Pfeiffer Vacuum IKR 270 User manual

BG 5008 BEN (2011-01)
A PASSION FOR PERFECTION
IKR 270
Compact Cold Cathode Gauge, All-metal
Operating Instructions

2 BG 5008 BEN (2011-01) IKR 270
In all communications with Pfeiffer Vacuum, please specify the information given
on the product nameplate.
Compact Cold Cathode Gauge
VACUUM
Pfeiffer Vacuum, D-35614 Asslar
Typ:
No:
F-No:
V W
This manual applies to products with the following part numbers
PT R21 251 (DN 40 CF-F flange short type)
PT R21 261 (DN 40 CF-F flange long type)
The part number (No) can be taken from the nameplate.
We reserve the right to make engineering changes without notice.
The Compact Cold Cathode Gauge IKR 270 has been designed for vacuum
measurement in a pressure range of 5×10-11 ... 1×10-2 mbar.
The gauge can be used with a Pfeiffer Vacuum measurement unit for Compact
Gauges or with another evaluation unit.
Over the whole measurement range, the measuring signal is output as logarithm of
the pressure.
The Compact Cold Cathode Gauge IKR 270 functions with a cold cathode ioni-
zation measurement circuit (according to the inverted magnetron principle).
Product Identification
Validity
Intended Use
Functional Principle

BG 5008 BEN (2011-01) IKR 270 3
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 Safety Information 4
1.4 Liability and Warranty 5
2Technical Data 6
3Installation 8
3.1 Vacuum Connection 8
3.1.1 Removing the Magnet Unit 9
3.2 Power Connection 10
3.2.1 Use With a Pfeiffer Vacuum Measurement Unit 10
3.2.2 Use With Another Evaluation Unit 10
4Operation 12
5Maintenance 13
5.1 Cleaning the Gauge / Changing Parts 13
5.1.1 Disassembling the Gauge 13
5.1.2 Cleaning the Gauge 16
5.1.3 Assembling the Gauge 17
5.2 What to Do in Case of Problems 20
6Removing the Gauge From the System 21
7Returning the Product 22
8Accessories 22
9Spare Parts 23
10 Disposal 23
Appendix 24
A: Relationship Measuring Signal vs. Pressure 24
B: Gas Type Dependence 25
For cross references to pages within this manual, the symbol (→XY) is used, for
references to other documents, the symbol (→[Z]).

4 BG 5008 BEN (2011-01) IKR 270
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→7) and the process
media.
Consider possible reactions of the process media due to the heat generated by
the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety information in this document.
•Before you begin to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic devices like heart
pacemakers or impair their function.
Maintain a safety distance of ≥10 cm between the magnet and the
heart pacemaker or prevent the influence of strong magnetic fields by
antimagnetic shielding.
Pass on the safety information to other users.
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 Safety Information

BG 5008 BEN (2011-01) IKR 270 5
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
custodian or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of changes (modifications, alterations etc.) to the product
•use the product with accessories not listed in the corresponding product
documentation.
The custodian assumes the responsibility in conjunction with the process media
used.
Gauge failures due to contamination or wear and tear, as well as expendable parts
(e.g. seals), are not covered by the warranty.
1.4 Liability and Warranty

6 BG 5008 BEN (2011-01) IKR 270
2 Technical Data
Admissible temperature
Storage
Operation
all types
long type
Bakeout
short type
long type
-40 °C ... +65 °C
+ 5 °C ... +55 °C
250 °C in bakeout area, see dimension
drawing (without magnetic shielding)
+250 °C (without electronics and mag-
netic shielding)
+250 °C in bakeout area, see dimen-
sion drawing (without magnetic shield-
ing)
Relative humidity max. 80% at temperatures up to +31 °C
decreasing to 50 % at +40 °C
Use indoors only
altitude up to 2000 m (6600 ft.)
Measurement range (air, N2) 5×10-11 ... 1×10-2 mbar
Accuracy ≈± 30%
in the range of 1×10-9 ... 1×10-3 mbar
Reproducibility ≈± 5%
in the range of 1×10-9 ... 1×10-3 mbar
Gas type dependence →Appendix B
Type of protection IP 40
Overpressure ≤9 bar
only for inert gases < 100 °C
Supply
DANGER
The gauge may only be connected to supply or measurement units
that conform to the requirements of a grounded protective extra-low
voltage (SELV). The connection to the gauge has to be fused.1)
Voltage at the gauge 14.5 ... 30.0 V= (ripple max. 1 Vpp)
Power consumption ≤2 W
Fuse1) ≤1 AT
The minimum voltage of the power supply must be increased proportionally to the
length of the measuring cable.
Voltage of the supply unit at maxi-
mum cable length 16.0 ... 30.0 V= (ripple max. 1 Vpp)
Electrical connection Compact connector Hirschmann
type GO 6, 6 poles, male
Cable 5 poles plus screen
Maximum cable length 100 m (0.25 mm² conductor)
150 m (0.34 mm² conductor)
500 m (1.0 mm² conductor)
Operating voltage
(in the measuring chamber)
≤3.3 kV
Operating current
(in the measuring chamber)
≤100 µA
1) Pfeiffer Vacuum measurement and control units for Compact Gauges fulfill these requirements.

BG 5008 BEN (2011-01) IKR 270 7
Output signal (measuring signal)
Voltage range ≈0 V ... ≈+10.5 V
Voltage/pressure relationship logarithmic, increase 0.8 V / decade
(→Appendix A)
Error signal < 0.5 V (no supply)
Output impedance 2×10 Ω
Normal load 100 kΩ
Minimum load 10 kΩ, short-circuit proof
Response time
p > 10-6 mbar
p = 10-8 mbar
pressure dependent
< 10 ms
≈1 s
Gauge identification 7.15 kΩresistance referenced to supply
common
Grounding concept →Figure 1
Vacuum flange-signal common connected via 10 kΩ
(max. voltage differential
with respect to safety ±50 V
with respect to accuracy ±10 V)
Supply common-signal common conducted separately; differential
measurement recommended for cable
lengths ≥10 m
Materials exposed to the vacuum
Feedthrough isolation
Internal seal
Flange
Anode
Ignition aid
ceramic (Al2O3)
Ag
stainless steel
(1.4306 / AISI 304L)
Mo
stainless steel (1.4310 / AISI 301)
Internal volume ≈20 cm³
Dimensions
Compact
ColdCathode
Gauge
VACUUM
VACUUM
105.5
24.1
ø 63,5
28 53
DN 40 CF-F
20
Compact
ColdCathode
Gauge
VACUUM
VACUUM
216.5
ø 63.5
24 32 57 20103.5
DN 40 CF-F
Ausheizbereich
Weight 950 g (DN 40 CF-F short type)
1100 g (DN 40 CF-F long type)

8 BG 5008 BEN (2011-01) IKR 270
3 Installation
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The gauge can be mounted in any orientation. However, it should be mounted so
that any particles present cannot enter the measuring chamber (→13).
See dimension drawing for space requirements (→7).
nRemove the protective cap.
The protective cap will be
needed for maintenance.
oMake the flange connection.
When making CF flange
connections, it can be
advantageous to temporarily
remove the magnet
(→section 3.1.1).
DANGER
DANGER: overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer sealing rings (e.g.
O-rings) cannot withstand such pressures. Process media can
thus leak and possibly damage your health.
Use sealing rings provided with an outer centering ring.
DANGER
DANGER: overpressure in the vacuum system >1 bar
If clamps are opened unintentionally injury can be caused by
catapulted parts.
Use the type of clamps which can only be opened and closed
by means of a tool (e.g. hose clip clamping ring).
3.1 Vacuum Connection

BG 5008 BEN (2011-01) IKR 270 9
DANGER
The gauge must be electrically connected to the grounded
vacuum chamber. The connection must conform to the re-
quirements of a protective connection according to EN 61010:
•CF flanges fulfill this requirement
•For gauges with KF flanges, use a conductive metallic
clamping ring.
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of
operation and remove the electronics unit.
•Allen wrench AF 1.5
•Open-end wrench AF 7
nUnfasten the hexagon socket set screw (1) on the side of the electronics
unit (2).
oRemove the electronics unit.
Caution
For reasons of tolerance, the same magnet and electronics unit
have to be used when reassembling the gauge.
pUnfasten the hexagon head screw (3) on the magnet unit (4) and remove
the magnet unit.
Caution
The magnetic force and the tendency to tilt make it more diffi-
cult to separate the magnet unit and the measuring chamber
(7).
qMake the flange connection between the gauge and the vacuum system.
rRemount the magnet unit and lock it with the hexagon head screw (3).
sCarefully mount the electronics unit (2).
tPush the electronics unit up to the mechanical stop and lock it with the
hexagon socket set screw (1).
3.1.1 Removing the Magnet
Unit
Tools required
Procedure

10 BG 5008 BEN (2011-01) IKR 270
1
2
3
4
7
2
3
4
7
1
If the gauge is used with a
Pfeiffer Vacuum measurement
unit for Compact Gauges, a
corresponding connection cable
is required (→22).
•Secure the connection
socket on the gauge with the
screw.
Compact Cold Cathode Gauge
VACUUM
The gauge can also be operated with other evaluation units. In this case, an
individual connection cable must be made.
For cable lengths up to 10 m (0.34 mm2conductor cross-section) , the measuring
signal can be read directly between the positive signal output (pin 2) and the sup-
ply common (pin 5) without the degree of accuracy being reduced. For longer
measuring cable lengths, we recommend a differential measurement between the
signal output and signal common (pin 3) (as a result of the voltage drop along the
supply cable ground lead, the common mode signal is approx. 1.0 V at the max.
permissible cable length).
nPrepare the connection
socket (ordering number
→22).
3.2 Power Connection
3.2.1 Use With a Pfeiffer
Vacuum Measurement
Unit
3.2.2 Use With Another
Evaluation Unit
Procedure

BG 5008 BEN (2011-01) IKR 270 11
oSolder the connection cable according to the diagram.
10
10
7.15 k
2
3
1
4
5
6
V–
+
–
+
10k
Figure 1: Electrical connection
Pin 1 identification
Pin 2 signal output
(measuring signal)
Pin 3 signal common
Pin 4 supply
Pin 5 supply common
Pin 6 screen
2
5
31
6
4
WARNING
The supply common (pin 5) and the screen (pin 6) must be
connected to the supply unit with protective ground.
Incorrect connection, incorrect polarity, or inadmissible supply
voltages can damage the gauge.
pReassemble the connection socket.
qPlug in the connection socket.
Secure the connection socket on
the gauge with the screw.
Compact Cold Cathode Gauge
VACUUM

12 BG 5008 BEN (2011-01) IKR 270
4 Operation
As soon as the required voltage is applied, the measurement signal is available
between pins 2 and 3 (→Appendix A for the relationship between the measuring
signal and the pressure)).
The green lamp on the gauge
indicates the operating state: Supply voltage present.
No supply voltage.
Caution
Turn on the gauge only at pressures <10-2 mbar to prevent excessive
contamination.
If you are using a Pfeiffer Vacuum measurement unit for Compact
Gauges with at least two gauge connections, the cold cathode gauge
can be controlled, for example, by a Pirani gauge.
The measuring signal depends on the type of gas being measured. The curves are
accurate for dry air, N2, O2, and CO. They can be mathematically converted for
other gases (→Appendix B).
If you are using a Pfeiffer Vacuum measurement unit for Pfeiffer Vacuum Compact
Gauges, you can enter a calibration factor to correct the measurement value
displayed (→of that measurement unit).
An ignition delay occurs when cold cathode gauges are switched on. The delay
time increases at low pressures and is typically:
10-7 mbar ≈0.1 minute
10-8 mbar ≈1 minute
10-9 mbar ≈5 minutes
10-10 mbar ≈20 minutes
5×10-11 mbar ≈30 minutes
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. seals), are not covered by the warranty.
Gauge contamination is influenced by the process media used as well as any ex-
isting or new contaminants and their respective partial pressures. With constantly
low pressures (< 1×10-6 mbar) , the gauge can be operated for more than one year
without cleaning (cleaning the gauge →13).
Contamination can to a certain extent be reduced by:
•geometric protections (e.g. screenings, elbows) against particles that spread
rectilinearly
•mounting the flange of the gauge at a place where the partial pressure of the
pollutants is particularly low.
Special precautions are required for vapors deposited under plasma (e.g. of the
cold cathode measuring system). It may even be necessary to temporarily switch
off the gauge while vapors occur.
Gas type dependence
Ignition delay
Contamination

BG 5008 BEN (2011-01) IKR 270 13
5 Maintenance
Gauge failures due to contamination or wear and tear, as well as expendable parts
(e.g. seals), are not covered by the warranty.
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before you begin to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
DANGER
DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling and disposing of cleaning agents. Consider possible
reactions with the product materials (→7).
•Allen wrench AF 1.5
•Allen wrench AF 3
•Open-end wrench AF 7
•Pliers for circlips
•Polishing cloth (400 grain) or Scotch-Brite
•Tweezers
•Cleaning alcohol
•Mounting tool for ignition aid
•Ignition aid
•Metal seal (11) for anode feedthrough
nRemove the gauge from the vacuum system (→21).
oUnfasten the hexagon socket set screw (1) on the side of the electronics
unit (2) (→Figure 2).
pRemove the electronics unit.
Caution
The cover of the electronics unit cannot be removed.
qUnfasten the hexagon head screw (3) on the magnet unit (4) and remove
the magnet unit.
5.1 Cleaning the Gauge /
Changing Parts
Tools / material required
5.1.1 Disassembling the Gauge
Procedure for short type

14 BG 5008 BEN (2011-01) IKR 270
Caution
The magnetic force and the tendency to tilt make it more diffi-
cult to separate the magnet unit and the measuring chamber
(7).
rRemove the circlip (5) as well as the polarity insert (6) from the measuring
chamber.
sRemove the four hexagon socket screws (8) incl. lock washers (8a) on the
back of the measuring chamber.
tCarefully remove the following items in this order: pressure piece (9),
washer (9a), complete anode (10), metal seal (11) incl. centering ring (12).
The parts can now be cleaned or replaced.
1
3
4
7
2
Figure 2a
6
5
8a
8
11
12
9a
9
7
10
10a
Figure 2b
nRemove the gauge from the vacuum system (→21).
oUnfasten the hexagon socket set screw (1) on the side of the electronics
unit (2) (→Figure 3).
pRemove the electronics unit.
Procedure for long type

BG 5008 BEN (2011-01) IKR 270 15
Caution
For reasons of tolerance, the same magnet and electronics unit
have to be used when reassembling the gauge.
qUnfasten the hexagon head screw (3) on the magnet unit (4) and remove
the magnet unit.
Caution
The magnetic force and the tendency to tilt make it more
difficult to separate the magnet unit and the measuring chamber
(7).
rRemove the circlip (5) and the polarity insert (6) from the measuring
chamber.
sRemove the two hexagon socket screws (20) incl. lock washers (19) from
the extension piece.
tCarefully remove the following items in this order: pressure piece (18),
insulator (17), anode extension (13).
uRemove the two hexagon socked screws (16) incl. lock washers (15) and
the tube (14).
vRemove the four hexagon socket screws (8) incl. the lock washers (8a) on
the back of the measuring chamber.
wCarefully remove the following items in this order: pressure piece (9),
washer (9a), complete anode (10), metal seal (11) incl. centering ring (12).
The parts can now be cleaned or replaced.
2
3
4
7
1
Figure 3a

16 BG 5008 BEN (2011-01) IKR 270
7
13
15 16
14
17
1819
20
Figure 3b
6
5
8a
8
11
12
9a
9
7
10
10a
Figure 3c
nUsing a polishing cloth rub the inside walls of the measuring chamber and
the polarity insert to a bright finish.
Caution
The sealing surfaces must only be worked concentrically.
oRinse the measuring chamber and the polarity insert with cleaning alcohol.
pAllow both to dry.
Cleaning or replacing the anode:
nRemove the old ignition aid (10a), for example with tweezers (→Figure 2).
oUsing a polishing cloth rub the anode pin to a bright finish.
5.1.2 Cleaning the Gauge
Procedure

BG 5008 BEN (2011-01) IKR 270 17
Caution
Do not bend the anode. Do not carry out mechanical work on
the ceramic part.
pRinse the anode with cleaning alcohol.
qAllow the anode to dry.
rInsert a new ignition aid (10a) into the mounting tool.
sCarefully press the anode (clean or new) centered and parallel to the tool
axis into the ignition aid and insert it to a depth of approx. 15 mm. The final
position is established after the anode is installed.
Anode
Ignition aid
Mounting tool
nInsert the new metal seal (11) with the centering ring (12) centered into the
measuring chamber. The sealing surfaces, seal and ceramic part must be
clean (→Figure 2b).
oCarefully insert the anode (10) incl. ignition aid (10a) into the measuring
chamber.
pCarefully place the washer (9a) and the pressure piece (9) on the
measuring chamber and tighten them uniformly with the four hexagon
socket screws (8) incl. the lock washers (8a) until the stop position is
reached.
qPosition the ignition aid (10a) by pushing the mounting tool over the anode
pin until the mechanical stop is reached.
rRemove the particles in the measuring chamber with dry nitrogen (be
careful to hold the measuring chamber with the flange pointing downwards).
sSlide the polarity insert (6) into the measuring chamber up to the
mechanical stop.
tPlace the circlip (5) snugly fitting on the polarity insert.
Caution
Visually check that the anode pin is centered over the middle
hole of the polarity insert (max. eccentricity = 0.5 mm).
uIf possible perform a leak test (leak rate <10-9 mbar l/s).
5.1.3 Assembling the Gauge
Procedure for short type

18 BG 5008 BEN (2011-01) IKR 270
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of
operation and remove the electronics unit.
vMount the magnet unit (4) and lock it with the hexagon head screw (3).
wMount the electronics unit (2) and secure it with the hexagon socket set
screw (1).
DANGER
Due to missing ground connection in conjunction with missing
or not correctly tightened hexagon socket set screw (1) danger-
ous contact voltage will occur.
nInsert the new metal seal (11) with the centering ring (12) centered into the
measuring chamber. The sealing surfaces, seal and ceramic part must be
clean (→Figure 3c).
oCarefully insert the anode (10) incl. ignition aid (10a) into the measuring
chamber.
pCarefully place the washer (9a) and the pressure piece (9) on the
measuring chamber and tighten them uniformly with the four hexagon
socket screws (8) incl. the lock washers (8a) until the stop position is
reached.
qPosition the ignition aid (10a) by pushing the mounting tool over the anode
pin until the mechanical stop is reached.
rRemove the particles in the measuring chamber with dry nitrogen.
sSlide the polarity insert (6) into the measuring chamber up to the
mechanical stop.
tPlace the circlip (5) snugly fitting on the polarity insert.
Caution
Visually check that the anode pin is centered over the middle
hole of the polarity insert (max. eccentricity = 0.5 mm).
uIf possible perform a leak test (leak rate <10-9 mbar l/s).
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of
operation and remove the electronics unit.
Procedure long version

BG 5008 BEN (2011-01) IKR 270 19
vPut the complete measuring chamber on the table with the flange pointing
downwards and carefully slide the extension piece (13) over the anode pin
(→Figure 4).
wCarefully slide the tube (14) over the extension piece and secure it with the
two screws (16) and the lock washers (15).
Slide the insulator (17) over the extension piece (13) as shown in Figure 4
and secure the pressure piece (18) with the two screws (20) and the lock
washers (19).
Caution
The inside of the tube and the insulator must be absolutely
clean and lint-free.
Mount the magnet unit (4) and lock it with the hexagon head screw (3).
Mount the electronics unit (2) and secure it with the hexagon socket set
screw (1).
DANGER
Due to missing ground connection in conjunction with missing
or not correctly tightened hexagon socket set screw (1) danger-
ous contact voltage will occur.
17
18
19
20
14
16
15
13
7
Figure 4

20 BG 5008 BEN (2011-01) IKR 270
Problem Possible cause Correction
Measuring signal con-
tinually < 0.5 V and green
lamp is OFF.
No supply voltage. Turn on the power
supply.
Measuring signal con-
tinually < 0.5 V and
Supply voltage too low. Increase the supply
voltage (→6).
green lamp is ON. Electronics unit defective. Replace the electronics
unit (→13).
Measuring signal con-
tinually in the range of
Pressure in the vacuum
chamber < 5×10-11 mbar.
–
0.5 ... 1.96 V
(underrange). Gas discharge has not
ignited.
Wait until the gas dis-
charge ignites
(≈20 minutes at a pres-
sure of 10-10 mbar).
5.2 What to Do in Case of
Problems