Pfeiffer Vacuum PrismaPlus QMG 220 User manual

Operating Instructions
incl. Declaration of Conformity
BG 5214 BE / A (2007-06) 1
PrismaPlus™
Compact Mass Spectrometer System
QMG 220

2BG 5214 BE / A (2007-06) QMG220.oi
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy all system information into the
spaces provided (→8).
Model:
PN:
SN:
V A
Pfeiffer Vacuum, D-35614 Asslar
Read through the operating instructions carefully before operating the
QMG 220. Keep this document in the vicinity of the equipment, accessi-
ble by all users.
The chapter 'Safety' (→6) contains important information concerning
the symbols used. It is essential to take note of this information in order
to operate the QMG 220 safely.
Product Identification

BG 5214 BE / A (2007-06) QMG220.oi 3
This document applies to products with part numbers listed
(All analyzers type QMA 200)
Part
number
Detector Filaments Additional technical data Remarks
Faraday C-
SEM
Tungsten Iridium,
yttriated Closed Molybdenum wiring 300 °C
Extraction
orifice
∅2 mm
PT M25 250 z
z
PT M25 251 zz
PT M25 252 zz
PT M25 253 zz
PT M25 254 zzz
PT M25 255 zzz
PT M25 256 zzz
PT M25 257 zzz
PT M25 261 zzz
PT M25 270 z
z z
PT M25 271 zzz
PT M25 272 zz
z
PT M25 273 zzz
PT M25 274 zzz
z
PT M25 275 zzzz
PT M25 276 zzz
z
PT M25 277 zzzzz
PT M25 278 zzzzz
PT M25 282 zzzz
PT M25 283 zzz
PT M25 285 zzGrid ion source
PT M25 286 zzzGrid ion source
PT M25 290 zzCross-Beam ion source
filament ∅0.15 mm
PT M25 291 zzCross-Beam ion source
filament ∅0.13 mm
PT M25 292 zzadjustable
PT M25 293 zz
zCross-Beam ion source
filament ∅0.15 mm
PT M25 294 zzzCross-Beam ion source
filament ∅0.13 mm
PT M25 295 zz
zadjustable
PT M25 296 zzCross-Beam ion
source, rotated 90°
PT M25 297 zzzCross-Beam ion source
filament ∅0.15 mm
Validity
Analyzers

4BG 5214 BE / A (2007-06) QMG220.oi
PT M28 699 I/O module IO 220 complete.
Part number Mass range Analyzer connection IO 220
PT M28 601 1 … 100 straight without
PT M28 602 1 … 200 straight without
PT M28 603 1 … 300 straight without
PT M28 611 1 … 100 straight with
PT M28 612 1 … 200 straight with
PT M28 613 1 … 300 straight with
PT M28 621 1 … 100 90° without
PT M28 622 1 … 200 90° without
PT M28 623 1 … 300 90° without
PT M28 631 1 … 100 90° with
PT M28 632 1 … 200 90° with
PT M28 633 1 … 300 90° with
24 VDC power supply (type P66A-6PI)
The part number can be taken from the product nameplates.
The PrismaPlus™ mass spectrometer is designed for partial pressure analysis at
pressures <10-4 mbar. Typical applications are measurement, monitoring and
process control functions in vacuum systems.
The QMG 220 is not intended to produce measurement results on which the safety
of persons or large assets depend. For such applications the safety must be en-
sured by additional measures.
PrismaPlus™ Pfeiffer Vacuum GmbH
QUADERA®INFICON AG
IO 220
QME 220
SP 220
Inteded Use
Trademarks

BG 5214 BE / A (2007-06) QMG220.oi 5
Content
Product Identification 2
Validity 3
Inteded Use 4
Trademarks 4
Content 5
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
1.5 Training 7
2Technical Data 8
2.1 System Overview 8
2.2 System Data 10
3Installation 17
3.1 Unpacking 17
3.2 Assembly 17
3.2.1 Space Requirements 18
3.2.2 Required Tools 18
3.2.3 QMA 200 Installation 19
3.2.4 QME 220 Installation 20
3.2.5 Input/Output Module IO 220 Installation/De-installation 20
3.3 Electrical Connections 24
3.3.1 QME 220 Connection 24
3.3.2 Power Supply SP 220 to QME 220 Connection 24
3.3.3 PC Connection 25
3.3.4 IO 220 Analog Input and Output Connections 27
3.3.5 IO 220 Digital Input and Output Connections 29
3.3.6 Vacuum Gauge Connection 31
3.3.7 Connection of the Additional Power Supply 33
3.3.8 Using the Analog and Digital Interfaces 34
3.4 Software Installation 34
4Operation 35
4.1 Initial Start Up 35
5Maintenance 37
5.1 QMA 200 (Filament Replacement) 37
5.1.1 HS Ion Source 37
5.1.2 Closed HS Ion Source 39
5.1.3 Cross-Beam Ion Source 41
5.1.4 Grid Ion Source 43
5.2 QME 220 45
5.2.1 Cleaning 45
5.2.2 Replacing the Filter Mat 45
5.2.3 Tuning the RF Generator 47
5.2.4 Optimizing the Ion Source Sensitivity 47
5.2.5 Replacing the QME 220 47
6Accessories 48
7Options 48
8Spare Parts 49
9Storage 50
10 Returning the Product 50
11 Disposal 51
Appendix 52
Software 52
Declaration of Contamination 53
Declaration of Conformity 54
For cross-references within this document, the symbol (→XY) is used, for cross-references to further
information sources, the symbol (→[Z]).

6BG 5214 BE / A (2007-06) QMG220.oi
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Consultation of operating instructions required (symbol printed on
equipment housing).
Notice
Optical inspection
< … > Labels on modules (front panel elements etc.)
QUADERA\ … Cross-references to information and procedures described in the
QUADERA®software.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
1.1 Symbols Used
1.2 Personnel Qualifications

BG 5214 BE / A (2007-06) QMG220.oi 7
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories and options not listed in the corresponding
product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Training
Pfeiffer Vacuum offers application, operating and maintenance courses for the
best use of this product. Please contact your local Pfeiffer Vacuum representa-
tive.
1.3 General Safety
Instructions
1.4 Liability and Warranty
1.5 Training

8BG 5214 BE / A (2007-06) QMG220.oi
2 Technical Data
The mass spectrometer system comprises of the following components:
PC
Link to PC
(Ethernet)
DI AI DO AO
C-SEM
Analyzer QMA 200
Ion source Mass filter
Faraday detector
Elektronic unit
QME 220
Input/output
module IO 220
Power supply
SP 220
Mains
Quadera software
Vacuum gauges
In all communications with Pfeiffer Vacuum please specify the informa-
tion given on the nameplate. For convenient reference transfer this in-
formation of all assemblies into the nameplate replicas in this manual.
2.1 System Overview
Electronic unit QME 220
or
Electronic unit QME 220 with
90° connection

BG 5214 BE / A (2007-06) QMG220.oi 9
→[1].
→48.
Input/output module IO 220
(option)
Analyzer QMA 200 F,
Faraday detector
Analyzer QMA 200 M,
secondary electron multiplier
(C-SEM)
Power supply SP 220
Mains cable
Software QUADERA®
Accessories

10 BG 5214 BE / A (2007-06) QMG220.oi
VACUUM
24V=
24V= RUN EMISS
LAN USB I/O
VACUUM
24V=
24V= RUN EMISS
LAN USB I/O
ANALOGI/O
DIGITALI/OSERIAL
TP
GAUGE
1
2
3
4
56
VACUUM
Front panel QME 220 without IO 220 Front panel QME 220 with
IO 220 installed
Front panel element Description →
Connectors < 24 V= > Connector for QME 220-power
supply SP 220 (1)
9= connector on the IO 220 for
an additional power supply
SP 220 (2) for vacuum gauges
with a high power consumption
24
33
LED < 24 V= > Indicator: 24 V o.k. 35
LED < RUN > Indicator: QME 220 firmware
running 35
LED < EMISS > Indicator: Emission on 35
Connector < LAN > Ethernet connection (PC) 25
Connector < USB > USB connection
(only for service purposes)
Connector < I/O > interconnection to IO 220
EXT_PROT input 26
Connector < TP GAUGE > Vacuum gauge connector
(analog) 32
Connector
< ANALOG I/O > Analog inputs / outputs 27
Connector
< DIGITAL I/O > Digital inputs / outputs 29
Connector < SERIAL > Vacuum gauge connector
(digital) 32
2.2 System Data
QME 220 front panel elements

BG 5214 BE / A (2007-06) QMG220.oi 11
Detector type Faraday
Unit resolution (valley, entire mass
range)
at 10 % peak height adjustable to
%
u
<10
0.5 … 2.5
Max. operating pressure mbar 1×10-4
Reproducibility of the peak ratio (con-
stant conditions during 8 h, N2and
Ar from air) % ±0.5
QMA 200 operating temperature °C 0 … +150
Bakeout temperature
(QME 220 removed) °C max. +200
Mounting orientation
any (→19)
Weight kg 2.4 (2.7 with 90° connection)
Connection flange DN 40 CF
Design principle,
field of application
open design, radial symmetrical, suitable for residual gas analy-
sis, 2 filaments (yttriated iridium or tungsten), degassing by
electron bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar <1×10-12 <2×10-12 <4×10-12
Sensitivity for argon A/mbar >1×10-3 >6×10-4 >3×10-4
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
closed design, suitable for quantitative gas analysis, effective
suppression of residual gas components, 2 filaments (yttriated
iridium or tungsten)
Mass range u 1 … 100 1 … 200 1 … 300
Conductance l/s 1 1 1
Minimum detectable partial pressure 1) ppm 10 20 50
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for molecular beam experiments,
2 filaments (yttriated iridium or tungsten), degassing by electron
bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 3×10-11 6×10-11 1.2×10-10
Sensitivity A/mbar 4×10-5 2×10-5 1×10-5
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for residual gas analysis in the UHV
range, 2 filaments (tungsten), degassing by electron bombard-
ment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 5×10-12 2×10-12 1×10-12
Sensitivity A/mbar 2×10-4 1×10-4 5×10-5
Contribution to neighboring mass (40/41) ppm <50 <100 <200
1) For non overlapping components with mass >4 u.
QMG 220 F, Faraday detector
General data
HS ion source
(High sensitivity-
ion source)
Closed HS ion source
Cross-Beam
ion source
Grid ion source

12 BG 5214 BE / A (2007-06) QMG220.oi
Detector type C-SEM / Faraday
Unit resolution (valley, entire mass
range)
at 10 % peak height adjustable to
%
u
<10
0.5 … 2.5
Max. operating pressure mbar 1×10-4
Reproducibility of the peak ratio (con-
stant conditions during 8 h, N2and
Ar from air) % ±0.5
QMA 200 operating temperature °C 0 … +150
Bakeout temperature
(QME 220 removed) °C max. +200
Mounting orientation
any (→19)
Weight kg 3.8 (4.1 with 90° connection)
Connection flange DN 40 CF
Design principle,
field of application
open design, radial symmetrical, suitable for residual gas analy-
sis, 2 filaments (yttriated iridium or tungsten), degassing by
electron bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar <1×10-14 /
5×10-12
<1×10-14 /
1×10-11
<2×10-14 /
2×10-11
Sensitivity for argon A/mbar >200 /
>5×10-4
>200 /
>3×10-4
>100 /
>1.5×10-4
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
closed design, suitable for quantitative gas analysis, effective
suppression of residual gas components 2 filaments (yttriated
iridium or tungsten)
Mass range u 1 … 100 1 … 200 1 … 300
Conductance l/s 1 1 1
Minimum detectable partial pressure 1) ppm <1 / 20 <1 / 40 <1 / 100
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for molecular beam experiments,
2 filaments (yttriated iridium or tungsten), degassing by electron
bombardment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 3×10-13 /
5×10-11
6×10-13 /
1×10-12
1.2×10-12 /
2.5×10-12
Sensitivity A/mbar 100 /
2×10-5
100 /
1×10-5
50 /
7×10-6
Contribution to neighboring mass (40/41) ppm <10 <20 <50
Design principle,
field of application
open design, suitable for residual gas analysis in the UHV
range, 2 filaments (tungsten), degassing by electron bombard-
ment (10 mA, 300 V)
Mass range u 1 … 100 1 … 200 1 … 300
Minimum detectable partial pressure mbar 1×10-13 /
1×10-11
2×10-13 /
2×10-11
4×10-13 /
4×10-11
Sensitivity A/mbar 200 /
1×10-4
200 /
5×10-5
100 /
3×10-5
Contribution to neighboring mass (40/41) ppm <50 <100 <200
1) For non overlapping components with mass >4 u.
QMG 220 M (C-SEM detector)
General data
HS ion source
(High Sensitivity-
ion source)
Closed HS ion source
Cross-Beam
ion source
Grid ion source

BG 5214 BE / A (2007-06) QMG220.oi 13
Measuring system
Measurement channels 128
Measurement modes Scan analog, Scan Bargraph, MID
Measurement cycles mono- / multichannel 1 … 9999 cycles
or repeat
MID-dwell 2 ms … 60 s
Measurement speed
scan analog + bargraph peak
scan bargraph stair
20 ms/u … 60 s/u
2 ms/u … 60 s/u
Electrometer amplifier 1×10-5 … 1×10-12 A (f.s.),
fix and autorange
Signal filter FIR filter
Power supply 24 VDC / 2.0 A, SP 220
Interfaces
Operation, control Ethernet (→25, 35)
Extension input/output module IO 220
(→20, 24)
EXTERNAL_PROTECTION floating contact (→14, 26)
Inputs/outputs
Analog →IO 220, 27
Digital →IO 220, 52
Weight 1.9 kg (2.2 kg with 90° connection)
Mains voltage 90 … 264 VAC
Mains frequency 47 … 63 Hz
Mains current consumption 1.5 A (100 VAC)
Output voltage 24 VDC, stabilized
Output current ≤2.75 ADC
Isolation 100 MOhm / 500 VDC
Safety standard EN 60950
Weight 0.6 kg
Analog inputs
Connector (<ANALOG I/O>) X7, 15 pin D-Sub connector (female)
Number of channels 5
Input configuration differential
Input voltage range nominal ±10 V, max. ±14 V ref. to GND
Input resistance 50 kOhm
Resolution 14 bit
Analog outputs
Connector X7, 15 pin D-Sub connector (female)
Number of channels 4
Output configuration single ended
Output voltage range 0 … +10 V
Output current ≤100 µA
Output resistance 200 Ohm
GND reference via 33 Ohm to GND (Imax. 50 mA)
Resolution 12 bit
(Connection diagram →28)
QME 220
Power supply SP 220
Input/output module IO 220
Analog inputs,
analog outputs

14 BG 5214 BE / A (2007-06) QMG220.oi
Digital inputs
Connector (<DIGITAL I/O>) X2, 25 pin D-Sub connector (male)
Number of channels 4 (+ EXT_PROT 1))
Input voltage <+5 V (low)
nominal +24 V (high), max. +28 V
Input current 1.9 mA
Supply voltage for floating contact +24V via 1.2 kOhm (Imax. 10 mA)
GND reference for external supply via 100 Ohm to GND (Imax. 50 mA)
EXTERNAL_PROTECTION
(EXT_PROT)
Electrical data same as digital inputs
Function control function, depending on
EXT_PROT mode selected 1)
1) Function table EXT_PROT input (detailed information →[1]:
QUADERA\Online Help\Cross-References from Manuals\#004).
EXT_PROT-Mode Input
EXT_PROT
Function
INTERN-OFF not relevant FIL and SEM can be switched on and
off (manually, no external protection).
EXTERN-ON-OFF +24 V FIL and C-SEM on
0 V (open) FIL and C-SEM off
EXTERN-OFF +24 V FIL and SEM can be switched on and
off (manually).
0 V (open) FIL and C-SEM off. To switch on
again, the input EXT_PROT has to be
connected to +24 V, after that FIL and
C-SEM can be operated manually
again.
Digital outputs
Connector (<DIGITAL I/O>) X2, 25 pin D-Sub connector (male)
Number of channels 16
Output configuration open collector (sink), optically isolated
Output voltage nominal +24 V, max. +28 V
Saturation voltage (low) ≤+0.9 V
Output current (sink) All 16 channels used: ≤60 mA/channel
4 channels used: ≤250 mA/channel 2)
2) Internally, the 16 channels are split in two groups:
Group A: odd channel numbers 1 … 15
Group B: even channel numbers 2 … 16
For thermal reasons, the channels used have to be assigned equally to both
groups (example: 2 channels to group A and 2 channels to group B).
(Connection diagram →29)
Digital inputs,
digital outputs,
EXTERNAL_PROTECTION

BG 5214 BE / A (2007-06) QMG220.oi 15
Digital interface for vacuum gauges
Connector (<SERIAL>) X1, 9 pin D-Sub connector (female)
Interface type RS485
Use utilization of vacuum gauges with digital
interfaces (suitable gauges →31).
Analog vacuum gauge interface
Connector (<TP GAUGE>) X5, 6 pin Amphenol C91 socket
Interface type analog
Use utilization of vacuum gauges with analog
interfaces (suitable gauges →31).
Operation only inside rooms
Altitude max. 2000 m NN
Protection category IP 30
Pollution degree 2
Temperatures
Storage/transport –25 … +70 °C
Operation 0 … +40 °C
Relative humidity max. 80% up to 31 °C,
linearly decreasing to 50% at 40 °C
118168 54(60)
141
127.5
DN 40 CF-F
ø37
83168 184(60)
141
127.5
DN 40 CF-F
ø37
130
Digital interface
Vacuum gauge interface
(analog)
Ambient conditions
Dimensions [mm]
Electronic unit QME 220 +
QMA 200 F analyzer with
Faraday detector
Electronic unit QME 220 +
analyzer QMA 200 M with
C-SEM + Faraday detector

16 BG 5214 BE / A (2007-06) QMG220.oi
168(60)
141
127.5
DN 40 CF-F
ø37
118 127.4
253
27
168(60)
141
127.5
DN 40 CF-F
ø37
83
253
130 127.4
27
16831
141
127.5
(55)
QME
IO 220
(X2)
43.5
Electronic unit QME 220 90°+
analyzer QMA 200 A with
Faraday detector
Electronic unit QME 220 90°+
analyzer QMA 200 M with
C-SEM detector
Electronic unit QME 220
+ input/output module IO 220
Power supply SP 220

BG 5214 BE / A (2007-06) QMG220.oi 17
3 Installation
Store the transport fastening devices and re-install them before trans-
porting the product again.
DANGER
Putting a product which presents a visible damage into operation can
be extremely hazardous. If the product presents a visible damage do
not put it into operation and make sure it is not inadvertently put into
operation.
DANGER
Voltages up to 330 VDC appear on the QMA 200 during operation.
Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed to
this voltage under unfavorable conditions. If as a result such parts (including the
lines and connected equipment!) become hazardous, they must be arranged or
protected in such a way that no arcing and charge transfer can occur.
If the QMA 200 can be touched while the vacuum system is open, additional pro-
tection is needed, e.g.:
•mechanical protection against touching
•forced disconnection of the SP 220 power supply when the system is opened.
DANGER
No external hazardous voltages are allowed to be transferred to the electrodes of
the QMA 200 (galvanic contact, arcing, ion or electron beams etc.). If such dan-
ger sources exist in the vacuum chamber, additional safety measures (e.g. better
placement, shielding, grounding, etc.) must be taken that reliable preclude such
influences. Also lower external voltages acting on the QMA 200 may damage the
electronics and lead to unreliable measurement results. Suitable precautions are
to be taken as mentioned above
WARNING
The QMA 200 must be correctly installed from a vacuum engineering point of
view, i.e. the gases to be detected must have unhindered access to the analyzer.
Vacuum coating of the analyzer must be prevented.
Make sure you adhere to the special requirements concerning cleanli-
ness and damage prevention when working with vacuum components.
3.1 Unpacking
3.2 Assembly

18 BG 5214 BE / A (2007-06) QMG220.oi
WARNING
The QMA 200 F may only be installed in flanges or tubes with an internal diame-
ter ≥37 mm, otherwise short circuits to the wall can occur.
The diameter of the extension tube for the QMA 200 M must be at least
40.5 mm.
Note the required installation depth. Do not kink the cables
Dimensions of system components →15).
Hexagon socket screw key, AF 4
Torx screw driver T10
Open-end wrench (2 pieces), AF 10
3.2.1 Space Requirements
3.2.2 Required Tools

BG 5214 BE / A (2007-06) QMG220.oi 19
DANGER
The analyzer flange must be properly grounded.
•By connecting with all 6 screws to the properly grounded vacuum system.
•If the mounting flange is not grounded, the QMA 200 flange (grounding screw
M4) must be connected to the protective ground by means of a separate
ground conductor. Establish this connection with yellow/green insulated or
bare stranded copper wire.
•2.5 mm² if mechanically protected
•4.0 mm² if unprotected
The QMA 200 should preferably be mounted horizontally (with the guid-
ing groove downward). This results in optimum protection of the
QME 220 against falling objects and affords easy installation and excel-
lent access to the front panel.
On the QMG 220 with 90° connection this results in a vertically sus-
pended arrangement of the QME 220.
Guide groove
Mounting tool
QMA 200 F QMA 200 M
Transport brace
Set the QMA 200 into the supplied mounting tool.
Carefully remove the transport cover on the QMA 200 and save it for possi-
ble future use.
Carefully pull off the transport brace and save it for possible future use.
Flange the analyzer to the vacuum chamber.
3.2.3 QMA 200 Installation
Removing the transport brace
and flanging the analyzer to
the vacuum chamber

20 BG 5214 BE / A (2007-06) QMG220.oi
DANGER
The QME 220 may be mounted only to a correctly installed QMA 200 as the only
ground connection is via the QMA 200 flange.
The 24 V supply line from the SP 220 must never be connected if QMA 200 is
not screw fastened to the QME 220.
Grounding tab
Guide groove
With a hexagon-socket-screw (AF 4) key loosen the two screws on the
black plastic connection piece of the QME 220 so that the moving part has a
play of 2 … 3 mm.
Carefully slide the QME 220 onto the mounted QMA 200 up to the notch
mark. Make sure the positioning on the QME 220 through the grounding tab
and the guide groove in the QMA 200 is correct.
Do not apply excessive force.
Firmly tighten the two hexagon-socket-head screws. These screws secure
the QME 220 mechanically and ensure electrical safety by providing ground
contact.
The optional I/O module IO 220 makes the utilization of additional interfaces possi-
ble (→chapter 'Technical Data').
The QME 220 can be ordered with the IO 220 already installed or it can be up-
graded at a later time.
•Screwdriver Torx T10
I/O module IO 220 (→48)
Disconnect the power supply from the mains and remove all electrical con-
nections to the QME 220.
Remove the QME 220 from the analyzer by following the procedure de-
scribed in chapter 3.2.4 in reverse order.
Place the QME 220 on a stable base in order to be able to work on the front
panel.
Loosen and remove the screws marked 1 … 3.
3.2.4 QME 220 Installation
3.2.5 Input/Output Module
IO 220
Installation/
De-installation
Required tools
Required Material
Procedure, installation