporting the product
again.
DANGER
Putting a product which presents visible damage into operation can be extremely
hazardous. If the product presents visible damage do not put it into operation and make
sure it is not inadvertently put into operation.
DANGER
Voltages up to 330 VDC appear on the QMA 200 during operation.
Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed to this
voltage under unfavorable conditions. If as a result such parts (including the lines and
connected equipment!) become hazardous, they must be arranged or protected in such
a way that no arcing and charge transfer can occur.
If the QMA 200 can be touched while the vacuum system is open, additional protection
is needed, e.g.:
• mechanical protection against touching
• forced disconnection of the SP 220 power supply when the system is opened.
DANGER
No external hazardous voltages are allowed to be transferred to the electrodes of the
QMA 200 (galvanic contact, arcing, ion or electron beams etc.). If such danger sources
exist in the vacuum chamber, additional safety measures (e.g. better placement,
shielding, grounding, etc.) must be taken that reliable preclude such influences. Also
lower external voltages acting on the QMA 200 may damage the electronics and lead to
unreliable measurement results. Suitable precautions are to be taken as mentioned
above.
WARNING
The QMA 200 must be correctly installed from a vacuum engineering point of view,
i.e. the gases to be detected must have unhindered access to the analyzer.
Vacuum coating of the analyzer must be prevented.
NOTE
Make sure you adhere to the special requirements concerning cleanliness and damage
prevention when working with vacuum components.