Pfeiffer Vacuum HPA 220 User manual

Translation of the original instructions
Operating Instructions
EN
DA0100BEN(2012_05)
High Pressure Analyser
HPA 220

3
Table of Contents
1 About this manual............................................................................ 5
1.1 Validity................................................................................................ 5
1.2 Conventions ....................................................................................... 5
2 Safety ................................................................................................7
2.1 Safety precautions .............................................................................7
2.2 Protective equipment..........................................................................7
2.3 Proper use.......................................................................................... 8
2.4 Improper use ...................................................................................... 9
2.5 Guidelines .......................................................................................... 9
3 Transport and storage .....................................................................9
3.1 Transport ............................................................................................ 9
3.2 Storage............................................................................................... 9
4 Product description .......................................................................10
4.1 Product identification ........................................................................10
4.2 Function ...........................................................................................11
4.3 Field of application ........................................................................... 11
4.4 System overview .............................................................................. 12
5 Technical data ................................................................................ 18
5.1 HPA 220........................................................................................... 18
5.2 QME 220 ..........................................................................................20
5.3 Input/output module IO 220.............................................................. 21
5.4 Base rack unit (BRU 220)................................................................. 22
5.5 Valve control unit (VCU 220)............................................................ 22
5.7 Dimensions....................................................................................... 23
5.8 Connection plug arrangement ..........................................................23
6 Gas inlet systems...........................................................................30
6.1 HPI 040 H, manually operated .........................................................30
6.2 HPI 040 P, electropneumatically operated ....................................... 30
6.3 Double gate valve operated manually ..............................................32
6.4 Double gate valve, electropneumatically operated........................... 33
6.5 Gas inlet valve UDV 040 .................................................................. 34
7 Commissioning .............................................................................. 35
7.1 Commissioning QME........................................................................35
7.2 Commissioning HPA 220 ................................................................. 37
8 Operation ........................................................................................ 43
8.1 Indicator and control elements BRU 220..........................................43
8.2 HPA 220........................................................................................... 43
8.3 Valve control .................................................................................... 44
8.4 Measurement ................................................................................... 44
8.5 Diaphragm pump in interval mode ...................................................44
8.6 Conditioning of the vacuum system .................................................44
8.7 Switching off ..................................................................................... 45
9 Maintenance / servicing................................................................. 46
9.1 QME ................................................................................................. 47
9.2 Replacing HiPace 80 operating fluid reservoir .................................48
10 Accessories and spare parts ........................................................ 49
10.1 Accessories and spare parts PrismaPlus™ .....................................49
10.2 Accessories and spare parts for HiPace 80 ..................................... 49
10.3 Connection cable ............................................................................. 49
10.4 HPA accessories ............................................................................. 49
11 Decommissioning ..........................................................................50
11.1 Shutting down for longer periods......................................................50

4
11.2 Recommissioning ............................................................................. 50
12 Disposal .......................................................................................... 51
13 Malfunctions ................................................................................... 51
13.1 Troubleshooting ...............................................................................51
14 Appendix ......................................................................................... 53
14.1 Block diagrams.................................................................................53
14.2 Literature .......................................................................................... 54

5
About this manual
1 About this manual
1.1 Validity
This manual is a customer document of Pfeiffer Vacuum. The operating manual
describes the functions of the named product and provides the most important
information for the safe use of the device. The description is written in accordance with
the valid EU Directives. The information in this operating manual refers to the product's
current development status. The document shall remain valid provided that the customer
does not make any changes to the product.
This document applies to products with article numbers:
PT M5x 1xx and PT M5x 2xx
The article number is found on the rating plate.
Up-to-date operating manuals can also be downloaded from www.pfeiffer-vacuum.de.
Related documents
*also available at www.pfeiffer-vacuum.de
1.2 Conventions
Safety instructions Safety instructions in Pfeiffer Vacuum operating manuals are the result of the risk
evaluations and danger analyses that were performed and that are based on
international certification standards according to UL, CSA, ANSI Z-535, Semi-S1,
ISO 3864 and DIN 4844. The following danger levels and information notices are
observed in this document:
HPA 220 Operating manual
Declaration of Conformity A component of this manual
Accessories operating manual (order-specific) see chap. Accessories*
DANGER
Immediate danger
Death or serious injuries may occur.
WARNING
Potential danger
Injury or severe property damage may occur.
CAUTION
Potential danger
Injury or property damage may occur.
NOTE
Requirement or notice
Prompt for activity or information on features that may cause damage to the product if
they are disregarded.

6
About this manual
Symbol definitions
Instruction in the text Instruction: An action is required.
Abbreviations used
Symbols used The symbol [X] is used for references to further documents listed under the
Literature section.
Trademarks
Prohibition of an action or activity in connection with a source
of danger, the disregarding of which may result in serious
accidents.
Warning about the danger represented by the symbol.
A certain action or activity in the use of a source of danger is
required, the disregarding of which may result in serious
accidents.
Important information on the product, handling or a relevant
part of the documentation to which special attention should
be given.
BRU Base rack unit
HPA High pressure analyser
IO Input output
VCU Valve control unit
MVP Diaphragm vacuum pump
PrismaPlus™ Pfeiffer Vacuum GmbH
QUADERA™ INFICON AG

7
Safety
2 Safety
2.1 Safety precautions
• Use only genuine spare parts (see chapter 10. Accessories and spare parts;
page 49)
• Do not expose any body parts to the vacuum.
• Observe safety and accident prevention regulations.
• Regularly check compliance with all safety measures.
• Do not carry out any unauthorised modifications or conversions to the system.
2.2 Protective equipment
The wearing of personal protective equipment is required in certain situations. Users and
employers are obliged to provide operating personnel with the appropriate equipment.
NOTE
Duty to inform
Every person involved in the installation, operation or maintenance of the system must
read and observe the safety-relevant parts of this operating manual.
The user is obliged to make all operating personnel aware of dangers emanating
from the medium being pumped or from the system as a whole.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum Units can be equipped with a series of adapted accessories. The
installation, operation and maintenance of connected devices are described in detail in
the operating manuals of the individual components.
For information on the order numbers of components, see chapter “Accessories and
spare parts”, page 49.
Use only genuine accessories.
DANGER
Danger due to strong magnetic fields
There is a strong magnet inside the PKR vacuum gauge head Vacuum gauge. Magnetic
fields can interfere with cardiac pacemakers, for example, or impair their function.
Maintain a safety clearance of at least 10 cm between cardiac pacemaker and
magnet.
Make sure that the warning labels on the vacuum gauge head Vacuum gaugeare not
covered during installation.

8
Safety
2.3 Proper use
The High pressure analyser HPA 220 is used in the analysis of non-flammable gases and
gas mixtures with process pressures of less than 10 mbar. The actual pressure range
depends on the screens attached.
• Installation, commissioning, operating and maintenance regulations must be
observed.
• Other accessories than those described in this manual must not be used without the
agreement of Pfeiffer Vacuum.
DANGER
Risk to health from harmful substances during maintenance or installation
Vacuum pumps, components and operating fluid may be contaminated by toxic,
reactive, or radioactive substances due to processing.
Use appropriate protective equipment for maintenance and repair work or when
reinstalling the system.
CAUTION
Risk of injury from hot surfaces
The vacuum chamber and adjacent metal parts may heat up considerably when baking
out and vacuum chamber heating.
Do not touch the unit when baking out and when using vacuum chamber heating.
Allow pump to cool down before starting maintenance and repair work.
Wear protective gloves according to EN 420, if necessary.
WARNING
Increased noise emission
Increased noise emission may occur within a limited area surrounding the vacuum
pump.
Provide sound insulation
Wear hearing protection
NOTE
CE Conformity
The manufacturer's Declaration of Conformity is void if the user modifies the original
product or additional equipment is installed!

9
Transport and storage
2.4 Improper use
Improper use of the equipment automatically invalidates all warranty and liability claims.
Improper use refers to the use of the system for any purpose other than the ones
described above, in particular:
• operation in potentially explosive areas.
• the analysis of flammable gases.
• the use of operating fluids not specified by Pfeiffer Vacuum.
• connection to pumps or equipment which are not suitable for this purpose according
to their operating manual;
• connection to units that have live parts that may be touched.
• use of the units in radioactive areas.
2.5 Guidelines
3 Transport and storage
3.1 Transport
Reuse the HPA 220 transport container. The unit should be transported or shipped in
the original packaging.
Remove protective caps from the high vacuum side and backing side just before
connecting.
Keep the original protective caps.
Always transport the unit in the upright position.
3.2 Storage
Close flange openings with the original protective caps.
Close other connections with appropriate protective caps.
Store the system indoors only at temperatures between +5°C to +40°C.
For rooms with humid or aggressive atmospheres: Seal the system in an airtight
plastic bag with drying agents enclosed.
QME/QMA EN 61010-1:2001
EN 611326-1: 1997+ A1:1998+ A2:2001+A3:2003
BRU Machinery 2006/42/EC (Appendix II, no. 1A)
EMC Directive 2004/108/EC
Directive for electrical equipment 2006/95/EC

10
Product description
4 Product description
Selection of inlet systems and options for HPA 220
4.1 Product identification
Product features To ensure reliable identification of the product, always keep all of the information on the
rating plate to hand when communicating with Pfeiffer Vacuum.
PrismaPlus
QMA 200
QME 220
Vacuum chamber
VCU 220
HiPace80
Inlet system BRU 220
DCU002 TPG26x
MVP 020
with PKR 251
Feature HPA 220 Operating
manual
Inlet system
HPI 040 H 250986 NA
HPI 040 P 250986 NA
Double gate valve,
manual 271691 NB
Double gate valve
electropneum. 271691 NB
UDV 040 BP 5003 BN
Connection
flange DN 40 CF-F DN 40 CF-F DN 40 CF-F DN 40 CF-F VCR 1/4"
PrismaPlus
1-100 amu
1-200 amu
1-300 amu
1-100 amu
1-200 amu
1-300 amu
1-100 amu
1-200 amu
1-300 amu
1-100 amu
1-200 amu
1-300 amu
1-100 amu
1-200 amu
1-300 amu
BG 5214 BN
Pump system HiPace 80
MVP 020-3
HiPace 80
MVP 020-3
HiPace 80
MVP 020-3
HiPace 80
MVP 020-3
HiPace 80
MVP 020-3
PT 0278 BN
PK 0208 BN
Vacuum
chamber yes yes yes yes yes
PKR 251 yes yes yes yes yes BG 5119 BN
BRU 220 yes yes yes yes yes DA 0100 BN
VCU 220 no yes no yes no DA 0100 BN
Total pressure
measurement
optional TPG 261 optional TPG 262 optional TPG 261 optional TPG 261 optional TPG 261 BG 5195 BN
BG 5196 BN
Pumping
station
control
TurboViewer
optional DCU 002
TurboViewer
optional DCU 002
TurboViewer
optional DCU 002
TurboViewer
optional DCU 002
TurboViewer
optional DCU 002 PT 0250 BN

11
Product description
Scope of delivery
4.2 Function
High pressure analyser HPA 220High Pressure Analyser HPA 220, quadrupole mass
spectrometer with turbo pump and gas inlet system for the gas analysis of non-
flammable gases in the pressure range 10-9 mbar (configuration-dependent).
The system can be operated manually via the BRU 220 and the Quadera software as
well as via corresponding inputs from a higher-level system control.
4.3 Field of application
The HPA 220 must be installed and operated the following ambient conditions only:
Order number PT M5x xcd cd
123450+41+52+63+7
PrismaPlus QME220M •••••••••
QMA200M •••••••••
Vacuum chamber with PKR 251 • • • • • • • • •
Pump system HiPace80 • • • • • • • • •
MVP020 •••••••••
System controller, base rack unit
BRU 220 •••••••••
Inlet system
HPI 040H •
HPI 040 P •
Double gate valve,
manual •
Double gate valve
electropneum, •
UDV 040 •
Valve controller, valve control unit
VCU 220 ••
Options TPG 26x • •
DCU002 • •
DANGER
Explosion hazard
The HPA 220 is not intended for use in potentially explosive areas.
Immediately switch off the HPA 220 in a potentially explosive atmosphere.
Utilisation indoors
Max. height 2000m NN
Protection class IP 30
Temperatures
– Storage/transport +5°C...+40°C
– Operation 0°C...+40°C
Relative humidity max. 80% to 31°C,
decreasing linearly to 50% at 40°C
EX

12
Product description
4.4 System overview
Quadrupole
electronics QME 220
with 90° connection
With the mass range according to option:
Analyser QMA 200
with pressure
vacuum gauge in the
HPA 200 vacuum
chamber
With the ion source according to option:
Base rack unit
BRU 220
(Figure shows the unit with all additional options; see section Additional components,
page 16and the following.)
PT M51 xxx 1-100 amu
PT M52 xxx 1-200 amu
PT M53 xxx 1-300 amu
PT M5x 1xx open ion source, Y filament
PT M5x 2xx open ion source, W filament

13
Product description
Mains cable
Connection cable set Standard cable (with all options included)
Cable Art. no. (3m) Art. no. (10m) Cable markings
Interface cable M12 PM 061 283-T PM 061 285-T DCU
Connection cable BRU/TC PM 061 512-T PM 061 514-T Turbo pump
Connection cable BRU/MVP PM 061 441-T PM 061 443 T MVP
Adapter cable MVP (0.5 m) PM 061 433-X MVP I/O
Adapter cable PKR (0.6 m) PT 448 249-T Gauge
Mains cable P 4564 309 Zx ---
Connection cable BRU/QME PT 165 060-T PT 165 061-T PrismaPlus
Extension cable M8 PM 061 783-T PM 061 785-T Switch point, MVP I/
O, valves 24V DC
Interlock plug BRU/user PT 165 050 User

14
Product description
Cable set optional components:
Quadera software [1]
USB converter and
TurboViewer software
Only for the version without DCU 002[14]
Pump system Consisting of:
Turbomolecular pump HiPace 80 venting valve[6] , air colling, optionally with
sealing gas valves.
Option Cable Art. no. (3m) Art. no. (10m) Cable markings
PT M5x x2x
PT M5x x4x Connection cable VCU/PP PT 165 070-T Digital I/O
PT M5x x2x Connection cable VCU/HPI PT 165 073-T Valves
PT M5x x4x Connection cable VCU/DZS PT 165 072-T Valves
PT M5x xx6
PT M5x xx7 Interface cable M12 - PM 061 285-T DCU
PT M5x xx1
PT M5x xx3 Connection cable TPG/VCU PT 165 062-T - Valves 24 VDC
PT M5x xx5
PT M5x xx7 Connection cable TPG/VCU - PT 165 063-T TPG
PT M5x x2x
PT M5x x4x Interlock plug VCU/external PT 165 051 External

15
Product description
Diaphragm pump MVP 020[5]
Inlet valve variants HPI 040 H, manually operated - for option PT5x x1x
HPI 040 P, electropneumatically operated - for option PT M5x x2x
Double gate valve, manually operated - for option PT M5x x3x

16
Product description
Double gate valve, electropneumatically operated - for option PT M5x x4x
UDV 040, manually operated - for option PT M5x x5x
VCU 220 - only for option PT M5x x2x and PT M5x x4x
Additional
components Display and control unit DCU 002 integrated into BRU (PM 061 348-T)[7]

17
Product description
Total pressure vacuum gauge from the “ActiveLine” series [9]
TPG 261 or TPG 262 integrated (only for PT M5x x2x) into BRU 220.
A total pressure vacuum gauge from the ActiveLine family with connection cable must
be provided separately, depending on the working pressure range.[13]
Heating option Heating unit composed of controller and heating jacket (Pfeiffer Vacuum GmbH;
PT 165 000-T [230V] or PT165 001-T [115V])


18
Technical data
5 Technical data
5.1 HPA 220
HPA 220
Mass range amu 1...100 1...200 1...300
Detection limit, min mbar Faraday 5x10-12 5x10-11 2x10-11
C-SEM 1x10-14 1x10-14 4x10-14
Sensitivity to Ar A/mbar Faraday 5x10-4 3x10-4 1.5x10-4
200 200 100
Interference from neighbouring
mass 40/41 ppm 10 20 50
Operating temperature,
analyser °C 0...+150°C
Bake-out temperature,
analyser without QME °C max. +200°C
Analyser QMA 220 M
Filament material two yttrium oxide coated iridium filaments for option PT M5x1xx
two tungsten filaments for option PT M5x2xx
Rod system: material/
diameter/length mm Stainless steel/6/100
Detector C-SEM/Faraday
Mass spectrometer electronics QME 220 M
Software Quadera
Turbopump HiPace 80
Diaphragm pump MVP 020-3
Total pressure vacuum gauge PKR 251
System control BRU 220
Interfaces:
– Connection system/PC Ethernet
– Analogue outputs, freely
selectable 4x 0...+10V
– Analogue inputs, freely
selectable 5x -10...+10V
– Digital outputs, freely
selectable 13x 24VDC
– Digital output,
Ready Contact, 60 VDC/30W
– Digital inputs1, freely
selectable up to 4x24 VDC
– Digital inputs,
specified 24 VDC, interlocks for system, valves and heating
Mounting orientation any2

19
Technical data
1
Configuration-dependent
2
3
0.03 screen included
4
actually achievable process pressure depends on the screen diameter
5
depends on selected screen
Other specifications for QME/QMA 220[2]
Weight (analyser unit with
TMP, PKR and PrismaPlus;
without valve interface)
kg 11.8
HPA 220
Valve interface HPI 040 Double gate valve UDV 040
Actuation electropneum. manual electropneum. manual manual
Compressed air bar 5...7 - 5...7 - -
Compressed air connection 1/8" female thread 1/8" female
thread
Screen diameter mm 0.033/0.1/0.3 0.033/0.1/0.3 0.1 0.1 adjustable
Process pressure, max.5mbar 8 8 20 20 50
Valve control VCU 220 - VCU 220 - -
Weight, valve interface kg 3.5 2.5 4.0 3.0 1.4
Weight, VCU kg 0.66 - 0.66 - -
Connection flange DN 40 CF-F DN 40 CF-F DN 40 CF-F DN 40 CF-F Cajon VCR 1/4"
NOTE
We recommend propping up the entire system under HiPace 80 or under VCU 220
(depending on option).

20
Technical data
5.2 QME 220
QME 220
Measurement system
– Measurement channels 128
– Measuring modes Analogue scan, bargraph scan, MID, MCD
– Measuring cycles Mono/multichannel 1... 9999 cycles or repeat
– Measuring speed
– Analogue scan+bargraph peak 20 ms/u...60ms/u
– Scan bargraph stair 2ms/u...60s/60u
– MID-dwell 2ms...60s
– Electrometer amplifier 1x10-5...1x10-12 A (f.s.), fixed and autorange
– Signal filter FIR filter
Power supply 24VDC/2.0A, SP220
Interfaces
– Operation, control Ethernet
– Extension Input/output module IO 220
Inputs outputs
– Analogue see IO 220[2]
– Digital see IO 220[2]
Weight 2.2 kg

21
Technical data
5.3 Input/output module IO 220
IO 220
Analogue inputs
– Connection (“analogue I/O”) X7, 15 pole D-Sub socket
– Number of channels 5
– Input configuration differential
– Input voltage range nominal ± 10V, max. ± 14 V to GND
– Input resistance 50 K ohm
– Resolution 14-bit
Analogue outputs
– Connection X7, 15 pole D-Sub socket
– Number of channels 4
– Output configuration Single-ended
– Output voltage range 0...+10V
– Output current <100A
– Output resistance 200 ohm
– Ground potential over 33 ohm to GND (Imax=50mA)
– Resolution 12-bit
Digital inputs
– Connection (“DIGITAL I/O”) X2, 25 pole D-Sub plug
– Number of channels 1...4 depending on option* +ext. protection**
– Input voltage <+5V (low)
nominal +24V (high), max. +28V
– Input current 1.9mA
– Supply voltage for potential-free
contacts
+24V over 1.2K ohm (Imax 10mA)
– Ground potential for external
supply
over 100 ohm to GND (Imax 50mA)
EXTERNAL_PROTECTION
– Electrical data as for digital inputs
– Function control function** depends on EXT_PROT mode
Digital outputs
– Connection (“DIGITAL I/O”) X2, 25 pole D-Sub plug
– Number of channels 16/13 depending on option*
– Output voltage nominal +24 V, max. +28 V
– Saturation voltage (low) ≤+0.9V
– Output current (sink) All 16 channels are used: ≤60 mA/channel
4 channels used: ≤250 mA/channel***
Vacuum gauge connection (analogue) occupied by PKR 251 [2]