Pfeiffer Vacuum PCR 260 User manual

BG 805 180 BE / D (2010-04)
A PASSION
FOR PERFECTION
PCR 260
Compact Pirani Capacitance Gauge
Operating Instructions
Product Identification
In all communications with Pfeiffer Vacuum, please specify
the information given on the product nameplate. For conven-
ient reference copy that information into the space provided
below.
Typ:
No:
F-No:
V W
Pfeiffer Vacuum, D-35614 Asslar
Validity
This document applies to products with the following part
numbers:
PT R26 850 (DN 16 ISO-KF)
PT R26 851 (DN 16 CF-F)
The part number (No) can be taken from the product
nameplate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to DN 16 ISO-KF vacuum con-
nection. They apply to other vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions are indicated in mm.
Intended Use
The Compact Pirani Capacitance Gauge PCR 260 has been
designed for vacuum measurement of gases in the pressure
range of 5×10-4 … 1500 mbar.
It must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxy-
gen) within the explosion range.
The gauge can be operated in connection with a Pfeiffer
Vacuum controller or with another evaluation unit.
Functional Principle
The PCR gauge is a combination gauge consisting of a
Pirani sensor and a capacitive diaphragm sensor. Both
sensors are constantly active.
At low pressures, only the signal of the Pirani sensor is used
for pressure measurement; at high pressures, only the signal
of the capacitive diaphragm sensor. To determine the output
signal in the intermediate range, both signals are used
proportional to the pressure.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and en-
vironmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
the end-user of the product.
General Safety Instructions
•Adhere to the applicable regulations and take the ne-
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the
process media due to the heat generated by the product.
•Adhere to the applicable regulations and take the ne-
cessary precautions for all work you are going to do and
consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty
becomes null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of changes (modifications, alterations etc.)
to the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (filament), are not covered by the
warranty.
Technical Data
Measurement principle
100 mbar 1) … 1500 mbar
5×10-4 … 1 mbar
1 … 100 mbar 1)
capacitance diaphragm
sensor
thermal conductance
according to Pirani
crossover range
Measurement range
(air, O2, CO, N2)
5×10-4 … 1500 mbar
Accuracy (N2)
1×10-3 … 50 mbar
50 … 950 mbar
Atmospheric pressure
(950 … 1050 mbar)
±15% of reading
±5% of reading
±2.5% of reading
Repeatability (N2)
±2% of reading
(1×10-3 … 1100 mbar)
Output signal
(measurement signal)
Voltage range 0 … +9.0 V
Mesasurement range +2.2 … +8.68 V
Voltage vs. pressure 1 V/decade, logarithmic
Output impedance 2 × 4.7 Ω, short circuit-proof
Minimum load impedance 10 kΩ
Response time 10 ms
Gauge identification resistor 3 kΩbetween pin 1
and pin 5 of electrical
connector
(→"Electrical Connection")
HV Adjustment at <<10-4 mbar
(with potentiometer <HV>)
Supply
DANGER
The gauge must only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded pro-
tective extra-low voltage (SELV). The connection
to the gauge has to be fused
Supply voltage at gauge +15 … +30 VDC
(ripple ≤1 Vpp)
Power consumption ≤2.5 W
Fuse to be connected 1 AT
Electrical connection Hirschmann connector
type GO 6, 6 pin, male
Sensor cable 5 pins plus shielding
Cable length ≤150 m (5×0.25 mm2)
≤200 m (5×0.34 mm2)
Grounding concept
Vacuum connection to
signal ground
(→"Power Connection")
connected via 1 MΩ
Materials exposed to vacuum
Vacuum connection
Pirani filament
Feedthrough
Orifice
Other materials
stainless steel
tungsten
glass
stainless steel
Ni, Cu, NiFe, SnAg, glass,
Al2O3(>99.5%), AgPd
Internal volume
DN 16 ISO-KF
DN 16 CF-F
≈6 cm3
≈8 cm3
Admissible pressure ≤5 bar (absolute)
Admissible Temperatures
Storage
Operation (ambient)
Bake-out 2)
Filament temperature
–20 … +65 °C
+10 … +50 °C
≤80 °C
<160 °C
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40 °C
Mounting orientation any
Use indoors only
altitudes up to 2000 m NN
Protection category IP 40
1) Crossover range for air, O2, CO and N210 mbar,
100 mbar in heavy gases.
2) Temperature at vacuum connection with horizontal moun-
ting orientation. During bake-out, measurement range,
accuracy, and repeatability may deviate from specifi-
cations.

Dimensions [mm]
26.3
DN 16 ISO-KF DN 16 CF-F
39 HV
28
65.3
16
22.5
20
43
Weight
DN 16 ISO-KF
DN 16 CF-F
90 g
120 g
Output Signal vs. Pressure
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
Overrange
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5
8.68
2.03.04.05.06.07.08.09.0
Underrange
Pressure p [mbar]
Output signal U [V]
mbar
Torr
Pa
p = 10(U-c) ⇔U = c + log10 p
valid in the range 5×10-4 mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U output signal
c constant (pressure unit dependent)
Gas Type Dependence
Indicated pressure (gauge calibrated for air)
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
10–4 246 10–3 246 10–2 246 246100246101 10–1
10–4
peff [mbar]
246
102246103
8
6
4
2
103
p [mbar]
8
6
4
2
4
2
2
Air, O2, CO, N2
He
Ar
Pirani
sensor
Cross
over
range
Capacitance
diaphragm
Sensor
Calibration factors
valid for Pirani pressure range below 1 mbar
peff = C × indicated pressure
Gas
type Calibration factor C Gas type Calibration factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0
H
2
air, O2, CO, N2
CO2
water vapour
Freon 12
0.5
1.0
0.9
0.5
0.7
Installation
Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering
ring.
DANGER
DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
•CF connection fulfill this requirement
•For gauges with a KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber preferably choose a horizontal
to upright position and possibly use a seal with a
centering ring and filter. If adjustment should be
possible after the gauge has been installed, be sure
to install it so that the potentiometer can be
accessed (→"Adjustment").
Remove the protective lid and install the product at the
vacuum system.
oder
Keep the protective lid
Protective lid
Clamping
Seal with centering ring
Seal with center-
ing ring and filter
bg805180bd/ d
(2010-04)
Original: Deutsch BG 805 180 BD / D (2010-04)

Power Connection
Make sure the vacuum connection is properly made
(→"Vacuum Connection").
nIf no sensor cable is available, make one according to
the following diagram.
2
5
31
6
4
1M
4.7
4.7
3.0k
2
3
1
4
5
6
18V
–
+
–
+
Ident
Electrical connection
Pin 1 Identification
Pin 2 Signal outpout
Pin 3 Signal common
Pin 4 Supply
Pin 5 Supply common (GND)
Pin 6 Screen Connector
soldering side
oConnect the sensor cable to the gauge and the con-
troller or PLC and secure it with the locking screw.
Operation
When the supply voltage is being applied, the measurement
signal is available at the connector (→"Electrical Connec-
tion").
Allow a stabilization period of ≈10 minutes after
power has been applied.
It is advisable to operate the gauge continuously, irrespective
of the pressure.
Gas Type Dependence
Pressure Range Measurement
Principle Gas Type Dependence
100 1) … 1500 mbar capacitance
diaphragm
sensor
independent of gas
type, no correction
required
1 … 100 1) mbar capacitance
diaphragm
sensor and
Pirani sensor
crossover range
5×10-4 … 1 mbar Pirani sensor proportional to
pressure 3)
Adjustment
The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.
The zero must be adjusted at the ambient temperature at
which the gauge is normally operated.
nIf you are using a seal with centering ring and filter,
check that they are clean or replace them if necessary
(→"Deinstallation").
oActivate the gauge.
pConnect a DC voltmeter to output signal (→"Electrical
Connection").
qEvacuate vacuum system to p <<10-4 mbar.
Wait at least 2 minutes.
rCarry out adjustment with potentiometer <HV> by
means of the enclosed screwdriver.
Keep button pressed
Adjust to 1.95 V
(±0.02 V)
PCR 260 gauges do not require adjustment at
atmospheric pressure.
3) The pressure reading applies to dry air, O2, CO and N2.
For other gases, it has to be converted
(calibration factors →"Technical Data").
Deinstallation
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
nVent the vacuum system.
oPut the gauge out off operation.
pLoosen locking screw of sensor cable connector and
unplug sensor cable.
qRemove the gauge from the vacuum system and cover
the vacuum connection with the protective lid.

Maintenance, Troubleshooting
Gauge failures due to contamination or wear and
tear, as well as expendable parts (filament), are not
covered by the warranty.
The product requires no maintenance.
Accessories
Part number
Centering ring DN 16 ISO-KF with fine filter PT 120 132-T
Returning the Product
WARNING
WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri-
mental to health and environment.
Products returned to Pfeiffer Vacuum should
preferably be free of harmful substances. Ad-
here to the forwarding regulations of all involved
countries and forwarding companies and en-
close a duly completed declaration of contami-
nation *).
*) Form under www.pfeiffer-vacuum.net
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration
of contamination are returned to the sender at his own
expense.
Disposal
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
N
WARNING
WARNING: substances detrimental to the en-
vironment
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can be de-
trimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
•Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accord-
ance with the relevant national regulations, separated
according to their materials, and recycled.
•Other components
Such components must be separated according to their
materials and recycled.
EC Declaration of Conformity
We, Pfeiffer Vacuum, hereby declare that the
equipment mentioned below complies with the
provisions of the Directive relating to electro-
magnetic compatibility 2004/108/EC.
Product
PCR 260
Standards
Harmonized and international/national standards and specifi-
cations:
•EN 61000-6-2:2005 (EMC: generic emission standard)
•EN 61000-6-3:2007 (EMC: generic immunity standard)
•EN 61010-1:2001 (Safety requirements for electrical equip-
ment for measurement, control and laboratory use)
•EN 61326-1:2006 (EMC requirements for electrical equip-
ment for measurement, control and laboratory use)
Manufacturer / Signatures
Pfeiffer Vacuum GmbH, Berliner Strasse 43, D-35614 Asslar
8 April 2010 8 April 2010
Manfred Bender
Managing director Dr. Matthias Wiemer Managing director
Berliner Strasse 43
D–35614 Asslar
Deutschland
Tel [phone]
Fax [phone]
[email protected]
www.pfeiffer-vacuum.net