Pfeiffer Vacuum IKR 270 User manual

BG 5008 BEN (2011-01)
A PASSION FOR PERFECTION
IKR 270
Compact Cold Cathode Gauge, All-metal
Operating Instructions

2 BG 5008 BEN (2011-01) IKR 270
In all communications with Pfeiffer Vacuum, please specify the information given
on the product nameplate.
Compact Cold Cathode Gauge
VACUUM
Pfeiffer Vacuum, D-35614 Asslar
Typ:
No:
F-No:
V W
This manual applies to products with the following part numbers
PT R21 251 (DN 40 CF-F flange short type)
PT R21 261 (DN 40 CF-F flange long type)
The part number (No) can be taken from the nameplate.
We reserve the right to make engineering changes without notice.
The Compact Cold Cathode Gauge IKR 270 has been designed for vacuum
measurement in a pressure range of 5×10-11 ... 1×10-2 mbar.
The gauge can be used with a Pfeiffer Vacuum measurement unit for Compact
Gauges or with another evaluation unit.
Over the whole measurement range, the measuring signal is output as logarithm of
the pressure.
The Compact Cold Cathode Gauge IKR 270 functions with a cold cathode ioni-
zation measurement circuit (according to the inverted magnetron principle).
Product Identification
Validity
Intended Use
Functional Principle

BG 5008 BEN (2011-01) IKR 270 3
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 Safety Information 4
1.4 Liability and Warranty 5
2Technical Data 6
3Installation 8
3.1 Vacuum Connection 8
3.1.1 Removing the Magnet Unit 9
3.2 Power Connection 10
3.2.1 Use With a Pfeiffer Vacuum Measurement Unit 10
3.2.2 Use With Another Evaluation Unit 10
4Operation 12
5Maintenance 13
5.1 Cleaning the Gauge / Changing Parts 13
5.1.1 Disassembling the Gauge 13
5.1.2 Cleaning the Gauge 16
5.1.3 Assembling the Gauge 17
5.2 What to Do in Case of Problems 20
6Removing the Gauge From the System 21
7Returning the Product 22
8Accessories 22
9Spare Parts 23
10 Disposal 23
Appendix 24
A: Relationship Measuring Signal vs. Pressure 24
B: Gas Type Dependence 25
For cross references to pages within this manual, the symbol (→XY) is used, for
references to other documents, the symbol (→[Z]).

4 BG 5008 BEN (2011-01) IKR 270
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→7) and the process
media.
Consider possible reactions of the process media due to the heat generated by
the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety information in this document.
•Before you begin to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic devices like heart
pacemakers or impair their function.
Maintain a safety distance of ≥10 cm between the magnet and the
heart pacemaker or prevent the influence of strong magnetic fields by
antimagnetic shielding.
Pass on the safety information to other users.
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 Safety Information

BG 5008 BEN (2011-01) IKR 270 5
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
custodian or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of changes (modifications, alterations etc.) to the product
•use the product with accessories not listed in the corresponding product
documentation.
The custodian assumes the responsibility in conjunction with the process media
used.
Gauge failures due to contamination or wear and tear, as well as expendable parts
(e.g. seals), are not covered by the warranty.
1.4 Liability and Warranty

6 BG 5008 BEN (2011-01) IKR 270
2 Technical Data
Admissible temperature
Storage
Operation
all types
long type
Bakeout
short type
long type
-40 °C ... +65 °C
+ 5 °C ... +55 °C
250 °C in bakeout area, see dimension
drawing (without magnetic shielding)
+250 °C (without electronics and mag-
netic shielding)
+250 °C in bakeout area, see dimen-
sion drawing (without magnetic shield-
ing)
Relative humidity max. 80% at temperatures up to +31 °C
decreasing to 50 % at +40 °C
Use indoors only
altitude up to 2000 m (6600 ft.)
Measurement range (air, N2) 5×10-11 ... 1×10-2 mbar
Accuracy ≈± 30%
in the range of 1×10-9 ... 1×10-3 mbar
Reproducibility ≈± 5%
in the range of 1×10-9 ... 1×10-3 mbar
Gas type dependence →Appendix B
Type of protection IP 40
Overpressure ≤9 bar
only for inert gases < 100 °C
Supply
DANGER
The gauge may only be connected to supply or measurement units
that conform to the requirements of a grounded protective extra-low
voltage (SELV). The connection to the gauge has to be fused.1)
Voltage at the gauge 14.5 ... 30.0 V= (ripple max. 1 Vpp)
Power consumption ≤2 W
Fuse1) ≤1 AT
The minimum voltage of the power supply must be increased proportionally to the
length of the measuring cable.
Voltage of the supply unit at maxi-
mum cable length 16.0 ... 30.0 V= (ripple max. 1 Vpp)
Electrical connection Compact connector Hirschmann
type GO 6, 6 poles, male
Cable 5 poles plus screen
Maximum cable length 100 m (0.25 mm² conductor)
150 m (0.34 mm² conductor)
500 m (1.0 mm² conductor)
Operating voltage
(in the measuring chamber)
≤3.3 kV
Operating current
(in the measuring chamber)
≤100 µA
1) Pfeiffer Vacuum measurement and control units for Compact Gauges fulfill these requirements.

BG 5008 BEN (2011-01) IKR 270 7
Output signal (measuring signal)
Voltage range ≈0 V ... ≈+10.5 V
Voltage/pressure relationship logarithmic, increase 0.8 V / decade
(→Appendix A)
Error signal < 0.5 V (no supply)
Output impedance 2×10 Ω
Normal load 100 kΩ
Minimum load 10 kΩ, short-circuit proof
Response time
p > 10-6 mbar
p = 10-8 mbar
pressure dependent
< 10 ms
≈1 s
Gauge identification 7.15 kΩresistance referenced to supply
common
Grounding concept →Figure 1
Vacuum flange-signal common connected via 10 kΩ
(max. voltage differential
with respect to safety ±50 V
with respect to accuracy ±10 V)
Supply common-signal common conducted separately; differential
measurement recommended for cable
lengths ≥10 m
Materials exposed to the vacuum
Feedthrough isolation
Internal seal
Flange
Anode
Ignition aid
ceramic (Al2O3)
Ag
stainless steel
(1.4306 / AISI 304L)
Mo
stainless steel (1.4310 / AISI 301)
Internal volume ≈20 cm³
Dimensions
Compact
ColdCathode
Gauge
VACUUM
VACUUM
105.5
24.1
ø 63,5
28 53
DN 40 CF-F
20
Compact
ColdCathode
Gauge
VACUUM
VACUUM
216.5
ø 63.5
24 32 57 20103.5
DN 40 CF-F
Ausheizbereich
Weight 950 g (DN 40 CF-F short type)
1100 g (DN 40 CF-F long type)

8 BG 5008 BEN (2011-01) IKR 270
3 Installation
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The gauge can be mounted in any orientation. However, it should be mounted so
that any particles present cannot enter the measuring chamber (→13).
See dimension drawing for space requirements (→7).
nRemove the protective cap.
The protective cap will be
needed for maintenance.
oMake the flange connection.
When making CF flange
connections, it can be
advantageous to temporarily
remove the magnet
(→section 3.1.1).
DANGER
DANGER: overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer sealing rings (e.g.
O-rings) cannot withstand such pressures. Process media can
thus leak and possibly damage your health.
Use sealing rings provided with an outer centering ring.
DANGER
DANGER: overpressure in the vacuum system >1 bar
If clamps are opened unintentionally injury can be caused by
catapulted parts.
Use the type of clamps which can only be opened and closed
by means of a tool (e.g. hose clip clamping ring).
3.1 Vacuum Connection

BG 5008 BEN (2011-01) IKR 270 9
DANGER
The gauge must be electrically connected to the grounded
vacuum chamber. The connection must conform to the re-
quirements of a protective connection according to EN 61010:
•CF flanges fulfill this requirement
•For gauges with KF flanges, use a conductive metallic
clamping ring.
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of
operation and remove the electronics unit.
•Allen wrench AF 1.5
•Open-end wrench AF 7
nUnfasten the hexagon socket set screw (1) on the side of the electronics
unit (2).
oRemove the electronics unit.
Caution
For reasons of tolerance, the same magnet and electronics unit
have to be used when reassembling the gauge.
pUnfasten the hexagon head screw (3) on the magnet unit (4) and remove
the magnet unit.
Caution
The magnetic force and the tendency to tilt make it more diffi-
cult to separate the magnet unit and the measuring chamber
(7).
qMake the flange connection between the gauge and the vacuum system.
rRemount the magnet unit and lock it with the hexagon head screw (3).
sCarefully mount the electronics unit (2).
tPush the electronics unit up to the mechanical stop and lock it with the
hexagon socket set screw (1).
3.1.1 Removing the Magnet
Unit
Tools required
Procedure

10 BG 5008 BEN (2011-01) IKR 270
1
2
3
4
7
2
3
4
7
1
If the gauge is used with a
Pfeiffer Vacuum measurement
unit for Compact Gauges, a
corresponding connection cable
is required (→22).
•Secure the connection
socket on the gauge with the
screw.
Compact Cold Cathode Gauge
VACUUM
The gauge can also be operated with other evaluation units. In this case, an
individual connection cable must be made.
For cable lengths up to 10 m (0.34 mm2conductor cross-section) , the measuring
signal can be read directly between the positive signal output (pin 2) and the sup-
ply common (pin 5) without the degree of accuracy being reduced. For longer
measuring cable lengths, we recommend a differential measurement between the
signal output and signal common (pin 3) (as a result of the voltage drop along the
supply cable ground lead, the common mode signal is approx. 1.0 V at the max.
permissible cable length).
nPrepare the connection
socket (ordering number
→22).
3.2 Power Connection
3.2.1 Use With a Pfeiffer
Vacuum Measurement
Unit
3.2.2 Use With Another
Evaluation Unit
Procedure