Pfeiffer Vacuum QMG 422 User manual

Operating Instructions
Incl. Declaration of Conformity
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QMG 422 Analyzers

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In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate.
For convenient reference copy that information into the space provided below.
Typ:
No:
F-No:
Pfeiffer Vacuum, D-35614 Asslar
This document applies to the QMA 400, QMA 410, QMA 430 with Faraday cup or
90° off-axis SEM and Faraday cup and with the ion sources described in this
document.
If not indicated otherwise in the legends, the illustrations in this document corre-
spond to the QMA 400 with 90° off-axis SEM. They apply to other types by analogy.
The short designation "QMA" is used for the QMA 400, QMA 410 and QMA 430.
The short designation "QMH" is used for the QMH 400 and QMH 410.
In contrast to the operating instructions for the QMG 422, these instructions follow
the same conventions as the Pfeiffer QuadStar™ 422 operating instructions. The
parameters are marked with quotation marks ("…") e.g. "Resolution".
We reserve the right to make technical changes without prior notice.
The QMA 400, QMA 410 and QMA 430 Analyzers are used for gas analysis in high
vacuum.
They are part of the QMG 422 mass spectrometer system and may only be used in
connection with equipment belonging to that system.
The operating instructions of all system components must be strictly followed.
Product Identification
Validity
Illustrations
Designations
Technical changes
Intended Use

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Contents
Product Identification 2
Validity 2
Intended Use 2
1 Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 5
1.4 Liability and Warranty 6
2 Description 7
2.1 Design 7
2.1.1 Ion Sources 8
2.1.2 Mass Filter 8
2.1.3 Secondary Electron Multiplier 9
2.2 Versions 10
2.2.1 Cathode Materials 10
2.2.2 Electron Collimation Magnet 11
2.2.3 90° Deflection 11
2.2.4 Faraday Cup 12
2.2.5 Isolated Design 12
2.2.6 Vacuum Annealed QMA 13
2.2.7 Extraction Hood 13
2.2.8 Beam Deflection Device 13
2.2.9 Differential Pumping 13
3 Technical Data 14
4 Installation 17
4.1 Preparation 17
4.1.1 Installing the Electron Collimation Magnets 20
4.2 Installation 21
4.3 Gas Inlet System 22
4.4 QMH 400/410 22
4.5 EP 422 22
4.6 CP 400 23
4.6.1 Removing / Installing the SEM Connector Plate 23
4.7 Mounting the Protective Tubes 23
4.8 Cabling 23
5 Operation 24
5.1 First Time Operation 24
5.2 High Temperature Operation 25
5.3 Baking the Analyzer 25
5.3.1 Removing the Connector Plates 26
5.3.2 Mounting the Connector Plates 26
5.4 Assessing the Sensitivity 26
5.5 Secondary Electron Multiplier SEM 27
5.5.1 Contamination 27
5.5.2 Low Partial Pressures 27
5.5.3 Gain Factor 27
5.6 Surface Ions 28
5.7 Degas 28

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6 Optimization 29
6.1 Recommended Operating Modes 29
6.2 Test Gas 30
6.3 Ion Source Parameters 31
6.3.1 Emission 31
6.3.2 Protection 31
6.3.3 V1 IonRef 31
6.3.4 V2 Cathode 32
6.3.5 V3 Focus 32
6.3.6 V4 Field Axis 32
6.3.7 V5 Extraction 33
6.3.8 V8 Reserve 33
6.3.9 V9 Wehnelt 33
6.4 V6 / V7 Deflection 33
6.5 Resolution 34
6.6 RF Cable Polarity 34
7 Ion Sources 35
7.1 Axial Ion Source 35
7.2 Crossbeam Ion Source 37
7.3 Grid Ion Source 41
7.4 Two Lens Ion Optics 43
7.5 Crossbeam Ion Source With Two Lens Ion Optics 46
7.6 Three Lens Ion Optics 48
7.7 Crossbeam Ion Source With Three Lens Ion Optics 51
8 Maintenance and Spare Parts 54
9 Disposal 54
Appendix 55
A: Literature 55
Declaration of Contamination 56
Declaration of Conformity 57
For cross-references within this document, the symbol (→ XY) is used, for cross-
references to other documents, the symbol (→[Z]).

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1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
• Adhere to the applicable regulations and take the necessary precautions for the
process media used.
• Consider possible reactions between the materials (→ 14) and the process
media.
• Consider possible reactions of the process media due to the heat generated by
the product.
• Post the warning signs required by the national and local regulations at the
appropriate places.
• If toxic or flammable gases are measured with the QMA, the exhaust gases
must be treated in accordance with the applicable regulations.
• Adhere to the applicable regulations and take the necessary precautions for all
work your are going to do and consider the safety instructions in this document.
• Follow the instructions and consider the data given in the documentation of all
system components.
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety
Instructions
Process media
Safety measures